Patents by Inventor Der-Chyang Yeh
Der-Chyang Yeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20250054894Abstract: A device includes a first die, an interconnect structure, a RDL layer, a guard structure and an underfill layer. The interconnect structure is electrically connected to the first die. The RDL layer is disposed in a dielectric layer. The guard structure is disposed in the dielectric layer to define a connector region, wherein the guard structure and the interconnect structure are disposed on opposite sides of the die. The underfill layer surrounds the interconnect structure, the first die and the guard structure, wherein the underfill layer is kept outside of the connector region by the guard structure.Type: ApplicationFiled: October 29, 2024Publication date: February 13, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hua-Wei Tseng, Yueh-Ting Lin, Shao-Yun Chen, Li-Hsien Huang, An-Jhih Su, Ming-Shih Yeh, Der-Chyang Yeh
-
Patent number: 12211782Abstract: A package comprises at least one first device die, and a redistribution line (RDL) structure having the at least one first device die bonded thereto. The RDL structure comprises a plurality of dielectric layers, and a plurality of RDLs formed through the plurality of dielectric layers. A trench is defined proximate to axial edges of the RDL structure through each of the plurality of dielectric layers. The trench prevents damage to portions of the RDL structure located axially inwards of the trench.Type: GrantFiled: August 10, 2023Date of Patent: January 28, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yueh-Ting Lin, Hua-Wei Tseng, Ming Shih Yeh, Der-Chyang Yeh
-
Patent number: 12191224Abstract: A semiconductor package includes a circuit substrate, a die, a frame structure, and a heat sink lid. The die is disposed on the circuit substrate and electrically connected with the circuit substrate. The die includes two first dies disposed side by side and separate from each other with a gap between two facing sidewalls of the two first dies. The frame structure is disposed on the circuit substrate and surrounding the die. The heat sink lid is disposed on the die and the frame structure. The head sink lid has a slit that penetrates through the heat sink lid in a thickness direction and exposes the gap between the two facing sidewalls of the two first dies.Type: GrantFiled: November 6, 2022Date of Patent: January 7, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wei-Chih Lai, Chien-Chia Chiu, Chen-Hua Yu, Der-Chyang Yeh, Cheng-Hsien Hsieh, Li-Han Hsu, Tsung-Shu Lin, Wei-Cheng Wu, Yu-Chen Hsu
-
Publication number: 20240429142Abstract: A semiconductor device includes first IC dies disposed side-by-side, a second IC die overlapping and electrically coupled to the first IC dies, and first conductive features. Each first IC die includes first and second die connectors. A first pitch of the first die connectors is less than a second pitch of the second die connectors and is substantially equal to a third pitch of the third die connectors of the second IC die. The first conductive features are interposed between and electrically coupled to the first and third die connectors. Each first conductive feature includes at least a first conductive bump and at least a first conductive joint.Type: ApplicationFiled: June 26, 2023Publication date: December 26, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Hung Tseng, Tzu-Sung Huang, Tsung-Hsien Chiang, An-Jhih Su, Yu-Jin Hu, Hua-Wei Tseng, Cheng-Hsien Hsieh, Wei-Cheng Wu, Der-Chyang Yeh
-
Publication number: 20240421111Abstract: A package device includes a top die having a top interconnect structure on a first surface of a transistor layer and a bottom interconnect structure on a second surface of the transistor layer. One of the top interconnect structure or the bottom interconnect structure is direct bonded onto a bottom die. The bottom interconnect structure includes a power rail which directly contacts transistor contacts that are directly contacting a transistor structure in the transistor layer.Type: ApplicationFiled: November 10, 2023Publication date: December 19, 2024Inventors: Hung-Pin Chang, Wei-Cheng Wu, Der-Chyang Yeh
-
