Patents by Inventor David Fenwick

David Fenwick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180327898
    Abstract: An article comprises a body having a coating. The coating comprises a Y—O—F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.
    Type: Application
    Filed: April 27, 2018
    Publication date: November 15, 2018
    Inventors: Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice
  • Publication number: 20180327899
    Abstract: An article comprises a body having a coating. The coating comprises a Y-O-F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.
    Type: Application
    Filed: April 27, 2018
    Publication date: November 15, 2018
    Inventors: Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice
  • Publication number: 20180327892
    Abstract: An article comprises a body having a coating. The coating comprises a Y—O—F coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.
    Type: Application
    Filed: April 27, 2018
    Publication date: November 15, 2018
    Inventors: Xiaowei Wu, David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice
  • Publication number: 20180251406
    Abstract: Disclosed herein are methods for fabricating layered ceramic materials via hot pressing. A method includes disposing a powder compact or a ceramic slurry onto a surface of an article, wherein the article is a chamber component of a processing chamber. The powder compact or ceramic slurry is hot pressed against the surface of the article by heating the article and the powder compact or ceramic slurry and applying a pressure of 15-100 Megapascals. The hot pressing sinters the powder compact or ceramic slurry into a sintered ceramic protective layer and bonds the sintered ceramic protective layer to the surface of the article.
    Type: Application
    Filed: February 27, 2018
    Publication date: September 6, 2018
    Inventors: Jennifer Y. Sun, Guodong Zhan, David Fenwick, Michael R. Rice
  • Publication number: 20180240648
    Abstract: Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The plasma resistant coating has a stress relief layer and a rare earth metal-containing oxide layer and uniformly covers features, such as those having an aspect ratio of about 3:1 to about 300:1.
    Type: Application
    Filed: January 20, 2017
    Publication date: August 23, 2018
    Inventors: Xiaowei Wu, David Fenwick, Jennifer Y. Sun, Guodong Zhan
  • Publication number: 20180209042
    Abstract: Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The plasma resistant coating has a stress relief layer and a layer comprising a solid solution of Y2O3—ZrO2 and uniformly covers features, such as those having an aspect ratio of about 3:1 to about 300:1.
    Type: Application
    Filed: December 20, 2017
    Publication date: July 26, 2018
    Inventors: Xiaowei Wu, David Fenwick, Jennifer Y. Sun, Guodong Zhan
  • Publication number: 20180112311
    Abstract: A multi-layer coating for a surface of an article comprises a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiNx, TaNx, Zr3N4, and TiZrxNy. The erosion resistant layer may be a rare oxide film comprising YZrxOy. The diffusion barrier layer and the erosion resistant layer may be deposited on the article's surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.
    Type: Application
    Filed: December 15, 2017
    Publication date: April 26, 2018
    Inventors: David Fenwick, Xiaowei Wu, Jennifer Y. Sun
  • Publication number: 20180105932
    Abstract: A multi-component coating composition for a surface of a chamber component comprising at least one first film layer of a yttrium oxide coated onto the surface of the chamber component using an atomic layer deposition process and at least one second film layer of zirconium oxide coated onto the surface of the chamber component using an atomic layer deposition process, wherein the multi-component coating comprises YZrxOy.
    Type: Application
    Filed: December 19, 2017
    Publication date: April 19, 2018
    Inventors: David Fenwick, Jennifer Y. Sun
  • Publication number: 20180016678
    Abstract: A multi-layer coating for a surface of an article comprising a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiNx, TaNx, Zr3N4, and TiZrxNy. The erosion resistant layer may be a rare oxide film including but not limited to YF3, Y2O3, Er2O3, Al2O3, ZrO2, ErAlxOy, YOxFy, YAlxOy, YZrxOy and YZrxAlyOz. The diffusion barrier layer and the erosion resistant layer may be deposited on the article's surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.
