Patents by Inventor Chung-Chuan Tseng
Chung-Chuan Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9368478Abstract: A microelectronic assembly may include a substrate having an opening extending between first and second oppositely facing surfaces of the substrate, the opening elongated in a first direction; and at least one microelectronic element having a front face facing and attached to the first surface of the substrate and a plurality of contacts at the front face overlying the opening, the microelectronic element having first and second opposite peripheral edges extending away from the front face. The first peripheral edge extends beyond, or is aligned in the first direction with, an inner edge of the opening, and the opening extends beyond the second peripheral edge.Type: GrantFiled: January 15, 2015Date of Patent: June 14, 2016Assignee: Invensas CorporationInventors: Wael Zohni, Chung-Chuan Tseng
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Patent number: 9287303Abstract: A semiconductor device includes a substrate, a logic gate structure, a photosensitive gate structure, a hard mask layer, a first spacer, a first source, a first drain, a second spacer, a second source and a second drain. The logic gate structure and the photosensitive gate structure are disposed on a surface of the substrate. The hard mask layer covers the logic gate structure, the photosensitive gate structure and the surface of the substrate. The first spacer overlies the hard mask layer conformal to a sidewall of the logic gate structure. The first source and drain are respectively disposed in the substrate at two opposite sides of the logic gate structure. The second spacer overlies the hard mask layer conformal to a sidewall of the photosensitive gate structure. The second source and drain are respectively disposed in the substrate at two opposite sides of the photosensitive gate structure.Type: GrantFiled: February 13, 2015Date of Patent: March 15, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chiao-Chi Wang, Chung-Chuan Tseng, Li-Hsin Chu, Chia-Wei Liu
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Patent number: 9281336Abstract: Embodiments of mechanisms of a backside illuminated image sensor device structure are provided. The method for manufacturing a backside illuminated image sensor device structure includes providing a substrate and forming a polysilicon layer over the substrate. The method further includes forming a buffer layer over the polysilicon layer and forming an etch stop layer over the buffer layer. The method further includes forming a hard mask layer over the etch stop layer and patterning the hard mask layer to form an opening in the hard mask layer. The method further includes performing an implant process through the opening of the hard mask layer to form a doped region in the substrate and removing the hard mask layer by a first removing process. The method further includes removing the etch stop layer by a second removing process and removing the buffer layer by a third removing process.Type: GrantFiled: September 26, 2013Date of Patent: March 8, 2016Assignee: Taiwan Semiconductor Manufacturing Co., LTDInventors: Chung-Chuan Tseng, Chia-Wei Liu, Li-Hsin Chu, Yu-Hsiang Tsai
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Publication number: 20160056078Abstract: Various embodiments of mechanisms for forming a slotted metal pad over a TSV in substrate are provided. The dielectric structures in the slotted metal pad reduce dishing effect during planarization of the slotted metal pad. As a result, the risk of having metal stringers in upper metal level(s) caused by the dishing effect is greatly reduced.Type: ApplicationFiled: November 3, 2015Publication date: February 25, 2016Inventors: Chung-Chuan Tseng, Chia-Wei Liu, Cindy Kuo, Ren-Wei Xiao
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Patent number: 9177914Abstract: Various embodiments of mechanisms for forming a slotted metal pad over a TSV in substrate are provided. The dielectric structures in the slotted metal pad reduce dishing effect during planarization of the slotted metal pad. As a result, the risk of having metal stringers in upper metal level(s) caused by the dishing effect is greatly reduced.Type: GrantFiled: November 15, 2012Date of Patent: November 3, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung-Chuan Tseng, Chia-Wei Liu, Cindy Kuo, Ren-Wei Xiao
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Publication number: 20150123293Abstract: A microelectronic assembly may include a substrate having an opening extending between first and second oppositely facing surfaces of the substrate, the opening elongated in a first direction; and at least one microelectronic element having a front face facing and attached to the first surface of the substrate and a plurality of contacts at the front face overlying the opening, the microelectronic element having first and second opposite peripheral edges extending away from the front face. The first peripheral edge extends beyond, or is aligned in the first direction with, an inner edge of the opening, and the opening extends beyond the second peripheral edge.Type: ApplicationFiled: January 15, 2015Publication date: May 7, 2015Applicant: INVENSAS CORPORATIONInventors: Wael Zohni, Chung-Chuan Tseng