Publication number: 20240421077Abstract: A package device for 3D stacking of integrated circuits includes a semiconductor substrate, and an interconnect structure on the semiconductor substrate. The interconnect structure is organized into a plurality of device regions, and the device has a first seal ring extending vertically through the interconnect structure in a first device region, and a second seal ring extending vertically through the interconnect structure in a second device region. The interconnect structure also includes a conductive line electrically connecting a metallization pattern within the first seal ring to a second metallization pattern within the second seal ring, wherein the first horizontally extending conductive line extends through the first seal ring and the second seal ring.Type: ApplicationFiled: November 10, 2023Publication date: December 19, 2024Inventors: Hung-Pin Chang, Wei-Cheng Wu, Der-Chyang Yeh
-
Patent number: 12170207Abstract: Stacked semiconductor devices and methods of forming the same are provided. Contact pads are formed on a die. A passivation layer is blanket deposited over the contact pads. The passivation layer is subsequently patterned to form first openings, the first openings exposing the contact pads. A buffer layer is blanket deposited over the passivation layer and the contact pads. The buffer layer is subsequently patterned to form second openings, the second opening exposing a first set of the contact pads. First conductive pillars are formed in the second openings. Conductive lines are formed over the buffer layer simultaneously with the first conductive pillars, ends of the conductive lines terminating with the first conductive pillars. An external connector structure is formed over the first conductive pillars and the conductive lines, the first conductive pillars electrically coupling the contact pads to the external connector structure.Type: GrantFiled: August 10, 2023Date of Patent: December 17, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Hsien-Wei Chen, Der-Chyang Yeh, Li-Hsien Huang
-
Publication number: 20240413097Abstract: In an embodiment, a package include an integrated circuit die comprising a first insulating bonding layer and a first semiconductor substrate and an interposer comprising a second insulating bonding layer and a second semiconductor substrate. The second insulating bonding layer is directly bonded to the first insulating bonding layer with dielectric-to-dielectric bonds. The package further includes an encapsulant over the interposer and surrounding the integrated circuit die. The encapsulant is further disposed between the first insulating bonding layer and the second insulating bonding layer along a line perpendicular to a major surface of the first semiconductor substrate.Type: ApplicationFiled: August 17, 2023Publication date: December 12, 2024Inventors: Hung-Pin Chang, Cheng-Hsien Hsieh, Li-Han Hsu, Wei-Cheng Wu, Der-Chyang Yeh
-
Publication number: 20240413101Abstract: In an embodiment, a package includes an integrated circuit die comprising a first insulating bonding layer and a first semiconductor substrate and an interposer comprising a second insulating bonding layer, a first seal ring, and a second semiconductor substrate. The second insulating bonding layer is directly bonded to the first insulating bonding layer with dielectric-to-dielectric bonds, and wherein the integrated circuit die overlaps the first seal ring. A sidewall of the integrated circuit die is exposed at an outer sidewall of the package.Type: ApplicationFiled: August 18, 2023Publication date: December 12, 2024Inventors: Hung-Pin Chang, Cheng-Hsien Hsieh, Li-Han Hsu, Wei-Cheng Wu, Der-Chyang Yeh
-
Publication number: 20240413102Abstract: A method includes etching a portion of a wafer to form a first trench in a scribe line of the wafer, wherein the scribe line is between a first device die and a second device die of the wafer. After the etching, a top surface of the portion of wafer in the scribe line is underlying and exposed to the first trench, and the first trench is between opposing sidewalls of the wafer. A laser grooving process is then performed to form a second trench extending from the top surface further down into the wafer, and the second trench is laterally between the opposing sidewalls of the wafer. A die-saw process is then performed to saw the wafer. The die-saw process is performed from a bottom of the second trench, and the die-saw process results in the first device die to be separated from the second device die.Type: ApplicationFiled: September 7, 2023Publication date: December 12, 2024Inventors: Hung-Pin Chang, Cheng-Hsien Hsieh, Li-Han Hsu, Wei-Cheng Wu, Der-Chyang Yeh
-
