Patents by Inventor David Y. Wang

David Y. Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190227698
    Abstract: Disclosed are a method and a computer system for splitting and merging files via a motion input on a graphical user interface. The method comprises determining existence of a motion input; splitting the file into split multiple partial files based on pre-configurations; and generating multiple partial file icons representing the split multiple partial files on the graphical user interface. The multiple partial files may be subsequently merged together.
    Type: Application
    Filed: April 3, 2019
    Publication date: July 25, 2019
    Inventors: David SC. Chen, Micky WT. Chiang, Chao Y. Huang, Chia-Hsueh Lin, Der-Joung Wang
  • Publication number: 20190195782
    Abstract: The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulse trains for use in multi-wavelength time-sequential optical metrology.
    Type: Application
    Filed: February 25, 2019
    Publication date: June 27, 2019
    Inventors: Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady, Derrick A. Shaughnessy
  • Patent number: 10318105
    Abstract: Disclosed are a method and a computer system for splitting and merging files via a motion input on a graphical user interface. The method comprises determining existence of a motion input; splitting the file into split multiple partial files based on pre-configurations; and generating multiple partial file icons representing the split multiple partial files on the graphical user interface. The multiple partial files may be subsequently merged together.
    Type: Grant
    Filed: February 24, 2015
    Date of Patent: June 11, 2019
    Assignee: International Business Machines Corporation
    Inventors: David S C Chen, Micky W T Chiang, Chao Y. Huang, Chia-Hsueh Lin, Der-Joung Wang
  • Patent number: 10234763
    Abstract: An article is prepared with surface regions having different contact angles. A reactive silane material is attached to a surface having a reactive tail component that is contacted with a first corresponding reactant, followed by imagewise UV exposure to cause imagewise reaction of the reactive tail component and first corresponding reactant, forming reacted regions and latent reaction regions. After rinsing, a second corresponding reactant that is capable of reaction with the reactive moiety is applied. Uniform UV exposure leads to a second reaction product only in the latent reaction regions. After rinsing, first regions comprise exclusively the first reaction product and second regions comprising exclusively the second reaction product. These first and second regions have contact angles that differ by 10-110 degrees. A composition can be applied that is exclusively attracted to either the first regions or the second regions, but not to both the first and second regions.
    Type: Grant
    Filed: May 11, 2017
    Date of Patent: March 19, 2019
    Assignee: EASTMAN KODAK COMPANY
    Inventors: Silas Owusu-Nkwantabisah, Roberta Dileo Benedict, David Y. Wang
  • Patent number: 10215693
    Abstract: Methods and systems for performing spectroscopic reflectometry measurements of semiconductor structures at infrared wavelengths are presented herein. In some embodiments measurement wavelengths spanning a range from 750 nanometers to 2,600 nanometers, or greater, are employed. In one aspect, reflectometry measurements are performed at oblique angles to reduce the influence of backside reflections on measurement results. In another aspect, a broad range of infrared wavelengths are detected by a detector that includes multiple photosensitive areas having different sensitivity characteristics. Collected light is linearly dispersed across the surface of the detector according to wavelength. Each different photosensitive area is arranged on the detector to sense a different range of incident wavelengths. In this manner, a broad range of wavelengths are detected with high signal to noise ratio by a single detector.
    Type: Grant
    Filed: December 18, 2016
    Date of Patent: February 26, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Shankar Krishnan, David Y. Wang
  • Patent number: 10215688
    Abstract: The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulse trains for use in multi-wavelength time-sequential optical metrology.
    Type: Grant
    Filed: July 22, 2016
    Date of Patent: February 26, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady, Derrick A. Shaughnessy
  • Publication number: 20180329302
    Abstract: An article is prepared with surface regions having different contact angles. A reactive silane material is attached to a surface having a reactive tail component that is contacted with a first corresponding reactant, followed by imagewise UV exposure to cause imagewise reaction of the reactive tail component and first corresponding reactant, forming reacted regions and latent reaction regions. After rinsing, a second corresponding reactant that is capable of reaction with the reactive moiety is applied. Uniform UV exposure leads to a second reaction product only in the latent reaction regions. After rinsing, first regions comprise exclusively the first reaction product and second regions comprising exclusively the second reaction product. These first and second regions have contact angles that differ by 10-110 degrees. A composition can be applied that is exclusively attracted to either the first regions or the second regions, but not to both the first and second regions.
