Patents by Inventor Chun-I Wu
Chun-I Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230040346Abstract: A semiconductor device with different configurations of gate structures and a method of fabricating the same are disclosed. The semiconductor device includes a first gate structure and a second gate structure. The first gate structure includes a first interfacial oxide (IO) layer, a first high-K (HK) dielectric layer disposed on the first interfacial oxide layer, and a first dipole layer disposed at an interface between the first IL layer and the first HK dielectric layer. The HK dielectric layer includes a rare-earth metal dopant or an alkali metal dopant. The second gate structure includes a second IL layer, a second HK dielectric layer disposed on the second IL layer, and a second dipole layer disposed at an interface between the second IL layer and the second HK dielectric layer. The second HK dielectric layer includes a transition metal dopant and the rare-earth metal dopant or the alkali metal dopant.Type: ApplicationFiled: March 22, 2022Publication date: February 9, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsiang-Pi CHANG, Huang-Lin CHAO, Chung-Liang CHENG, Pinyen LIN, Chun-Chun LIN, Tzu-Li LEE, Yu-Chia LIANG, Duen-Huei HOU, Wen-Chung LIU, Chun-I WU
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Publication number: 20230020099Abstract: A method includes forming a dummy gate stack over a semiconductor region, forming a source/drain region on a side of the dummy gate stack, removing the dummy gate stack to form a trench, depositing a gate dielectric layer extending into the trench, depositing a metal-containing layer over the gate dielectric layer, and depositing a silicon-containing layer on the metal-containing layer. The metal-containing layer and the silicon-containing layer in combination act as a work-function layer. A planarization process is performed to remove excess portions of the silicon-containing layer, the metal-containing layer, and the gate dielectric layer, with remaining portions of the silicon-containing layer, the silicon-containing layer, and the gate dielectric layer forming a gate stack.Type: ApplicationFiled: January 17, 2022Publication date: January 19, 2023Inventors: Hsin-Yi Lee, Weng Chang, Chi On Chui, Chun-I Wu, Huang-Lin Chao
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Publication number: 20230009485Abstract: A method includes removing a first dummy gate stack and a second dummy gate stack to form a first trench and a second trench. The first dummy gate stack and the second dummy gate stack are in a first device region and a second device region, respectively. The method further includes depositing a first gate dielectric layer and a second gate dielectric layer extending into the first trench and the second trench, respectively, forming a fluorine-containing layer comprising a first portion over the first gate dielectric layer, and a second portion over the second gate dielectric layer, removing the second portion, performing an annealing process to diffuse fluorine in the first portion into the first gate dielectric layer, and at a time after the annealing process, forming a first work-function layer and a second work-function layer over the first gate dielectric layer and the second gate dielectric layer, respectively.Type: ApplicationFiled: February 21, 2022Publication date: January 12, 2023Inventors: Hsin-Yi Lee, Weng Chang, Hsiang-Pi Chang, Huang-Lin Chao, Chung-Liang Cheng, Chi On Chui, Kun-Yu Lee, Tzer-Min Shen, Yen-Tien Tung, Chun-I Wu
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Patent number: 11502757Abstract: A method of manufacturing a device with a optical component disposed thereon, including following steps of: preparing a substrate, the substrate including a signal guide and an electric conductive structure; and mounting an optical component on the substrate and corresponding a light transmission face of the optical component to the signal guide, wherein the optical component and the substrate is connected by an adhesive material and the optical component is electrically connected with the electric conductive structure. A transmission device being made by the method of manufacturing the device with the optical component disposed thereon as described above is further provided.Type: GrantFiled: July 28, 2021Date of Patent: November 15, 2022Assignee: QUANTUMZ INC.Inventors: Chun-Chieh Chen, Ming-Che Hsieh, Po-Ting Chen, Chun-I Wu
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Publication number: 20220254955Abstract: A light emitting diode structure includes a metal reflective layer, a first transparent electrically-conductive layer, a dielectric layer, second transparent electrically-conductive layers, a first type semiconductor layer, an active layer and a second type semiconductor layer. The metal reflective layer has first concave sections. The first transparent electrically-conductive layer is conformally formed over the first concave sections of the metal reflective layer. The dielectric layer is formed over the first transparent electrically-conductive layer and has through holes to expose the first transparent electrically-conductive layer. The second transparent electrically-conductive layers are formed over the dielectric layer, and connected with the first transparent electrically-conductive layer via the through holes. Each second transparent electrically-conductive layer is connected to the first transparent electrically-conductive layer to form a T-shaped cross section in each first concave section.Type: ApplicationFiled: January 19, 2022Publication date: August 11, 2022Inventors: Cheng-Yu CHIEN, Hou-Jun WU, Chun-I WU
