Abstract: Embodiments disclosed herein include complementary metal-oxide-semiconductor (CMOS) devices and methods of forming CMOS devices. In an embodiment, a CMOS device comprises a first transistor with a first conductivity type, where the first transistor comprises a first source region and a first drain region, and a first metal over the first source region and the first drain region. In an embodiment, the CMOS device further comprises a second transistor with a second conductivity type opposite form the first conductivity type, where the second transistor comprises a second source region and a second drain region, a second metal over the second source region and the second drain region, and the first metal over the second metal.

Abstract: In an embodiment of the present disclosure, a device structure includes a fin structure, a gate on the fin structure, and a source and a drain on the fin structure, where the gate is between the source and the drain. The device structure further includes an insulator layer having a first insulator layer portion adjacent to a sidewall of the source, a second insulator layer portion adjacent to a sidewall of the drain, and a third insulator layer portion therebetween adjacent to a sidewall of the gate, and two or more stressor materials adjacent to the insulator layer. The stressor materials can be tensile or compressively stressed and may strain a channel under the gate.

Abstract: Disclosed herein are tools and methods for subtractively patterning metals. These tools and methods may permit the subtractive patterning of metal (e.g., copper, platinum, etc.) at pitches lower than those achievable by conventional etch tools and/or with aspect ratios greater than those achievable by conventional etch tools. The tools and methods disclosed herein may be cost-effective and appropriate for high-volume manufacturing, in contrast to conventional etch tools.

Abstract: An embodiment includes a metal interconnect structure, comprising: a dielectric layer disposed on a substrate; an opening in the dielectric layer, wherein the opening has sidewalls and exposes a conductive region of at least one of the substrate and an interconnect line; an adhesive layer, comprising manganese, disposed over the conductive region and on the sidewalls; and a fill material, comprising cobalt, within the opening and on a surface of the adhesion layer. Other embodiments are described herein.

Abstract: A stacked device structure includes a first device structure including a first body that includes a semiconductor material, and a plurality of terminals coupled with the first body. The stacked device structure further includes an insulator between the first device structure and a second device structure. The second device structure includes a second body such as a fin structure directly above the insulator. The second device structure further includes a gate coupled to the fin structure, a spacer including a dielectric material adjacent to the gate, and an epitaxial structure adjacent to a sidewall of the fin structure and between the spacer and the insulator. A metallization structure is coupled to a sidewall surface of the epitaxial structure, and further coupled with one of the terminals of the first device.

Abstract: An embodiment includes a metal interconnect structure, comprising: a dielectric layer disposed on a substrate; an opening in the dielectric layer, wherein the opening has sidewalls and exposes a conductive region of at least one of the substrate and an interconnect line; an adhesive layer, comprising manganese, disposed over the conductive region and on the sidewalls; and a fill material, comprising cobalt, within the opening and on a surface of the adhesion layer. Other embodiments are described herein.

Abstract: An integrated circuit structure includes a vertical stack including a first device, and a second device above the first device. The first device includes (i) a first source and first drain region, (ii) a first body laterally between the first source and drain regions, (iii) a first source contact including a first conductive material, and (iv) a first drain contact including the first conductive material. The second device includes (i) a second source and second drain region, (ii) a second body laterally between the second source and drain regions, (iii) a second source contact including a second conductive material, and (iv) a second drain contact including the second conductive material. In an example, the first and second conductive materials are compositionally different. In an example, the first conductive material induces compressive strain on the first body, and the second conductive material induces tensile strain on the second body.

Abstract: An integrated circuit structure includes a first device, and a second device laterally adjacent to the first device. The first device includes (i) a first source region, and a first source contact including a first conductive material, (ii) a first drain region, and a first drain contact including the first conductive material, and (iii) a first body laterally between the first source region and the first drain region. The second device includes (i) a second source region, and a second source contact including a second conductive material, (ii) a second drain region, and a second drain contact including the second conductive material, and (iii) a second body laterally between the second source region and the second drain region. The first and second conductive materials are compositionally different. The first conductive material induces compressive strain on the first body, and the second conductive material induces tensile strain on the second body.

Abstract: Integrated circuit (IC) interconnect lines having line breaks and line bridges within one interconnect level that are based on a single lithographic mask pattern. Multi-patterning may be employed to define a grating structure of a desired pitch in a first mask layer. Breaks and bridges between the grating structures may be derived from a second mask layer through a process-based selective occlusion of openings defined in the second mask layer that are below a threshold minimum lateral width. Portions of the grating structure underlying openings defined in the second mask layer that exceed the threshold minimum lateral width are removed. Trenches in an underlayer may then be etched based on a union of the remainder of the grating structure and the occluded openings in the second mask layer. The trenches may then be backfilled to form the interconnect lines.

