Abstract: An apparatus for cleaning and conditioning the surface of a semiconductor substrate such as wafer includes a rotatable chuck, a chamber, a rotatable tray for collecting cleaning solution with one or more drain outlets, multiple receptors for collecting multiple cleaning solutions, a first motor to drive chuck, and a second motor to drive the tray. The drain outlet in the tray can be positioned directly above its designated receptor located under the drain outlet. The cleaning solution collected by the tray can be guided into designated receptor. One characteristic of the apparatus is having a robust and precisely controlled cleaning solution recycle with minimum cross contamination.

Abstract: A method of diagnosing operation of a turbo speed sensor that monitors a turbocharger in an internal combustion engine system includes determining whether the engine system is operating in one of a high speed and a low speed range and determining a threshold turbo speed value based on whether engine system is operating in one of the high speed and the low speed range. An actual turbo speed value of the turbocharger is monitored based on a signal generated by the turbo speed sensor. The actual turbo speed value is compared to the threshold turbo speed value and a diagnostic signal is generated based on the step of comparing.

Abstract: The invention discloses a low-cost apparatus for chemical solution preparation with controlled process parameters such as chemical age, temperature, yield of active ingredients at the point of use. In addition, this apparatus provides chamber-to-chamber consistency on these parameters across multiple processing chambers on a single wafer wet-clean system. The invention also discloses a method to use chemical solution mixture resident time to achieve optimal combined effect of temperature, reactivity and yield of active ingredients of chemical solution mixture for best wafer treatment results.

Abstract: A electrochemical deposition system which has a 3-D stacked architecture comprises a factory interface for receiving semiconductor wafers, a mainframe comprising a mainframe transfer robot and a plurality of wafer holder assemblies which disposed on the top thereof, a plurality of electroplating cells disposed within the mainframe, a plurality of cleaning cells disposed within the mainframe and located below the electroplating cells, a plurality of thermal treatment chambers disposed in between the mainframe and the factory interface, and a fluid distribution system fluidly connected to the electroplating cells and the cleaning cells, wherein the mainframe transfer robot transfers the semiconductor wafer from the factory interface and within the electroplating cells, the cleaning cells, and the thermal treatment chambers. As a result, the system of the present invention is expandable to accommodate newly-added processing units without overmuch increased footprint.

Abstract: Various systems and methods are described for controlling an engine in a vehicle in response to an equilibrium value of an exhaust gas constituent generated from an exhaust gas sensor. One example method comprises during engine fueling below a threshold amount where at least one intake valve and one exhaust valve of the engine are operating: generating an equilibrium value of an exhaust gas constituent reading of the exhaust gas sensor, the equilibrium value based on a trajectory of the exhaust gas constituent reading, and under selected engine combusting conditions, adjusting the sensor signal based on the equilibrium value.

Abstract: The present invention provides an apparatus and method for rapid and uniform thermal treatment of semiconductor workpieces in two closely arranged thermal treatment chambers with a retractable door between them. The retractable door moves in between two thermal treatment chambers during heating or cooling process, and additional heating and cooling sources are provided for double-side thermal treatment of the semiconductor workpiece.

Abstract: An apparatus for cleaning a surface of wafer or substrate includes a plate being positioned with a gap to surface of the wafer or substrate, and the plate being rotated around an axis vertical to surface of wafer or substrate. The rotating plate surface facing surface of the wafer or substrate has grooves, regular patterns, and irregular patterns to enhance the cleaning efficiency. Another embodiment further includes an ultra sonic or mega sonic transducer vibrating the rotating plate during cleaning process.

Abstract: A temperature sensor rationality control system for an exhaust treatment system having an oxidation catalyst includes an oxidation catalyst inlet temperature sensor that generates an inlet temperature signal and an oxidation catalyst outlet temperature sensor that generates an outlet temperature signal. A control module determines whether a difference based on the inlet temperature signal and the outlet temperature signal is below a difference threshold when an exhaust temperature is within a threshold range.

Abstract: A method of diagnosing operation of a turbo speed sensor that monitors a turbocharger in an internal combustion engine system includes determining whether the engine system is operating in one of a high speed and a low speed range and determining a threshold turbo speed value based on whether engine system is operating in one of the high speed and the low speed range. An actual turbo speed value of the turbocharger is monitored based on a signal generated by the turbo speed sensor. The actual turbo speed value is compared to the threshold turbo speed value and a diagnostic signal is generated based on the step of comparing.

Abstract: A lean NOX trap is a diesel exhaust aftertreatment system is selectively denitrated in a manner that addresses unreliability of NOX sensor data. According to one concept, data from a NOX is ignored or given decreased weight in a period immediately following a denitration. According to another concept, denitration is made contingent on both a first and a second criteria being met. The first criteria relates to the amount of NOX stored in the LNT or remaining NOX storage capacity of the LNT. The second criteria relates to the current performance of the exhaust treatment system, or a portion thereof, as determined from one or more measurements of NOX concentration in the exhaust.

