Abstract: A lower electrode assembly useful for supporting a semiconductor substrate in a plasma processing chamber includes a temperature controlled lower base plate, an upper plate, a mounting groove surrounding a bond layer and an edge seal comprising an elastomeric band having an outer concave surface in an uncompressed state, the band mounted in the groove such that upper and lower ends of the band are axially compressed and a maximum outward bulging of the band is no greater than a predetermined distance.

Abstract: A kit comprising an installation fixture, a plurality of mechanical fasteners and an embedding tool is provided which allows for an elastomer band to be disposed in a mounting groove around a semiconductor substrate support in a manner that relieves the internal stresses of the elastomer band, leading to an elastomer band with a longer operational lifetime. The installation fixture is secured to a substrate support with mechanical fasteners. An elastomer band is placed around an outer circumference of the installation fixture and rotated back and forth to relieve internal stresses of the elastomer band. The fixture is inverted and the elastomer band is slid vertically off the fixture and into the mounting groove. An embedding tool can be used to completely insert the elastomer band into the mounting groove.

Abstract: An improved gas injection assembly for mounting in a central bore of a dielectric window of an inductively coupled plasma chamber includes a window having a central bore and cylindrical recess configured to receive an annular insert having a bayonet opening. The gas injector assembly includes a gas injector, an RF shield surrounding the gas injector, and a faceplate surrounding the RF shield, the faceplate including projections at the bottom thereof for engaging the bayonet opening in the annular insert. The window and gas injection assembly are designed to avoid chipping of the window which is typically made of quartz and in prior mounting arrangements the window has a bayonet opening machined therein. Due to the brittle nature of the quartz material, the machined bayonet opening was subject to chipping when the gas injector assembly was inserted into the bayonet opening.

Abstract: A lower electrode assembly useful for supporting a semiconductor substrate in a plasma processing chamber includes a temperature controlled lower base plate, an upper plate, a mounting groove surrounding a bond layer and an edge seal comprising an elastomeric band having an outer concave surface in an uncompressed state, the band mounted in the groove such that upper and lower ends of the band are axially compressed and a maximum outward bulging of the band is no greater than a predetermined distance.

Abstract: A method is provided for treating a bipolar ESC having a front surface and a back surface, the front surface including an anodized layer. The method includes eliminating the anodized layer, disposing a new anodized layer onto the front surface, and treating the new anodized layer with water to seal the new anodized layer.

Abstract: Systems and methods of rendering curves through iterative refinement are disclosed. One such method of rendering a curve from a polygonal control loop 0P comprises iteratively applying k subdivisions described by Js to a series of polygons starting with 0P, where each subdivision is applied to the previous polygon.

Abstract: A keypad includes a substrate and one or more layers of decorative material on the substrate. Transparent and/or conventional conductive materials are disposed on the decorative material. Electrical circuit components are soldered to the conductive layers.

Abstract: Atomic oxygen generated in oxygen stripping plasmas reacts with and damages low-k dielectric materials during stripping of dielectric post etch residues. While damage of low-k dielectric materials during stripping of dielectric post etch residues is lower with hydrogen stripping plasmas, hydrogen stripping plasmas exhibit lower strip rates. Inclusion of oxygen in a hydrogen stripping plasma improves both photoresist strip rate and uniformity, while maintaining a hydrogen to oxygen ratio avoids low-k dielectric material damage.

Abstract: The present invention includes methods, kits and bandages that accommodate a medical device extending from an incision in a patient. The bandage includes an outer surface, inner absorbent layer and one or more closure mechanisms. The outer surface includes a slit extending from an outer peripheral edge to an inner peripheral edge that forms an aperture to accommodate a medical device. The inner absorbent layer is in contact with the outer surface and at least partially spans the aperture to accommodate the medical device. The one or more closure mechanisms are used to substantially seal the slit. The bandage is positioned about the incision and secured about the medical device for absorption.

Abstract: Surface modeling systems and techniques are described which approximate Catmull-Clark subdivision surfaces. A quadrilateral mesh is analyzed by applying shape and tangent masks to faces on the quad-mesh. Through application of the shape masks, a shape patch is created which approximates the subdivision limit surface. This shape patch can be used for rendering surface shape. Through application of tangent masks, tangent patches are created which comprise tangent vectors which give rise to continuous normal vector fields, which can be used for shading of the surface.

Abstract: According to one embodiment of the invention, a method for displaying information is provided. The method includes providing an identity information section, a product information section, and a notes section. The method also includes identifying a plurality of categories of transaction information associated with the particular one of the customers. The method also includes displaying, on a same single layout, the identity information section, the product information section, the notes section, a plurality of tabs identifying the respective categories of transaction information, and the window.

Abstract: According to one embodiment of the invention, a method for displaying information is provided. The method includes providing an identity information section, a product information section, and a notes section. The method also includes identifying a plurality of categories of transaction information associated with the particular one of the customers. The method also includes displaying, on a same single layout, the identity information section, the product information section, the notes section, a plurality of tabs identifying the respective categories of transaction information, and the window.

Abstract: An insert earphone comprises a housing and at least one transducer that is located in the housing. The transducer is adapted to receive electrical energy and to responsively convert the electrical energy into acoustic energy for presentation to an eardrum of a user. The transducer is positioned within the housing so as to be in close proximity to the eardrum of the user when the housing is inserted into the ear canal. At least one sealing member is coupled to the housing. The at least one sealing member is adapted to provide an acoustic seal within the ear canal of the user.

Abstract: An image output device includes a marking engine and a media path adjacent the marking engine. The media path has a media transportation direction and a media transport element (e.g., a nip drive, a belt drive, a suction drive, an air pressure drive, etc.) within the media path that moves the media along the media path in the media transportation direction. A drive motor is operatively connected to the media transport element. The drive motor provides drive force in a forward direction that causes the media transport element to move media along the media path in the media transportation direction. The drive motor can also provide the drive force in a reverse direction opposite the forward direction. A one-way drive transfer device (e.g., a one-way clutch, a one-way swing arm mechanism, etc.) is operatively connected to the drive motor. The one-way drive transfer device only transfers drive force from the drive motor when the drive motor operates in the reverse direction.

Abstract: A method for etching a trench is provided. The method initiates with providing a substrate having a patterned feature. The method includes alternating between deposition of a protective layer onto inner surfaces of the patterned feature and etching the trench into the substrate. The alternating may be achieved through a gas modulation technique and in one embodiment, the deposition and the etching are performed in the same chamber, i.e., the substrate does not move to a different chamber between the etch and deposition processes. The alternating is continued until the trench is completed and then the trench is filled. A semiconductor processing system is also provided.

Abstract: Atomic oxygen generated in oxygen stripping plasmas reacts with and damages low-k dielectric materials during stripping of dielectric post etch residues. While damage of low-k dielectric materials during stripping of dielectric post etch residues is lower with hydrogen stripping plasmas, hydrogen stripping plasmas exhibit lower strip rates. Inclusion of oxygen in a hydrogen stripping plasma improves both photoresist strip rate and uniformity, while maintaining a hydrogen to oxygen ratio avoids low-k dielectric material damage.