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Publication number: 20220231197Abstract: A flip-chip light emitting device includes a substrate, a light-emitting layer, a bonding layer disposed between the substrate and the light-emitting layer, and a protective insulating layer disposed over the light-emitting layer and the bonding layer. The bonding layer has first and second upper surfaces that respectively have different first and second roughnesses.Type: ApplicationFiled: April 8, 2022Publication date: July 21, 2022Inventors: Weiping XIONG, Xin WANG, Zhiwei WU, Di GAO, Chun-I WU, Duxiang WANG
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Publication number: 20220216621Abstract: An antenna structure includes a patch antenna including two opposite edges, a microstrip line connected to the patch antenna, two first radiation assemblies respectively disposed on two sides of the patch antenna, two second radiation assemblies disposed under the two first radiation assemblies, a liquid crystal layer disposed between a first plane and a second plane, and a ground plane disposed under the two second radiation assemblies. The patch antenna, the microstrip line, and the two first radiation assemblies are located on the first plane, and each of the first radiation assemblies includes multiple separated first conductors. The two second radiation assemblies are located on the second plane, and each of the second radiation assemblies includes multiple separated second conductors. A projection of the two second radiation assemblies on the first plane, the two first radiation assemblies, and the two edges of the patch antenna collectively form two loops.Type: ApplicationFiled: August 6, 2021Publication date: July 7, 2022Applicant: Au Optronics CorporationInventors: Shih-Yuan Chen, Hsiu-Ping Liao, Chun-I Wu, Yi-Chen Hsieh, Yi-Hsiang Lai, Ching-Huan Lin, Chuang Yueh Lin
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Patent number: 11322657Abstract: A flip-chip light emitting device includes a transparent substrate, an epitaxial light-emitting structure, a transparent bonding layer interposed between the transparent substrate and the light-emitting structure, and a protective insulating layer disposed over the light-emitting structure and the bonding layer. The transparent bonding layer has a smaller-thickness section that has a first contact surface for the protective insulating layer to be disposed thereover, and a larger-thickness section that has a second contact surface meshing with and bonded to a roughened bottom surface of the light-emitting structure. The first contact surface is smaller in roughness than the second contact surface. A method for producing the device is also disclosed.Type: GrantFiled: August 25, 2020Date of Patent: May 3, 2022Assignee: QUANZHOU SANAN SEMICONDUCTOR TECHNOLOGY CO., LTD.Inventors: Weiping Xiong, Xin Wang, Zhiwei Wu, Di Gao, Chun-I Wu, Duxiang Wang
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Publication number: 20220077296Abstract: The embodiments described herein are directed to a method for the fabrication of transistors with aluminum-free n-type work function layers as opposed to aluminum-based n-type work function layers. The method includes forming a channel portion disposed between spaced apart source/drain epitaxial layers and forming a gate stack on the channel portion, where forming the gate stack includes depositing a high-k dielectric layer on the channel portion and depositing a p-type work function layer on the dielectric layer. After depositing the p-type work function layer, forming without a vacuum break, an aluminum-free n-type work function layer on the p-type work function layer and depositing a metal on the aluminum-free n-type work function layer. The method further includes depositing an insulating layer to surround the spaced apart source/drain epitaxial layers and the gate stack.Type: ApplicationFiled: November 22, 2021Publication date: March 10, 2022Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chung-Liang CHENG, Ziwei FANG, Chun-I WU, Huang-Lin CHAO
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Patent number: 11183574Abstract: The embodiments described herein are directed to a method for the fabrication of transistors with aluminum-free n-type work function layers as opposed to aluminum-based n-type work function layers. The method includes forming a channel portion disposed between spaced apart source/drain epitaxial layers and forming a gate stack on the channel portion, where forming the gate stack includes depositing a high-k dielectric layer on the channel portion and depositing a p-type work function layer on the dielectric layer. After depositing the p-type work function layer, forming without a vacuum break, an aluminum-free n-type work function layer on the p-type work function layer and depositing a metal on the aluminum-free n-type work function layer. The method further includes depositing an insulating layer to surround the spaced apart source/drain epitaxial layers and the gate stack.Type: GrantFiled: November 21, 2019Date of Patent: November 23, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chung-Liang Cheng, Ziwei Fang, Chun-I Wu, Huang-Lin Chao
