Patents by Inventor Chung-Wei Chang

Chung-Wei Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7879639
    Abstract: A method to fabricate an image sensor includes providing a semiconductor substrate having a pixel area and a logic area, forming a light sensing element in the pixel area, and forming a first transistor in the pixel area and a second transistor in the logic area. The step of forming the first transistor in the pixel area and the second transistor in the logic area includes performing a first implant process in the pixel area and the logic area, performing a second implant process in the pixel area and the logic area, and performing a third implant process only in the logic area.
    Type: Grant
    Filed: April 13, 2007
    Date of Patent: February 1, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Yao Ko, Chung-Wei Chang, Han-Chi Liu, Shou-Gwo Wuu
  • Publication number: 20100221865
    Abstract: The present disclosure provides an image sensor semiconductor device. The semiconductor device includes a semiconductor substrate having a first type of dopant; a semiconductor layer having a second type of dopant different from the first type of dopant and disposed on the semiconductor substrate; and an image sensor formed in the semiconductor layer.
    Type: Application
    Filed: May 14, 2010
    Publication date: September 2, 2010
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. ("TSMC")
    Inventors: Chung-Wei Chang, Han-Chi Liu, Chun-Yao Ko, Shou-Gwo Wuu
  • Patent number: 7732844
    Abstract: The present disclosure provides an image sensor semiconductor device. The semiconductor device includes a semiconductor substrate having a first type of dopant; a semiconductor layer having a second type of dopant different from the first type of dopant and disposed on the semiconductor substrate; and an image sensor formed in the semiconductor layer.
    Type: Grant
    Filed: March 6, 2007
    Date of Patent: June 8, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Wei Chang, Han-Chi Liu, Chun-Yao Ko, Shou-Gwo Wuu
  • Publication number: 20090243025
    Abstract: An image sensor includes an imaging area that includes a plurality of pixels that are formed in a substrate layer of a first conductivity type. Each pixel includes a collection region that is formed in a portion of the substrate layer and doped with a dopant of a first conductivity type. A plurality of wells are disposed in portions of the substrate layer and doped with another dopant of the second conductivity type. Each well is positioned laterally adjacent to each collection region. A buried layer spans the imaging area and is disposed in a portion of the substrate layer that is beneath the photodetectors and the wells. The buried layer is doped with a dopant of a second conductivity type. Each collection region, each well, and the buried layer are formed such that a region of the substrate layer having substantially the same doping as the substrate layer resides between each collection region and the buried layer.
    Type: Application
    Filed: March 25, 2008
    Publication date: October 1, 2009
    Inventors: Eric G. Stevens, Hung Q. Doan, Shou-Gwo Wuu, Chung-Wei Chang
  • Publication number: 20090244427
    Abstract: A liquid crystal display panel includes a first substrate, and a second substrate opposite to and facing the first substrate. The first substrate, having a repairing region and a display region defined thereon, includes at least one repairing wire arranged in the repairing region, and a passivation layer disposed over the repairing wire. The second substrate includes a common electrode, and at least one repairing protection pad formed thereon. The repairing protection pad, disposed on the surface of the common electrode and in the repairing region, faces the first substrate, and corresponds to the repairing wire.
    Type: Application
    Filed: October 21, 2008
    Publication date: October 1, 2009
    Inventor: Chung-Wei Chang
  • Publication number: 20090011521
    Abstract: The invention, the manufacturing process and operation method for forming the streptavidin surface acoustic wave (SAW) immunosensor apparatus is disclosed. Firstly, the PZT film is formed on silicon substrate by using the micro-powder-sol-gel method. Then, the metal transducer electrodes are coated on the PZT film using semiconductor process technology to produce the SAW. Finally, the sensing area of the SAW element is modified by streptavidin to form the streptavidin SAW immunosensor. The invention could be used for examining the ligand decorated by biotin, also for examining antibody.
    Type: Application
    Filed: June 25, 2008
    Publication date: January 8, 2009
    Applicant: Chang Gung University
    Inventors: Hsin-Chun Lu, Chung-Yi Wang, Chia-Yen Li, Chung-Wei Chang, Meng-Kai Huang, Hao-Yu Ting, Hsin-Chieh Yang, Yi-Ju Hsiao
  • Publication number: 20080251821
    Abstract: A method to fabricate an image sensor includes providing a semiconductor substrate having a pixel area and a logic area, forming a light sensing element in the pixel area, and forming a first transistor in the pixel area and a second transistor in the logic area. The step of forming the first transistor in the pixel area and the second transistor in the logic area includes performing a first implant process in the pixel area and the logic area, performing a second implant process in the pixel area and the logic area, and performing a third implant process only in the logic area.
