Patents by Inventor Ching Hwa Tey

Ching Hwa Tey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240105502
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a wafer structure. The wafer structure has a normal region and a trimmed region adjacent to the normal region. A top surface of the trimmed region is lower than a top surface of the normal region. The semiconductor structure includes a dielectric layer and a conductive layer disposed on the wafer structure in the normal region and the trimmed region. The semiconductor structure includes a protective layer disposed on a portion of the dielectric layer in the trimmed region and a portion of the conductive layer in the trimmed region. The semiconductor structure includes another dielectric layer disposed on a portion of the dielectric layer in the normal region and a portion of the conductive layer in the normal region and on the protective layer.
    Type: Application
    Filed: December 13, 2023
    Publication date: March 28, 2024
    Inventors: Tien-Tsai HUNG, Yi LIU, Guo-Hai ZHANG, Ching-Hwa TEY
  • Publication number: 20230387174
    Abstract: An image sensor structure includes a semiconductor substrate; an interconnection layer on the semiconductor substrate; nano-pillar structures, each including a first doped layer, a second doped layer and a third doped layer stacked in sequence; conductive structures, respectively electrically connected to the first doped layer and the interconnection layer, the second doped layer and the interconnection layer, and the third doped layer and the interconnection layer; a first insulating layer on the interconnection layer and wrapping the nano-pillar structures and the conductive structures, wherein the first doping layer is exposed on the first insulating layer; a transparent barrier layer on the first insulating layer; and a photoelectric thin film structure on the first insulating layer and electrically connected to the interconnection layer. The photoelectric thin film structure includes photoconductive film portions.
    Type: Application
    Filed: July 11, 2022
    Publication date: November 30, 2023
    Inventors: Zhaoyao Zhan, Jing Feng, XIAOHONG JIANG, CHING HWA TEY
  • Publication number: 20230386893
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a wafer structure. The wafer structure has a normal region and a trimmed region adjacent to the normal region. A top surface of the trimmed region is lower than a top surface of the normal region. The semiconductor structure includes a dielectric layer and a conductive layer disposed on the wafer structure in the normal region and the trimmed region. The semiconductor structure includes a protective layer disposed on a portion of the dielectric layer in the trimmed region and a portion of the conductive layer in the trimmed region. The semiconductor structure includes another dielectric layer disposed on a portion of the dielectric layer in the normal region and a portion of the conductive layer in the normal region and on the protective layer.
    Type: Application
    Filed: June 17, 2022
    Publication date: November 30, 2023
    Inventors: Tien-Tsai HUNG, Yi LIU, Guo-Hai ZHANG, Ching-Hwa TEY
  • Publication number: 20230225139
    Abstract: The present invention provides an image sensor, the image sensor includes a substrate, a first circuit layer on the substrate, at least one nanowire photodiode located on the first circuit layer and electrically connected with the first circuit layer, wherein the nanowire photodiode comprises a lower material layer and an upper material layer, and a P-N junction or a Schottky junction is arranged between the lower material layer and the upper material layer, wherein the lower material layer comprises a perovskite material, and a precursor layer located under the lower material layer, wherein the precursor layer comprises different metal elements as the lower material layer
    Type: Application
    Filed: March 17, 2023
    Publication date: July 13, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Zhaoyao Zhan, QIANWEI DING, XIAOHONG JIANG, CHING HWA TEY
  • Patent number: 11641000
    Abstract: The invention provides an image sensor, the image sensor includes a substrate, a first circuit layer located on the substrate, and at least one nanowire photodiode located on the first circuit layer and electrically connected to the first circuit layer, the nanowire photodiode comprises a lower material layer and an upper material layer with a P-N junction between the lower material layer and the upper material layer, the lower material layer includes perovskite material.
    Type: Grant
    Filed: December 29, 2020
    Date of Patent: May 2, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Zhaoyao Zhan, Qianwei Ding, Xiaohong Jiang, Ching Hwa Tey
  • Publication number: 20230071411
    Abstract: A method for forming a photosensitive device includes the steps of providing an integrated circuit structure having a first pad and a second pad exposed from a surface of the integrated circuit structure, forming a first material layer on the surface of the integrated circuit structure, patterning the first material layer to expose the second pad, forming a second material layer on the first material layer and covering the second pad, and patterning the second material.
    Type: Application
    Filed: November 10, 2022
    Publication date: March 9, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Zhaoyao Zhan, QIANWEI DING, XIAOHONG JIANG, CHING HWA TEY
  • Publication number: 20230076390
    Abstract: A photosensitive device is disclosed, including an integrated circuit structure, a first pad and a second pad exposed from a surface of the integrated circuit structure, a first material layer disposed on the surface of the integrated circuit structure and covering the first pad, and a second material layer disposed on the first material layer and covering the second pad. The first material layer and the second material layer form a heterojunction photodiode.
