Patents by Inventor David R. Evans

David R. Evans has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120073635
    Abstract: A method is provided for forming a tandem dye-sensitized solar cell (DSC) using a bonding process. The method forms a first photovoltaic (PV) cell including a cathode, a first dye, and an anode. A second PV cell is also formed including a cathode, a second dye, and an anode. The second PV cell anode is bonded to the first PV cell cathode, at a temperature of less than 100 degrees C., using a transparent conductive adhesive. In response to the bonding, an internal series electrical connection is formed between the first PV cell and the second PV cell. In one aspect, the second PV cell is formed from a first titanium oxide (TiO2) nanotube (TNT) layer anode.
    Type: Application
    Filed: September 28, 2010
    Publication date: March 29, 2012
    Inventors: Jong-Jan Lee, David R. Evans, Karen Yuri Nishimura, Sean Andrew Vail, Wei Pan
  • Patent number: 7968419
    Abstract: A method is provided for forming a metal/semiconductor/metal (MSM) back-to-back Schottky diode from a silicon (Si) semiconductor. The method deposits a Si semiconductor layer between a bottom electrode and a top electrode, and forms a MSM diode having a threshold voltage, breakdown voltage, and on/off current ratio. The method is able to modify the threshold voltage, breakdown voltage, and on/off current ratio of the MSM diode in response to controlling the Si semiconductor layer thickness. Generally, both the threshold and breakdown voltage are increased in response to increasing the Si thickness. With respect to the on/off current ratio, there is an optimal thickness. The method is able to form an amorphous Si (a-Si) and polycrystalline Si (polySi) semiconductor layer using either chemical vapor deposition (CVD) or DC sputtering. The Si semiconductor can be doped with a Group V donor material, which decreases the threshold voltage and increases the breakdown voltage.
    Type: Grant
    Filed: September 21, 2008
    Date of Patent: June 28, 2011
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Tingkai Li, Sheng Teng Hsu, David R. Evans
  • Patent number: 7714354
    Abstract: A method is provided for electroforming metal integrated circuit structures. The method comprises: forming an opening such as a via or line through an interlevel insulator, exposing a substrate surface; forming a base layer overlying the interlevel insulator and substrate surface; forming a strike layer overlying the base layer; forming a top layer overlying the strike layer; selectively etching to remove the top layer overlying the substrate surface, exposing a strike layer surface; and, electroforming a metal structure overlying the strike layer surface. The electroformed metal structure is deposited using an electroplating or electroless deposition process. Typically, the metal is Cu, Au, Ir, Ru, Rh, Pd, Os, Pt, or Ag. The base, strike, and top layers can be deposited using physical vapor deposition (PVD), evaporation, reactive sputtering, or metal organic chemical vapor deposition (MOCVD).
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: May 11, 2010
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: David R. Evans, John W. Hartzell
  • Patent number: 7696550
    Abstract: A multi-layer PrxCa1-xMnO3 (PCMO) thin film capacitor and associated deposition method are provided for forming a bipolar switching thin film. The method comprises: forming a bottom electrode; depositing a nanocrystalline PCMO layer; depositing a polycrystalline PCMO layer; forming a multi-layer PCMO film with bipolar switching properties; and, forming top electrode overlying the PCMO film. If the polycrystalline layers are deposited overlying the nanocrystalline layers, a high resistance can be written with narrow pulse width, negative voltage pulses. The PCMO film can be reset to a low resistance using a narrow pulse width, positive amplitude pulse. Likewise, if the nanocrystalline layers are deposited overlying the polycrystalline layers, a high resistance can be written with narrow pulse width, positive voltage pulses, and reset to a low resistance using a narrow pulse width, negative amplitude pulse.
    Type: Grant
    Filed: May 22, 2007
    Date of Patent: April 13, 2010
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Tingkai Li, Lawrence J. Charneski, Wei-Wei Zhuang, David R. Evans, Sheng Teng Hsu
  • Patent number: 7633108
    Abstract: A method is provided for forming a metal/semiconductor/metal (MSM) current limiter and resistance memory cell with an MSM current limiter. The method provides a substrate; forms an MSM bottom electrode overlying the substrate; forms a ZnOx semiconductor layer overlying the MSM bottom electrode, where x is in the range between about 1 and about 2, inclusive; and, forms an MSM top electrode overlying the semiconductor layer. The ZnOx semiconductor can be formed through a number of different processes such as spin-coating, direct current (DC) sputtering, radio frequency (RF) sputtering, metalorganic chemical vapor deposition (MOCVD), or atomic layer deposition (ALD).