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Publication number: 20150087104Abstract: Embodiments of mechanisms of a backside illuminated image sensor device structure are provided. The method for manufacturing a backside illuminated image sensor device structure includes providing a substrate and forming a polysilicon layer over the substrate. The method further includes forming a buffer layer over the polysilicon layer and forming an etch stop layer over the buffer layer. The method further includes forming a hard mask layer over the etch stop layer and patterning the hard mask layer to form an opening in the hard mask layer. The method further includes performing an implant process through the opening of the hard mask layer to form a doped region in the substrate and removing the hard mask layer by a first removing process. The method further includes removing the etch stop layer by a second removing process and removing the buffer layer by a third removing process.Type: ApplicationFiled: September 26, 2013Publication date: March 26, 2015Applicant: Taiwan Semiconductor Manufacturing Co., LtdInventors: Chung-Chuan TSENG, Chia-Wei LIU, Li-Hsin CHU, Yu-Hsiang TSAI
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Patent number: 8946901Abstract: A microelectronic assembly may include a substrate having an opening extending between first and second oppositely facing surfaces of the substrate, the opening elongated in a first direction; and at least one microelectronic element having a front face facing and attached to the first surface of the substrate and a plurality of contacts at the front face overlying the opening, the microelectronic element having first and second opposite peripheral edges extending away from the front face. The first peripheral edge extends beyond, or is aligned in the first direction with, an inner edge of the opening, and the opening extends beyond the second peripheral edge.Type: GrantFiled: January 22, 2013Date of Patent: February 3, 2015Assignee: Invensas CorporationInventors: Wael Zohni, Chung-Chuan Tseng
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Publication number: 20140203440Abstract: A microelectronic assembly may include a substrate having an opening extending between first and second oppositely facing surfaces of the substrate, the opening elongated in a first direction; and at least one microelectronic element having a front face facing and attached to the first surface of the substrate and a plurality of contacts at the front face overlying the opening, the microelectronic element having first and second opposite peripheral edges extending away from the front face. The first peripheral edge extends beyond, or is aligned in the first direction with, an inner edge of the opening, and the opening extends beyond the second peripheral edge.Type: ApplicationFiled: January 22, 2013Publication date: July 24, 2014Applicant: INVENSAS CORPORATIONInventors: Wael Zohni, Chung-Chuan Tseng
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Publication number: 20140131841Abstract: Various embodiments of mechanisms for forming a slotted metal pad over a TSV in substrate are provided. The dielectric structures in the slotted metal pad reduce dishing effect during planarization of the slotted metal pad. As a result, the risk of having metal stringers in upper metal level(s) caused by the dishing effect is greatly reduced.Type: ApplicationFiled: November 15, 2012Publication date: May 15, 2014Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung-Chuan Tseng, Chia-Wei Liu, Cindy Kuo, Ren-Wei Xiao
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Publication number: 20140090882Abstract: One or more techniques or systems for mitigating peeling associated with a pad, such as a pad of a semiconductor, are provided herein. In some embodiments, a pad structure for mitigating peeling comprises a bond region located above a first region. In some embodiments, a first inter-layer dielectric region associated with the first region is formed in an inter-layer region under the pad. Additionally, a first inter-metal dielectric region associated with the first region is formed in an inter-metal region under the inter-layer region. In some embodiments, the first inter-metal region is formed under the first inter-layer region. In this manner, peeling associated with the pad structure is mitigated, at least because the first inter-metal dielectric region comprises dielectric material and the first inter-layer dielectric region comprises dielectric material, thus forming a dielectric-dielectric interface between the first inter-metal dielectric region and the inter-layer dielectric region.Type: ApplicationFiled: September 28, 2012Publication date: April 3, 2014Applicant: Taiwan Semiconductor Manufacturing Company LimitedInventors: Szu-Ying Chen, Jeng-Shyan Lin, Dun-Nian Yaung, Jen-Cheng Liu, Chia-Wei Liu, Chung-Chuan Tseng
