Patents by Inventor Daniel Babbs

Daniel Babbs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180269094
    Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.
    Type: Application
    Filed: May 22, 2018
    Publication date: September 20, 2018
    Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
  • Patent number: 9978623
    Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.
    Type: Grant
    Filed: August 10, 2015
    Date of Patent: May 22, 2018
    Assignee: Brooks Automation, Inc.
    Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
  • Publication number: 20160329234
    Abstract: A transfer apparatus for transporting substrates in a transfer chamber having a first and second ends and two sides extending between the ends. The transfer apparatus includes a drive section, at least one base arm fixed at one end with respect to the transfer chamber and including at least one arm link rotatably coupled to the drive section and at least one transfer arm rotatably coupled to a common end of the base arm, the at least one transfer arm has two end effectors. The drive section has motors with three independent axes of rotation defining three degrees of freedom. One degree of freedom moves the at least one base arm horizontally for transporting the at least one transfer arm and two degrees of freedom drives the at least one transfer arm to extend and retract the at least one transfer arm and swap the two end effectors.
    Type: Application
    Filed: July 20, 2016
    Publication date: November 10, 2016
    Inventors: Alexander Krupyshev, Robert T. Caveney, Daniel Babbs, Ulysses Gilchrist
  • Publication number: 20160111308
    Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
    Type: Application
    Filed: December 21, 2015
    Publication date: April 21, 2016
    Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
  • Publication number: 20160035608
    Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.
    Type: Application
    Filed: August 10, 2015
    Publication date: February 4, 2016
    Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
  • Patent number: 9224628
    Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
    Type: Grant
    Filed: September 24, 2012
    Date of Patent: December 29, 2015
    Assignee: Brooks Automation. Inc.
    Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
  • Patent number: 9105673
    Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.
    Type: Grant
    Filed: May 19, 2008
    Date of Patent: August 11, 2015
    Assignee: Brooks Automation, Inc.
    Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
  • Publication number: 20150013910
    Abstract: A transfer apparatus for transporting substrates in a transfer chamber having a first and second ends and two sides extending between the ends. The transfer apparatus includes a drive section, at least one base arm fixed at one end with respect to the transfer chamber and including at least one arm link rotatably coupled to the drive section and at least one transfer arm rotatably coupled to a common end of the base arm, the at least one transfer arm has two end effectors. The drive section has motors with three independent axes of rotation defining three degrees of freedom. One degree of freedom moves the at least one base arm horizontally for transporting the at least one transfer arm and two degrees of freedom drives the at least one transfer arm to extend and retract the at least one transfer arm and swap the two end effectors.
    Type: Application
    Filed: February 11, 2013
    Publication date: January 15, 2015
    Inventors: Alexander Krupyshev, Ulysses Gilchrist, Robert T. Caveney, Daniel Babbs
  • Patent number: 8827618
    Abstract: A semiconductor workpiece processing system including at least one substrate processing tool that has a common housing with a first side having a first substrate holding container interface and a second side having a second substrate holding container interface having a different orientation than the first substrate holding container interface, a first transport section disposed corresponding to the first side of the tool, a second transport section being separate and distinct from the first transport section and interfacing with the first transport section and being configured to transport the substrate holding container between the first transport section and the tool and between the first side and the second side of the tool, the second transport section including at least one overhead gantry disposed above the tool, where the second transfer section is capable of interfacing with at least the second substrate holding container interface.
    Type: Grant
    Filed: December 3, 2012
    Date of Patent: September 9, 2014
    Assignee: Brooks Automation, Inc.
    Inventors: Daniel Babbs, Robert C. May
  • Publication number: 20140202921
    Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.
    Type: Application
    Filed: January 22, 2014
    Publication date: July 24, 2014
    Inventors: Daniel Babbs, Robert T. Caveney, Robert C. May, Krysztof A. Majczak
  • Publication number: 20130333174
    Abstract: A semiconductor workpiece processing system including at least one substrate processing tool that has a common housing with a first side having a first substrate holding container interface and a second side having a second substrate holding container interface having a different orientation than the first substrate holding container interface, a first transport section disposed corresponding to the first side of the tool, a second transport section being separate and distinct from the first transport section and interfacing with the first transport section and being configured to transport the substrate holding container between the first transport section and the tool and between the first side and the second side of the tool, the second transport section including at least one overhead gantry disposed above the tool, where the second transfer section is capable of interfacing with at least the second substrate holding container interface.