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Publication number: 20210328018Abstract: The structure of a semiconductor device with different gate structures configured to provide ultra-low threshold voltages and a method of fabricating the semiconductor device are disclosed. The method includes forming first and second nanostructured channel regions in first and second nanostructured layers, respectively, and forming first and second gate-all-around (GAA) structures surrounding the first and second nanostructured channel regions, respectively. The forming the first and second GAA structures includes selectively forming an Al-based n-type work function metal layer and a Si-based capping layer on the first nanostructured channel regions, depositing a bi-layer of Al-free p-type work function metal layers on the first and second nanostructured channel regions, depositing a fluorine blocking layer on the bi-layer of Al-free p-type work function layers, and depositing a gate metal fill layer on the fluorine blocking layer.Type: ApplicationFiled: June 28, 2021Publication date: October 21, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chung-Liang CHENG, Chun-I Wu, Huang-Lin Chao
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Patent number: 11148607Abstract: A foldable positioning structure and a bicycle carrier including the same is provided. The foldable positioning structure is for being mounted on a main body of a bicycle carrier, the main body includes a first rod member and a second rod member which are rotatably connected with each other, the foldable positioning structure includes an abutting assembly, a controlling assembly and a linkage. The abutting assembly is disposed on the second rod member and movable relative to the second rod member. The controlling assembly is rotatably disposed on the second rod member and slidable relative to the second rod member, and the controlling assembly has an engaging portion which is radially disposed thereon. The linkage is connected to and between the abutting assembly and the controlling assembly.Type: GrantFiled: August 25, 2020Date of Patent: October 19, 2021Assignee: KING ROOF INDUSTRIAL CO., LTD.Inventors: Chun-Yi Hsieh, Chun-I Wu
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Publication number: 20210305376Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate. The semiconductor device structure includes a gate stack over the substrate. The gate stack includes a gate dielectric layer, a first metal-containing layer, a silicon-containing layer, a second metal-containing layer, and a gate electrode layer sequentially stacked over the substrate. The silicon-containing layer is between the first metal-containing layer and the second metal-containing layer, and the silicon-containing layer is thinner than the second metal-containing layer.Type: ApplicationFiled: June 11, 2021Publication date: September 30, 2021Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsueh-Wen TSAU, Chun-I WU, Ziwei FANG, Huang-Lin CHAO, I-Ming CHANG, Chung-Liang CHENG, Chih-Cheng LIN
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Patent number: 11049937Abstract: The structure of a semiconductor device with different gate structures configured to provide ultra-low threshold voltages and a method of fabricating the semiconductor device are disclosed. The method includes forming first and second nanostructured channel regions in first and second nanostructured layers, respectively, and forming first and second gate-all-around (GAA) structures surrounding the first and second nanostructured channel regions, respectively. The forming the first and second GAA structures includes selectively forming an Al-based n-type work function metal layer and a Si-based capping layer on the first nanostructured channel regions, depositing a bi-layer of Al-free p-type work function metal layers on the first and second nanostructured channel regions, depositing a fluorine blocking layer on the bi-layer of Al-free p-type work function layers, and depositing a gate metal fill layer on the fluorine blocking layer.Type: GrantFiled: October 18, 2019Date of Patent: June 29, 2021Inventors: Chung-Liang Cheng, Chun-I Wu, Huang-Lin Chao
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Patent number: 11043609Abstract: A light emitting diode includes an n-type confinement layer, a quantum well active layer formed on the n-type confinement layer, a p-type confinement layer formed on the quantum well active layer, a gallium phosphide-based quantum dot structure formed in the p-type confinement layer, and a GaP-based current spreading layer formed on the GaP-based quantum dot structure. A method of manufacturing the light emitting diode is also provided.Type: GrantFiled: September 26, 2019Date of Patent: June 22, 2021Assignee: XIAMEN SAN'AN OPTOELECTRONICS CO., LTD.Inventors: Senlin Li, Jingfeng Bi, Chun-Kai Huang, Jin Wang, Chih-Hung Hsiao, Chun-I Wu, Du-Xiang Wang
