Patents by Inventor Danny Pak-Chum Shum

Danny Pak-Chum Shum has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10446607
    Abstract: Devices and methods of forming a device are disclosed. The method includes providing a substrate and a first upper dielectric layer over first and second regions of the substrate. The first upper dielectric layer includes a first upper interconnect level with a plurality of metal lines in the regions. A two-terminal device element which includes a device layer coupled in between first and second terminals is formed over the first upper dielectric layer in the second region. The first terminal contacts the metal line in the first upper interconnect level of the second region and the second terminal is formed on the device layer. An encapsulation liner covers at least exposed side surfaces of the device layer of the two-terminal device element. A dielectric layer which includes a second upper interconnect level with dual damascene interconnects is provided in the regions.
    Type: Grant
    Filed: December 28, 2016
    Date of Patent: October 15, 2019
    Assignee: GLOBALFOUNDARIES SINGAPORE PTE. LTD.
    Inventors: Wanbing Yi, Curtis Chun-I Hsieh, Juan Boon Tan, Soh Yun Siah, Hai Cong, Alex See, Young Seon You, Danny Pak-Chum Shum, Hyunwoo Yang
  • Publication number: 20190305041
    Abstract: Methods of forming a MTJ dummy fill gradient across near-active-MRAM-cell periphery and far-outside-MRAM logic regions and the resulting device are provided. Embodiments include providing an embedded MRAM layout with near-active-MRAM-cell periphery logic and far-outside-MRAM logic regions; forming a MTJ structure within the layout based on minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first and second metal layers; forming a high-density MTJ dummy structure in the near-active-MRAM-cell periphery logic region based on second minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first metal layer and the second metal layer; and forming a low-density MTJ dummy structure in the far-outside-MRAM logic region based on third minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first metal layer and the second metal layer.
    Type: Application
    Filed: June 17, 2019
    Publication date: October 3, 2019
    Inventors: Pinghui LI, Haiqing ZHOU, Liying ZHANG, Wanbing YI, Ming ZHU, Danny Pak-Chum SHUM, Darin CHAN
  • Patent number: 10431732
    Abstract: Shielded semiconductor devices and methods for fabricating shielded semiconductor devices are provided. An exemplary magnetically shielded semiconductor device includes a substrate having a top surface and a bottom surface. An electromagnetic-field-susceptible semiconductor component is located on and/or in the substrate. The magnetically shielded semiconductor device includes a top magnetic shield located over the top surface of the substrate. Further, the magnetically shielded semiconductor device includes a bottom magnetic shield located under the bottom surface of the substrate. Also, the magnetically shielded semiconductor device includes a sidewall magnetic shield located between the top magnetic shield and the bottom magnetic shield.
    Type: Grant
    Filed: May 31, 2017
    Date of Patent: October 1, 2019
    Assignees: GLOBALFOUNDRIES SINGAPORE PTE. LTD., AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
    Inventors: Bhushan Bharat, Shan Gao, Danny Pak-Chum Shum, Wanbing Yi, Juan Boon Tan, Wei Yi Lim, Teck Guan Lim, Michael Han Kim Kwong, Eva Wai Leong Ching
  • Publication number: 20190287921
    Abstract: Methodologies and an apparatus for enabling magnetic shielding of stand alone MRAM are provided. Embodiments include placing MRAM dies and logic dies on a first surface of a mold frame; forming a top magnetic shield over top and side surfaces of the MRAM dies; forming a mold cover over the MRAM dies, FinFET dies and mold frame; removing the mold frame to expose a bottom surface of the MRAM dies and FinFET dies; and forming a bottom magnetic shield over the bottom surface of the MRAM dies.
    Type: Application
    Filed: June 5, 2019
    Publication date: September 19, 2019
    Inventors: Bharat BHUSHAN, Juan Boon TAN, Boo Yang JUNG, Wanbing YI, Danny Pak-Chum SHUM
  • Patent number: 10411027
    Abstract: Integrated circuits and methods of producing the same are provided. In an exemplary embodiment, an integrated circuit includes a substrate and a fin extending from the substrate. The fin includes a first and second fin sidewall, and a memory cell layer is adjacent to the first and second fin sidewalls. A first control gate is adjacent to the memory cell layer where the memory cell layer is between the first fin sidewall and the first control gate. A second control gate is also adjacent to the memory cell layer, where the memory cell layer is between the second fin sidewall and the second control gate. The first and second control gates are electrically isolated from each other.
