Patents by Inventor Chrystel Deguet

Chrystel Deguet has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080254591
    Abstract: A method for making a thin-film element includes epitaxially growing a first crystalline layer on a second crystalline layer of a support where the second crystalline layer is a material different from the first crystalline layer, the first crystalline layer having a thickness less than a critical thickness. A dielectric layer is formed on a side of the first crystalline layer opposite to the support to form a donor structure. The donor structure is assembled with a receiver layer and the support is removed.
    Type: Application
    Filed: September 25, 2006
    Publication date: October 16, 2008
    Inventors: Chrystel Deguet, Laurent Clavelier
  • Publication number: 20080153267
    Abstract: The invention relates to a method for manufacturing an SOI substrate, associating silicon based areas and areas of GaAs based material at the thin layer of the SOI substrate, the SOI substrate comprising a silicon support supporting successively a layer of dielectric material and a thin layer of silicon.
    Type: Application
    Filed: December 19, 2007
    Publication date: June 26, 2008
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE
    Inventors: Laurent CLAVELIER, Chrystel DEGUET
  • Publication number: 20070284660
    Abstract: A method for fabricating semiconductor on insulator wafers by providing a semiconductor substrate or a substrate that includes an epitaxial semiconductor layer as a source substrate, attaching the source substrate to a handle substrate to form a source handle assembly and detaching the source substrate at a predetermined splitting area provided inside the source substrate and being essentially parallel to its main surface, to remove a layer from the source handle assembly to thereby create the semiconductor on insulator wafer. A diffusion barrier layer, in particular, an oxygen diffusion barrier layer can be provided on the source substrate. In addition the invention relates to the corresponding semiconductor on insulator wafers that are produced by the method.
    Type: Application
    Filed: May 9, 2007
    Publication date: December 13, 2007
    Inventors: Chrystel Deguet, Takeshi Akatsu, Hubert Moriceau, Thomas Signamarcheix, Loic Sanchez
  • Publication number: 20070228378
    Abstract: Method for producing nanostructures comprising: a step of providing a substrate (100) having a buried barrier layer (2) and above said barrier layer (2) a crystalline film (5) provided with a network of crystalline defects and/or stress fields (12) in a crystalline zone (13), one or several steps of attacking the substrate (100), of which a preferential attack either of the crystalline defects and/or the stress fields, or the crystalline zone (13) between the crystalline defects and/or the stress fields, said attack steps enabling the barrier layer (2) to be laid bared locally and protrusions (7) to be formed on a nanometric scale, separated from each other by hollows (7.1) having a base located in the barrier layer, the protrusions leading to nanostructures (7, 8).
    Type: Application
    Filed: December 19, 2006
    Publication date: October 4, 2007
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE
    Inventors: Franck FOURNEL, Hubert Moriceau, Chrystel Deguet
  • Patent number: 7229898
    Abstract: Improved fabrication processes for manufacturing GeOI type wafers are disclosed. In an implementation, a method for fabricating a germanium on insulator wafer includes providing a source substrate having a surface, at least a layer of germanium and a weakened area. The weakened area is located at a predetermined depth in the germanium layer of the source substrate and is generally parallel to the source substrate surface. The technique also includes providing a germanium oxynitride layer in or on the source substrate, bonding the source substrate surface to a handle substrate to form a source-handle structure, and detaching the source substrate from the source-handle structure at the weakened area of the source substrate to create the germanium on insulator wafer having, as a surface, a useful layer of germanium.
    Type: Grant
    Filed: January 4, 2005
    Date of Patent: June 12, 2007
    Assignee: S.O.I.Tec Silicon on Insulator Technologies S.A.
    Inventors: Konstantin Bourdelle, Fabrice Letertre, Bruce Faure, Christophe Morales, Chrystel Deguet
  • Publication number: 20060110899
    Abstract: Improved fabrication processes for manufacturing GeOI type wafers are disclosed. In an implementation, a method for fabricating a germanium on insulator wafer includes providing a source substrate having a surface, at least a layer of germanium and a weakened area. The weakened area is located at a predetermined depth in the germanium layer of the source substrate and is generally parallel to the source substrate surface. The technique also includes providing a germanium oxynitride layer in or on the source substrate, bonding the source substrate surface to a handle substrate to form a source-handle structure, and detaching the source substrate from the source-handle structure at the weakened area of the source substrate to create the germanium on insulator wafer having, as a surface, a useful layer of germanium.
    Type: Application
    Filed: January 4, 2005
    Publication date: May 25, 2006
    Inventors: Konstantin Bourdelle, Fabrice Letertre, Bruce Faure, Christophe Morales, Chrystel Deguet