    Type: Application
    Filed: April 13, 2007
    Publication date: October 16, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Yao Ko, Chung-Wei Chang, Han-Chi Liu, Shou-Gwo Wuu
  • Patent number: 7388187
    Abstract: An image sensor device includes a semiconductor substrate having a first type of conductivity, a semiconductor layer having the first type of conductivity formed on the semiconductor substrate, and pixels formed in the semiconductor layer. The semiconductor layer includes a first deep well having the first type of conductivity and substantially underlying the plurality of pixels, and a second deep well having a second type of conductivity different from the first type of conductivity and substantially underlying the first deep well.
    Type: Grant
    Filed: March 6, 2007
    Date of Patent: June 17, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Han-Chi Liu, Chung-Wei Chang, Shou-Gwo Wuu, Tong-Chern Ong, Chun-Yao Ko
  • Publication number: 20080105944
    Abstract: The present disclosure provides an image sensor semiconductor device. The semiconductor device includes a semiconductor substrate having a first type of dopant; a semiconductor layer having a second type of dopant different from the first type of dopant and disposed on the semiconductor substrate; and an image sensor formed in the semiconductor layer.
    Type: Application
    Filed: March 6, 2007
    Publication date: May 8, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Wei Chang, Han-Chi Liu, Chun-Yao Ko, Shou-Gwo Wuu
  • Patent number: 6833578
    Abstract: A memory cell comprising a capacitor having a dielectric layer interposing first and second vertically disposed electrodes, an insulating lining located over the capacitor, and a transistor gate extension passing over the capacitor. A spacer isolates an end of one of the capacitor electrodes from the transistor gate extension. In one embodiment, the spacer includes a first non-planar profile configured to engage a second non-planar profile comprising ends of the one of the capacitor electrodes and the insulating lining.
    Type: Grant
    Filed: December 11, 2003
    Date of Patent: December 21, 2004
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Chi Tu, Chun-Yao Chen, Huey-Chi Chu, Chung-Wei Chang, Tien-Lu Lin, Kuo-Ching Huang, Wen-Cheng Chen, Tsung-Hsun Huang, Hsiao-Hui Tseng
  • Patent number: 6764967
    Abstract: A method for forming a silicon dioxide layer over a silicon substrate including providing a substrate having exposed silicon portions; and, forming a silicon dioxide layer over the exposed silicon portions according to an oxide formation process including contacting the exposed silicon portions with an oxidizing solution comprising water and ozone.
    Type: Grant
    Filed: October 5, 2002
    Date of Patent: July 20, 2004
    Assignee: Taiwan SEmiconductor Manufacturing Co., Ltd.
    Inventors: Vincent Pai, Kuo-Chi Tu, Chung-Wei Chang, Chia-Shiung Tsai, Chun-Yao Chen
  • Publication number: 20040067639
    Abstract: A method for forming a silicon dioxide layer over a silicon substrate including providing a substrate having exposed silicon portions; and, forming a silicon dioxide layer over the exposed silicon portions according to an oxide formation process including contacting the exposed silicon portions with an oxidizing solution comprising water and ozone.
    Type: Application
    Filed: October 5, 2002
    Publication date: April 8, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Vincent Pai, Kuo-Chi Tu, Chung-Wei Chang, Chia-Shiung Tsai, Chun-Yao Chen
  • Patent number: 6661050
    Abstract: Within both a memory cell structure and a method for fabricating the memory cell structure there is employed a storage capacitor formed within a trench adjoining an active region of a semiconductor substrate. Within the memory cell structure and the method for fabrication thereof, both the active region of the semiconductor substrate and the trench are contained within a doped well within the semiconductor substrate.
    Type: Grant
    Filed: March 20, 2002
    Date of Patent: December 9, 2003
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Kuo-Chyuan Tzeng, Chen-Jong Wang, Chung-Wei Chang
  • Patent number: 6661049
    Abstract: Within a method for fabricating a capacitor structure, and a capacitor structure fabricated employing the method, there is formed within an isolation region adjoining an active region of a semiconductor substrate a laterally asymmetric trench which leaves exposed an upper sidewall portion of the active region of the semiconductor substrate. There is then formed within the laterally asymmetric trench a capacitor node layer which contacts the exposed upper sidewall portion of the active region of the semiconductor substrate and extends above the active region of the semiconductor substrate. The capacitor may be a storage capacitor with increased capacitance fabricated within a memory cell structure of decreased dimensions.
    Type: Grant
    Filed: September 6, 2001
    Date of Patent: December 9, 2003
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Kuo-Chyuan Tzeng, Chen-Jong Wang, Chung-Wei Chang
  • Patent number: 6638813
    Abstract: A process for forming a composite insulator spacer on the sides of a buried stack capacitor structure, wherein the buried stack capacitor structure is located overlying a portion of an insulator filled, shallow trench isolation (STI) region, has been developed. A thin silicon nitride spacer is first formed on the sides of the completed buried stack capacitor structure, followed by deposition of a silicon oxide layer. An anisotropic dry etch procedure is next employed removing a top portion of the silicon oxide layer, and resulting in a partially defined silicon oxide spacer. A critical wet etch procedure is next used to remove the bottom portion of the silicon oxide layer, defining the final silicon oxide spacer of the composite insulator spacer, now comprised of a silicon oxide spacer on an underlying silicon nitride spacer.