    Type: Application
    Filed: July 11, 2017
    Publication date: January 18, 2018
    Inventors: David Fenwick, Xiaowei Wu, Jennifer Y. Sun
  • Publication number: 20170323772
    Abstract: An article comprises a body having a protective coating. The protective coating is a thin film that comprises a metal oxy-fluoride. The metal oxy-fluoride has an empirical formula of MxOyFz, where M is a metal, y has a value of 0.1 to 1.9 times a value of x and z has a value of 0.1 to 3.9 times the value of x. The protective coating has a thickness of 1 to 30 microns and a porosity of less than 0.1%.
    Type: Application
    Filed: April 26, 2017
    Publication date: November 9, 2017
    Inventors: David Fenwick, Chengtsin Lee, Jennifer Y. Sun, Yikai Chen
  • Publication number: 20170314125
    Abstract: A multi-component coating composition for a surface of a semiconductor process chamber component comprising at least one first film layer of a yttrium oxide or a yttrium fluoride coated onto the surface of the semiconductor process chamber component using an atomic layer deposition process and at least one second film layer of an additional oxide or an additional fluoride coated onto the surface of the semiconductor process chamber component using an atomic layer deposition process, wherein the multi-component coating composition is selected from the group consisting of YOxFy, YAlxOy, YZrxOy and YZrxAlyOz.
    Type: Application
    Filed: April 24, 2017
    Publication date: November 2, 2017
    Inventors: David Fenwick, Jennifer Y. Sun
  • Publication number: 20060093272
    Abstract: In one embodiment, an assembly having a first board, a second board, a fiber bundle, and at least one movable stage is provided. The fiber bundle has a first end and a second end, and the first end of the fiber bundle is attached to the first board first face. The movable stage has a second optical array provided thereon or therein. The movable stage is disposed on the second board such that the at least one motor steers the movable stage. The movable stage is steered such that the second optical array is aligned with the second end of the fiber bundle in a desired manner.
    Type: Application
    Filed: November 3, 2004
    Publication date: May 4, 2006
    Inventors: David Fenwick, Richard Luebs, Terrel Morris, Duane Wegher, Jeffrey Yetter
  • Publication number: 20060093270
    Abstract: In one embodiment, a fiber assembly is provided. The fiber assembly has a first fiber having at least one core. The core has a length, a first end, and a second end, and light may be transmitted along the core. The second end has an obtusely angled end surface. The assembly also has a second fiber having at least one core having a first end. Light may be transmitted along the core. The second end of the first fiber is optically coupled to the first end of the second fiber such that light emitted from the first fiber may be transmitted to the second fiber.
    Type: Application
    Filed: November 3, 2004
    Publication date: May 4, 2006
    Inventors: David Fenwick, Richard Luebs, Terrel Morris, Duane Wegher, Jeffrey Yetter
  • Publication number: 20060093273
    Abstract: In one embodiment, fiber assemblies are provided. The fiber assemblies may have a first fiber and a second fiber. The first fiber may have at least one core having a length and first and second ends. The second end may have a first connector. The second fiber may have at least one core having a length and first and second ends. The second end may have a second connector having at least one magnet. The first connector may be engaged to the second connector, and the at least one magnet may be operated to engage the first connector to the second connector.
    Type: Application
    Filed: November 3, 2004
    Publication date: May 4, 2006
    Inventors: David Fenwick, Richard Luebs, Terrel Morris, Duane Wegher, Jeffrey Yetter
  • Publication number: 20060093271
    Abstract: In one embodiment, method of forming fibers is provided. The method includes modifying a first exposed edge of at least one core of a first fiber. The first fiber has a first end, a second end, and a length between the first end and the second end. The second end has the first exposed edge of the core, and the first exposed edge has a first diffusion state. The first fiber may transmit light along the core. The modification of the first exposed edge includes modifying the first diffusion state of the first exposed edge of the core to a second diffusion state such that light exiting the first exposed edge in the second diffusion state is spread over a greater number of angles relative to angles of the light exiting the first exposed edge in the first diffusion state.