    Type: Application
    Filed: November 10, 2022
    Publication date: March 9, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Zhaoyao Zhan, QIANWEI DING, XIAOHONG JIANG, CHING HWA TEY
  • Patent number: 11527605
    Abstract: A method for fabricating a MOMCAP includes steps as follows: An Nth metal layer is formed on a substrate according to an Nth expected capacitance value of the Nth metal layer. An Nth capacitance error value between an Nth actual capacitance value of the Nth metal layer and the Nth expected capacitance value is calculated. An N+1th expected capacitance value of an N+1th metal layer is adjusted to form an N+1th actual capacitance value according to the Nth capacitance error value, and the N+1th metal layer with an N+1th actual capacitance value is formed on the Nth metal layer according to the adjusted N+1th expected capacitance value, to make the sum of the Nth actual capacitance value and the N+1th actual capacitance value equal to the sum of the Nth expected capacitance value and the N+1th expected capacitance value. N is an integer greater than 1.
    Type: Grant
    Filed: July 1, 2021
    Date of Patent: December 13, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shu-Ji Chen, Jing Feng, Xiao-Hong Jiang, Ching-Hwa Tey
  • Patent number: 11527561
    Abstract: A photosensitive device is disclosed, including an integrated circuit structure, a first pad and a second pad exposed from a surface of the integrated circuit structure, a first material layer disposed on the surface of the integrated circuit structure and covering the first pad, and a second material layer disposed on the first material layer and covering the second pad. The first material layer and the second material layer form a photodiode.
    Type: Grant
    Filed: July 16, 2020
    Date of Patent: December 13, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Zhaoyao Zhan, Qianwei Ding, Xiaohong Jiang, Ching Hwa Tey
  • Publication number: 20220367609
    Abstract: A method for fabricating a MOMCAP includes steps as follows: An Nth metal layer is formed on a substrate according to an Nth expected capacitance value of the Nth metal layer. An Nth capacitance error value between an Nth actual capacitance value of the Nth metal layer and the Nth expected capacitance value is calculated. An N+1th expected capacitance value of an N+1th metal layer is adjusted to form an N+1th actual capacitance value according to the Nth capacitance error value, and the N+1th metal layer with an N+1th actual capacitance value is formed on the Nth metal layer according to the adjusted N+1th expected capacitance value, to make the sum of the Nth actual capacitance value and the N+1th actual capacitance value equal to the sum of the Nth expected capacitance value and the N+1th expected capacitance value. N is an integer greater than 1.
    Type: Application
    Filed: July 1, 2021
    Publication date: November 17, 2022
    Inventors: Shu-Ji CHEN, Jing FENG, Xiao-Hong JIANG, Ching-Hwa TEY
  • Publication number: 20220336519
    Abstract: An image sensor structure including a substrate, a nanowire structure, a first conductive line, a second conductive line, and a third conductive line is provided. The nanowire structure includes a first doped layer, a second doped layer, a third doped layer, and a fourth doped layer sequentially stacked on the substrate. The first doped layer and the third doped layer have a first conductive type. The second doped layer and the fourth doped layer have a second conductive type. The first conductive line is connected to a sidewall of the second doped layer. The second conductive line is connected to a sidewall of the third doped layer. The third conductive line is connected to the fourth doped layer.
    Type: Application
    Filed: May 17, 2021
    Publication date: October 20, 2022
    Applicant: United Microelectronics Corp.
    Inventors: Zhaoyao Zhan, Jing Feng, Qianwei Ding, Xiaohong Jiang, Ching-Hwa Tey
  • Publication number: 20220262671
    Abstract: A transistor structure with an air gap includes a substrate. A transistor is disposed on the substrate. An etching stop layer covers and contacts the transistor and the substrate. A first dielectric layer covers and contacts the etching stop layer. A second dielectric layer covers the first dielectric layer. A trench is disposed on the gate structure and within the first dielectric layer and the second dielectric layer. A width of the trench within the second dielectric layer is smaller than a width of the trench within the first dielectric layer. A filling layer is disposed within the trench and covers the top surface of the second dielectric layer. An air gap is formed within the filling layer.
    Type: Application
    Filed: May 4, 2022
    Publication date: August 18, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Yunfei Li, JI FENG, GUOHAI ZHANG, CHING HWA TEY
  • Patent number: 11355389
    Abstract: A transistor structure with an air gap includes a substrate. A transistor is disposed on the substrate. An etching stop layer covers and contacts the transistor and the substrate. A first dielectric layer covers and contacts the etching stop layer. A second dielectric layer covers the first dielectric layer. A trench is disposed on the gate structure and within the first dielectric layer and the second dielectric layer. A width of the trench within the second dielectric layer is smaller than a width of the trench within the first dielectric layer. A filling layer is disposed within the trench and covers the top surface of the second dielectric layer. An air gap is formed within the filling layer.
