Patents by Inventor Chwen Yu

Chwen Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210231553
    Abstract: A method for processing a substrate by using fluid flowing through a particle detector is provided. The particle detector is utilized to detect nano-particles contained in fluid. The particle detector includes a substrate and a pair of sensing electrodes disposed on the substrate. The substrate includes nano-pores, wherein the pore size of the nano-pores is greater than the particle size of the nano-particles, allowing the nano-particles contained in the fluid passing through the nano-pores. The pair of sensing electrodes are positioned adjacent to at least one of the nano-pores.
    Type: Application
    Filed: April 12, 2021
    Publication date: July 29, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: En-Tian Lin, Chwen Yu, Mei Lee, Shu-Yu Hsu
  • Patent number: 11075336
    Abstract: In a method of manufacturing a semiconductor device, a magnetic random access memory (MRAM) cell structure is formed. The MRAM cell structure includes a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode. A first insulating cover layer is formed over the MRAM cell structure. A second insulating cover layer is formed over the first insulating cover layer. An interlayer dielectric (ILD) layer is formed. A contact opening in the ILD layer is formed, thereby exposing the second insulating cover layer. A part of the second insulating cover layer and a part of the first insulating cover layer are removed, thereby exposing the top electrode. A conductive layer is formed in the opening contacting the top electrode. The second insulating cover layer has an oxygen getter property.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: July 27, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shy-Jay Lin, Chwen Yu, William J. Gallagher
  • Publication number: 20210123963
    Abstract: A monitoring system is provided. The monitoring system includes a non-conductive tube, a conductive tape, a metallic plate, and an electrostatic field meter. The non-conductive tube includes an outer surface. The conductive tape is wrapped around the outer surface of the non-conductive tube. The metallic plate contacts and extends away from the conductive tape. The electrostatic field meter is disposed a predetermined distance away from the metallic plate, and a static charge of the metallic plate is detectable by the electrostatic field meter. A method of monitoring static charge is also provided.
    Type: Application
    Filed: May 26, 2020
    Publication date: April 29, 2021
    Inventors: SHIN-TA WU, CHWEN YU
  • Patent number: 10976233
    Abstract: A particle detector for detecting nano-particles contained in fluid is provided. The particle detector includes a substrate and at least one pair of sensing electrodes disposed on the substrate. The substrate includes nano-pores, wherein the pore size of the nano-pores is greater than the particle size of the nano-particles, allowing the nano-particles contained in the fluid passing through the nano-pores. The at least one pair of sensing electrodes are positioned adjacent to at least one of the nano-pores.
    Type: Grant
    Filed: August 15, 2018
    Date of Patent: April 13, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: En-Tian Lin, Chwen Yu, Mei Lee, Shu-Yu Hsu
  • Publication number: 20210018457
    Abstract: A detector includes a substrate including a first surface and a second surface opposite to the first surface, a funnel-shaped recess extending from the second surface of the substrate to the first surface of the substrate, a conductive layer disposed below the first surface of the substrate, an insulating layer disposed between the substrate and the conductive layer, and a first through via extending through the conductive layer and the insulating layer, and coupled to the funnel-shaped recess.
    Type: Application
    Filed: February 7, 2020
    Publication date: January 21, 2021
    Inventor: CHWEN YU
  • Publication number: 20200350488
    Abstract: A device is provided that includes a semiconductor substrate on which a free magnetic element is positioned, which has first and second magnetic domains separated by a domain wall. A first magnet is positioned on the substrate near a first end of the free magnetic element, and has a first polarity and a first value of coercivity. A second magnet is positioned on the substrate near a second end of the free magnetic element, and has a second polarity, antiparallel relative to the first polarity, and a second value of coercivity different from the first value of coercivity.
    Type: Application
    Filed: July 21, 2020
    Publication date: November 5, 2020
    Inventors: Mingyuan SONG, Chwen YU, Shy-Jay LIN
  • Publication number: 20200350487
    Abstract: A device is provided that includes a semiconductor substrate on which a free magnetic element is positioned, which has first and second magnetic domains separated by a domain wall. A first magnet is positioned on the substrate near a first end of the free magnetic element, and has a first polarity and a first value of coercivity. A second magnet is positioned on the substrate near a second end of the free magnetic element, and has a second polarity, antiparallel relative to the first polarity, and a second value of coercivity different from the first value of coercivity.