    Type: Grant
    Filed: October 19, 2017
    Date of Patent: September 10, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Ming Zhu, Pinghui Li, Eng Huat Toh, Yiang Aun Nga, Danny Pak-Chum Shum
  • Patent number: 10381404
    Abstract: Integrated circuits and methods of producing the same are provided. In an exemplary embodiment, an integrated circuit includes a substrate having a buried insulator layer and an active layer overlying the buried insulator layer. A transistor overlies the buried insulator layer, and a memory cell underlies the buried insulator layer. As such, the memory cell and the transistor are on opposite sides of the buried insulator layer.
    Type: Grant
    Filed: August 7, 2017
    Date of Patent: August 13, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Bhushan Bharat, Juan Boon Tan, Danny Pak-Chum Shum, Yi Jiang, Wanbing Yi
  • Publication number: 20190244650
    Abstract: A magneto-resistive memory (MRM) structure includes a source line and a first transistor that includes a source region and a drain region. The source line is electrically connected to the source region of the first transistor. The MRM structure further includes an MRM cell that includes an MRM transistor electrically in series with an MRM magnetic tunnel junction (MTJ). The MRM transistor is electrically connected to the drain region of the first transistor such that the MRM cell is electrically in series with the first transistor. Still further, the MRM structure further includes a voltage amplifier electrically connected to a mid-point node of the first transistor and the MRM transistor, a sense-amplifier electrically connected to the voltage amplifier, and a bit line electrically connected to the MRM MTJ of the MRM cell.
    Type: Application
    Filed: February 6, 2018
    Publication date: August 8, 2019
    Inventors: Akhilesh Jaiswal, Ajey P. Jacob, Bipul C. Paul, William Taylor, Danny Pak-Chum Shum
  • Patent number: 10374005
    Abstract: Methods of forming a MTJ dummy fill gradient across near-active-MRAM-cell periphery and far-outside-MRAM logic regions and the resulting device are provided. Embodiments include providing an embedded MRAM layout with near-active-MRAM-cell periphery logic and far-outside-MRAM logic regions; forming a MTJ structure within the layout based on minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first and second metal layers; forming a high-density MTJ dummy structure in the near-active-MRAM-cell periphery logic region based on second minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first metal layer and the second metal layer; and forming a low-density MTJ dummy structure in the far-outside-MRAM logic region based on third minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first metal layer and the second metal layer.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: August 6, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Pinghui Li, Haiqing Zhou, Liying Zhang, Wanbing Yi, Ming Zhu, Danny Pak-Chum Shum, Darin Chan
  • Publication number: 20190229068
    Abstract: Methodologies and an apparatus for enabling magnetic shielding of stand alone MRAM are provided. Embodiments include placing MRAM dies and logic dies on a first surface of a mold frame; forming a top magnetic shield over top and side surfaces of the MRAM dies; forming a mold cover over the MRAM dies, FinFET dies and mold frame; removing the mold frame to expose a bottom surface of the MRAM dies and FinFET dies; and forming a bottom magnetic shield over the bottom surface of the MRAM dies.
    Type: Application
    Filed: January 23, 2018
    Publication date: July 25, 2019
    Inventors: Bharat BHUSHAN, Juan Boon TAN, Boo Yang JUNG, Wanbing YI, Danny Pak-Chum SHUM
  • Patent number: 10361162
    Abstract: Methodologies and an apparatus for enabling magnetic shielding of stand alone MRAM are provided. Embodiments include placing MRAM dies and logic dies on a first surface of a mold frame; forming a top magnetic shield over top and side surfaces of the MRAM dies; forming a mold cover over the MRAM dies, FinFET dies and mold frame; removing the mold frame to expose a bottom surface of the MRAM dies and FinFET dies; and forming a bottom magnetic shield over the bottom surface of the MRAM dies.