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Patent number: 11038029Abstract: A method for forming a semiconductor device structure is provided. The method includes providing a substrate and an insulating layer over the substrate. The insulating layer has a trench partially exposing the substrate. The method includes forming a gate dielectric layer in the trench. The method includes forming a first metal-containing layer over the gate dielectric layer. The method includes forming a silicon-containing layer over the first metal-containing layer. The method includes forming a second metal-containing layer over the silicon-containing layer. The method includes forming a gate electrode layer in the trench and over the second metal-containing layer.Type: GrantFiled: February 15, 2019Date of Patent: June 15, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsueh-Wen Tsau, Chun-I Wu, Ziwei Fang, Huang-Lin Chao, I-Ming Chang, Chung-Liang Cheng, Chih-Cheng Lin
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Publication number: 20210118995Abstract: The structure of a semiconductor device with different gate structures configured to provide ultra-low threshold voltages and a method of fabricating the semiconductor device are disclosed. The method includes forming first and second nanostructured channel regions in first and second nanostructured layers, respectively, and forming first and second gate-all-around (GAA) structures surrounding the first and second nanostructured channel regions, respectively. The forming the first and second GAA structures includes selectively forming an Al-based n-type work function metal layer and a Si-based capping layer on the first nanostructured channel regions, depositing a bi-layer of Al-free p-type work function metal layers on the first and second nanostructured channel regions, depositing a fluorine blocking layer on the bi-layer of Al-free p-type work function layers, and depositing a gate metal fill layer on the fluorine blocking layer.Type: ApplicationFiled: October 18, 2019Publication date: April 22, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chung-Liang CHENG, Chun-I Wu, Huang-Lin Chao
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Patent number: 10985022Abstract: Examples of a method of forming an integrated circuit device with an interfacial layer disposed between a channel region and a gate dielectric are provided herein. In some examples, the method includes receiving a workpiece having a substrate and a fin having a channel region disposed on the substrate. An interfacial layer is formed on the channel region of the fin, and a gate dielectric layer is formed on the interfacial layer. A first capping layer is formed on the gate dielectric layer, and a second capping layer is formed on the first capping layer. An annealing process is performed on the workpiece configured to cause a first material to diffuse from the first capping layer into the gate dielectric layer. The forming of the first and second capping layers and the annealing process may be performed in the same chamber of a fabrication tool.Type: GrantFiled: November 29, 2018Date of Patent: April 20, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chung-Liang Cheng, Chun-I Wu, Ziwei Fang, Huang-Lin Chao
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Patent number: 10971602Abstract: An embodiment is a method of semiconductor processing. The method includes depositing a high-k gate dielectric layer over a semiconductor fin. A barrier layer is deposited over the high-k gate dielectric layer. A silicon passivation layer is deposited over the barrier layer. A nitrogen treatment is performed on the silicon passivation layer. A capping layer is deposited over the silicon passivation layer. The capping layer is annealed.Type: GrantFiled: April 20, 2020Date of Patent: April 6, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chien-Shun Liao, Huai-Tei Yang, Chun Chieh Wang, Yueh-Ching Pai, Chun-I Wu
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Publication number: 20210066551Abstract: A flip-chip light emitting device includes a transparent substrate, an epitaxial light-emitting structure, a transparent bonding layer interposed between the transparent substrate and the light-emitting structure, and a protective insulating layer disposed over the light-emitting structure and the bonding layer. The transparent bonding layer has a smaller-thickness section that has a first contact surface for the protective insulating layer to be disposed thereover, and a larger-thickness section that has a second contact surface meshing with and bonded to a roughened bottom surface of the light-emitting structure. The first contact surface is smaller in roughness than the second contact surface. A method for producing the device is also disclosed.Type: ApplicationFiled: August 25, 2020Publication date: March 4, 2021Inventors: Weiping XIONG, Xin WANG, Zhiwei WU, Di GAO, Chun-I WU, Duxiang WANG