    Type: Application
    Filed: May 11, 2017
    Publication date: November 15, 2018
    Inventors: Silas Owusu-Nkwantabisah, Roberta Dileo Benedict, David Y. Wang
  • Publication number: 20180238814
    Abstract: Methods and systems for performing spectroscopic measurements of semiconductor structures including ultraviolet, visible, and infrared wavelengths greater than two micrometers are presented herein. A spectroscopic measurement system includes a combined illumination source including a first illumination source that generates ultraviolet, visible, and near infrared wavelengths (wavelengths less than two micrometers) and a second illumination source that generates mid infrared and long infrared wavelengths (wavelengths of two micrometers and greater). Furthermore, the spectroscopic measurement system includes one or more measurement channels spanning the range of illumination wavelengths employed to perform measurements of semiconductor structures. In some embodiments, the one or more measurement channels simultaneously measure the sample throughout the wavelength range. In some other embodiments, the one or more measurement channels sequentially measure the sample throughout the wavelength range.
    Type: Application
    Filed: February 14, 2018
    Publication date: August 23, 2018
    Inventors: Noam Sapiens, Shankar Krishnan, David Y. Wang, Alexander Buettner, Kerstin Purrucker, Kevin A. Peterlinz
  • Patent number: 9970863
    Abstract: Methods and systems for performing broadband spectroscopic metrology with reduced sensitivity to focus errors are presented herein. Significant reductions in sensitivity to focus position error are achieved by imaging the measurement spot onto the detector such that the direction aligned with the plane of incidence on the wafer surface is oriented perpendicular to the direction of wavelength dispersion on the detector surface. This reduction in focus error sensitivity enables reduced focus accuracy and repeatability requirements, faster focus times, and reduced sensitivity to wavelength errors without compromising measurement accuracy. In a further aspect, the dimension of illumination field projected on the wafer plane in the direction perpendicular to the plane of incidence is adjusted to optimize the resulting measurement accuracy and speed based on the nature of target under measurement.
    Type: Grant
    Filed: August 24, 2015
    Date of Patent: May 15, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Shankar Krishnan, Guorong V. Zhuang, David Y. Wang, Xuefeng Liu
  • Publication number: 20180088040
    Abstract: Methods and systems for performing spectroscopic reflectometry measurements of semiconductor structures at infrared wavelengths are presented herein. In some embodiments measurement wavelengths spanning a range from 750 nanometers to 2,600 nanometers, or greater, are employed. In one aspect, reflectometry measurements are performed at oblique angles to reduce the influence of backside reflections on measurement results. In another aspect, a broad range of infrared wavelengths are detected by a detector that includes multiple photosensitive areas having different sensitivity characteristics. Collected light is linearly dispersed across the surface of the detector according to wavelength. Each different photosensitive area is arranged on the detector to sense a different range of incident wavelengths. In this manner, a broad range of wavelengths are detected with high signal to noise ratio by a single detector.
    Type: Application
    Filed: December 18, 2016
    Publication date: March 29, 2018
    Inventors: Shankar Krishnan, David Y. Wang
  • Patent number: 9921152
    Abstract: Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures at ultraviolet, visible, and infrared wavelengths are presented herein. In another aspect, wavelength errors are reduced by orienting the direction of wavelength dispersion on the detector surface perpendicular to the projection of the plane of incidence onto the detector surface. In another aspect, a broad range of infrared wavelengths are detected by a detector that includes multiple photosensitive areas having different sensitivity characteristics. Collected light is linearly dispersed across the surface of the detector according to wavelength. Each different photosensitive area is arranged on the detector to sense a different range of incident wavelengths. In this manner, a broad range of infrared wavelengths are detected with high signal to noise ratio by a single detector. These features enable high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.
    Type: Grant
    Filed: October 27, 2016
    Date of Patent: March 20, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Shankar Krishnan, David Y. Wang
  • Patent number: 9921104
    Abstract: Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures over a broad range of angles of incidence (AOI), azimuth angles, or both, are presented herein. Spectra including two or more sub-ranges of angles of incidence, azimuth angles, or both, are simultaneously measured over different sensor areas at high throughput. Collected light is linearly dispersed across different photosensitive areas of one or more detectors according to wavelength for each subrange of AOIs, azimuth angles, or both. Each different photosensitive area is arranged on the one or more detectors to perform a separate spectroscopic measurement for each different range of AOIs, azimuth angles, or both. In this manner, a broad range of AOIs, azimuth angles, or both, are detected with high signal to noise ratio, simultaneously. This approach enables high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.
