Patents by Inventor Cory Watkins

Cory Watkins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Confocal 3D inspection system and process
    Publication number: 20030025918
    Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers, other semiconductor substrates and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.
    Type: Application
    Filed: July 16, 2002
    Publication date: February 6, 2003
    Applicant: August Technology Corp.
    Inventors: Cory Watkins, David Vaughnn, Alan Blair
  • Confocal 3D inspection system and process
    Publication number: 20030027367
    Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers, other semiconductor substrates and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.
    Type: Application
    Filed: July 16, 2002
    Publication date: February 6, 2003
    Applicant: August Technology Corp.
    Inventors: Cory Watkins, David Vaughnn, Alan Blair
  • Confocal 3D inspection system and process
    Publication number: 20020191178
    Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for inspecting of bumps and other three dimensional (3D) features on wafers and other semiconductor substrates. The sensor eliminates out of focus light using a confocal principal to improve depth response. This process and system creates multiple parallel confocal optical paths along a line. The out of focus light is eliminated by placing an aperture at a plane which is a conjugate focal plane to the surface of the sample. The result is that the sensor produces a signal only when the sample surface is in a narrow focal range.
    Type: Application
    Filed: September 12, 2001
    Publication date: December 19, 2002
    Inventors: Cory Watkins, Alan Blair
  • Confocal 3D inspection system and process
    Publication number: 20020148984
    Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for inspecting of bumps and other three dimensional (3D) features on wafers and other semiconductor substrates. The sensor eliminates out of focus light using a confocal principal to improve depth response.
    Type: Application
    Filed: February 11, 2002
    Publication date: October 17, 2002
    Inventors: Cory Watkins, David Vaughnn
  • Confocal 3D inspection system and process
    Publication number: 20020145734
    Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for inspecting of bumps and other three dimensional (3D) features on wafers and other semiconductor substrates. The sensor eliminates out of focus light using a confocal principal to improve depth response.
    Type: Application
    Filed: February 11, 2002
    Publication date: October 10, 2002
    Inventors: Cory Watkins, David Vaughnn, Alan Blair