    Type: Grant
    Filed: August 15, 2007
    Date of Patent: December 15, 2009
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Tingkai Li, Sheng Teng Hsu, Wei-Wei Zhuang, David R. Evans
  • Patent number: 7625595
    Abstract: A method of monitoring synthesis of PCMO precursor solutions includes preparing a PCMO precursor solution and withdrawing samples of the precursor solution at intervals during a reaction phase of the PCMO precursor solution synthesis. The samples of the PCMO precursor solution are analyzed by UV spectroscopy to determine UV transmissivity of the samples of the PCMO precursor solution and the samples used to form PCMO thin films. Electrical characteristics of the PCMO thin films formed from the samples are determined to identify PCMO thin films having optimal electrical characteristics. The UV spectral characteristics of the PCMO precursor solutions are correlated with the PCMO thin films having optimal electrical characteristics. The UV spectral characteristics are used to monitor synthesis of future batches of the PCMO precursor solutions, which will result in PCMO thin films having optimal electrical characteristics.
    Type: Grant
    Filed: April 11, 2006
    Date of Patent: December 1, 2009
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Wei-Wei Zhuang, David R. Evans, Tingkai Li, Sheng Teng Hsu
  • Patent number: 7589464
    Abstract: A device and a fabrication method are provided for an EL device with a nanotip-contoured phosphor layer. The method comprises: forming a bottom electrode with nanotips; forming a phosphor layer overlying the bottom electrode, having irregularly-shaped top and bottom surfaces; and, forming a top electrode overlying the phosphor layer. The bottom electrode top surface has a nanotip contour, and the phosphor layer irregularly-shaped top and bottom surfaces have contours approximately matching the bottom electrode top surface nanotip contour. In one aspect, a contoured bottom dielectric is interposed between the bottom electrode and the phosphor layer, having top and bottoms surfaces with contours approximately matching the nanotip contour. Likewise, a top dielectric may be interposed between the top electrode and the phosphor layer, having a bottom surface with a contour approximately matching the contour of phosphor layer top surface.
    Type: Grant
    Filed: March 1, 2005
    Date of Patent: September 15, 2009
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: John F. Conley, Jr., David R. Evans, Wei Gao, Yoshi Ono
  • Publication number: 20090040924
    Abstract: A cable modem termination system (CMTS) is adapted to move particular traffic flows to a different priority service flow. The CMTS includes detection logic, or is coupled to detection logic, to detect the presence of particular traffic, logic to establish a different priority service flow between a cable modem termination system and a cable modem, and flow control logic to direct a given packet on to the different priority service flow if the given packet contains information that matches one or more classifiers.
    Type: Application
    Filed: August 11, 2008
    Publication date: February 12, 2009
    Applicant: ARRIS
    Inventor: David R. Evans
  • Publication number: 20090032817
    Abstract: A method is provided for forming a metal/semiconductor/metal (MSM) back-to-back Schottky diode from a silicon (Si) semiconductor. The method deposits a Si semiconductor layer between a bottom electrode and a top electrode, and forms a MSM diode having a threshold voltage, breakdown voltage, and on/off current ratio. The method is able to modify the threshold voltage, breakdown voltage, and on/off current ratio of the MSM diode in response to controlling the Si semiconductor layer thickness. Generally, both the threshold and breakdown voltage are increased in response to increasing the Si thickness. With respect to the on/off current ratio, there is an optimal thickness. The method is able to form an amorphous Si (a-Si) and polycrystalline Si (polySi) semiconductor layer using either chemical vapor deposition (CVD) or DC sputtering. The Si semiconductor can be doped with a Group V donor material, which decreases the threshold voltage and increases the breakdown voltage.
    Type: Application
    Filed: September 21, 2008
    Publication date: February 5, 2009
    Inventors: Tingkai Li, Sheng Teng Hsu, David R. Evans
  • Patent number: 7446010
    Abstract: A method is provided for forming a metal/semiconductor/metal (MSM) back-to-back Schottky diode from a silicon (Si) semiconductor. The method deposits a Si semiconductor layer between a bottom electrode and a top electrode, and forms a MSM diode having a threshold voltage, breakdown voltage, and on/off current ratio. The method is able to modify the threshold voltage, breakdown voltage, and on/off current ratio of the MSM diode in response to controlling the Si semiconductor layer thickness. Generally, both the threshold and breakdown voltage are increased in response to increasing the Si thickness. With respect to the on/off current ratio, there is an optimal thickness. The method is able to form an amorphous Si (a-Si) and polycrystalline Si (polySi) semiconductor layer using either chemical vapor deposition (CVD) or DC sputtering. The Si semiconductor can be doped with a Group V donor material, which decreases the threshold voltage and increases the breakdown voltage.
