Abstract: Shallow junctions n- and p-channel field effect transistors are formed with a single ion implant into a conformal tungsten silicide layer. Although phosphorous and boron are implanted into the same silicide regions, the phosphorous prevents the boron from outdiffusing.

Abstract: Disclosed are novel fast semiconductor photodetector means that comprise a good asymmetric superlattice structure. Associated with the material of the structure is a relatively short minority carrier effective lifetime .tau..sub.e, typically .tau..sub.e <10.sup.-9 sec. In response to a constant photon flux of appropriate wavelength the photodetector can have a substantially constant voltage output that is proportional to the photon flux for small values of flux, and that saturates at a value that is substantially proportional to .tau..sub.e.sup.-1 for relatively large values of flux. The novel photodetector means can be advantageously combined with a FET or bipolar transistor, and the combination can be part of an integrated circuit.