Abstract: According to a first aspect of the invention, there is provided a lithographic method of providing an alignment mark on a layer provided on a substrate, the method including providing the alignment mark on an area of the layer which is oriented within a certain range of angles with respect to a surface of the substrate on which the layer is provided.

Abstract: A lithographic alignment apparatus includes a radiation source arranged to generate radiation at a wavelength of 1000 nanometers or longer, and a plurality of non-imaging detectors arranged to detect the radiation after the radiation has been reflected by an alignment mark.

Abstract: A method of improving a resolution of an image using image reconstruction is provided. The method includes acquiring scan data of an object and forward projecting a current image estimate of the scan data to generate calculated projection data. The method also includes applying a data-fit term and a regularization term to the scan data and the calculated projection data and modifying at least one of the data fit term and the regularization term to accommodate spatio-temporal information to form a reconstructed image from the scan data and the calculated projection data.

Abstract: A method for reconstructing an image of an object, the image comprising a plurality of image elements, is disclosed. The method includes accessing image data associated with the plurality of image elements, applying a first algorithm to the plurality of image elements, selecting a spatially non-homogenous set of the plurality of image elements, and applying an iterative algorithm to the set of image elements to reduce an amount of time necessary for reconstructing the image, or to improve an image quality at a fixed computation time, or both.

Abstract: A method for aligning a substrate in a lithographic apparatus is presented. The substrate includes a plurality of alignment marks. The alignment marks have been defined by a second lithographic apparatus and are arranged to provide a substrate grid as a coordinate system that includes a first and a second direction, substantially perpendicular to the first direction.

Abstract: An arrangement for and a method of automatically selecting substrate alignment marks on a substrate in a lithographic apparatus or overlay metrology targets in an overlay metrology apparatus. The apparatus has a processor and a memory connected to the processor. The memory stores locations of one or more sets of substrate alignment marks or overlay metrology targets available for selection and selection rules to select suitable substrate alignment marks or overlay metrology targets from this at least one set. The selection rules are based on experimental or theoretical knowledge about which substrate alignment mark or overlay metrology targets locations are optimal in dependence on one or more selection criteria.

Abstract: A method for aligning a substrate in a lithographic apparatus is presented. The substrate includes a plurality of alignment marks. The alignment marks have been defined by a second lithographic apparatus and are arranged to provide a substrate grid as a coordinate system that includes a first and a second direction, substantially perpendicular to the first direction.

Abstract: An assembly for treating metal products is presented. The assembly includes a preheat furnace aligned with a reheat furnace. Cold products are initially heated in the preheat furnace and hot products bypass the preheat furnace. A material handling device is provided for a) transferring preheated products from an outlet of the preheat furnace to an inlet of the reheat furnace, and for b) transferring hot products from a point between the furnaces to the inlet of the reheat furnace. The material handling device includes a support extending between the outlet of the preheat furnace and the inlet of the reheat furnace for receiving preheated and hot products; and a displacement device located below the support means for lifting and translating preheated and hot products from the support means to the inlet of the reheating means.

Abstract: A radio system allows for exchanging messages between a set of relay stations (R1, R2, R3 . . . ) and mobile access stations (M . . . ) for communications. At least one common semaphore channel is used through which the relay stations simultaneously transmit code signals (M(R1)+M(R2)+M(R3)+. . . ) at first preset instants and separately transmit a code signal at other preset time instants, the access stations tap the said channel at these various preset instants and the recognition in the access station of code signals received in the first preset instants and the quality of code signals received in the other preset instants constitutes a criterion for establishing the connection between the access station and a relay station corresponding to the recognized code.

Abstract: An apparatus for providing the outer quenching and the inner quenching of tubular pieces, notably of steel tubes, characterized in that it includes successively, in the advancement direction of the tubes:slanting rollers allowing the tubes delivered continuously to move forward successively by rotating about their axis;an outer quenching system;a clamping and locking system for the tube;a retractable carrier supporting an injection lance for carrying out the inner quenching, said carrier being provided with said clamping and locking system for the tube;means allowing the carrier to move backward with the tube clamping system in order to accompany said tube in movement while the outer quenching is carried out; andretractable rollers which come in position to support the tube as the carrier moves backward while disengaging the tube from the outer quenching system.

Abstract: The gearbox has synchronizers and at least one speed ratio set of gears which is non-synchronized. The synchronized set of gears are actuated by parallel longitudinally movable rods. A first rod which moves the movable means is connected to a second rod which relates to one of the synchronizers by automatically withdrawable connecting means so that the beginning of the displacement from its position of rest of the first rod causes a displacement of the second rod, said displacement, which precedes the engagement of the non-synchronized set of gears, being of such extent that it just puts the synchronizers into action without engaging the corresponding speed ratio. The second rod carries a slidable sleeve having withdrawable means for connection to the second rod and means for positively driving the second rod at the same time as the first rod.

Abstract: A security system for seismicly detecting intrusion into an enclosure. A plurality of sensor units are electrically connected in parallel across a two wire transmission line. The sensing elements are coupled to the line through high output impedence amplifiers to negate any signal attenuating shunt paths. The readout end of the line is closed through a characteristic impedence resistor to avoid signal reflections, and the remote end of the line is closed through relatively high resistors to avoid sensor signal absorption or attenuation.