Patents by Inventor Ching-Pei Hsieh

Ching-Pei Hsieh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9099647
    Abstract: The present disclosure provides methods of making resistive random access memory (RRAM) cells. The RRAM cell includes a transistor and an RRAM structure. The RRAM structure includes a bottom electrode having a via portion and a top portion, a resistive material layer on the bottom electrode having a width that is same as a width of the top portion of the bottom electrode; a capping layer over the bottom electrode, a first spacer surrounding the capping layer and a top electrode, a second spacer surround the top portion of the bottom electrode and the first spacer, and the top electrode. The RRAM cell further includes a conductive material connecting the top electrode of the RRAM structure to a metal layer.
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: August 4, 2015
    Assignee: Taiwan Semicnductor Manufacturing Company, Ltd.
    Inventors: Yu-Wen Liao, Wen-Ting Chu, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Hsia-Wei Chen, Ching-Pei Hsieh
  • Publication number: 20150147864
    Abstract: The present disclosure provides methods of making resistive random access memory (RRAM) cells. The RRAM cell includes a transistor and an RRAM structure. The RRAM structure includes a bottom electrode having a via portion and a top portion, a resistive material layer on the bottom electrode having a width that is same as a width of the top portion of the bottom electrode; a capping layer over the bottom electrode, a first spacer surrounding the capping layer and a top electrode, a second spacer surround the top portion of the bottom electrode and the first spacer, and the top electrode. The RRAM cell further includes a conductive material connecting the top electrode of the RRAM structure to a metal layer.
    Type: Application
    Filed: January 28, 2015
    Publication date: May 28, 2015
    Inventors: Yu-Wen Liao, Wen-Ting Chung-Shi, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Hsia-Wei Chen, Ching-Pei Hsieh
  • Patent number: 9040951
    Abstract: A memory structure includes a first dielectric layer, having a first top surface, over a conductive structure. A first opening in the first dielectric layer exposes an area of the conductive structure, and has an interior sidewall. A first electrode structure, having a first portion and a second portion, is over the exposed area of the conductive structure. The second portion extends upwardly along the interior sidewall. A resistance variable layer is disposed over the first electrode. A second electrode structure, having a third portion and a fourth portion, is over the resistance variable layer. The third portion has a second top surface below the first top surface of the first dielectric layer. The fourth portion extends upwardly along the resistance variable layer. A second opening is defined by the second electrode structure. At least a part of a second dielectric layer is disposed in the second opening.
    Type: Grant
    Filed: August 30, 2013
    Date of Patent: May 26, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fu-Ting Sung, Ching-Pei Hsieh, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20150060750
    Abstract: A memory structure includes a first dielectric layer, having a first top surface, over a conductive structure. A first opening in the first dielectric layer exposes an area of the conductive structure, and has an interior sidewall. A first electrode structure, having a first portion and a second portion, is over the exposed area of the conductive structure. The second portion extends upwardly along the interior sidewall. A resistance variable layer is disposed over the first electrode. A second electrode structure, having a third portion and a fourth portion, is over the resistance variable layer. The third portion has a second top surface below the first top surface of the first dielectric layer. The fourth portion extends upwardly along the resistance variable layer. A second opening is defined by the second electrode structure. At least a part of a second dielectric layer is disposed in the second opening.
    Type: Application
    Filed: August 30, 2013
    Publication date: March 5, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fu-Ting Sung, Ching-Pei Hsieh, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai
  • Patent number: 8963114
    Abstract: The present disclosure provides a resistive random access memory (RRAM) cells and methods of making the same. The RRAM cell includes a transistor and an RRAM structure. The RRAM structure includes a bottom electrode having a via portion and a top portion, a resistive material layer on the bottom electrode having a width that is same as a width of the top portion of the bottom electrode; a capping layer over the bottom electrode, a first spacer surrounding the capping layer and a top electrode, a second spacer surround the top portion of the bottom electrode and the first spacer, and the top electrode. The RRAM cell further includes a conductive material connecting the top electrode of the RRAM structure to a metal layer.
    Type: Grant
    Filed: March 6, 2013
    Date of Patent: February 24, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Wen Liao, Wen-Ting Chu, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Hsia-Wei Chen, Ching-Pei Hsieh
  • Publication number: 20150048297
    Abstract: A manufacture includes a first electrode having an upper surface, a second electrode having a lower surface directly over the upper surface of the first electrode, a resistance variable film between the first electrode and the second electrode, and a first conductive member on and surrounding an upper portion of the second electrode.
    Type: Application
    Filed: August 16, 2013
    Publication date: February 19, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ching-Pei HSIEH, Yu-Hsing CHANG, Chern-Yow HSU, Shih-Chang LIU, Chia-Shiung TSAI
  • Publication number: 20150048298
    Abstract: A manufacture includes a first electrode having an upper surface and a side surface, a resistance variable film over the first electrode, and a second electrode over the resistance variable film. The resistance variable film extends along the upper surface and the side surface of the first electrode. The second electrode has a side surface. A portion of the side surface of the first electrode and a portion of the side surface of the second electrode sandwich a portion of the resistance variable film.
    Type: Application
    Filed: August 16, 2013
    Publication date: February 19, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ching-Pei HSIEH, Fu-Ting SUNG, Chern-Yow HSU, Shih-Chang LIU, Chia-Shiung TSAI
  • Patent number: 8872149
    Abstract: A memory cell and method includes a first electrode formed in an opening in a first dielectric layer, the first dielectric layer being formed on a substrate including a metal layer, the opening being configured to allow physical contact between the first electrode and the metal layer, the first electrode having a first width W1 and extending a distance beyond a region defined by the opening, a resistive layer formed on the first electrode and having substantially the first width W1, a capping layer, having a second width W2 less than the first width W1, formed on the resistive layer, a second electrode formed on the capping layer and having substantially the second width W2, a first composite spacer region having at least two different dielectric layers formed on the resistive layer between the first width W1 and the second width W2, and a via coupled to the second electrode.
    Type: Grant
    Filed: July 30, 2013
    Date of Patent: October 28, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Pei Hsieh, Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu, Chia-Shiung Tsai