    Type: Grant
    Filed: January 23, 2018
    Date of Patent: July 23, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Bharat Bhushan, Juan Boon Tan, Boo Yang Jung, Wanbing Yi, Danny Pak-Chum Shum
  • Publication number: 20190214550
    Abstract: Methods of magnetically shielding a perpendicular STT-MRAM structure on all six sides within a flip-chip package and the resulting devices are provided. Embodiments include forming a passivation stack over an upper surface of a wafer and outer portions of an Al pad; forming a polymer layer over the passivation stack; forming a UBM layer over the Al pad, portions of the polymer layer and along sidewalls of the polymer layer; forming a T-shaped Cu pillar over the UBM layer; forming a ?-bump over the T-shaped Cu pillar; dicing the wafer into a plurality of dies; forming an epoxy layer over a bottom surface of each die; forming a magnetic shielding layer over the epoxy layer and along sidewalls of each die, the epoxy layer, the passivation stack and the polymer layer; and connecting the ?-bump to a package substrate with a BGA balls.
    Type: Application
    Filed: January 8, 2018
    Publication date: July 11, 2019
    Inventors: Bharat BHUSHAN, Juan Boon TAN, Danny Pak-Chum SHUM, Wanbing YI
  • Patent number: 10347826
    Abstract: Methods of magnetically shielding a perpendicular STT-MRAM structure on all six sides within a flip-chip package and the resulting devices are provided. Embodiments include forming a passivation stack over an upper surface of a wafer and outer portions of an Al pad; forming a polymer layer over the passivation stack; forming a UBM layer over the Al pad, portions of the polymer layer and along sidewalls of the polymer layer; forming a T-shaped Cu pillar over the UBM layer; forming a ?-bump over the T-shaped Cu pillar; dicing the wafer into a plurality of dies; forming an epoxy layer over a bottom surface of each die; forming a magnetic shielding layer over the epoxy layer and along sidewalls of each die, the epoxy layer, the passivation stack and the polymer layer; and connecting the ?-bump to a package substrate with a BGA balls.
    Type: Grant
    Filed: January 8, 2018
    Date of Patent: July 9, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Bharat Bhushan, Juan Boon Tan, Danny Pak-Chum Shum, Wanbing Yi
  • Publication number: 20190206928
    Abstract: Methods of forming a MTJ dummy fill gradient across near-active-MRAM-cell periphery and far-outside-MRAM logic regions and the resulting device are provided. Embodiments include providing an embedded MRAIVI layout with near-active-MRAM-cell periphery logic and far-outside-MRAM logic regions; forming a MTJ structure within the layout based on minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first and second metal layers; forming a high-density MTJ dummy structure in the near-active-MRAM-cell periphery logic region based on second minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first metal layer and the second metal layer; and forming a low-density MTJ dummy structure in the far-outside-MRAM logic region based on third minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first metal layer and the second metal layer.
    Type: Application
    Filed: December 29, 2017
    Publication date: July 4, 2019
    Inventors: Pinghui LI, Haiqing ZHOU, Liying ZHANG, Wanbing YI, Ming ZHU, Danny Pak-Chum SHUM, Darin CHAN
  • Patent number: 10332597
    Abstract: A method of forming a FG OTP/MTP cell with a P+ drain junction at the NCAP region and the resulting device are provided. Embodiments include forming MVPW regions laterally separated in a p-sub; forming a MVNW region in the p-sub between the MVPW regions; forming a first RX, a second RX, and a third RX in the MVPW and MVNW regions, respectively; forming a first and a second pair of floating gates separated over and perpendicular to the first and second RX and the second and third RX, respectively; forming a N+ source region between and adjacent to each FG of the first and the second pair in the second RX; and forming a pair of P+ drain regions in the second RX, each P+ drain region adjacent to a FG of the first pair and a FG of the second pair and remote from the N+ source region.
    Type: Grant
    Filed: November 8, 2017
    Date of Patent: June 25, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Shyue Seng Tan, Danny Pak-Chum Shum, Eng Huat Toh
  • Patent number: 10312442
    Abstract: Non-volatile memory (NVM) devices, resistive random access memory (RRAM) devices and methods for fabricating such devices are provided. In an exemplary embodiment, a non-volatile memory (NVM) device includes a first electrode and a second electrode positioned above the first electrode. Further, the NVM device includes a variable resistance material layer positioned between the first electrode and the second electrode. The variable resistance material layer contains magnesium oxide.
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: June 4, 2019
    Assignee: Globalfoundries Singapore Pte. Ltd.
