Patents by Inventor Christopher Dennis

Christopher Dennis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10495979
    Abstract: Embodiments described herein provide a system, a software application, and a method of a lithography process, to write full tone portions and grey tone portions in a single pass. One embodiment includes a controller configured to provide mask pattern data to a lithography system. The controller is configured to divide a plurality of spatial light modulator pixels spatially by at least a grey tone group and a full tone group of spatial light modulator pixels. When divided by the controller, the grey tone group of spatial light modulator pixels is operable to project a first number of the multiplicity of shots to the plurality of full tone exposure polygons and the plurality of grey tone exposure polygons, and the full tone group of spatial light modulator pixels is operable to project a second number of the multiplicity of shots to the plurality of full tone exposure polygons.
    Type: Grant
    Filed: February 19, 2019
    Date of Patent: December 3, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Christopher Dennis Bencher, Joseph R. Johnson, Thomas L. Laidig
  • Patent number: 10490599
    Abstract: Embodiments described herein provide for light field displays and methods of forming light field displays where micro-LED arrays are each configured to provide at least a macro-pixel of effective native hardware resolution, where each macro-pixel provides single pixel of spatial resolution and plurality of pixels of angular resolution, and where each pixel of angular resolution includes a plurality of sub-pixels each provided by a directional collimating micro-LED device described herein.
    Type: Grant
    Filed: February 23, 2018
    Date of Patent: November 26, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Manivannan Thothadri, Christopher Dennis Bencher, Robert Jan Visser, John M. White
  • Patent number: 10488762
    Abstract: Embodiments of the present disclosure provide improved photolithography systems and methods using a solid state emitter array. The solid state emitter array comprises solid state emitter devices arranged in rows and columns, wherein each solid state emitter device comprises two or more subpixels. Each solid state emitter device comprises one program gate which may transmit a voltage to a state storage node. The state storage node is in electrical communication with a drive gate. The drive gate is in communication with two or more solid state emitter subpixels. The arrangement of a plurality of subpixels in communication with a single drive gate allows more than one pulse to be delivered to the drive gate, resulting in illumination of more than one subpixel at each drive gate. The redundancy results in improved data efficiency.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: November 26, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Joseph R. Johnson, Thomas L. Laidig, Christopher Dennis Bencher
  • Patent number: 10474041
    Abstract: The present disclosure generally relates to lithography devices comprising an autofocus system. The autofocus system is configured to individually focus and adjust a plurality of digital micromirror devices. The autofocus system comprises a single light beam and a diffractive optical element configured to split the single light beam into two or more split beams. The two or more split beams are directed to a beam splitter. The two or more split beams are then reflected off the surface of a substrate to at least one position sensor. The position sensor is configured to measure the position of each of the two or more split beams. At least one digital micromirror device is then individually adjusted based on the measured position to adjust the focus of the at least one digital micromirror device with respect to surface height and tilt variations of the substrate.
    Type: Grant
    Filed: February 4, 2019
    Date of Patent: November 12, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Guoheng Zhao, Jeremy Rolfe Nesbitt, Christopher Dennis Bencher, Mehdi Vaez-Iravani
  • Publication number: 20190339622
    Abstract: Embodiments of the present disclosure provide methods for producing images on substrates. The method includes providing a p-polarization beam to a first mirror cube having a first digital micromirror device (DMD), providing an s-polarization beam to a second mirror cube having a second DMD, and reflecting the p-polarization beam off the first DMD and reflecting the s-polarization beam off the second DMD such that the p-polarization beam and the s-polarization beam are reflected towards a light altering device configured to produce a plurality of superimposed images on the substrate.
    Type: Application
    Filed: July 12, 2019
    Publication date: November 7, 2019
    Inventors: Christopher Dennis BENCHER, Joseph R. JOHNSON, David MARKLE, Mehdi VAEZ-IRAVANI
  • Publication number: 20190332020
    Abstract: Systems and methods discussed herein relate to patterning substrates during lithography and microlithography to form features to a set or sets of critical dimensions using dose. The dose maps are generated based upon images captured during manufacturing to account for process variation in a plurality of operations employed to pattern the substrates. The dose maps are used along with imaging programs to tune the voltages applied to various regions of a substrate in order to produce features to a set or sets of critical dimensions and compensate for upstream or downstream operations that may otherwise result in incorrect critical dimension formation.
    Type: Application
    Filed: April 27, 2018
    Publication date: October 31, 2019
    Inventors: Christopher Dennis BENCHER, Joseph R. JOHNSON
  • Publication number: 20190332017
    Abstract: Embodiments of the present disclosure provide improved photolithography systems and methods using a solid state emitter device. The solid state emitter device includes an array of solid state emitters arranged in a plurality of horizontal rows and vertical columns. The variable intensity of each group of solid state emitters, for example an entire row or column of solid state emitters, is controllable for improved field brightness uniformity and stitching. Controlling the variable intensity includes, for example, varying the signal, such as voltage, that is applied to each of the rows of solid state emitters to attenuate the brightness from the middle of the array to the edges of the array to accommodate for overlapping exposures during photolithography processing.