    Type: Application
    Filed: November 3, 2004
    Publication date: May 4, 2006
    Inventors: David Fenwick, Richard Luebs, Terrel Morris, Duane Wegher, Jeffrey Yetter
  • Publication number: 20060093361
    Abstract: Systems are provided having, for example, at least first and second processing units, an optical bus system coupled to the at least first and second processing units, and an optical bus controller coupled to the optical bus system. The optical bus system includes a plurality of optical switches and each optical switch includes, for example, at least a first switch state for directing light in at least a first direction and a second switch state for directing light in at least a second direction. Methods for optical bus communication are also provided.
    Type: Application
    Filed: November 3, 2004
    Publication date: May 4, 2006
    Inventors: David Fenwick, Richard Luebs, Terrel Morris, Duane Wegher
  • Publication number: 20060062528
    Abstract: Apparatus for connecting an interconnecting cable between first and second printed circuit (PC) boards comprises: a base member disposed on a side of the first PC board for fixedly attaching one end of the interconnecting cable to the first PC board; a first connector attached to the other end of the interconnecting cable; a second connector disposed on a side of the second PC board; and a spring member attached to the base member for supporting the first connector away from the side of the first PC board, the spring member operative to force the first connector against the side of the second PC board to cause slidable engagement of the first and second connectors when one of the first and second PC boards is slid past the other of the first and second PC boards.
    Type: Application
    Filed: September 20, 2004
    Publication date: March 23, 2006
    Inventors: Terrel Morris, David Fenwick, Richard Luebs, Duane Wegher, Jeffry Yetter
  • Publication number: 20060050754
    Abstract: An array of light beam emitter sections comprises: a substrate having a surface divided into an array of sections; and a grouping of light emitters disposed at each surface section and configured to emit light beams at different emission angles with respect to the surface. Also disclosed is apparatus for establishing optical communication channels between the array of light beam emitter sections and an array of light detectors. The apparatus comprises a controller coupled to the arrays of emitter sections and detectors for mapping at least one light emitter of each grouping with a light detector of the detector array to establish optical communication channels between the arrays based on the mappings.
    Type: Application
    Filed: September 9, 2004
    Publication date: March 9, 2006
    Inventors: Terrel Morris, David Fenwick, Richard Luebs, Duane Wegher, Jeffry Yetter
  • Publication number: 20060034572
    Abstract: A system for configuring fiber optic communication channels between arrays of emitters and detectors comprises: an array of light emitters; an array of light detectors; a bundle of optical fibers disposed between the arrays of light emitters and light detectors for conducting light from the light emitters to the light detectors, wherein a diameter of each optical fiber in the bundle is greater than a diameter of light emitted from each light emitter in the array, and wherein an area cross-section of the bundle of optical fibers overlaps the array of light emitters and the array of light detectors; and logic for mapping at least one emitter to at least one detector to establish at least one fiber optic communication channel between the array of light emitters and the array of light detectors. A counterpart method is also disclosed.
    Type: Application
    Filed: August 10, 2004
    Publication date: February 16, 2006
    Inventors: Terrel Morris, David Fenwick, Richard Luebs, Duane Wegher, Jeffry Yetter
  • Publication number: 20060034560
    Abstract: Optical communication apparatus comprises: a first IC assembly disposed at a first PCB and comprising: a first IC package electrically coupled to circuits of the first PCB and having an opening in a bottom layer thereof; a first array of optical elements disposed in and electrically coupled to the first IC package and aligned with the bottom layer opening; and a tube of optical fibers disposed in the bottom layer opening with one end aligned under the first array and another end protruding out from the bottom layer of the first package and extending through a hole in the first PCB; a second IC assembly disposed at a second PCB, arranged in parallel with the first PCB, and comprising: a second IC package electrically coupled to circuits of the second PCB and having an opening in a top layer thereof; and a second array of optical elements disposed at the second IC package and electrically coupled thereto through the top layer opening; and wherein the second array being optically aligned with the optical fiber t
    Type: Application
    Filed: August 10, 2004
    Publication date: February 16, 2006
    Inventors: Terrel Morris, David Fenwick, Richard Luebs, Duane Wegher, Jeffrey Yetter