    Inventors: Danny Pak-Chum Shum, Desmond Jia Jun Loy, Wen Siang Lew
  • Patent number: 10290679
    Abstract: A scalable method of forming an integrated high-density STT-MRAM with a 3D array of multi-level MTJs and the resulting devices are provided. Embodiments include providing a Si substrate of an X-density STT-MRAM having an array of interconnect stacks; forming a level of a MTJ structure on each of a first interconnect stack and a second interconnect stack, wherein (X?1) defines a number of interconnect stacks between the first and the second interconnect stacks; forming a via on each interconnect stack without a MTJ structure; forming a metal layer on each MTJ structure and via on the level; repeating the forming of the MTJ structure, the via, and the metal layer one interconnect stack laterally shifted until the level of the MTJ structure equals X, only forming the MTJ structure at that level; forming a bit line over the substrate; and connecting the bit line to each MTJ structure.
    Type: Grant
    Filed: March 9, 2018
    Date of Patent: May 14, 2019
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Bharat Bhushan, Juan Boon Tan, Yi Jiang, Danny Pak-Chum Shum, Wanbing Yi
  • Publication number: 20190139607
    Abstract: A method of forming a FG OTP/MTP cell with a P+ drain junction at the NCAP region and the resulting device are provided. Embodiments include forming MVPW regions laterally separated in a p-sub; forming a MVNW region in the p-sub between the MVPW regions; forming a first RX, a second RX, and a third RX in the MVPW and MVNW regions, respectively; forming a first and a second pair of floating gates separated over and perpendicular to the first and second RX and the second and third RX, respectively; forming a N+ source region between and adjacent to each FG of the first and the second pair in the second RX; and forming a pair of P+ drain regions in the second RX, each P+ drain region adjacent to a FG of the first pair and a FG of the second pair and remote from the N+ source region.
    Type: Application
    Filed: November 8, 2017
    Publication date: May 9, 2019
    Inventors: Shyue Seng TAN, Danny Pak-Chum SHUM, Eng Huat TOH
  • Publication number: 20190123059
    Abstract: Integrated circuits and methods of producing the same are provided. In an exemplary embodiment, an integrated circuit includes a substrate and a fin extending from the substrate. The fin includes a first and second fin sidewall, and a memory cell layer is adjacent to the first and second fin sidewalls. A first control gate is adjacent to the memory cell layer where the memory cell layer is between the first fin sidewall and the first control gate. A second control gate is also adjacent to the memory cell layer, where the memory cell layer is between the second fin sidewall and the second control gate. The first and second control gates are electrically isolated from each other.
    Type: Application
    Filed: October 19, 2017
    Publication date: April 25, 2019
    Inventors: Ming Zhu, Pinghui Li, Eng Huat Toh, Yiang Aun Nga, Danny Pak-Chum Shum
  • Publication number: 20190115350
    Abstract: Devices and methods for forming a device are presented. The device includes a substrate having a well of a first polarity type and a thyristor-based memory cell. The thyristor-based memory cell includes at least a first region of a second polarity type adjacent to the well, a gate which serves as a second word line disposed on the substrate, at least a first layer of the first polarity type disposed adjacent to the first region of the second polarity type and adjacent to the gate, and at least a heavily doped first layer of the second polarity type disposed on the first layer of the first polarity type and adjacent to the gate. At least the heavily doped first layer of the second polarity type is self-aligned with side of the gate.
    Type: Application
    Filed: December 12, 2018
    Publication date: April 18, 2019
    Inventors: Eng Huat TOH, Shyue Seng TAN, Elgin Kiok Boone QUEK, Danny Pak-Chum SHUM
  • Publication number: 20190088874
    Abstract: Non-volatile memory (NVM) devices, resistive random access memory (RRAM) devices and methods for fabricating such devices are provided. In an exemplary embodiment, a non-volatile memory (NVM) device includes a first electrode and a second electrode positioned above the first electrode. Further, the NVM device includes a variable resistance material layer positioned between the first electrode and the second electrode. The variable resistance material layer contains magnesium oxide.
    Type: Application
    Filed: September 21, 2017
    Publication date: March 21, 2019
    Inventors: Danny Pak-Chum Shum, Desmond Jia Jun Loy, Wen Siang Lew