Patents by Inventor Chu Lin
Chu Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12287575Abstract: A system and method for depositing a photoresist and utilizing the photoresist are provided. In an embodiment a deposition chamber is utilized along with a first precursor material comprising carbon-carbon double bonds and a second precursor material comprising repeating units to deposit the photoresist onto a substrate. The first precursor material is turned into a plasma in a remote plasma chamber prior to being introduced into the deposition chamber. The resulting photoresist comprises a carbon backbone with carbon-carbon double bonds.Type: GrantFiled: April 18, 2023Date of Patent: April 29, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Keng-Chu Lin, Joung-Wei Liou, Cheng-Han Wu, Ya Hui Chang
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Patent number: 12288722Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The method can include forming a fin structure over a substrate. The fin structure can include a channel layer and a sacrificial layer. The method can further include forming a first recess structure in a first portion of the fin structure, forming a second recess structure in the sacrificial layer of a second portion of the fin structure, forming a dielectric layer in the first and second recess structures, and performing an oxygen-free cyclic etching process to etch the dielectric layer to expose the channel layer of the second portion of the fin structure. The oxygen-free cyclic etching process can include two etching processes to selectively etch the dielectric layer over the channel layer.Type: GrantFiled: January 2, 2023Date of Patent: April 29, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Han-Yu Lin, Jhih-Rong Huang, Yen-Tien Tung, Tzer-Min Shen, Fu-Ting Yen, Gary Chan, Keng-Chu Lin, Li-Te Lin, Pinyen Lin
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Publication number: 20250126848Abstract: A flash memory device and method of making the same are disclosed. The flash memory device is located on a substrate and includes a floating gate electrode, a tunnel dielectric layer located between the substrate and the floating gate electrode, a smaller length control gate electrode and a control gate dielectric layer located between the floating gate electrode and the smaller length control gate electrode. The length of a major axis of the smaller length control gate electrode is less than a length of a major axis of the floating gate electrode.Type: ApplicationFiled: December 20, 2024Publication date: April 17, 2025Inventors: Yu-Chu LIN, Chi-Chung JEN, Wen-Chih CHIANG, Yi-Ling LIU, Huai-jen TUNG, Keng-Ying LIAO
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Publication number: 20250126870Abstract: A semiconductor device structure and methods of forming the same are described. The structure includes a gate dielectric layer disposed over a substrate, a gate electrode layer disposed over the gate dielectric layer, and a first gate spacer disposed adjacent the gate dielectric layer. The first gate spacer includes an inner surface facing the gate dielectric layer and an outer surface opposite the inner surface, and the first gate spacer includes a fluorine concentration that decreases from the inner surface and the outer surface towards a center of the first gate spacer. The structure further includes a second gate spacer disposed on the outer surface of the first gate spacer, and the second gate spacer includes a fluorine concentration that decreases from an outer surface towards an inner surface.Type: ApplicationFiled: October 15, 2023Publication date: April 17, 2025Inventors: Zheng-Yong LIANG, Wei-Ting YEH, Fu-Ting YEN, Hung-Yu YEN, Chien-Hung LIN, Kuei-Lin CHAN, Yu-Yun PENG, Keng-Chu LIN
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Publication number: 20250126920Abstract: A device is disclosed. The device includes a plurality of pixels disposed over a first surface of a semiconductor layer. The device includes a device layer disposed over the first surface. The device includes metallization layers disposed over the device layer. One of the metallization layers, closer to the first surface than any of other ones of the metallization layers, includes at least one conductive structure. The device includes an oxide layer disposed over a second surface of the semiconductor layer, the second surface being opposite to the first surface, the oxide layer also lining a recess that extends through the semiconductor layer. The device includes a spacer layer disposed between inner sidewalls of the recess and the oxide layer. The device includes a pad structure extending through the oxide layer and the device layer to be in physical contact with the at least one conductive structure.Type: ApplicationFiled: December 20, 2024Publication date: April 17, 2025Applicant: Taiwan Semiconductor Manufacturing Company LimitedInventors: Keng-Ying Liao, Huai-jen Tung, Chih Wei Sung, Po-zen Chen, Yu-chien Ku, Yu-Chu Lin, Chi-Chung Jen, Yen-Jou Wu, S.S. Wang
