Patents by Inventor David KUIPER

David KUIPER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FORMULATIONS FOR HIGH SELECTIVE SILICON NITRIDE ETCH
    Publication number: 20210054287
    Abstract: Compositions useful for the selective removal of silicon nitride materials relative to polysilicon, silicon oxide materials and/or silicide materials from a microelectronic device having same thereon are provided. The compositions of the invention are particularly useful in the etching of 3D NAND structures.
    Type: Application
    Filed: August 21, 2020
    Publication date: February 25, 2021
    Inventors: Daniela WHITE, David KUIPER, Susan DIMEO
  • AMINOIODOSILANES AND METHODS OF SYNTHESIZING THESE AMINOIODOSILANES
    Publication number: 20200231616
    Abstract: Methods of synthesizing aminoiodosilanes are disclosed. The reaction to produce the disclosed aminoiodosilanes is represented by the formula: SiI4+z(NH2R1)?SiIy(NHR1)z, wherein R1 is selected from a C1-C10 alkyl or cycloalkyl, aryl, or a hetero group; y=1 to 3; and z=4?y.
    Type: Application
    Filed: April 2, 2020
    Publication date: July 23, 2020
    Inventors: Thomas H. BAUM, Manish KHANDELWAL, David KUIPER
  • PREPARATION OF TRIIODOSILANES
    Publication number: 20200181178
    Abstract: Provided is a process for preparing certain silane precursor compounds, e.g., triiodosilane from trichlorosilane utilizing lithium iodide in powder form and catalyzed by tertiary amines. The process provides triiodosilane in high yields and high purity. Triiodosilane is a precursor compound useful in the atomic layer deposition of silicon onto various microelectronic device structures.
    Type: Application
    Filed: December 6, 2019
    Publication date: June 11, 2020
    Inventors: David KUIPER, Manish KHANDELWAL, Thomas M. CAMERON, Thomas H. BAUM, John CLEARY
  • Aminoiodosilanes and methods of synthesizing these aminoiodosilanes
    Patent number: 10640523
    Abstract: Methods of synthesizing aminoiodosilanes are disclosed. The reaction to produce the disclosed aminoiodosilanes is represented by the formula: SiI4+z(NH2R1)=SiIy(NHR1)z, wherein R1 is selected from a C1-C10 alkyl or cycloalkyl, aryl, or a hetero group; y=1 to 3; and z=4?y.
    Type: Grant
    Filed: January 8, 2019
    Date of Patent: May 5, 2020
    Assignee: ENTEGRIS, INC.
    Inventors: Thomas H. Baum, Manish Khandelwal, David Kuiper
  • AMINOIODOSILANES AND METHODS OF SYNTHESIZING THESE AMINOIODOSILANES
    Publication number: 20190218238
    Abstract: Methods of synthesizing aminoiodosilanes are disclosed. The reaction to produce the disclosed aminoiodosilanes is represented by the formula: SiI4+z(NH2R1)=SiIy(NHR1)z, wherein R1 is selected from a C1-C10 alkyl or cycloalkyl, aryl, or a hetero group; y=1 to 3; and z=4?y.
    Type: Application
    Filed: January 8, 2019
    Publication date: July 18, 2019
    Inventors: Thomas H. BAUM, Manish KHANDELWAL, David KUIPER