Abstract: Complementary metal-oxide-semiconductor (CMOS) devices and methods related to selective metal contacts to n-type and p-type source and drain semiconductors are discussed. A p-type metal is deposited on n- and p-type source/drains. The p-type metal is selectively removed from the n-type source/drains but remains on dielectric materials adjacent the n-type source/drains. An n-type metal is deposited on the n-type source/drains while the remaining p-type metal seals the dielectric materials to protect the n-type metal from contamination. The n-type metal is then sealed using another p-type metal. A contact fill material contacts the resultant source and drain contact stacks.

Abstract: Described herein are integrated circuit devices with conductive regions formed from MX or MAX materials. MAX materials are layered, hexagonal carbides and nitrides that include an early transition metal (M) and an A group element (A). MX materials remove the A group element. MAX and MX materials are highly conductive, and their two-dimensional layer structure allows very thin layers to be formed. MAX or MX materials can be used to form several conductive elements of IC circuits, including contacts, interconnects, or liners or barrier regions for contacts or interconnects.

Abstract: An integrated circuit includes a lower and upper device portions including bodies of semiconductor material extending horizontally between first source and drain regions in a spaced-apart vertical stack. A first gate structure is around a body in the lower device portion and includes a first gate electrode and a first gate dielectric. A second gate structure is around a body in the upper device portion and includes a second gate electrode and a second gate dielectric, where the first gate dielectric is compositionally distinct from the second gate dielectric. In some embodiments, a dipole species has a first concentration in the first gate dielectric and a different second concentration in the second gate dielectric. A method of fabrication is also disclosed.

Abstract: Methods/structures of forming substrate tap structures are described. Those methods/structures may include forming a plurality of conductive interconnect structures on an epitaxial layer disposed on a substrate, wherein individual ones of the plurality of conductive interconnect structures are adjacent each other, forming a portion of a seed layer on at least one of the plurality of conductive interconnect structures, and forming a conductive trace on the seed layer.

Abstract: A magnetic memory device comprising a plurality of memory cells is disclosed. The memory device includes an array of memory cells where each memory cell includes a first material layer having a ferromagnetic material, a second material layer having ruthenium, and a third material layer having bismuth and/or antimony. The second material layer is sandwiched between the first material layer and the third material in a stacked configuration.

Abstract: Integrated circuit (IC) interconnect lines having improved electromigration resistance. Multi-patterning may be employed to define a first mask pattern. The first mask pattern may be backfilled and further patterned based on a second mask layer through a process-based selective occlusion of openings defined in the second mask layer that are below a threshold minimum lateral width. Portions of material underlying openings defined in the second mask layer that exceed the threshold are removed. First trenches in an underlying dielectric material layer may be etched based on a union of the remainder of the first mask layer and the partially occluded second mask layer. The first trenches may then be backfilled with a first conductive material to form first line segments. Additional trenches in the underlayer may then be etched and backfilled with a second conductive material to form second line segments that are coupled together by the first line segments.

Abstract: Disclosed herein are transistor electrode-channel arrangements, and related methods and devices. For example, in some embodiments, a transistor electrode-channel arrangement may include a channel material, source/drain electrodes provided over the channel material, and a sealant at least partially enclosing one or more of the source/drain electrodes, wherein the sealant includes one or more metallic conductive materials.

Abstract: Disclosed herein are transistor electrode-channel arrangements, and related methods and devices. For example, in some embodiments, a transistor electrode-channel arrangement may include a channel material, source/drain electrodes provided over the channel material, and a sealant at least partially enclosing one or more of the source/drain electrodes, wherein the sealant includes one or more metallic conductive materials.

Abstract: In an embodiment of the present disclosure, a device structure includes a fin structure, a gate on the fin structure, and a source and a drain on the fin structure, where the gate is between the source and the drain. The device structure further includes an insulator layer having a first insulator layer portion adjacent to a sidewall of the source, a second insulator layer portion adjacent to a sidewall of the drain, and a third insulator layer portion therebetween adjacent to a sidewall of the gate, and two or more stressor materials adjacent to the insulator layer. The stressor materials can be tensile or compressively stressed and may strain a channel under the gate.

Abstract: A stacked device structure includes a first device structure including a first body that includes a semiconductor material, and a plurality of terminals coupled with the first body. The stacked device structure further includes an insulator between the first device structure and a second device structure. The second device structure includes a second body such as a fin structure directly above the insulator. The second device structure further includes a gate coupled to the fin structure, a spacer including a dielectric material adjacent to the gate, and an epitaxial structure adjacent to a sidewall of the fin structure and between the spacer and the insulator. A metallization structure is coupled to a sidewall surface of the epitaxial structure, and further coupled with one of the terminals of the first device.

Abstract: An RRAM device is disclosed. The RRAM device includes a bottom electrode, a high-k material on the bottom electrode, a top electrode, a top contact on the top electrode and an encapsulating layer of Al2O3. The encapsulating layer encapsulates the bottom electrode, the high-k material, the top electrode and the top contact.