Patents by Inventor Chung-Yi Yu

Chung-Yi Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140209918
    Abstract: The present disclosure relates to a gallium-nitride (GaN) transistor device having a composite gallium nitride layer with alternating layers of GaN and aluminum nitride (AlN). In some embodiments, the GaN transistor device has a first GaN layer disposed above a semiconductor substrate. An AlN inter-layer is disposed on the first GaN layer. A second GaN layer is disposed on the AlN inter-layer. The AlN inter-layer allows for the thickness of the GaN layer to be increased over continuous GaN layers, mitigating bowing and cracking of the GaN substrate, while improving the breakdown voltage of the disclosed GaN device.
    Type: Application
    Filed: January 25, 2013
    Publication date: July 31, 2014
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chi-Ming Chen, Po-Chun Liu, Chung-Yi Yu
  • Patent number: 8790954
    Abstract: An integrated circuit device is provided. The integrated circuit device can include a substrate; a first radiation-sensing element disposed over a first portion of the substrate; and a second radiation-sensing element disposed over a second portion of the substrate. The first portion comprises a first radiation absorption characteristic, and the second portion comprises a second radiation absorption characteristic different from the first radiation absorption characteristic.
    Type: Grant
    Filed: August 30, 2013
    Date of Patent: July 29, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzu-Hsuan Hsu, Yuan-Chih Hsieh, Dun-Nian Yaung, Chung-Yi Yu
  • Patent number: 8791504
    Abstract: A circuit structure includes a substrate, a nucleation layer of undoped aluminum nitride, a graded buffer layer comprising aluminum, gallium, nitrogen, one of silicon and oxygen, and a p-type conductivity dopant, a ungraded buffer layer comprising gallium, nitrogen, one of silicon and oxygen, and a p-type conductivity dopant without aluminum, and a bulk layer of undoped gallium nitride over the ungraded buffer layer. The various dopants in the graded buffer layer and the ungraded buffer layer increases resistivity and results in layers having an intrinsically balanced conductivity.
    Type: Grant
    Filed: October 20, 2011
    Date of Patent: July 29, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Ming Chen, Po-Chun Liu, Hung-Ta Lin, Chin-Cheng Chang, Chung-Yi Yu, Chia-Shiung Tsai, Ho-Yung David Hwang
  • Publication number: 20140203289
    Abstract: The present disclosure relates to a donor layer of bi-layer AlGaN and associated method of fabrication within a high electron mobility transistor (HEMT) configured to provide low-resistance ohmic source and drain contacts to reduce power consumption, while maintaining a high-mobility of a two-dimensional electron gas (2DEG) within a channel of the HEMT. The donor layer of bi-layer AlGaN comprises a mobility-enhancing layer of AlzGa(1-z)N, a resistance-reducing layer of AlxGa(1-x)N disposed over the mobility-enhancing layer, wherein the ohmic source and drain contacts connect to the HEMT. A channel layer of GaN is disposed beneath the mobility-enhancing layer, wherein a 2DEG resides, forming the channel of the HEMT.
    Type: Application
    Filed: January 21, 2013
    Publication date: July 24, 2014
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Po-Chun Liu, Chung-Yi Yu, Chi-Ming Chen, Chen-Hao Chiang
  • Publication number: 20140197418
    Abstract: A semiconductor structure includes a substrate, a first III-V compound layer over the substrate, one or more sets of III-V compound layers over the first III-V compound layer, a second III-V compound layer over the one or more sets of III-V compound layers, and an active layer over the second III-V compound layer. The first III-V compound layer has a first type doping. Each of the one or more sets of III-V compound layers includes a lower III-V compound layer and an upper III-V compound layer over the lower III-V compound layer. The upper III-V compound layer having the first type doping, and the lower III-V compound layer is at least one of undoped, unintentionally doped having a second type doping, or doped having the second type doping. The second III-V compound layer is either undoped or unintentionally doped having the second type doping.
    Type: Application
    Filed: January 16, 2013
    Publication date: July 17, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Ming CHEN, Po-Chun LIU, Chung-Yi YU, Chia-Shiung TSAI
  • Patent number: 8772831
    Abstract: A circuit structure includes a substrate and a patterned dielectric layer over the substrate. The patterned dielectric layer includes a plurality of vias; and a number of group-III group-V (III-V) compound semiconductor layer. The III-V compound semiconductor layers include a first layer in the vias, a second layer over the first layer and the dielectric layer, and a bulk layer over the second layer.
