Patents by Inventor David Martin Hemenway

David Martin Hemenway has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser micromachining using programmable pulse shapes
    Patent number: 7817686
    Abstract: Laser pulse shaping techniques produce tailored laser pulse spectral output. The laser pulses can be programmed to have desired pulse widths and pulse shapes (such as sub-nanosecond to 10 ns-20 ns pulse widths with 1 ns to several nanoseconds leading edge rise times). Preferred embodiments are implemented with one or more electro-optical modulators receiving drive signals that selectively change the amount of incident pulsed laser emission to form a tailored pulse output. Triggering the drive signal from the pulsed laser emission suppresses jitter associated with other stages of the link processing system and substantially removes jitter associated with pulsed laser emission build-up time.
    Type: Grant
    Filed: March 27, 2008
    Date of Patent: October 19, 2010
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Xiaoyuan Peng, Brian W. Baird, William J. Jordens, David Martin Hemenway
  • LASER MICROMACHINING USING PROGRAMMABLE PULSE SHAPES
    Publication number: 20090245301
    Abstract: Laser pulse shaping techniques produce tailored laser pulse spectral output. The laser pulses can be programmed to have desired pulse widths and pulse shapes (such as sub-nanosecond to 10 ns-20 ns pulse widths with 1 ns to several nanoseconds leading edge rise times). Preferred embodiments are implemented with one or more electro-optical modulators receiving drive signals that selectively change the amount of incident pulsed laser emission to form a tailored pulse output. Triggering the drive signal from the pulsed laser emission suppresses jitter associated with other stages of the link processing system and substantially removes jitter associated with pulsed laser emission build-up time.
    Type: Application
    Filed: March 27, 2008
    Publication date: October 1, 2009
    Applicant: Electro Sciencitfic Industries, Inc.
    Inventors: Xiaoyuan Peng, Brian W. Baird, William J. Jordens, David Martin Hemenway
  • Method of suppressing distortion of a working laser beam of a laser link processing system
    Patent number: 7423818
    Abstract: A method of suppressing distortion of a working laser beam directed for incidence on a target specimen presented for processing by a laser link processing system uses a spatial filter to remove stray light-induced distortion from the working laser beam.
    Type: Grant
    Filed: May 24, 2006
    Date of Patent: September 9, 2008
    Assignee: Electro Scientific Industries, Inc.
    Inventors: David Martin Hemenway, Brady Nilsen, Ho Wai Lo, Keith Grant
  • Systems and methods for semiconductor structure processing using multiple laser beam spots
    Publication number: 20080124816
    Abstract: Methods and systems selectively irradiate structures on or within a semiconductor substrate using multiple laser beams. The structures may be laser-severable conductive links, and the purpose of the irradiation may be to sever selected links.
    Type: Application
    Filed: October 30, 2007
    Publication date: May 29, 2008
    Applicant: Electro Scientific Industries, Inc.
    Inventors: Kelly J. Bruland, Stephen N. Swaringen, Brian W. Baird, Ho Wai Lo, David Martin Hemenway
  • Methods and systems for semiconductor structure processing using multiple laser beam spots
    Publication number: 20080121627
    Abstract: Methods and systems selectively irradiate structures on or within a semiconductor substrate using multiple laser beams. The structures may be laser-severable conductive links, and the purpose of the irradiation may be to sever selected links.
    Type: Application
    Filed: October 30, 2007
    Publication date: May 29, 2008
    Applicant: Electro Scientific Industries, Inc.
    Inventors: Kelly J. Bruland, Stephen N. Swaringen, Brian W. Baird, Ho Wai Lo, David Martin Hemenway, Brady Nilsen