Abstract: A semiconductor memory device and a method of manufacturing the semiconductor memory device are provided. The semiconductor memory device includes a first insulating layer including a cell region and an extension region, a channel structure penetrating the first insulating layer in the cell region, a memory layer extending along a side wall of the channel structure, conductive layers disposed to be spaced apart in the vertical direction along a side wall of the memory layer over the first insulating layer, an active pattern coupled to a corresponding conductive layer among the conductive layers, and a gate electrode disposed over the active pattern.

Abstract: A memory device and a manufacturing method are provided. The memory device includes a first gate conductive pattern disposed within a cell region and a word line contact region and extending in a first direction; and a second gate conductive pattern sequentially disposed with the first gate conductive pattern and extending in the first direction. Each of the first gate conductive pattern and the second gate conductive pattern includes a first extension extending in parallel with a second extension within the word line contact region; a first extending member extending in a third direction from an end of the first extension and a second extending member extending in the third direction from an end of the second extension, wherein the third direction is orthogonal to the first direction; and a connection connecting the first extending member to the second extending member.

Abstract: A semiconductor memory device includes: a semiconductor substrate including a first region and a second region; a memory cell array over the first region of the semiconductor substrate; a dummy stack structure over the second region of the semiconductor substrate; a chip guard structure penetrating the dummy stack structure; and a void-containing structure penetrating the dummy stack structure.

Abstract: Provided herein is a memory device and a method of manufacturing the memory device. The method of manufacturing a memory device includes forming a stacked body including first and second material layers on a lower structure, forming first openings passing through the stacked body, filling the first openings with preliminary contact plugs, respectively, forming, on the stacked body, a stepped structure including steps respectively corresponding to the preliminary contact plugs, forming second openings passing through respective steps of the stepped structure and open at least portions of the first openings, respectively, at different depths, exposing side surfaces of the second material layers by removing respective portions of the preliminary contact plugs adjacent to respective first sides of the first openings through the second openings, and forming the stacked body having a reverse step structure by removing exposed portions of the second material layers.

Abstract: A semiconductor device includes a first conductive pattern having a first line portion extending in a first direction and a first bending portion that extends from the first line portion. A closed area, surrounded by the first line portion and the first bending portion, is defined at one side of the first line portion. The semiconductor device further includes a second conductive pattern disposed in the closed area, the second conductive pattern being spaced apart from the first conductive pattern.

Abstract: Provided herein is a semiconductor memory device. The semiconductor memory device includes a stacked body, and first pass transistors and second pass transistors configured to couple global word lines to local lines, wherein any one of the plurality of conductive lines is a block select line, and gates of the first pass transistors and the second pass transistors are coupled to the block select line.

Abstract: A semiconductor device includes: a stacked structure comprising a plurality of dielectric layers and a plurality of conductive layers, wherein the dielectric layers are alternately stacked with the conductive layers; a groove formed for each conductive layer by recessing the conductive layer to the inside of the stacked structure; and an isolation structure formed through the stacked structure so as to isolate the stacked structure into a first block and a second block. The isolation structure comprises a first isolation structure and a second isolation structure adjacent to the first isolation structure with a gap provided between the first and second isolation structures, and one end of the first isolation structure and the other end of the second isolation structure, which face each other, have a vortex shape when viewed from above.

Abstract: Provided herein is a memory device and a method of manufacturing the memory device. The memory device includes a first conductive layer extending in a first direction, a second conductive layer extending from the first conductive layer in a second direction intersecting the first direction, a plurality of first channel structures penetrating the first conductive layer and disposed to be spaced apart from each other in the first direction, and a plurality of second channel structures penetrating the second conductive layer, wherein the first conductive layer may form an interface with the second conductive layer, and the interface may be disposed between the plurality of first channel structures and the plurality of second channel structures.

Abstract: A semiconductor device includes: a first insulating layer, a plurality of first electrodes penetrating the first insulating layer, a plurality of second electrodes penetrating the first insulating layer, the plurality of second electrodes being located between the plurality of first electrodes: a first high dielectric constant layer having a dielectric constant higher than a dielectric constant of the first insulating layer, a plurality of third electrodes penetrating the first high dielectric constant layer, the plurality of third electrodes being respectively connected to the plurality of first electrodes, and a plurality of fourth electrodes penetrating the first high dielectric constant layer, the plurality of fourth electrodes being located between the plurality of third electrodes.

Abstract: A semiconductor memory device includes a gate stack structure including a plurality of conductive layers stacked to be spaced apart from each other in a first direction, the gate stack structure surrounding the periphery of a polygonal opening. The semiconductor memory device also includes a stepped structure formed along a sidewall of the polygonal opening.