    Type: Application
    Filed: April 26, 2018
    Publication date: October 31, 2019
    Inventors: Christopher Dennis BENCHER, Joseph R. JOHNSON
  • Publication number: 20190294051
    Abstract: Embodiments of the present disclosure generally relate to an image projection system. The image projection system includes an active matrix solid state emitter (SSE) device. The active matrix solid state emitter includes a substrate, a silicon layer, and a emitter substrate. The silicon layer is deposited over the substrate having a plurality of transistors formed therein. The emitter substrate is positioned between the silicon layer and the substrate. The emitter substrate comprises a plurality of emitter arrays. Each emitter array defines a pixel, wherein one pixel comprises one or more transistors from the plurality of transistors. Each transistor is configured to receive a variable amount of current.
    Type: Application
    Filed: March 22, 2018
    Publication date: September 26, 2019
    Inventors: Joseph R. JOHNSON, Christopher Dennis BENCHER
  • Patent number: 10416550
    Abstract: Embodiments disclosed herein relate to an exposure pattern alteration software application which manipulates exposure polygons having lines with angles substantially close to angles of symmetry of a hex close pack arrangement, which suffer from long jogs. Long jogs present themselves as high edge placement error regions. As such, the exposure pattern alteration software application provides for line wave reduction by serrating polygon edges at affected angles to reduce edge placement errors during maskless lithography patterning in a manufacturing process.
    Type: Grant
    Filed: March 26, 2018
    Date of Patent: September 17, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Joseph R. Johnson, Christopher Dennis Bencher, Thomas L. Laidig
  • Publication number: 20190278005
    Abstract: Embodiments herein describe a sub-micron 3D diffractive optics element and a method for forming the sub-micron 3D diffractive optics element. In a first embodiment, a method is provided for forming a sub-micron 3D diffractive optics element on a substrate without planarization. The method includes depositing a material stack to be patterned on a substrate, depositing and patterning a thick mask material on a portion of the material stack, etching the material stack down one level, trimming a side portion of the thick mask material, etching the material stack down one more level, repeating trim and etch steps above ā€˜nā€™ times, and stripping the thick mask material from the material stack.
    Type: Application
    Filed: March 5, 2019
    Publication date: September 12, 2019
    Inventors: Michael Yu-tak YOUNG, Ludovic GODET, Robert Jan VISSER, Naamah ARGAMAN, Christopher Dennis BENCHER, Wayne MCMILLAN
  • Patent number: 10394130
    Abstract: The present disclosure provides a method for producing an image on a substrate. The method includes providing a single beam of light to a multiple DMD assembly, splitting the single beam of light into an s-polarization beam and a p-polarization beam, and reflecting the s-polarization beam and the p-polarization beam through the multiple DMD assembly such that the multiple DMD assembly produces a plurality of superimposed images on the substrate.
    Type: Grant
    Filed: July 12, 2016
    Date of Patent: August 27, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Christopher Dennis Bencher, Joseph R. Johnson, Dave Markle, Mehdi Vaez-Iravani
  • Publication number: 20190243250
    Abstract: An image correction application relating to the ability to apply maskless lithography patterns to a substrate in a manufacturing process is disclosed. The embodiments described herein relate to a software application platform, which corrects non-uniform image patterns on a substrate. The application platform method includes in a digital micromirror device (DMD) installed in an image projection system, the DMD having a plurality of columns, each column having a plurality of mirrors, disabling at least one entire column of the plurality of columns, exposing a first portion of the substrate to a first shot of electromagnetic radiation, exposing a second portion of the substrate to a second shot of electromagnetic radiation, and iteratively translating the substrate a step size and exposing another portion of the substrate to another shot of electromagnetic radiation until the substrate has been completely exposed to shots of electromagnetic radiation.
    Type: Application
    Filed: April 19, 2019
    Publication date: August 8, 2019
    Inventors: Thomas L. LAIDIG, Joseph R. JOHNSON, Christopher Dennis BENCHER
  • Publication number: 20190229246
    Abstract: The present disclosure generally relates to light field displays and methods of displaying images with light field arrays. In one example, the present disclosure relates to pixel arrangements for use in light field displays. Each pixel includes a plurality of LEDs, such as micro LEDs, positioned adjacent respective micro-lenses of each pixel.
    Type: Application
    Filed: March 29, 2019
    Publication date: July 25, 2019
    Inventors: Christopher Dennis BENCHER, Manivannan THOTHADRI, Robert Jan VISSER
  • Publication number: 20190228396
    Abstract: Provided is a method for an augmented reality point-of-sale. A first location for rendering an augmented reality point-of-sale may be detected. A computer-generated image of the augmented reality point-of-sale may be superimposed on a view of the customer at the first location, which may be at least partially within the view of the customer. In response to an item being placed within the view of the customer, item data associated with the item may be detected. The item data may be transmitted to a merchant system. Price data associated with a price of the item may be received. A payment transaction may be initiated based on the price data. A system and a computer program product are also provided.