    Type: Grant
    Filed: November 7, 2011
    Date of Patent: July 8, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Ming Chen, Po-Chun Liu, Hung-Ta Lin, Chin-Cheng Chang, Chung-Yi Yu, Chia-Shiung Tsai, Ho-Yung David Hwang
  • Patent number: 8772845
    Abstract: The present disclosure provides a semiconductor memory device. The device includes a pinning layer having an anti-ferromagnetic material and disposed over a first electrode; a pinned layer disposed over the pinning layer; a composite layer disposed over the pinned layer, the composite layer having a magnetic material randomly distributed in a non-magnetic material; a barrier layer disposed on the composite layer; a free layer disposed over the barrier layer; and a second electrode disposed over the free layer.
    Type: Grant
    Filed: September 22, 2011
    Date of Patent: July 8, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Ming Chen, Cheng-Yuan Tsai, Chung-Yi Yu, Kai-Wen Cheng, Kuo-Ming Wu
  • Publication number: 20140183598
    Abstract: A semiconductor structure includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A dielectric passivation layer is disposed on the second III-V compound layer. A source feature and a drain feature are disposed on the second III-V compound layer, and extend through the dielectric passivation layer. A gate electrode is disposed over the second III-V compound layer between the source feature and the drain feature. The gate electrode has an exterior surface. An oxygen containing region is embedded at least in the second III-V compound layer under the gate electrode. A gate dielectric layer has a first portion and a second portion. The first portion is under the gate electrode and on the oxygen containing region. The second portion is on a portion of the exterior surface of the gate electrode.
    Type: Application
    Filed: December 28, 2012
    Publication date: July 3, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Han-Chin Chiu, Chi-Ming Chen, Chung-Yi Yu, Chia-Shiung Tsai
  • Patent number: 8723185
    Abstract: Provided is a method of fabricating a semiconductor device. The method includes providing a silicon substrate having opposite first and second sides. At least one of the first and second sides includes a silicon (111) surface. The method includes forming a high coefficient-of-thermal-expansion (CTE) layer on the first side of the silicon substrate. The high CTE layer has a CTE greater than the CTE of silicon. The method includes forming a buffer layer over the second side of the silicon substrate. The buffer layer has a CTE greater than the CTE of silicon. The method includes forming a III-V family layer over the buffer layer. The III-V family layer has a CTE greater than the CTE of the buffer layer.
    Type: Grant
    Filed: November 30, 2010
    Date of Patent: May 13, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Ming Chen, Chung-Yi Yu, Chia-Shiung Tsai, Ho-Yung David Hwang
  • Patent number: 8710560
    Abstract: A semiconductor device includes a semiconductor substrate having a front surface and a back surface, elements formed on the substrate, interconnect metal layers formed over the front surface of the substrate, including a topmost interconnect metal layer, an inter-metal dielectric for insulating each of the plurality of interconnect metal layers, and a bonding pad disposed within the inter-metal dielectric, the bonding pad in contact with one of the interconnect metal layers other than the topmost interconnect metal layer.
    Type: Grant
    Filed: August 8, 2007
    Date of Patent: April 29, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yuan-Chih Hsieh, Shih-Chang Liu, Shih-Chi Fu, Tzu-Hsuan Hsu, Chung-Yi Yu, Gwo-Yuh Shiau, Chia-Shiung Tsai
  • Publication number: 20140042446
    Abstract: A high electron mobility transistor (HEMT) includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A source feature and a drain feature are in contact with the second III-V compound layer. A n-type doped region underlies each source feature and drain feature in the second III-V compound layer. A p-type doped region underlies each n-type doped region in the first III-V compound layer. A gate electrode is disposed over a portion of the second III-V compound layer between the source feature and the drain feature.
    Type: Application
    Filed: August 9, 2012
    Publication date: February 13, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Hao Chiang, Han-Chin Chiu, Po-Chun Liu, Chi-Ming Chen, Chung-Yi Yu
  • Publication number: 20140014967
    Abstract: The present disclosure is directed to an integrated circuit and its formation. In some embodiments, the integrated circuit includes a diffusion barrier layer. The diffusion barrier layer can be arranged to prevent diffusion of the Si and O2 from a Si substrate into a Group III nitride layer. The diffusion barrier layer can comprise Al2O3. In some embodiments, the integrated circuit further comprises a lattice-matching structure disposed between the silicon substrate and a Group III nitride layer.
    Type: Application
    Filed: July 16, 2012
    Publication date: January 16, 2014
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chi-Ming Chen, Han-Chin Chiu, Chung-Yi Yu, Chia-Shiung Tsai
  • Patent number: 8629531
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a dielectric material layer on a silicon substrate, the dielectric material layer being patterned to define a plurality of regions separated by the dielectric material layer; a first buffer layer disposed on the silicon substrate; a heterogeneous buffer layer disposed on the first buffer layer; and a gallium nitride layer grown on the heterogeneous buffer layer only within the plurality of regions.