Patent number: 12159853Abstract: A package structure including IPD and method of forming the same are provided. The package structure includes a die, an encapsulant laterally encapsulating the die, a first RDL structure disposed on the encapsulant and the die, an IPD disposed on the first RDL structure and an underfill layer. The IPD includes a substrate, a first connector on a first side of the substrate and electrically connected to the first RDL structure, a guard structure on a second side of the substrate opposite to the first side and laterally surrounding a connector region, and a second connector disposed within the connector region and electrically connected to a conductive via embedded in the substrate. The underfill layer is disposed to at least fill a space between the first side of the IPD and the first RDL structure. The underfill layer is separated from the connector region by the guard structure.Type: GrantFiled: January 17, 2023Date of Patent: December 3, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hua-Wei Tseng, Yueh-Ting Lin, Shao-Yun Chen, Li-Hsien Huang, An-Jhih Su, Ming-Shih Yeh, Der-Chyang Yeh
-
Publication number: 20240387263Abstract: Embodiments provide a high aspect ratio via for coupling a top electrode of a vertically oriented component to the substrate, where the top electrode of the component is coupled to the via by a conductive bridge, and where the bottom electrode of the component is coupled to substrate. Some embodiments provide for mounting the component by a component wafer and separating the components while mounted to the substrate. Some embodiments provide for mounting individual components to the substrate.Type: ApplicationFiled: July 31, 2024Publication date: November 21, 2024Inventors: Chen-Hua Yu, Chi-Hsi Wu, Wen-Chih Chiou, Tsang-Jiuh Wu, Der-Chyang Yeh, Ming Shih Yeh, An-Jhih Su
-
Publication number: 20240379482Abstract: A semiconductor device and a forming method thereof are provided. The semiconductor device includes an integrated circuit (IC) die and an encapsulant. The IC die includes a semiconductor substrate and an interconnect structure connected to the semiconductor substrate, the semiconductor substrate includes a first ledge, and the interconnect structure includes a second ledge. The encapsulant extends along the first ledge of the first semiconductor substrate and the second ledge of the first interconnect structure.Type: ApplicationFiled: May 12, 2023Publication date: November 14, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Pin Chang, Der-Chyang Yeh, Wei-Cheng Wu
-
Patent number: 12142524Abstract: Embodiments provide a high aspect ratio via for coupling a top electrode of a vertically oriented component to the substrate, where the top electrode of the component is coupled to the via by a conductive bridge, and where the bottom electrode of the component is coupled to substrate. Some embodiments provide for mounting the component by a component wafer and separating the components while mounted to the substrate. Some embodiments provide for mounting individual components to the substrate.Type: GrantFiled: July 21, 2022Date of Patent: November 12, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chen-Hua Yu, Chi-Hsi Wu, Wen-Chih Chiou, Tsang-Jiuh Wu, Der-Chyang Yeh, Ming Shih Yeh, An-Jhih Su
-
Publication number: 20240371840Abstract: A package structure and the manufacturing method thereof are provided. The package structure includes a first package including at least one first semiconductor die encapsulated in an insulating encapsulation and through insulator vias electrically connected to the at least one first semiconductor die, a second package including at least one second semiconductor die and conductive pads electrically connected to the at least one second semiconductor die, and solder joints located between the first package and the second package. The through insulator vias are encapsulated in the insulating encapsulation. The first package and the second package are electrically connected through the solder joints. A maximum size of the solder joints is greater than a maximum size of the through insulator vias measuring along a horizontal direction, and is greater than or substantially equal to a maximum size of the conductive pads measuring along the horizontal direction.Type: ApplicationFiled: July 15, 2024Publication date: November 7, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wei-Yu Chen, An-Jhih Su, Chi-Hsi Wu, Der-Chyang Yeh, Li-Hsien Huang, Po-Hao Tsai, Ming-Shih Yeh, Ta-Wei Liu
-
Publication number: 20240355721Abstract: A semiconductor package includes a semiconductor die including an active surface and an electrical terminal on the active surface, and a redistribution circuitry disposed on the active surface of the semiconductor die and connected to the electrical terminal. A top surface of the redistribution circuitry includes a planar portion and a concave portion connected to the planar portion, the concave portion is directly over the electrical terminal, and a minimum distance measured from a lowest point of the concave portion to a virtual plane where the planar portion is located is equal to or smaller than 0.5 ?m.Type: ApplicationFiled: July 1, 2024Publication date: October 24, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Li-Hsien Huang, An-Jhih Su, Der-Chyang Yeh, Hua-Wei Tseng, Chiang Lin, Ming-Shih Yeh