    Type: Application
    Filed: July 21, 2020
    Publication date: November 5, 2020
    Inventors: Mingyuan SONG, Chwen YU, Shy-Jay LIN
  • Publication number: 20200279994
    Abstract: A semiconductor structure is provided. The semiconductor structure includes: a substrate; a magnetic layer over the substrate; a magnetic tunnel junction (MTJ) cell over the magnetic layer; and a non-magnetic conductive layer between the magnetic layer and the MTJ cell. An associated method for fabricating the semiconductor structure is also disclosed.
    Type: Application
    Filed: May 19, 2020
    Publication date: September 3, 2020
    Inventors: CHWEN YU, SHY-JAY LIN
  • Patent number: 10756255
    Abstract: A device is provided that includes a semiconductor substrate on which a free magnetic element is positioned, which has first and second magnetic domains separated by a domain wall. A first magnet is positioned on the substrate near a first end of the free magnetic element, and has a first polarity and a first value of coercivity. A second magnet is positioned on the substrate near a second end of the free magnetic element, and has a second polarity, antiparallel relative to the first polarity, and a second value of coercivity different from the first value of coercivity.
    Type: Grant
    Filed: May 17, 2018
    Date of Patent: August 25, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Mingyuan Song, Chwen Yu, Shy-Jay Lin
  • Patent number: 10680166
    Abstract: A semiconductor structure is provided. The semiconductor structure includes: a substrate; a magnetic layer over the substrate; a magnetic tunnel junction (MTJ) cell over the magnetic layer; and a non-magnetic conductive layer between the magnetic layer and the MTJ cell. An associated method for fabricating the semiconductor structure is also disclosed.
    Type: Grant
    Filed: April 17, 2019
    Date of Patent: June 9, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chwen Yu, Shy-Jay Lin
  • Publication number: 20200152865
    Abstract: In a method of manufacturing a semiconductor device, a magnetic random access memory (MRAM) cell structure is formed. The MRAM cell structure includes a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode. A first insulating cover layer is formed over the MRAM cell structure. A second insulating cover layer is formed over the first insulating cover layer. An interlayer dielectric (ILD) layer is formed. A contact opening in the ILD layer is formed, thereby exposing the second insulating cover layer. A part of the second insulating cover layer and a part of the first insulating cover layer are removed, thereby exposing the top electrode. A conductive layer is formed in the opening contacting the top electrode. The second insulating cover layer has an oxygen getter property.
    Type: Application
    Filed: January 15, 2020
    Publication date: May 14, 2020
    Inventors: Shy-Jay LIN, Chwen YU, William J. GALLAGHER
  • Publication number: 20200056978
    Abstract: A particle detector for detecting nano-particles contained in fluid is provided. The particle detector includes a substrate and at least one pair of sensing electrodes disposed on the substrate. The substrate includes nano-pores, wherein the pore size of the nano-pores is greater than the particle size of the nano-particles, allowing the nano-particles contained in the fluid passing through the nano-pores. The at least one pair of sensing electrodes are positioned adjacent to at least one of the nano-pores.
    Type: Application
    Filed: August 15, 2018
    Publication date: February 20, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: En-Tian Lin, Chwen Yu, Mei Lee, Shu-Yu Hsu
  • Patent number: 10541361
    Abstract: In a method of manufacturing a semiconductor device, a magnetic random access memory (MRAM) cell structure is formed. The MRAM cell structure includes a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode. A first insulating cover layer is formed over the MRAM cell structure. A second insulating cover layer is formed over the first insulating cover layer. An interlayer dielectric (ILD) layer is formed. A contact opening in the ILD layer is formed, thereby exposing the second insulating cover layer. A part of the second insulating cover layer and a part of the first insulating cover layer are removed, thereby exposing the top electrode. A conductive layer is formed in the opening contacting the top electrode. The second insulating cover layer has an oxygen getter property.
    Type: Grant
    Filed: March 29, 2018
    Date of Patent: January 21, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chwen Yu, Shy-Jay Lin, William J. Gallagher
  • Publication number: 20190355895
    Abstract: A device is provided that includes a semiconductor substrate on which a free magnetic element is positioned, which has first and second magnetic domains separated by a domain wall. A first magnet is positioned on the substrate near a first end of the free magnetic element, and has a first polarity and a first value of coercivity. A second magnet is positioned on the substrate near a second end of the free magnetic element, and has a second polarity, antiparallel relative to the first polarity, and a second value of coercivity different from the first value of coercivity.