Abstract: A temperature sensor rationality control system for an exhaust treatment system having an oxidation catalyst includes an oxidation catalyst inlet temperature sensor that generates an inlet temperature signal and an oxidation catalyst outlet temperature sensor that generates an outlet temperature signal. A control module determines whether a difference based on the inlet temperature signal and the outlet temperature signal is below a difference threshold when an exhaust temperature is within a threshold range.

Abstract: The present invention relates to the identification of a specific cysteine (Cys) residue in MgrA of Staphylococcus aureus and homologs in other bacteria that acts as a redox switch to regulate virulence of S. aureus and expression of bacterial genes that confer resistance to antibiotics. In addition, MgrA is found to be a key virulence determinant for S. aureus. Oxidative regulation of other Cys containing proteins in various bacteria has been observed, leading to the ability to modulate virulence and resistance of these organisms.

Abstract: A system is disclosed for diagnosing cylinder misfiring in an internal combustion engine. A control computer is configured to periodically diagnose whether each cylinder of the engine is firing or misfiring, and to log information relating to such cylinder firing or misfiring.

Abstract: A diesel oxidation catalyst (DOC) testing system includes a DOC that is located in an exhaust system of a vehicle. A control module verifies proper operation of the DOC during a post-fuel injection process in an engine of the vehicle. The control module computes a predicted temperature of exhaust gases at an output of the DOC that corresponds with proper operation of the DOC during the post-fuel injection process, determines an actual temperature of the exhaust gases during the post-fuel injection process, and activates an alarm indicator when a difference between the predicted temperature and the actual temperature is greater than a first predetermined value. A first temperature sensor is located downstream from the DOC in the exhaust system. The first temperature sensor communicates with the control module, generates the actual temperature, and transmits the actual temperature to the control module.

Abstract: A system is disclosed for estimating the mass flow of recirculated exhaust gas (EGR) from an exhaust manifold to an intake manifold of an internal combustion engine via an EGR conduit disposed therebetween and a fraction of EGR attributable to a mass of charge flow entering the intake manifold. An engine controller is responsive to current values of various combinations of the engine exhaust temperature (ETE), intake manifold pressure (IMP), differential pressure (?P) across an EGR valve, and EGR valve position (EGRP) to determine an estimate of EGR mass flow. The controller is further operable to estimate EGR fraction as a function of the estimated EGR mass flow value, mass flow of charge entering the intake manifold, and engine speed.

Abstract: A system is disclosed for diagnosing cylinder misfiring in an internal combustion engine. A control computer is configured to periodically diagnose whether each cylinder of the engine is firing or misfiring, and to log information relating to such cylinder firing or misfiring.

Abstract: The present invention relates to an engine diagnostic system for detecting malfunctions in an engine system having a variable geometry turbine exhaust system. The engine diagnosis system includes an electronic control module adapted to periodically initiate a preprogrammed variable geometry turbine diagnostic routine.

Abstract: Human CDX2, a homeobox gene, has been identified as a downstream effector of tumor suppressor APC. APC induces the transcription of CDX2. This newly found relationship permits specific drug screening assays as well as therapeutic and diagnostic methods.

Abstract: An equivalence ratio-based system for controlling transient engine fueling includes an engine controller responsive to a number of engine operating conditions to estimate a mass of oxygen trapped within a number of cylinders of an internal combustion engine. The engine controller is further operable to map current values of engine speed and commanded fueling to one of a number of predetermined maximum fuel-to-oxygen, or equivalence, ratio values (&PHgr;MAX). The engine controller is then operable to determine an oxygen/fuel control (OFC) limited fueling command (FOFCL) as a function of the estimated oxygen mass value and the maximum equivalence ratio, and to limit engine fueling based on the OFC limited fueling command FOFCL. In one embodiment, the engine controller is operable to fuel the engine according to a minimum of the OFC limited fueling command FOFCL and a default fueling command FDEF, although other fuel limiting strategies are contemplated.

Abstract: The present invention relates to an engine diagnostic system for detecting malfunctions in an engine system having a variable geometry turbine exhaust system. The engine diagnosis system includes a variable geometry turbine adapted to receive exhaust gasses exiting an engine, a variable geometry turbine position sensor operationally connected to the variable geometry turbine, a compressed air reserve, a pressure capsule pneumatically connected between the compressed air reserve and the variable geometry turbine, a pressure regulator pneumatically connected between the compressed air reserve and the capsule, a pressure sensor pneumatically connected between the pressure regulator and the capsule, and an electronic control module electrically connected to the variable geometry turbine position sensor, to the pressure regulator, and to the pressure sensor. The sensors may be integrally connected to the engine exhaust system, or may be part of a diagnostic station.