    Type: Grant
    Filed: May 17, 2006
    Date of Patent: November 4, 2008
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Tingkai Li, Sheng Teng Hsu, David R. Evans
  • Patent number: 7446014
    Abstract: A method is provided for forming a NanoElectroChemical (NEC) cell. The method provides a bottom electrode with a top surface. Nanowire shells are formed. Each nanowire shell has a nanowire and a sleeve, with the nanowire connected to the bottom electrode top surface. A top electrode is formed overlying the nanowire shells. A main cavity is formed between the top electrode and bottom electrodes, partially displaced by a first plurality of nanowire shells. Electrolyte cavities are formed between the sleeves and nanowires by etching the first sacrificial layer. In one aspect, electrolyte cavities are formed between the bottom electrode top surface and a shell coating layer joining the sleeve bottom openings. Then, the main and electrolyte cavities are filled with either a liquid or gas phase electrolyte. In a different aspect, the first sacrificial layer is a solid phase electrolyte that is not etched away.
    Type: Grant
    Filed: October 12, 2006
    Date of Patent: November 4, 2008
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Fengyan Zhang, David R. Evans, Sheng Teng Hsu
  • Patent number: 7407858
    Abstract: A method of fabricating a RRAM includes preparing a substrate and forming a bottom electrode ori the substrate. A PCMO layer is deposited on the bottom electrode using MOCVD or liquid MOCVD, followed by a post-annealing process. The deposited PCMO thin film has a crystallized PCMO structure or a nano-size and amorphous PCMO structure. A top electrode is formed on the PCMO layer.
    Type: Grant
    Filed: April 11, 2006
    Date of Patent: August 5, 2008
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Tingkai Li, Sheng Teng Hsu, David R. Evans
  • Patent number: 7405098
    Abstract: A method is provided for forming a liquid phase epitaxial (LPE) germanium (Ge)-on-insulator (GOI) thin-film with a smooth surface. The method provides a silicon (Si) wafer, forms a silicon nitride insulator layer overlying the Si wafer, and selectively etches the silicon nitride insulator layer, forming a Si seed access region. Then, the method conformally deposits Ge overlying the silicon nitride insulator layer and Si seed access region, forming a Ge layer with a first surface roughness, and smoothes the Ge layer using a chemical-mechanical polish (CMP) process. Typically, the method encapsulates the Ge layer and anneals the Ge layer to form a LPE Ge layer. A Ge layer is formed with a second surface roughness, less than the first surface roughness. In some aspects, the method forms an active device in the LPE Ge layer.
    Type: Grant
    Filed: January 25, 2006
    Date of Patent: July 29, 2008
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Jong-Jan Lee, Jer-Shen Maa, Douglas J. Tweet, David R. Evans, Allen Burmaster
  • Patent number: 7390725
    Abstract: Transistors fabricated on SSOI (Strained Silicon On Insulator) substrate, which comprises a strained silicon layer disposed directly on an insulator layer, have enhanced device performance due to the strain-induced band modification of the strained silicon device channel and the limited silicon volume because of the insulator layer. The present invention discloses SSOI substrate fabrication processes comprising various novel approaches. One is the use of a thin relaxed SiGe layer as the strain-induced seed layer to facilitate integration and reduce processing cost. Another is the formation of split implant microcracks deep in the silicon substrate to reduce the number of threading dislocations reaching the strained silicon layer. And lastly is a two step annealing/thinning process for the strained silicon/SiGe multilayer film transfer without blister or flaking formation.
    Type: Grant
    Filed: November 21, 2005
    Date of Patent: June 24, 2008
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Jer-shen Maa, Jong-Jan Lee, Douglas J. Tweet, David R. Evans, Allen W. Burmaster, Sheng Teng Hsu
  • Publication number: 20080142970
    Abstract: A planarized nanowire structure and a method for planarizing a nanowire structure are presented. The method provides nanowires with tips, formed overlying a substrate. A first insulator layer is deposited partially covering the nanowires. The first insulator layer is coated with a spin-on insulator layer, completely covering the nanowires. In some aspects of the method, the spin-on insulator layer is annealed. The spin-on insulator layer is then polished with a slurry and, in response to the polishing, a planarized insulator surface is formed with exposed nanowire tips.
