Patents by Inventor Daniel Babbs
Daniel Babbs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230377924Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: ApplicationFiled: May 23, 2023Publication date: November 23, 2023Inventors: Daniel BABBS, Robert T CAVENEY, Robert C MAY, Krzysztof A MAJCZAK
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Patent number: 11658051Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: GrantFiled: September 14, 2021Date of Patent: May 23, 2023Assignee: Brooks Automation US, LLCInventors: Daniel Babbs, Robert T Caveney, Robert C May, Krzysztof A Majczak
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Publication number: 20230143307Abstract: A linear electrical machine including a frame with a level reference plane, an array of electromagnets connected to the frame and coupled to an alternating current power source energizing each electromagnet, at least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane, and a controller operably coupled to the array of electromagnets and the alternating current power source and configured so as to sequentially excite the electromagnets with multiphase alternating current with a predetermined excitation characteristic so that each reaction platen is levitated and propelled with up to six degrees of freedom.Type: ApplicationFiled: October 27, 2022Publication date: May 11, 2023Inventors: Jairo T. Moura, Vincent Tsang, Karanjit Saini, Robert T. Caveney, Robert C. May, Daniel Babbs
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Publication number: 20230129289Abstract: A vacuum substrate transport apparatus including a frame, a drive section having a drive axis, at least one arm, having an end effector for holding a substrate, having at least one degree of freedom axis effecting extension and retraction, and a bearing defining a guideway that defines the axis, the bearing including at least one rolling load bearing element disposed in a bearing case, interfacing between a bearing raceway and bearing rail to support arm loads, and effecting sliding of the case along the rail, and at least one rolling, substantially non-load bearing, spacer element disposed in the case, intervening between each of the load bearing elements, wherein the spacer element is a sacrificial buffer material compatible with sustained substantially unrestricted service commensurate with a predetermined service duty of the apparatus in a vacuum environment at temperatures over 260° C. for a specified predetermined service period.Type: ApplicationFiled: December 22, 2022Publication date: April 27, 2023Inventors: Daniel BABBS, Robert Chris May, Robert T. Caveney
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Patent number: 11545380Abstract: A vacuum substrate transport apparatus including a frame, a drive section having a drive axis, at least one arm, having an end effector for holding a substrate, having at least one degree of freedom axis effecting extension and retraction, and a bearing defining a guideway that defines the axis, the bearing including at least one rolling load bearing element disposed in a bearing case, interfacing between a bearing raceway and bearing rail to support arm loads, and effecting sliding of the case along the rail, and at least one rolling, substantially non-load bearing, spacer element disposed in the case, intervening between each of the load bearing elements, wherein the spacer element is a sacrificial buffer material compatible with sustained substantially unrestricted service commensurate with a predetermined service duty of the apparatus in a vacuum environment at temperatures over 260° C. for a specified predetermined service period.Type: GrantFiled: October 30, 2019Date of Patent: January 3, 2023Assignee: Brooks Automation US LLCInventors: Daniel Babbs, Robert Chris May, Robert T. Caveney
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Publication number: 20220153535Abstract: A substrate transport apparatus comprising a frame, a drive section connected to the frame, and an articulated arm having at least one articulated arm link operably connected to the drive section so that the articulated arm rotates about a pivot axis relative to the frame and extends and retracts relative to the pivot axis. The articulated arm has an end effector pivotally mounted to at least one articulated arm link forming a joint between the end effector and the articulated arm link, with an arm joint pivot axis disposed so that the end effector rotates relative to at least one articulated arm link about the arm joint pivot axis. The articulated arm has a drive band transmission with drive and driven pulleys where the driven pulley is connected to the articulated wrist.Type: ApplicationFiled: February 1, 2022Publication date: May 19, 2022Inventors: Daniel BABBS, Vincent W. TSANG, Robert C. MAY
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Patent number: 11235935Abstract: A substrate transport apparatus comprising a frame, a drive section connected to the frame, and an articulated arm having at least one articulated arm link operably connected to the drive section so that the articulated arm rotates about a pivot axis relative to the frame and extends and retracts relative to the pivot axis. The articulated arm has an end effector pivotally mounted to at least one articulated arm link forming a joint between the end effector and the articulated arm link, with an arm joint pivot axis disposed so that the end effector rotates relative to at least one articulated arm link about the arm joint pivot axis. The articulated arm has a drive band transmission with drive and driven pulleys where the driven pulley is connected to the articulated wrist.Type: GrantFiled: January 22, 2021Date of Patent: February 1, 2022Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, Vincent W. Tsang, Robert C. May
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Publication number: 20210407836Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: ApplicationFiled: September 14, 2021Publication date: December 30, 2021Inventors: Daniel BABBS, Robert T. Caveney, Robert C. May, Krzysztof A. Majczak
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Patent number: 11201070Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.Type: GrantFiled: May 22, 2018Date of Patent: December 14, 2021Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