    Type: Grant
    Filed: January 29, 2002
    Date of Patent: October 28, 2003
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Kuo-Chyuan Tzeng, Chen-Jong Wang, Chung-Wei Chang, Wen-Chuan Chiang, Wen-Cheng Chen, Kuo-Ching Huang
  • Publication number: 20030178661
    Abstract: Within both a memory cell structure and a method for fabricating the memory cell structure there is employed a storage capacitor formed within a trench adjoining an active region of a semiconductor substrate. Within the memory cell structure and the method for fabrication thereof, both the active region of the semiconductor substrate and the trench are contained within a doped well within the semiconductor substrate.
    Type: Application
    Filed: March 20, 2002
    Publication date: September 25, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Chyuan Tzeng, Chen-Jong Wang, Chung-Wei Chang
  • Patent number: 6613690
    Abstract: A process for forming a buried stack capacitor structure in a recessed region of a shallow trench isolation (STI) region, has been developed. The process features a unique sequence of procedures eliminating possible polysilicon stringers or residuals which if left remaining would result in leakage or shorts between conductive elements. The unique sequence of procedures include: deposition of a silicon oxide layer on the polysilicon layer from which the storage node structure will be defined from; photoresist plugs used to protect the portions of the silicon oxide and the underlying polysilicon layer located in the recessed region, during definition of the polysilicon storage node structure; and definition of the polysilicon storage node structure via a wet etch procedure, using the silicon oxide layer for protection of the underlying polysilicon storage node structure.
    Type: Grant
    Filed: July 17, 2002
    Date of Patent: September 2, 2003
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Chung-Wei Chang, Kuo-Chyuan Tzeng, Chen-Jong Wang, Min-Hsiang Chiang, Chi-Hsing Lo
  • Patent number: 6569732
    Abstract: A process sequence for fabricating a buried stack capacitor structure, to be used as a component in a memory cell such as a one transistor SRAM cell, has been developed. The process features formation of a self-aligned opening used to accommodate a subsequent buried stack capacitor structure, with the self-aligned opening defined via selective dry and wet etch procedures, employed to avoid damage to regions of a semiconductor substrate which become exposed at the conclusion of the definition procedure. In addition the process sequence allows a smooth, top surface topography to be present during definition of a polysilicon storage node structure in the self-aligned opening, allowing unwanted portions of polysilicon to be easily removed, reducing the risk of polysilicon stringers.
    Type: Grant
    Filed: October 2, 2002
    Date of Patent: May 27, 2003
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Min-Hsiung Chiang, Chung-Wei Chang, Kuo-Chyuan Tzeng
  • Publication number: 20030042519
    Abstract: Within a method for fabricating a capacitor structure, and a capacitor structure fabricated employing the method, there is formed within an isolation region adjoining an active region of a semiconductor substrate a laterally asymmetric trench which leaves exposed an upper sidewall portion of the active region of the semiconductor substrate. There is then formed within the laterally asymmetric trench a capacitor node layer which contacts the exposed upper sidewall portion of the active region of the semiconductor substrate and extends above the active region of the semiconductor substrate. The capacitor may be a storage capacitor with increased capacitance fabricated within a memory cell structure of decreased dimensions.
    Type: Application
    Filed: September 6, 2001
    Publication date: March 6, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Chyuan Tzeng, Chen-Jong Wang, Chung-Wei Chang
  • Patent number: 6436762
    Abstract: A method is described for making capacitor-under-bit line (CUB) DRAM cells with improved overlay margins between bit lines and capacitor top electrodes. After forming FETs for the memory cells, an interpolysilicon oxide (IPO) layer is deposited, and first and second plug contacts are formed in the IPO to the FET source/drain areas for capacitors and bit line contacts, respectively. A capacitor node oxide is deposited, and first openings are etched in which crown capacitor bottom electrodes are formed. After etching back the node oxide a thin interelectrode dielectric layer is formed and a conformal conducting layer is deposited to form capacitor top electrodes. A photoresist mask is used to etch openings in the conducting layer over the second plug contacts, and an isotropic etch is used to recess the openings under the mask to increase the spacing between the capacitor top electrodes and the bit line contacts to improve the overlay margin.
    Type: Grant
    Filed: May 14, 2001
    Date of Patent: August 20, 2002
    Assignee: Taiwan Semiconductor Manufactoring Company
    Inventors: Kuo-Chyuan Tzeng, Tse-Liang Ying, Min-Hsiung Chiang, Hsiao-Hui Tseng, Chung-Wei Chang