    Type: Grant
    Filed: February 18, 2011
    Date of Patent: January 14, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming Chyi Liu, Hsieh Ching Pei, Jiun-Lei Yu, Chi-Ming Chen, Shih-Chang Liu, Chung-Yi Yu, Chia-Shiung Tsai
  • Patent number: 8629037
    Abstract: Provided is a method of fabricating a semiconductor device. The method includes forming a first dielectric layer over a first surface and a second surface of a silicon substrate. the first and second surfaces being opposite surfaces. A first portion of the first dielectric layer covers the first surface of the substrate, and a second portion of the first dielectric layer covers the second surface of the substrate. The method includes forming openings that extend into the substrate from the first surface. The method includes filling the openings with a second dielectric layer. The method includes removing the first portion of the first dielectric layer without removing the second portion of the first dielectric layer.
    Type: Grant
    Filed: September 24, 2011
    Date of Patent: January 14, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Feng Nieh, Chung-Yi Yu, Hung-Ta Lin
  • Patent number: 8629013
    Abstract: Provided is a method of fabricating a semiconductor device. The method includes forming a first III-V family layer over a substrate. The first III-V family layer includes a surface having a first surface morphology. The method includes performing an ion implantation process to the first III-V family layer through the surface. The ion implantation process changes the first surface morphology into a second surface morphology. After the ion implantation process is performed, the method includes forming a second III-V family layer over the first III-V family layer. The second III-V family layer has a material composition different from that of the first III-V family layer.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: January 14, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Feng Nieh, Chung-Yi Yu, Hung-Ta Lin
  • Patent number: 8624326
    Abstract: A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a first dielectric layer disposed over the substrate. The semiconductor device further includes a buffer layer disposed over the substrate and between first and second walls of a trench of the dielectric layer. The semiconductor device further includes an insulator layer disposed over the buffer layer and between the first and second wall of the trench of the dielectric layer. The semiconductor device also includes a second dielectric layer disposed over the first dielectric layer and the insulator layer. Further, the semiconductor device includes a fin structure disposed over the insulator layer and between first and second walls of a trench of the second dielectric layer.
    Type: Grant
    Filed: October 20, 2011
    Date of Patent: January 7, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Ming Chen, Chung-Yi Yu, Ho-Yung David Hwang
  • Publication number: 20140001439
    Abstract: The present disclosure is directed to an integrated circuit and a method for the fabrication of the integrated circuit. The integrated circuit includes a lattice matching structure. The lattice matching structure can include a first buffer region, a second buffer region and a superlattice structure formed from AlxGa1?xN/AlyGa1?yN layer pairs.
    Type: Application
    Filed: June 27, 2012
    Publication date: January 2, 2014
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chi-Ming Chen, Po-Chun Liu, Chung-Yi Yu
  • Publication number: 20130344640
    Abstract: An integrated circuit device is provided. The integrated circuit device can include a substrate; a first radiation-sensing element disposed over a first portion of the substrate; and a second radiation-sensing element disposed over a second portion of the substrate. The first portion comprises a first radiation absorption characteristic, and the second portion comprises a second radiation absorption characteristic different from the first radiation absorption characteristic.
    Type: Application
    Filed: August 30, 2013
    Publication date: December 26, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzu-Hsuan Hsu, Yuan-Chih Hsieh, Dun-Nian Yaung, Chung-Yi Yu
  • Patent number: 8525286
    Abstract: An integrated circuit device is provided. The integrated circuit device can include a substrate; a first radiation-sensing element disposed over a first portion of the substrate; and a second radiation-sensing element disposed over a second portion of the substrate. The first portion comprises a first radiation absorption characteristic, and the second portion comprises a second radiation absorption characteristic different from the first radiation absorption characteristic.
    Type: Grant
    Filed: August 6, 2009
    Date of Patent: September 3, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzu-Hsuan Hsu, Chris Hsieh, Dun-Nian Yaung, Chung-Yi Yu
  • Patent number: 8476146
    Abstract: Provided is a method of fabricating a semiconductor device. The method includes forming a first layer on a first side of a first silicon wafer. The first silicon wafer has a second side opposite the first side. The first layer has a coefficient-of-thermal-expansion (CTE) that is lower than that of silicon. The method includes bonding the first wafer to a second silicon wafer in a manner so that the first layer is disposed in between the first and second silicon wafers. The method includes removing a portion of the first silicon wafer from the second side. The method includes forming a second layer over the second side of the first silicon wafer. The second layer has a CTE higher than that of silicon.
    Type: Grant
    Filed: December 3, 2010
    Date of Patent: July 2, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Ming Chen, Chung-Yi Yu, Chia-Shiung Tsai, Ho-Yung David Hwang