    Type: Application
    Filed: January 23, 2019
    Publication date: July 25, 2019
    Inventor: Christopher Dennis Boncimino
  • Patent number: 10322111
    Abstract: The invention relates to heterocyclic compounds consisting of a core nitrogen atom surrounded by three pendant groups, wherein two of the three pendant groups are preferably benzimidazolyl methyl and tetrahydroquinolyl, and the third pendant group contains N and optionally contains additional rings. The compounds bind to chemokine receptors, including CXCR4 and CCR5, and demonstrate protective effects against infection of target cells by a human immunodeficiency virus (HIV).
    Type: Grant
    Filed: February 8, 2016
    Date of Patent: June 18, 2019
    Assignee: GENZYME CORPORATION
    Inventors: Gary J. Bridger, Renato T. Skerlj, Al Kaller, Curtis Harwig, David Earl Bogucki, Trevor R. Wilson, Jason B. Crawford, Ernest J. McEachern, Bem Atsma, Siqiao Nan, Yuanxi Zhou, Dominique Schols, Christopher Dennis Smith, Maria Rosario DiFluri
  • Patent number: 10289003
    Abstract: An image correction application relating to the ability to apply maskless lithography patterns to a substrate in a manufacturing process is disclosed. The embodiments described herein relate to a software application platform, which corrects non-uniform image patterns on a substrate. The application platform method includes in a digital micromirror device (DMD) installed in an image projection system, the DMD having a plurality of columns, each column having a plurality of mirrors, disabling at least one entire column of the plurality of columns, exposing a first portion of the substrate to a first shot of electromagnetic radiation, exposing a second portion of the substrate to a second shot of electromagnetic radiation, and iteratively translating the substrate a step size and exposing another portion of the substrate to another shot of electromagnetic radiation until the substrate has been completely exposed to shots of electromagnetic radiation.
    Type: Grant
    Filed: August 31, 2016
    Date of Patent: May 14, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Thomas L. Laidig, Joseph R. Johnson, Christopher Dennis Bencher
  • Publication number: 20190139461
    Abstract: An apparatus for signaling a roadside emergency includes a plurality of panels including a first-panel, a second-panel, and a third-panel, a plurality of markings, and a plurality of attachment means. The second-panel and third-panel include words to alert other drivers and emergency service. The plurality of markings are disposed about a surface area of the plurality of panels to provide a visual indicator. The plurality of attachment means are configured to attach the plurality of panels to a vehicle. The apparatus may be used to signal the roadside emergency by providing a highly visible safety sign or banner for applying to a vehicle.
    Type: Application
    Filed: February 16, 2018
    Publication date: May 9, 2019
    Inventor: David Christopher Dennis Lester
  • Publication number: 20190139466
    Abstract: An apparatus includes an elongate member, a plurality of markings, and a plurality of attachment means. The elongate member includes a first-side and a second-side. Each side includes words to alert other drivers and emergency service. The plurality of markings are disposed about a surface area of the elongate member to provide a visual indicator. The plurality of attachment means are configured to attach the elongate member to a vehicle. The apparatus may be used to signal the roadside emergency by providing a highly visible safety sign or banner for applying to a vehicle.
    Type: Application
    Filed: November 6, 2017
    Publication date: May 9, 2019
    Inventor: David Christopher Dennis Lester
  • Patent number: 10256382
    Abstract: The present disclosure generally relates to light field displays and methods of displaying images with light field arrays. In one example, the present disclosure relates to pixel arrangements for use in light field displays. Each pixel includes a plurality of LEDs, such as micro LEDs, positioned adjacent respective micro-lenses of each pixel.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: April 9, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: John M. White, Christopher Dennis Bencher, Manivannan Thothadri, Robert Jan Visser
  • Publication number: 20190036026
    Abstract: Disclosed are methods and apparatus for a shadow mask. A shadow mask (200), comprising: a frame (210) made of a metallic material, and one or more mask patterns (205) coupled to the frame (210), the one or more mask patterns (205) comprising a metal having a coefficient of thermal expansion less than or equal to about 14 microns/meter/degrees Celsius and having a plurality of openings (215) formed therein, the metal having a thickness of about 5 microns to about 50 microns and having borders (355) formed therein each defining a fine opening (215) having a recessed surface (370) formed on a substrate contact surface (375) thereof.
    Type: Application
    Filed: February 3, 2016
    Publication date: January 31, 2019
    Inventors: Xi HUANG, Brian E. LASSITER, Christopher Dennis BENCHER, Dieter HAAS