Abstract: A chemical mechanical polishing apparatus includes a platen to hold a polishing pad, a carrier laterally movable by an actuator across the polishing pad to hold a substrate against a polishing surface of the polishing pad during a polishing process, a thermal control system including a plurality of independently controllable heaters and coolers to independently control temperatures of a plurality of zones on the polishing pad, and a controller configured to cause the thermal control system to generate a first zone having a first temperature and a second zone having a different second temperature on the polishing pad.

Abstract: A laser projector includes a light combining device, a light splitting system, a plurality of light valves, and a beam combiner. The light combining device is for emitting an illumination beam. The light splitting system is for receiving the illumination beam to generate a plurality of color beams. The plurality of light valves is for receiving and modulating the plurality of color beams to generate modulated color beams. The beam combiner is for combining the modulated color beams to form a full-color image.

Abstract: A polishing system includes a platen to hold a polishing pad, a carrier head to hold a substrate against the polishing pad, a conditioner including a conditioner head to hold a conditioner disk against the polishing pad, a motor to move the conditioner head laterally movable relative to the platen, a conditioning disk cleaning station positioned adjacent the platen to clean the conditioning disk, and a controller configured to cause the motor to, during polishing of the substrate, move the conditioner head back and forth between a first position with the conditioner head over the polishing pad and a second position with the conditioner head in the conditioner disk cleaning station.

Abstract: An anti-theft lock includes an engaging member arranged on a chassis, a latch module including a connecting member and a latch coupled to the connecting member, a fixing module coupled to the connecting member, a magnetic module arranged on the top cover and used to cooperate with the fixing module to control movement of the connecting member, and an unlocking mechanism including magnetic members. The connecting member is movably arranged on a top cover. The latch is engaged with or separated from the engaging member through movement of the connecting member. The magnetic members are attracted to or repelled from the magnetic module so that the magnetic module fixes or loosens the connecting member. When the connecting member can move, the latch is disengaged from and separated from the engaging member.

Abstract: A method for establishing robust prediction model is adapted for solving the problem that the conventional prediction model cannot generate stable and credible results with missing data. The method of the present invention includes the following steps: obtaining pre-established single-modality standard models respectively based on each type of modalities from samples; extracting modality sets each having the same modality types from the samples to establish corresponding multi-modalities standard models; extracting multiple combinations of the modality sets from the samples having complete modalities to be training data, wherein the multiple combinations of the modality sets can be classified into single-modality, multi-modalities and complete-modalities; inputting said training data into a to-be trained prediction model, and modifying the prediction model by said single-modality standard models and said multi-modalities standard models to obtain a well-trained prediction model.

Abstract: Methods and apparatuses for dispensing polishing fluids onto a polishing pad within a chemical mechanical polishing (CMP) system are disclosed herein. In particular, embodiments herein relate to a CMP polishing method including urging a substrate against a surface of a pad of a polishing system using a carrier assembly. A fluid is dispensed onto the pad from a fluid delivery assembly at a variable flow rate and a first flow rate of the variable flow rate is pulsed at a frequency and a duty cycle. The frequency refers to a number of pulses of the fluid at the first flow rate per rotation of the pad. The term duty cycle refers to a percentage of the pad exposed to fluid per rotation of the pad. The carrier assembly is translated across a surface of the pad while rotating the carrier assembly about a rotational axis.

Abstract: A touch light-emitting module and a manufacturing method thereof are disclosed. The touch light-emitting module includes a printed circuit board and a touch-control conductor. The printed circuit board has a top surface on which a touch-control IC and a luminous unit that is electrically connected are disposed. The touch-control conductor includes a hollowed portion. The touch-control conductor is coated, on the bottom thereof, with a conductive material to combine with the top surface of the printed circuit board, so that the touch-control IC and the luminous unit are located in the hollowed portion. An encapsulation resin is then injected into a space between the printed circuit board and the hollowed portion to complete encapsulation. As such, the present invention offers a simplified structure to achieve an effect of minimization, and also simplifies the manufacturing process and reduces the working time to thereby enhance the yield.

Abstract: An over-voltage protection circuit includes an over-voltage detection circuit, a voltage generator and a switch for providing over-voltage protection between two pins of a USB Type-C port. The over-voltage detection circuit provides an over-voltage signal according to the level of the second pin. The switch includes a first end coupled to the first pin, a second end coupled to the second pin and a control end coupled to a control signal. When the over-voltage signal does not indicate an over-voltage occurrence at the second pin, the voltage generator provides the control signal having a first level for operating the switch in a first region. When the over-voltage signal indicates an over-voltage occurrence at the second pin, the voltage generator adjusts the control signal to a second level for cutting off the switch. The switch operates in a second region after the over-voltage occurrence and before the switch is cut off.

Abstract: An over-voltage protection circuit includes an over-voltage detection circuit, a voltage generator and a switch for providing over-voltage protection between two pins of a USB Type-C port. The over-voltage detection circuit provides an over-voltage signal according to the level of the second pin. The switch includes a first end coupled to the first pin, a second end coupled to the second pin and a control end coupled to a control signal. When the over-voltage signal does not indicate an over-voltage occurrence at the second pin, the voltage generator provides the control signal having a first level for operating the switch in a first region. When the over-voltage signal indicates an over-voltage occurrence at the second pin, the voltage generator adjusts the control signal to a second level for cutting off the switch. The switch operates in a second region after the over-voltage occurrence and before the switch is cut off.