-
Publication number: 20240339370Abstract: A method includes bonding a composite die on a redistribution structure. The composite die comprises a device die including a semiconductor substrate, a through-semiconductor via penetrating through the semiconductor substrate, a metal via at a surface of the device die, and a sacrificial carrier attached to the device die. The composite die is encapsulated in an encapsulant. A planarization process is performed on the composite die and the encapsulant, and the sacrificial carrier is removed to reveal the metal via. A conductive feature is formed to electrically couple to the metal via.Type: ApplicationFiled: June 5, 2023Publication date: October 10, 2024Inventors: Chien-Fu Tseng, Der-Chyang Yeh, Hung-Pin Chang, Cheng-Hsien Hsieh, Li-Han Hsu, Meng-Tsan Lee, Wei-Cheng Wu, Chin-Te Wang
-
Publication number: 20240332202Abstract: A package structure and method of forming the same are provided. The package structure includes a first die and a second die disposed side by side, a first encapsulant laterally encapsulating the first and second dies, a bridge die disposed over and connected to the first and second dies, and a second encapsulant. The bridge die includes a semiconductor substrate, a conductive via and an encapsulant layer. The semiconductor substrate has a through substrate via embedded therein. The conductive via is disposed over a back side of the semiconductor substrate and electrically connected to the through substrate via. The encapsulant layer is disposed over the back side of the semiconductor substrate and laterally encapsulates the conductive via. The second encapsulant is disposed over the first encapsulant and laterally encapsulates the bridge die.Type: ApplicationFiled: June 6, 2024Publication date: October 3, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Hung Lin, Chih-Wei Wu, Chia-Nan Yuan, Ying-Ching Shih, An-Jhih Su, Szu-Wei Lu, Ming-Shih Yeh, Der-Chyang Yeh
-
Patent number: 12087745Abstract: A package structure and the manufacturing method thereof are provided. The package structure includes a first package including at least one first semiconductor die encapsulated in an insulating encapsulation and through insulator vias electrically connected to the at least one first semiconductor die, a second package including at least one second semiconductor die and conductive pads electrically connected to the at least one second semiconductor die, and solder joints located between the first package and the second package. The through insulator vias are encapsulated in the insulating encapsulation. The first package and the second package are electrically connected through the solder joints. A maximum size of the solder joints is greater than a maximum size of the through insulator vias measuring along a horizontal direction, and is greater than or substantially equal to a maximum size of the conductive pads measuring along the horizontal direction.Type: GrantFiled: October 26, 2023Date of Patent: September 10, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wei-Yu Chen, An-Jhih Su, Chi-Hsi Wu, Der-Chyang Yeh, Li-Hsien Huang, Po-Hao Tsai, Ming-Shih Yeh, Ta-Wei Liu
-
Publication number: 20240282743Abstract: A method of manufacturing a semiconductor device structure includes forming a bond or joint between a first device and a second device. The first device comprises an integrated passive device (IPD) and a first contact pad disposed over the IPD. The second device comprises a second contact pad. The first contact pad has a first surface with first lateral extents. The second contact pad has a second surface with second lateral extents. The width of the second lateral extents is less than the width of the first lateral extents. The joint structure includes the first contact pad, the second contact pad, and a solder layer interposed therebetween. The solder layer has tapered sidewalls extending in a direction away from the first surface of the first contact pad to the second surface of the second contact pad. At least one of the first surface or the second surface is substantially planar.Type: ApplicationFiled: May 3, 2024Publication date: August 22, 2024Inventors: Ying-Ju Chen, An-Jhih Su, Hsien-Wei Chen, Der-Chyang Yeh, Chi-Hsi Wu, Chen-Hua Yu