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Publication number: 20110308773Abstract: An apparatus for cleaning an emitter electrode in electrohydrodynamic fluid accelerator and precipitator devices via movement of a cleaning device including granular abrasives positioned to frictionally engage the emitter electrode. The cleaning device causes the granular abrasives to travel along a longitudinal extent of the emitter electrode to remove detrimental material accumulated on the electrode. The granular abrasives can be retained in housing, on opposed cleaning surfaces, and can be compressed by the housing or an applied force to abrade detrimental material from the electrode surface.Type: ApplicationFiled: June 21, 2010Publication date: December 22, 2011Applicant: TESSERA, INC.Inventors: Guilian Gao, Nels Jewell-Larsen, Chung-Chuan Tseng
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Patent number: 7964947Abstract: A stacked microelectronic assembly is disclosed, as are different embodiments related to the same. The stacked microelectronic assembly includes a plurality of stackable microelectronic units each having a semiconductor element mounted on a substrate, and also includes alignment elements which align and stack the units one atop another. The aligned assembly may be heated to melt or to reflow the conductive bonding material between the units, thereby electrically coupling and bonding corresponding conductive terminals on each unit.Type: GrantFiled: December 21, 2006Date of Patent: June 21, 2011Assignee: Tessera, Inc.Inventors: Ilyas Mohammed, Chung-Chuan Tseng
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Publication number: 20080156518Abstract: A substrate including plural microelectronic device carriers has metallic alignment elements. The alignment elements desirably are disposed in a predetermined positional relationship to terminals on the carriers. The alignment elements are engaged with a carrier frame and a cutting device is aligned with the carrier frame. The cutting device cuts the carriers so that borders of the carriers are in a precise relationship with the terminals.Type: ApplicationFiled: January 3, 2007Publication date: July 3, 2008Applicant: Tessera, Inc.Inventors: Kenneth Allen Honer, Christopher Paul Wade, Seiichi Tobe, Chung-Chuan Tseng, Ellis Chau, Kyong-Mo Bang
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Publication number: 20080150114Abstract: A stacked microelectronic assembly is disclosed, as are different embodiments related to the same. The stacked microelectronic assembly includes a plurality of stackable microelectronic units each having a semiconductor element mounted on a substrate, and also includes alignment elements which align and stack the units one atop another. The aligned assembly may be heated to melt or to reflow the conductive bonding material between the units, thereby electrically coupling and bonding corresponding conductive terminals on each unit.Type: ApplicationFiled: December 21, 2006Publication date: June 26, 2008Applicant: Tessera, Inc.Inventors: Ilyas Mohammed, Chung-Chuan Tseng
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Publication number: 20050189635Abstract: Various embodiments of packaged chips and ways of fabricating them are disclosed herein. One such packaged chip disclosed herein includes a chip having a front face, a rear face opposite the front face, and a device at one of the front and rear faces, the device being operable as a transducer of at least one of acoustic energy and electromagnetic energy, and the chip including a plurality of bond pads exposed at one of the front and rear faces. The packaged chip includes a package element having a dielectric element and a metal layer disposed on the dielectric element, the package element having an inner surface facing the chip and an outer surface facing away from the chip. The metal layer includes a plurality of contacts exposed at at least one of the inner and outer surfaces, the contacts conductively connected to the bond pads.Type: ApplicationFiled: March 1, 2005Publication date: September 1, 2005Applicant: Tessera, Inc.Inventors: Giles Humpston, Philip Osborn, Jesse Thompson, Yoichi Kubota, Chung-Chuan Tseng, Robert Burtzlaff, Belgacem Haba, David Tuckerman, Michael Warner
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Publication number: 20050189622Abstract: Various embodiments of packaged chips and ways of fabricating them are disclosed herein. One such packaged chip disclosed herein includes a chip having a front face, a rear face opposite the front face, and a device at one of the front and rear faces, the device being operable as a transducer of at least one of acoustic energy and electromagnetic energy, and the chip including a plurality of bond pads exposed at one of the front and rear faces. The packaged chip includes a package element having a dielectric element and a metal layer disposed on the dielectric element, the package element having an inner surface facing the chip and an outer surface facing away from the chip. The metal layer includes a plurality of contacts exposed at at least one of the inner and outer surfaces, the contacts conductively connected to the bond pads.Type: ApplicationFiled: March 1, 2005Publication date: September 1, 2005Applicant: Tessera, Inc.Inventors: Giles Humpston, Philip Osborn, Jesse Thompson, Yoichi Kubota, Chung-Chuan Tseng, Robert Burtzlaff, Belgacem Haba, David Tuckerman, Michael Warner