    Type: Application
    Filed: December 3, 2012
    Publication date: December 19, 2013
    Applicant: BROOKS AUTOMATION, INC.
    Inventor: Daniel Babbs
  • Patent number: 8328495
    Abstract: A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
    Type: Grant
    Filed: August 19, 2009
    Date of Patent: December 11, 2012
    Assignee: Brooks Automation, Inc.
    Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
  • Patent number: 8297319
    Abstract: A method for pressurizing a substrate carrier including pressurizing a chamber that is of unitary construction with the carrier and/or a substrate cassette within the carrier and maintaining a pressure within the carrier by releasing gas from the chamber into the carrier.
    Type: Grant
    Filed: September 14, 2007
    Date of Patent: October 30, 2012
    Assignee: Brooks Automation, Inc.
    Inventors: Daniel Babbs, William Fosnight
  • Patent number: 8272827
    Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
    Type: Grant
    Filed: August 13, 2007
    Date of Patent: September 25, 2012
    Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
  • Patent number: 8267634
    Abstract: A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
    Type: Grant
    Filed: May 11, 2007
    Date of Patent: September 18, 2012
    Assignee: Brooks Automation, Inc.
    Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
  • Patent number: 8033815
    Abstract: Chucking mechanisms may include a plurality of chucking sections respectively connecting to a pressure control device to generate individual chucking forces. The individual chucking forces of the chucking sections may be varied by the pressure control device such that a magnitude of separation force is reduced for an imprint lithography system.
    Type: Grant
    Filed: September 16, 2010
    Date of Patent: October 11, 2011
    Assignee: Molecular Imprints, Inc.
    Inventors: Daniel A. Babbs, Byung-Jin Choi, Anshuman Cherala
  • Patent number: 7880872
    Abstract: The present invention features a method to determine relative spatial parameters between two coordinate systems, which may be a mold and a region of a substrate in which mold is employed to generate a pattern. The method includes sensing relative alignment between the two coordinate systems at multiple points and determines relative spatial parameters therebetween. The relative spatial parameters include a relative area and a relative shape.
    Type: Grant
    Filed: October 8, 2009
    Date of Patent: February 1, 2011
    Assignee: Molecular Imprints, Inc.
    Inventors: Pawan Kumar Nimmakayala, Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Philip D. Schumaker, Daniel A. Babbs, Van Nguyen Truskett
  • Publication number: 20110014314
    Abstract: Chucking mechanisms may include a plurality of chucking sections respectively connecting to a pressure control device to generate individual chucking forces. The individual chucking forces of the chucking sections may be varied by the pressure control device such that a magnitude of separation force is reduced for an imprint lithography system.
    Type: Application
    Filed: September 16, 2010
    Publication date: January 20, 2011
    Applicant: MOLECULAR IMPRINTS, INC.
    Inventors: Daniel A. Babbs, Byung-Jin Choi, Anshuman Cherala
  • Publication number: 20110008136
    Abstract: A load port including a frame defining a load port opening, a substrate carrier interface connected to the frame and configured to removably couple with a substrate carrier shell, a load port door configured to interface with a substrate carrier door, the load port door being movably coupled to frame and having a first position substantially blocking the load port opening, and a second position where the load port opening is substantially unblocked by the load port door, and a door coupling member without moving parts, located on the load port door configured to releasably couple with a corresponding member without moving parts on the substrate carrier door, wherein activation of the door coupling member effects coupling between the load port door and substrate carrier door and a passive release of the substrate carrier door from the substrate carrier shell.
    Type: Application
    Filed: September 20, 2010
    Publication date: January 13, 2011
    Applicant: Brooks Automation, Inc.
    Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
  • Publication number: 20100314803
    Abstract: A chucking system may include a plurality of discrete vacuum sections. The size of at least one vacuum section may be configured to be substantially similar to size of a strained region of the substrate. The strained region of the substrate is a localized deformation in the substrate due to separation force applied during a nano-imprint lithography process.
    Type: Application
    Filed: August 20, 2010
    Publication date: December 16, 2010
    Applicant: MOLECULAR IMPRINTS, INC.
    Inventors: Daniel A. Babbs, Byung-Jin Choi, Anshuman Cherala