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Publication number: 20250122367Abstract: A polymer composite for preparing a low dielectric resin composition having a dielectric loss tangent (Df) that is less than or equal to 0.00200 is provided. The polymer composite includes a first styrene-based copolymer having a weight average molecular weight that is lower than 20,000 g/mol and a second styrene-based copolymer having a weight average molecular weight that is higher than 20,000 g/mol, wherein the weight ratio of the first styrene-based copolymer to the second styrene-based copolymer is from 5/95 to 95/5.Type: ApplicationFiled: October 10, 2024Publication date: April 17, 2025Inventors: Chi-Jui HSIEH, Tz-Jie JU, Yi-Hsuan TANG, Chiung Chi LIN, Hung Lin CHEN, Chi Yi LIU, Hsiao-Chu LIN, Ka Chun AU-YEUNG, Wei-Liang LEE, Yu-Chen HSU, Ming-Hung LIAO, Chien-Han CHEN, Yu-Tien CHEN, Yu-Pin LIN, Gang-Lun FAN
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Patent number: 12272756Abstract: In some implementations, one or more semiconductor processing tools may deposit a first dielectric layer on a substrate of a semiconductor device. The one or more semiconductor processing tools may deposit a floating gate on the first dielectric layer. The one or more semiconductor processing tools may deposit a second dielectric layer on the floating gate and on the substrate of the semiconductor device. The one or more semiconductor processing tools may deposit a first control gate on a first portion of the second dielectric layer. The one or more semiconductor processing tools may deposit a second control gate on a second portion of the second dielectric layer, wherein a third portion of the second dielectric layer is between the first control gate and the floating gate and between the second control gate and the floating gate.Type: GrantFiled: May 2, 2023Date of Patent: April 8, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Chun Shen, Chi-Chung Jen, Ya-Chi Hung, Yu-Chu Lin, Wen-Chih Chiang
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Patent number: 12272752Abstract: A semiconductor device structure is provided. The semiconductor device structure includes multiple semiconductor nanostructures, and the semiconductor nanostructures include a first semiconductor material. The semiconductor device structure also includes multiple epitaxial structures extending from edges of the semiconductor nanostructures. The epitaxial structures include a second semiconductor material that is different than the first semiconductor material. The semiconductor device structure further includes a gate stack wrapped around the semiconductor nanostructures.Type: GrantFiled: November 29, 2023Date of Patent: April 8, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shuen-Shin Liang, Pang-Yen Tsai, Keng-Chu Lin, Sung-Li Wang, Pinyen Lin
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Patent number: 12259111Abstract: An electronic device with light-indicating function is provided. The electronic device includes a substrate, a first light source, a second light source, and a light guiding element. The substrate includes a first surface and a second surface, wherein the first surface is opposite to the second surface. The first light source is disposed on the first surface of the substrate, wherein the first light source faces the first direction, and the first light source provides a first light beam. The second light source is disposed on the first surface of the substrate, wherein the second light source faces the second direction, the second light source provides a second light beam, and the first direction is not parallel to the second direction. The light guiding element includes a first section and a second section.Type: GrantFiled: March 7, 2024Date of Patent: March 25, 2025Assignee: WISTRON NEWEB CORP.Inventors: Ching-Hsun Meng, Wei-Hung Liao, Yang-Chieh Ma, Hsueh-Chu Lin
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Patent number: 12261188Abstract: A device is disclosed. The device includes a plurality of pixels disposed over a first surface of a semiconductor layer. The device includes a device layer disposed over the first surface. The device includes metallization layers disposed over the device layer. One of the metallization layers, closer to the first surface than any of other ones of the metallization layers, includes at least one conductive structure. The device includes an oxide layer disposed over a second surface of the semiconductor layer, the second surface being opposite to the first surface, the oxide layer also lining a recess that extends through the semiconductor layer. The device includes a spacer layer disposed between inner sidewalls of the recess and the oxide layer. The device includes a pad structure extending through the oxide layer and the device layer to be in physical contact with the at least one conductive structure.Type: GrantFiled: April 17, 2023Date of Patent: March 25, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Keng-Ying Liao, Yu-Chu Lin, Chih Wei Sung, Shih Sian Wang, Chi-Chung Jen, Yu-chien Ku, Yen-Jou Wu, Huai-jen Tung, Po-Zen Chen