    Type: Grant
    Filed: November 7, 2016
    Date of Patent: March 20, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Shankar Krishnan, Alexander Buettner, Kerstin Purrucker, David Y. Wang
  • Patent number: 9857292
    Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.
    Type: Grant
    Filed: November 7, 2016
    Date of Patent: January 2, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Lawrence Rotter, Klaus Flock, Muzammil Arain, David Y. Wang
  • Publication number: 20170356800
    Abstract: Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures over a broad range of angles of incidence (AOI), azimuth angles, or both, are presented herein. Spectra including two or more sub-ranges of angles of incidence, azimuth angles, or both, are simultaneously measured over different sensor areas at high throughput. Collected light is linearly dispersed across different photosensitive areas of one or more detectors according to wavelength for each subrange of AOIs, azimuth angles, or both. Each different photosensitive area is arranged on the one or more detectors to perform a separate spectroscopic measurement for each different range of AOIs, azimuth angles, or both. In this manner, a broad range of AOIs, azimuth angles, or both, are detected with high signal to noise ratio, simultaneously. This approach enables high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.
    Type: Application
    Filed: November 7, 2016
    Publication date: December 14, 2017
    Inventors: Shankar Krishnan, Alexander Buettner, Kerstin Purrucker, David Y. Wang
  • Patent number: 9740309
    Abstract: The present invention relates to a finger-driven computer mouse. The finger-driven computer mouse includes a mouse housing and finger retention device adjacent thereto. The user inserts his or her finger tips in the finger retention device and can position the mouse across a flat surface by actions of the fingers except the thumb which is used to operate mouse buttons arranged on a side surface. The finger-driven mouse allows the wrist and hand muscles to be in a relaxed, natural posture.
    Type: Grant
    Filed: August 20, 2015
    Date of Patent: August 22, 2017
    Inventor: David Y. Wang
  • Publication number: 20170205342
    Abstract: Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures at ultraviolet, visible, and infrared wavelengths are presented herein. In another aspect, wavelength errors are reduced by orienting the direction of wavelength dispersion on the detector surface perpendicular to the projection of the plane of incidence onto the detector surface. In another aspect, a broad range of infrared wavelengths are detected by a detector that includes multiple photosensitive areas having different sensitivity characteristics. Collected light is linearly dispersed across the surface of the detector according to wavelength. Each different photosensitive area is arranged on the detector to sense a different range of incident wavelengths. In this manner, a broad range of infrared wavelengths are detected with high signal to noise ratio by a single detector. These features enable high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.
    Type: Application
    Filed: October 27, 2016
    Publication date: July 20, 2017
    Inventors: Shankar Krishnan, David Y. Wang
  • Publication number: 20170052112
    Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.
    Type: Application
    Filed: November 7, 2016
    Publication date: February 23, 2017
    Inventors: Lawrence Rotter, Klaus Flock, Muzammil Arain, David Y. Wang
  • Publication number: 20170016815
    Abstract: The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulses trains for use in multi-wavelength time-sequential optical metrology.
    Type: Application
    Filed: July 22, 2016
    Publication date: January 19, 2017
    Inventors: Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady, Derrick A. Shaughnessy
  • Patent number: 9519093
    Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.
    Type: Grant
    Filed: August 22, 2014
    Date of Patent: December 13, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Lawrence Rotter, Klaus Flock, Muzammil Arain, David Y. Wang
  • Publication number: 20160245741
    Abstract: Methods and systems for performing broadband spectroscopic metrology with reduced sensitivity to focus errors are presented herein. Significant reductions in sensitivity to focus position error are achieved by imaging the measurement spot onto the detector such that the direction aligned with the plane of incidence on the wafer surface is oriented perpendicular to the direction of wavelength dispersion on the detector surface. This reduction in focus error sensitivity enables reduced focus accuracy and repeatability requirements, faster focus times, and reduced sensitivity to wavelength errors without compromising measurement accuracy. In a further aspect, the dimension of illumination field projected on the wafer plane in the direction perpendicular to the plane of incidence is adjusted to optimize the resulting measurement accuracy and speed based on the nature of target under measurement.
    Type: Application
    Filed: August 24, 2015
    Publication date: August 25, 2016
    Inventors: Shankar Krishnan, Guorong V. Zhuang, David Y. Wang, Xuefeng Liu