Abstract: A semiconductor device includes: a stacked structure comprising a plurality of dielectric layers and a plurality of conductive layers, wherein the dielectric layers are alternately stacked with the conductive layers; a groove formed for each conductive layer by recessing the conductive layer to the inside of the stacked structure; and an isolation structure formed through the stacked structure so as to isolate the stacked structure into a first block and a second block. The isolation structure comprises a first isolation structure and a second isolation structure adjacent to the first isolation structure with a gap provided between the first and second isolation structures, and one end of the first isolation structure and the other end of the second isolation structure, which face each other, have a vortex shape when viewed from above.

Abstract: A semiconductor device includes: a stacked structure comprising a plurality of dielectric layers and a plurality of conductive layers, wherein the dielectric layers are alternately stacked with the conductive layers; a groove formed for each conductive layer by recessing the conductive layer to the inside of the stacked structure; and an isolation structure formed through the stacked structure so as to isolate the stacked structure into a first block and a second block. The isolation structure comprises a first isolation structure and a second isolation structure adjacent to the first isolation structure with a gap provided between the first and second isolation structures, and one end of the first isolation structure and the other end of the second isolation structure, which face each other, have a vortex shape when viewed from above.

Abstract: A semiconductor memory device includes: a semiconductor substrate including a first region and a second region; a memory cell array over the first region of the semiconductor substrate; a dummy stack structure over the second region of the semiconductor substrate; a chip guard structure penetrating the dummy stack structure; and a void-containing structure penetrating the dummy stack structure.

Abstract: A semiconductor device includes: a stacked structure comprising a plurality of dielectric layers and a plurality of conductive layers, wherein the dielectric layers are alternately stacked with the conductive layers; a groove formed for each conductive layer by recessing the conductive layer to the inside of the stacked structure; and an isolation structure formed through the stacked structure so as to isolate the stacked structure into a first block and a second block. The isolation structure comprises a first isolation structure and a second isolation structure adjacent to the first isolation structure with a gap provided between the first and second isolation structures, and one end of the first isolation structure and the other end of the second isolation structure, which face each other, have a vortex shape when viewed from above.

Abstract: A semiconductor device includes: a first insulating layer, a plurality of first electrodes penetrating the first insulating layer, a plurality of second electrodes penetrating the first insulating layer, the plurality of second electrodes being located between the plurality of first electrodes: a first high dielectric constant layer having a dielectric constant higher than a dielectric constant of the first insulating layer, a plurality of third electrodes penetrating the first high dielectric constant layer, the plurality of third electrodes being respectively connected to the plurality of first electrodes, and a plurality of fourth electrodes penetrating the first high dielectric constant layer, the plurality of fourth electrodes being located between the plurality of third electrodes.

Abstract: A semiconductor device includes: a stacked structure comprising a plurality of dielectric layers and a plurality of conductive layers, wherein the dielectric layers are alternately stacked with the conductive layers; a groove formed for each conductive layer by recessing the conductive layer to the inside of the stacked structure; and an isolation structure formed through the stacked structure so as to isolate the stacked structure into a first block and a second block. The isolation structure comprises a first isolation structure and a second isolation structure adjacent to the first isolation structure with a gap provided between the first and second isolation structures, and one end of the first isolation structure and the other end of the second isolation structure, which face each other, have a vortex shape when viewed from above.

Abstract: A semiconductor device includes a first conductive pattern having a first line portion extending in a first direction and a first bending portion that extends from the first line portion. A closed area, surrounded by the first line portion and the first bending portion, is defined at one side of the first line portion. The semiconductor device further includes a second conductive pattern disposed in the closed area, the second conductive pattern being spaced apart from the first conductive pattern.

Abstract: A semiconductor device includes a first conductive pattern having a first line portion extending in a first direction and a first bending portion that extends from the first line portion. A closed area, surrounded by the first line portion and the first bending portion, is defined at one side of the first line portion. The semiconductor device further includes a second conductive pattern disposed in the closed area, the second conductive pattern being spaced apart from the first conductive pattern.

Abstract: A semiconductor device includes conductive patterns stacked and spaced apart from each other in a first direction to form a stepped structure, a stepped insulating layer overlapping the stepped structure, contact plugs extending through the stepped insulating layer in the first direction to contact respective contact portions of the conductive patterns, and barrier patterns disposed on sidewalls of the stepped insulating layer.

Abstract: A semiconductor device includes: a stacked structure comprising a plurality of dielectric layers and a plurality of conductive layers, wherein the dielectric layers are alternately stacked with the conductive layers; a groove formed for each conductive layer by recessing the conductive layer to the inside of the stacked structure; and an isolation structure formed through the stacked structure so as to isolate the stacked structure into a first block and a second block. The isolation structure comprises a first isolation structure and a second isolation structure adjacent to the first isolation structure with a gap provided between the first and second isolation structures, and one end of the first isolation structure and the other end of the second isolation structure, which face each other, have a vortex shape when viewed from above.