    Type: Grant
    Filed: December 24, 2020
    Date of Patent: June 7, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yunfei Li, Ji Feng, Guohai Zhang, Ching Hwa Tey
  • Publication number: 20220165895
    Abstract: The invention provides an image sensor, the image sensor includes a substrate, a first circuit layer located on the substrate, and at least one nanowire photodiode located on the first circuit layer and electrically connected to the first circuit layer, the nanowire photodiode comprises a lower material layer and an upper material layer with a P-N junction between the lower material layer and the upper material layer, the lower material layer includes perovskite material.
    Type: Application
    Filed: December 29, 2020
    Publication date: May 26, 2022
    Inventors: Zhaoyao Zhan, QIANWEI DING, XIAOHONG JIANG, CHING HWA TEY
  • Publication number: 20220139762
    Abstract: A transistor structure with an air gap includes a substrate. A transistor is disposed on the substrate. An etching stop layer covers and contacts the transistor and the substrate. A first dielectric layer covers and contacts the etching stop layer. A second dielectric layer covers the first dielectric layer. A trench is disposed on the gate structure and within the first dielectric layer and the second dielectric layer. A width of the trench within the second dielectric layer is smaller than a width of the trench within the first dielectric layer. A filling layer is disposed within the trench and covers the top surface of the second dielectric layer. An air gap is formed within the filling layer.
    Type: Application
    Filed: December 24, 2020
    Publication date: May 5, 2022
    Inventors: Yunfei Li, JI FENG, GUOHAI ZHANG, CHING HWA TEY
  • Publication number: 20210384231
    Abstract: A photosensitive device is disclosed, including an integrated circuit structure, a first pad and a second pad exposed from a surface of the integrated circuit structure, a first material layer disposed on the surface of the integrated circuit structure and covering the first pad, and a second material layer disposed on the first material layer and covering the second pad. The first material layer and the second material layer form a photodiode.
    Type: Application
    Filed: July 16, 2020
    Publication date: December 9, 2021
    Inventors: Zhaoyao Zhan, QIANWEI DING, XIAOHONG JIANG, CHING HWA TEY
  • Patent number: 11127621
    Abstract: A method of forming a semiconductor device includes following steps. Firstly, a substrate is provided and the substrate has a first semiconductor layer formed thereon. Next, an isolating structure is formed in the first semiconductor layer, and a sacrificial layer is formed on the first semiconductor layer by consuming a top portion of the first semiconductor layer. Then, the sacrificial layer is removed to form a second semiconductor layer, and a portion of the isolating structure is also removed to form a shallow trench isolation (STI), with a top surface of the shallow trench isolation being substantially coplanar with a top surface of the second semiconductor layer.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: September 21, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ji Feng, Yunfei Li, Guohai Zhang, Ching Hwa Tey, Jingling Wang
  • Patent number: 11101361
    Abstract: A GAA transistor includes a semiconductor substrate. A first shallow trench isolation (STI) is embedded in the semiconductor substrate. A top surface of the first STI is lower than a top surface of the semiconductor substrate. A nanowire crosses the first STI and is disposed on the first STI. A gate structure contacts and wraps around the nanowire. A source electrode contacts a first end of the nanowire. A drain electrode contacts a second end of the nanowire.
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: August 24, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Zhaoyao Zhan, Qianwei Ding, Xiaohong Jiang, Ching Hwa Tey
  • Publication number: 20210134653
    Abstract: A method of forming a semiconductor device includes following steps. Firstly, a substrate is provided and the substrate has a first semiconductor layer formed thereon. Next, an isolating structure is formed in the first semiconductor layer, and a sacrificial layer is formed on the first semiconductor layer by consuming a top portion of the first semiconductor layer. Then, the sacrificial layer is removed to form a second semiconductor layer, and a portion of the isolating structure is also removed to form a shallow trench isolation (STI), with a top surface of the shallow trench isolation being substantially coplanar with a top surface of the second semiconductor layer.
    Type: Application
    Filed: November 4, 2019
    Publication date: May 6, 2021
    Inventors: JI FENG, Yunfei Li, GUOHAI ZHANG, CHING HWA TEY, JINGLING WANG
  • Patent number: 10909299
    Abstract: A method for stabilizing bandgap voltage includes the steps of: providing a first layout pattern designated with a first voltage; reducing a critical dimension of the first layout pattern for generating a second layout pattern corresponding to a second voltage; matching the second voltage with a target voltage; and then outputting the second layout pattern to a mask. Preferably, the first layout pattern and the second layout pattern include polysilicon resistor patterns.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: February 2, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wei Pang, Jing Feng, Xiaohong Jiang, Ching Hwa Tey