    Type: Application
    Filed: May 17, 2018
    Publication date: November 21, 2019
    Inventors: Mingyuan SONG, Chwen YU, Shy-Jay LIN
  • Patent number: 10438639
    Abstract: Various memory devices and associated methods of operation are disclosed herein. An exemplary method includes flowing a current through an electrode of a memory device. The current exerts a spin-torque for orienting a magnetic field of a magnetic layer of the memory device and produces a magnetic field in the electrode that assists in orienting the magnetic field of the magnetic layer. The current can produce the magnetic field in the electrode when flowing through a region of the electrode having a winding orientation that is substantially perpendicular to a longitudinal axis of the memory device. In some implementations, flowing the current through the electrode includes storing data in the memory device.
    Type: Grant
    Filed: April 18, 2019
    Date of Patent: October 8, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Chwen Yu
  • Publication number: 20190245140
    Abstract: A semiconductor structure is provided. The semiconductor structure includes: a substrate; a magnetic layer over the substrate; a magnetic tunnel junction (MTJ) cell over the magnetic layer; and a non-magnetic conductive layer between the magnetic layer and the MTJ cell. An associated method for fabricating the semiconductor structure is also disclosed.
    Type: Application
    Filed: April 17, 2019
    Publication date: August 8, 2019
    Inventors: CHWEN YU, SHY-JAY LIN
  • Publication number: 20190244648
    Abstract: Various memory devices and associated methods of operation are disclosed herein. An exemplary method includes flowing a current through an electrode of a memory device. The current exerts a spin-torque for orienting a magnetic field of a magnetic layer of the memory device and produces a magnetic field in the electrode that assists in orienting the magnetic field of the magnetic layer. The current can produce the magnetic field in the electrode when flowing through a region of the electrode having a winding orientation that is substantially perpendicular to a longitudinal axis of the memory device. In some implementations, flowing the current through the electrode includes storing data in the memory device.
    Type: Application
    Filed: April 18, 2019
    Publication date: August 8, 2019
    Inventor: Chwen Yu
  • Publication number: 20190165260
    Abstract: In a method of manufacturing a semiconductor device, a magnetic random access memory (MRAM) cell structure is formed. The MRAM cell structure includes a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode. A first insulating cover layer is formed over the MRAM cell structure. A second insulating cover layer is formed over the first insulating cover layer. An interlayer dielectric (ILD) layer is formed. A contact opening in the ILD layer is formed, thereby exposing the second insulating cover layer. A part of the second insulating cover layer and a part of the first insulating cover layer are removed, thereby exposing the top electrode. A conductive layer is formed in the opening contacting the top electrode. The second insulating cover layer has an oxygen getter property.
    Type: Application
    Filed: March 29, 2018
    Publication date: May 30, 2019
    Inventors: Chwen Yu, Shy-Jay Lin, William J. Gallagher
  • Patent number: 10283179
    Abstract: Various memory devices and associated methods of operation are disclosed herein. An exemplary method includes flowing a current through an electrode of a memory device. The current exerts a spin-torque for orienting a magnetic field of a magnetic layer of the memory device and produces a magnetic field in the electrode that assists in orienting the magnetic field of the magnetic layer. The current can produce the magnetic field in the electrode when flowing through a region of the electrode having a winding orientation that is substantially perpendicular to a longitudinal axis of the memory device. In some implementations, flowing the current through the electrode includes storing data in the memory device.
    Type: Grant
    Filed: January 25, 2018
    Date of Patent: May 7, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventor: Chwen Yu
  • Publication number: 20190131518
    Abstract: A semiconductor structure is provided. The semiconductor structure includes: a substrate; a magnetic layer over the substrate; a magnetic tunnel junction (MTJ) cell over the magnetic layer; and a non-magnetic conductive layer between the magnetic layer and the MTJ cell. An associated method for fabricating the semiconductor structure is also disclosed.
    Type: Application
    Filed: October 30, 2017
    Publication date: May 2, 2019
    Inventors: CHWEN YU, SHY-JAY LIN