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Patent number: 11121015Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: GrantFiled: August 27, 2019Date of Patent: September 14, 2021Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, Robert T. Caveney, Robert C. May, Krzysztof A. Majczak
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Publication number: 20210229934Abstract: A substrate transport apparatus comprising a frame, a drive section connected to the frame, and an articulated arm having at least one articulated arm link operably connected to the drive section so that the articulated arm rotates about a pivot axis relative to the frame and extends and retracts relative to the pivot axis. The articulated arm has an end effector pivotally mounted to at least one articulated arm link forming a joint between the end effector and the articulated arm link, with an arm joint pivot axis disposed so that the end effector rotates relative to at least one articulated arm link about the arm joint pivot axis. The articulated arm has a drive band transmission with drive and driven pulleys where the driven pulley is connected to the articulated wrist.Type: ApplicationFiled: January 22, 2021Publication date: July 29, 2021Inventors: Daniel BABBS, Vincent W. TSANG, Robert C. MAY
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Publication number: 20200395232Abstract: A process apparatus including a front end with a load opening for loading production workpieces into the apparatus; a process section being offset at a distance from and coupled to the front end via an interior transport path configured for transport of the workpieces between the front end and process section; a load lock between the front end and process section with the transport path extending through the load lock, the load lock having an intermediate entry with an opening shunting the transport path to the exterior separate from the front end; and a predetermined interchangeable transport carrier cassette configured to be entered within the load lock from the exterior through the intermediate entry opening, the entry and removal of the cassette through the opening loads and unloads the load lock with a transport path interface that interfaces, the transport path coincident with the cassette loaded in the load lock.Type: ApplicationFiled: June 11, 2020Publication date: December 17, 2020Inventors: Alexander Krupyshev, Leigh Sharrock, Daniel Babbs, Robert May
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Patent number: 10679882Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.Type: GrantFiled: December 21, 2015Date of Patent: June 9, 2020Assignee: BROOKS AUTOMATION, INCInventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Publication number: 20200161153Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: ApplicationFiled: August 27, 2019Publication date: May 21, 2020Inventors: Daniel Babbs, Robert T. Caveney, Robert C. May, Krysztof A. Majczak
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Publication number: 20200144087Abstract: A vacuum substrate transport apparatus including a frame, a drive section having a drive axis, at least one arm, having an end effector for holding a substrate, having at least one degree of freedom axis effecting extension and retraction, and a bearing defining a guideway that defines the axis, the bearing including at least one rolling load bearing element disposed in a bearing case, interfacing between a bearing raceway and bearing rail to support arm loads, and effecting sliding of the case along the rail, and at least one rolling, substantially non-load bearing, spacer element disposed in the case, intervening between each of the load bearing elements, wherein the spacer element is a sacrificial buffer material compatible with sustained substantially unrestricted service commensurate with a predetermined service duty of the apparatus in a vacuum environment at temperatures over 260° C. for a specified predetermined service period.Type: ApplicationFiled: October 30, 2019Publication date: May 7, 2020Inventors: Daniel BABBS, Robert Chris May, Robert T. Caveney
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Patent number: 10395959Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: GrantFiled: January 22, 2014Date of Patent: August 27, 2019Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, Robert T. Caveney, Robert C. May, Krysztof A. Majczak
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Publication number: 20180269094Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.Type: ApplicationFiled: May 22, 2018Publication date: September 20, 2018Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
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Patent number: 9978623Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.Type: GrantFiled: August 10, 2015Date of Patent: May 22, 2018Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
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Publication number: 20160329234Abstract: A transfer apparatus for transporting substrates in a transfer chamber having a first and second ends and two sides extending between the ends. The transfer apparatus includes a drive section, at least one base arm fixed at one end with respect to the transfer chamber and including at least one arm link rotatably coupled to the drive section and at least one transfer arm rotatably coupled to a common end of the base arm, the at least one transfer arm has two end effectors. The drive section has motors with three independent axes of rotation defining three degrees of freedom. One degree of freedom moves the at least one base arm horizontally for transporting the at least one transfer arm and two degrees of freedom drives the at least one transfer arm to extend and retract the at least one transfer arm and swap the two end effectors.Type: ApplicationFiled: July 20, 2016Publication date: November 10, 2016Inventors: Alexander Krupyshev, Robert T. Caveney, Daniel Babbs, Ulysses Gilchrist
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Publication number: 20160111308Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.Type: ApplicationFiled: December 21, 2015Publication date: April 21, 2016Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May