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Publication number: 20250098227Abstract: A flash memory device includes a floating gate electrode formed within a substrate semiconductor layer having a doping of a first conductivity type, a pair of active regions formed within the substrate semiconductor layer, having a doping of a second conductivity type, and laterally spaced apart by the floating gate electrode, an erase gate electrode formed within the substrate semiconductor layer and laterally offset from the floating gate electrode, and a control gate electrode that overlies the floating gate electrode. The floating gate electrode may be formed in a first opening in the substrate semiconductor layer, and the erase gate electrode may be formed in a second opening in the substrate semiconductor layer. Multiple instances of the flash memory device may be arranged as a two-dimensional array of flash memory cells.Type: ApplicationFiled: December 5, 2024Publication date: March 20, 2025Inventors: Yu-Chu Lin, Chia-Ming Pan, Chi-Chung Jen, Wen-Chih Chiang, Huai-Jen Tung, Keng-Ying Liao
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Patent number: 12255249Abstract: The present disclosure is directed to method for the fabrication of spacer structures between source/drain epitaxial structures and metal gate structures in nanostructure transistors. The method includes forming a fin structure with alternating first and second nanostructure elements on a substrate. The method also includes etching edge portions of the first nanostructure elements in the fin structure to form spacer cavities, and depositing a spacer layer on the fin structure to fill the spacer cavities. Further, treating the spacer layer with a microwave-generated plasma to form an oxygen concentration gradient within the spacer layer outside the spacer cavities and removing, with an etching process, the treated portion of the spacer layer. During the etching process, a removal rate of the etching process for the treated portion of the spacer layer is based on an oxygen concentration within the oxygen concentration gradient.Type: GrantFiled: August 9, 2023Date of Patent: March 18, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Mrunal Abhijith Khaderbad, Keng-Chu Lin, Yu-Yun Peng
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Patent number: 12255239Abstract: The present disclosure describes a semiconductor device that includes a transistor. The transistor includes a source/drain region that includes a front surface and a back surface opposite to the front surface. The transistor includes a salicide region on the back surface and a channel region in contact with the source/drain region. The channel region has a front surface co-planar with the front surface of the source/drain region. The transistor further includes a gate structure disposed on a front surface of the channel region. The semiconductor device also includes a backside contact structure that includes a conductive contact in contact with the salicide region and a liner layer surrounding the conductive contact.Type: GrantFiled: July 16, 2021Date of Patent: March 18, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Mrunal Abhijith Khaderbad, Keng-Chu Lin, Yu-Yun Peng
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Publication number: 20250088782Abstract: A cushion for a wearable device includes an outer cover layer and an inner cushion. The outer cover layer includes a first base material, a heat conducting material and a first heat storage material. The heat conducting material and the first heat storage material are dispersed in the first base material. The enthalpy value of the outer cover layer is less than or equal to 5 J/g. The inner cushion includes a second base material and a second heat storage material. The second heat storage material is dispersed in the second base material. The enthalpy value of the inner cushion is greater than that of the outer cover layer. The difference between the enthalpy value of the inner cushion and the enthalpy value of the outer cover layer is greater than 45 J/g.Type: ApplicationFiled: September 7, 2023Publication date: March 13, 2025Applicant: Merry Electronics(Shenzhen) Co., Ltd.Inventors: Ying Chen Cheng, Yu Lin Chu, Cheng Yu Tsai, Hsin-Chu Lin
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Patent number: 12249657Abstract: In some implementations, one or more semiconductor processing tools may form a first terminal of a semiconductor device by depositing a tunneling oxide layer on a first portion of a body of the semiconductor device, depositing a first volume of polysilicon-based material on the tunneling oxide layer, and depositing a first dielectric layer on an upper surface and a second dielectric layer on a side surface of the first volume of polysilicon-based material. The one or more semiconductor processing tools may form a second terminal of the semiconductor device by depositing a second volume of polysilicon-based material on a second portion of the body of the semiconductor device. A side surface of the second volume of polysilicon-based material is adjacent to the second dielectric layer.Type: GrantFiled: July 26, 2023Date of Patent: March 11, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Chu Lin, Chi-Chung Jen, Wen-Chih Chiang, Ming-Hong Su, Yung-Han Chen, Mei-Chen Su, Chia-Ming Pan