Abstract: A controller for managing a battery pack includes: a detection terminal, for transmitting an enable signal when values of battery parameters for the battery pack satisfy a sleep condition, where the enable signal enables the detection circuit to detect whether the battery pack is connected to a load and whether the battery pack is connected to the charger; and a receiving terminal, for receiving a detection result transmitted by the detection circuit. The detection result indicates whether the battery pack is connected to at least one of the load and charger. The controller controls the battery pack to enter a sleep mode of the sleep modes based on the detection result. The controller also includes a control terminal, for transmitting a control signal to control an on/off state of a charging switch and/or a discharging switch. The control signal is generated by the controller based on the detection result.

Abstract: A polishing pad includes a sensor assembly surrounded by a lower portion of the polishing pad, and an upper portion including a pad portion disposed on the assembly and at least a portion of a polishing layer disposed on the lower portion. The sensor assembly includes a lower body having a first pair of electrodes formed thereon, a polymer body having a second pair of electrodes formed thereon and aligned with the first pair of electrodes, and a pair of gaps between the first pair of electrodes and the second pair of electrodes.

Abstract: A laser projector includes a light combining device, a light splitting system, a plurality of light valves, and a beam combiner. The light combining device is for emitting an illumination beam. The light splitting system is for receiving the illumination beam to generate a plurality of color beams. The plurality of light valves is for receiving and modulating the plurality of color beams to generate modulated color beams. The beam combiner is for combining the modulated color beams to form a multi-color image.

Abstract: A method of temperature control for a chemical mechanical polishing system includes directing a gas that includes steam from an orifice onto the component in the polishing system while the component is spaced away from a polishing pad of the polishing system to raise a temperature of the component to an elevated temperature, and before the component returns to an ambient temperature, moving the component into contact with the polishing pad.

Abstract: A chemical mechanical polishing system includes a platen to support a polishing pad, a boiler, a component that is movable between a first position spaced from the polishing pad and a second position in contact with the polishing pad, a plurality of nozzles to direct steam from the boiler onto the component of the polishing system when located at the first position, an actuator to move the component from the first position to the second position in contact with the polishing pad, and a controller configured to cause the treatment station to direct the steam onto the component to clean the component, and cause the actuator to move the cleaned component from the treatment station into contact with the polishing pad.

Abstract: A refrigeration cabinet includes a freezing compartment, a first evaporator and a second evaporator. The freezing compartment includes a freezing compartment door, and the first evaporator and the second evaporator are both equipped in the freezing compartment. The first evaporator is turned off and a second evaporator is working while the freezing compartment door is opened.

Abstract: An apparatus includes a substrate holder, a first actuator to rotate the substrate holder, a second actuator to move the substrate holder linearly, a first sensor to generate one or more first measurements or images of the substrate, a second sensor to generate one or more second measurements of target positions on the substrate, and a processing device. The processing device estimates a position of the substrate on the substrate holder and causes the first actuator to rotate the substrate holder about a first axis. The rotation causes an offset between a field of view of the second sensor and a target position on the substrate due to the substrate not being centered on the substrate holder. The processing device causes the second actuator to move the substrate holder linearly along a second axis to correct the offset. The processing device determines a profile across a surface of the substrate based on the one or more second measurements of the target positions.

Abstract: A chemical mechanical polishing apparatus includes a platen to support a polishing pad, the platen having a recess, a flexible membrane in the recess, and an in-situ vibration monitoring system to generate a signal. The in-situ acoustic monitoring system includes a vibration sensor supported by the flexible membrane and positioned to couple to an underside of the polishing pad.

Abstract: A controller for managing a battery pack includes: a detection terminal, for transmitting an enable signal when values of battery parameters for the battery pack satisfy a sleep condition, where the enable signal enables the detection circuit to detect whether the battery pack is connected to a load and whether the battery pack is connected to the charger; and a receiving terminal, for receiving a detection result transmitted by the detection circuit. The detection result indicates whether the battery pack is connected to at least one of the load and charger. The controller controls the battery pack to enter a sleep mode of the sleep modes based on the detection result. The controller also includes a control terminal, for transmitting a control signal to control an on/off state of a charging switch and/or a discharging switch. The control signal is generated by the controller based on the detection result.

Abstract: A chemical mechanical polishing system includes a platen to support a polishing pad having a polishing surface, and a pad cooling assembly. The pad cooling assembly has an arm extending over the platen, a nozzle suspended by the arm and coupled to a source of coolant fluid, the nozzle positioned to spray coolant fluid from the source onto the polishing surface of the polishing pad, and an opening in the arm adjacent the nozzle and a passage extending in the arm from the opening, the opening positioned sufficiently close to the nozzle that a flow of coolant fluid from the nozzle entrains air from the opening.

Abstract: A chemical mechanical polishing system includes a platen to support a polishing pad, a carrier head to hold a substrate and bring a lower surface of the substrate into contact with the polishing pad, and an in-situ friction monitoring system including a friction sensor. The friction sensor includes a pad portion having a substrate contacting portion with an upper surface to contact the lower surface of the substrate, and a pair of capacitive sensors positioned below and on opposing sides of the substrate contacting portion.