Abstract: A lithographic apparatus comprises an illumination system configured to condition a radiation beam and a support constructed to support a patterning device. The lithographic apparatus further comprises a substrate table constructed to hold a substrate; and a projection system configured to project the patterned beam onto a target portion of the substrate. An active damping system is provided to dampen a vibration of at least part of the projection system. The active damping system comprises a combination of a sensor to measure a position quantity of the projection system and an actuator to exert a force on the projection system in dependency of a signal provided by the sensor. The active damping system is corrected to a damping mass, the damping mass being connected to the projection system.

Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam, a support constructed to support a patterning device capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, and a projection system configured to project the patterned radiation beam onto a target portion of the substrate. At least one vibration isolation support device can be provided for supporting an object of the apparatus. The object can be rotatably supported at the vibration isolation support device by way of a rotational support having a center of rotation. The rotational support can have its center of rotation located substantially at the center of gravity of the vibration isolation support device.

Abstract: A cable connection between a first object and a second object includes a cable bundle of one or more cables having a certain length, one end of the bundle fixed to the first object and another end of the bundle fixed to the second object, a cable bundle holder configured to hold the bundle at a location along the length of the bundle, and a control system configured to control a position of the cable bundle holder with respect to the second object. A control system for a cable connection, and a method of reducing the transfer of vibrations from a first object to a second object via a cable connection are also presented.