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Publication number: 20250081365Abstract: An electronic device is provided. The electronic device is adapted to be disposed on a mounting surface. The electronic device includes a device body, a connection base and a bracket. The connection base is connected to the device body. The connection base is adapted to be rotated between a first orientation and a second orientation relative to the device body. When the connection base is in the first orientation, the connection base is connected to the device body. When the connection base is in the second orientation, the connection base is separated from the device body. The bracket is wedged against the connection base, wherein the bracket is adapted to be affixed to the mounting surface.Type: ApplicationFiled: July 24, 2024Publication date: March 6, 2025Inventors: Liang-Cheng LU, Hsueh-Chu LIN, Chiu-Hui WU
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Publication number: 20250079853Abstract: A power generating device and a power supplying method thereof are provided. The power generating device includes a battery set, a charge storage device, a charger and a voltage converter. The battery set has microbial fuel cell and/or solar battery, and is configured to generate a supply voltage. The charger generates a charging voltage according to the supply voltage, and provides the charging voltage through a first resistor to charge the charge storage device. The voltage converter converts a storage voltage provided by the charge storage device to generate a driving voltage, and provides the driving voltage to drive a load.Type: ApplicationFiled: October 20, 2023Publication date: March 6, 2025Applicant: National Tsing Hua UniversityInventors: Chao-I Liu, Heng-An Su, I-Chu Lin, Yao-Yu Lin, Chia-Chieh Hsu, Hsin-Tien Li, Tzu-Yin Liu, Han-Yi Chen
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Publication number: 20250081492Abstract: Embodiments of the present disclosure provide semiconductor device structures and methods of forming the same. The method includes removing a first semiconductor layer disposed between a second semiconductor layer and a third semiconductor layer and performing an oxide refill process to form a seamless dielectric material between the second and third semiconductor layers. The oxide refill process includes exposing the second and third semiconductor layers to a silicon-containing precursor at a first flow rate for a first duration to form a monolayer, and exposing the monolayer to an oxygen-containing precursor at a second flow rate for a second duration to form the seamless dielectric material, the second flow rate is about twice to about 20 times the first flow rate, and the second duration is about twice to about 20 times the first duration.Type: ApplicationFiled: August 30, 2023Publication date: March 6, 2025Inventors: Kuei-Lin CHAN, Wei-Ting YEH, Fu-Ting YEN, Yu-Yun PENG, Keng-Chu LIN
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Patent number: 12216090Abstract: A device is provided for blade detection. The device comprises a supporting frame, a linear track, and a fixture. The supporting frame comprises a plurality of aluminum extruded bodies with connectors thereof and a plurality of rotating adjusting pads with fixing plates thereof; the linear track comprises a plurality of tracks with connectors thereof and a plurality of sliders; and the fixture comprises a bearing holder part, a bearing connector, a sliding rod, a joint bearer with a connector thereof, a chuck, and a detector. On detecting a blade, the present invention helps the detector to be maintained on the blade surface for detection in horizontal and vertical directions without deviating from track; and the detector is in contact with the blade surface to move precisely and regularly without missing or repeating detection areas. Thus, the area is detected completely with time saved and accuracy improved.Type: GrantFiled: January 27, 2022Date of Patent: February 4, 2025Assignee: Institute of Nuclear Energy Research, Atomic Energy Council, Executive Yuan, R. O.C.Inventors: Yu-Chu Lin, Wei-Nian Su
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Patent number: 12218253Abstract: A flash memory device and method of making the same are disclosed. The flash memory device is located on a substrate and includes a floating gate electrode, a tunnel dielectric layer located between the substrate and the floating gate electrode, a smaller length control gate electrode and a control gate dielectric layer located between the floating gate electrode and the smaller length control gate electrode. The length of a major axis of the smaller length control gate electrode is less than a length of a major axis of the floating gate electrode.Type: GrantFiled: April 15, 2023Date of Patent: February 4, 2025Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Yu-Chu Lin, Chi-Chung Jen, Wen-Chih Chiang, Yi-Ling Liu, Huai-Jen Tung, Keng-Ying Liao