    Type: Application
    Filed: December 14, 2006
    Publication date: June 19, 2008
    Inventors: David R. Evans, Lisa H. Stecker, Allen Burmaster
  • Patent number: 7364989
    Abstract: A method of controlling strain in a single-crystal, epitaxial oxide film, includes preparing a silicon substrate; forming a silicon alloy layer taken from the group of silicon alloy layer consisting of Si1-xGex and Si1-yCy on the silicon substrate; adjusting the lattice constant of the silicon alloy layer by selecting the alloy material content to adjust and to select a type of strain for the silicon alloy layer; depositing a single-crystal, epitaxial oxide film, by atomic layer deposition, taken from the group of oxide films consisting of perovskite manganite materials, single crystal rare-earth oxides and perovskite oxides, not containing manganese; and rare earth binary and ternary oxides, on the silicon alloy layer; and completing a desired device.
    Type: Grant
    Filed: July 1, 2005
    Date of Patent: April 29, 2008
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Douglas J. Tweet, Yoshi Ono, David R. Evans, Sheng Teng Hsu
  • Patent number: 7364665
    Abstract: A method of selectively etching a three-layer structure consisting of SiO2, In2O3, and titanium, includes etching the SiO2, stopping at the titanium layer, using C3F8 in a range of between about 10 sccm to 30 sccm; argon in a range of between about 20 sccm to 40 sccm, using an RF source in a range of between about 1000 watts to 3000 watts and an RF bias in a range of between about 400 watts to 800 watts at a pressure in a range of between about 2 mtorr to 6 mtorr; and etching the titanium, stopping at the In2O3 layer, using BCl in a range of between about 10 sccm to 50 sccm; chlorine in a range of between about 40 sccm to 80 sccm, a Tcp in a range of between about 200 watts to 500 watts at an RF bias in a range of between about 100 watts to 200 watts at a pressure in a range of between about 4 mtorr to 8 mtorr.
    Type: Grant
    Filed: October 21, 2004
    Date of Patent: April 29, 2008
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Tingkai Li, Bruce D. Ulrich, David R. Evans, Sheng Teng Hsu
  • Publication number: 20080096345
    Abstract: A method is provided for forming a NanoElectroChemical (NEC) cell. The method provides a bottom electrode with a top surface. Nanowire shells are formed. Each nanowire shell has a nanowire and a sleeve, with the nanowire connected to the bottom electrode top surface. A top electrode is formed overlying the nanowire shells. A main cavity is formed between the top electrode and bottom electrodes, partially displaced by a first plurality of nanowire shells. Electrolyte cavities are formed between the sleeves and nanowires by etching the first sacrificial layer. In one aspect, electrolyte cavities are formed between the bottom electrode top surface and a shell coating layer joining the sleeve bottom openings. Then, the main and electrolyte cavities are filled with either a liquid or gas phase electrolyte. In a different aspect, the first sacrificial layer is a solid phase electrolyte that is not etched away.
    Type: Application
    Filed: October 12, 2006
    Publication date: April 24, 2008
    Inventors: Fengyan Zhang, David R. Evans, Sheng Teng Hsu
  • Patent number: 7361574
    Abstract: A method is provided for transferring a single-crystal silicon (Si) film to a glass substrate. The method deposits a germanium (Ge)-containing material overlying a Si wafer, forming a sacrificial Ge-containing film. A single-crystal Si film is formed overlying the sacrificial Ge-containing film. The Si film surface is bonded to a transparent substrate, forming a bonded substrate. The bonded substrate is immersed in a Ge etching solution to remove the sacrificial Ge-containing film, which separates the transparent substrate from the Si wafer. The result is a transparent substrate with an overlying single crystal Si film. Optionally, channels can be formed to distribute the Ge etching solution, and promote the removal of the Ge-containing film.
    Type: Grant
    Filed: November 17, 2006
    Date of Patent: April 22, 2008
    Assignee: Sharp Laboratories of America, Inc
    Inventors: Jer-Shen Maa, David R. Evans, Jong-Jan Lee, Douglas J. Tweet, Sheng Teng Hsu
  • Patent number: 7306962
    Abstract: A method is provided for electroforming metal integrated circuit structures. The method comprises: forming an opening such as a via or line through an interlevel insulator, exposing a substrate surface; forming a base layer overlying the interlevel insulator and substrate surface; forming a strike layer overlying the base layer; forming a top layer overlying the strike layer; selectively etching to remove the top layer overlying the substrate surface, exposing a strike layer surface; and, electroforming a metal structure overlying the strike layer surface. The electroformed metal structure is deposited using an electroplating or electroless deposition process. Typically, the metal is Cu, Au, Ir, Ru, Rh, Pd, Os, Pt, or Ag. The base, strike, and top layers can be deposited using physical vapor deposition (PVD), evaporation, reactive sputtering, or metal organic chemical vapor deposition (MOCVD).
    Type: Grant
    Filed: June 17, 2004
    Date of Patent: December 11, 2007
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: David R. Evans, John W. Hartzell