Patents by Inventor Derrick Liu

Derrick Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10170593
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Grant
    Filed: December 20, 2017
    Date of Patent: January 1, 2019
    Assignee: International Business Machines Corporation
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Publication number: 20180358504
    Abstract: A method of forming a metal silicide nanowire network that includes multiple metal silicide nanowires fused together in an orderly arrangement on a substrate. The metal silicide nanowire network can be formed by printing a first set of multiple parallel silicon nanowires on the substrate and printing a second set of multiple parallel silicon nanowires over the first set of multiple parallel silicon nanowires such that said first set is perpendicular to said second set. A metal layer can be formed on the silicon nanowires. A silicidation anneal process is performed such that metal silicide nanowires are formed and fused together in an orderly arrangement, forming a grid network. After the silicidation anneal is performed, any unreacted silicon or metal can be selectively removed.
    Type: Application
    Filed: August 3, 2018
    Publication date: December 13, 2018
    Applicant: International Business Machines Corporation
    Inventors: Jeffrey P. Gambino, Derrick Liu, Daniel S. Vanslette
  • Patent number: 10147839
    Abstract: A method of forming a metal silicide nanowire network that includes multiple metal silicide nanowires fused together in a disorderly arrangement on a substrate. The metal silicide nanowire network can be formed by applying a solution that contains silicon nanowires onto the substrate, forming a metal layer on the silicon nanowires, and performing a silicidation anneal such that the metal silicide nanowires are fused together in a disorderly arrangement, forming a mesh. After the silicidation anneal is performed, any unreacted silicon or metal can be selectively removed.
    Type: Grant
    Filed: August 18, 2015
    Date of Patent: December 4, 2018
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey P. Gambino, Derrick Liu, Daniel S. Vanslette
  • Patent number: 10147725
    Abstract: A method of making a semiconductor device comprises forming a first channel region comprising a first channel region material and a second channel region comprising a second channel region material; disposing a gate dielectric on the first channel region and second channel region; depositing a work function modifying material on the gate dielectric; disposing a mask over the work function modifying material deposited on the gate dielectric disposed on the first channel region; removing the work function modifying material from the unmasked gate dielectric disposed on the second channel region; removing the mask from the work function modifying material deposited on the gate dielectric disposed on the first channel region; forming a first gate electrode on the work function modifying material deposited on the first channel region and forming a second gate electrode on the gate dielectric disposed on the second channel region.
    Type: Grant
    Filed: December 14, 2015
    Date of Patent: December 4, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Ruqiang Bao, Gauri Karve, Derrick Liu, Robert R. Robison, Gen Tsutsui, Reinaldo A. Vega, Koji Watanabe
  • Publication number: 20180342642
    Abstract: A method of forming a metal silicide nanowire network that includes multiple metal silicide nanowires fused together in a disorderly arrangement on a substrate. The metal silicide nanowire network can be formed by applying a solution that contains silicon nanowires onto the substrate, forming a metal layer on the silicon nanowires, and performing a silicidation anneal such that the metal silicide nanowires are fused together in a disorderly arrangement, forming a mesh. After the silicidation anneal is performed, any unreacted silicon or metal can be selectively removed.
    Type: Application
    Filed: August 3, 2018
    Publication date: November 29, 2018
    Applicant: International Business Machines Corporation
    Inventors: Jeffrey P. Gambino, Derrick Liu, Daniel S. Vanslette
  • Patent number: 10121853
    Abstract: A semiconductor structure is provided that includes a semiconductor fin portion having an end wall and extending upward from a substrate. A gate structure straddles a portion of the semiconductor fin portion. A first set of gate spacers is located on opposing sidewall surfaces of the gate structure; and a second set of gate spacers is located on sidewalls of the first set of gate spacers. One gate spacer of the second set of gate spacers has a lower portion that directly contacts the end wall of the semiconductor fin portion.
    Type: Grant
    Filed: October 26, 2017
    Date of Patent: November 6, 2018
    Assignee: International Business Machines Corporation
    Inventors: Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Fee Li Lie, Derrick Liu, Soon-Cheon Seo, Stuart A. Sieg
  • Patent number: 10121852
    Abstract: A semiconductor structure is provided that includes a semiconductor fin portion having an end wall and extending upward from a substrate. A gate structure straddles a portion of the semiconductor fin portion. A first set of gate spacers is located on opposing sidewall surfaces of the gate structure; and a second set of gate spacers is located on sidewalls of the first set of gate spacers. One gate spacer of the second set of gate spacers has a lower portion that directly contacts the end wall of the semiconductor fin portion.
    Type: Grant
    Filed: October 26, 2017
    Date of Patent: November 6, 2018
    Assignee: International Business Machines Corporation
    Inventors: Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Fee Li Lie, Derrick Liu, Soon-Cheon Seo, Stuart A. Sieg
  • Publication number: 20180122813
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Application
    Filed: December 20, 2017
    Publication date: May 3, 2018
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Publication number: 20180083016
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Application
    Filed: October 19, 2017
    Publication date: March 22, 2018
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Publication number: 20180083017
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Application
    Filed: November 27, 2017
    Publication date: March 22, 2018
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Publication number: 20180083015
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Application
    Filed: June 7, 2017
    Publication date: March 22, 2018
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Publication number: 20180083013
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Application
    Filed: September 22, 2016
    Publication date: March 22, 2018
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Patent number: 9922983
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Grant
    Filed: September 22, 2016
    Date of Patent: March 20, 2018
    Assignee: International Business Machines Corporation
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Patent number: 9922984
    Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.
    Type: Grant
    Filed: June 7, 2017
    Date of Patent: March 20, 2018
    Assignee: International Business Machines Corporation
    Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
  • Publication number: 20180069027
    Abstract: A semiconductor structure includes a stained fin, a gate upon the strain fin, and a spacer upon a sidewall of the gate and upon an end surface of the strained fin. The end surface of the strained fin is coplanar with a sidewall of the gate. The spacer limits relaxation of the strained fin.
    Type: Application
    Filed: October 27, 2017
    Publication date: March 8, 2018
    Inventors: Kangguo Cheng, Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Juntao Li, Fee Li Lie, Derrick Liu, Chun Wing Yeung
  • Publication number: 20180061941
    Abstract: A semiconductor structure is provided that includes a semiconductor fin portion having an end wall and extending upward from a substrate. A gate structure straddles a portion of the semiconductor fin portion. A first set of gate spacers is located on opposing sidewall surfaces of the gate structure; and a second set of gate spacers is located on sidewalls of the first set of gate spacers. One gate spacer of the second set of gate spacers has a lower portion that directly contacts the end wall of the semiconductor fin portion.
    Type: Application
    Filed: October 26, 2017
    Publication date: March 1, 2018
    Inventors: Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Fee Li Lie, Derrick Liu, Soon-Cheon Seo, Stuart A. Sieg
  • Publication number: 20180061942
    Abstract: A semiconductor structure is provided that includes a semiconductor fin portion having an end wall and extending upward from a substrate. A gate structure straddles a portion of the semiconductor fin portion. A first set of gate spacers is located on opposing sidewall surfaces of the gate structure; and a second set of gate spacers is located on sidewalls of the first set of gate spacers. One gate spacer of the second set of gate spacers has a lower portion that directly contacts the end wall of the semiconductor fin portion.
    Type: Application
    Filed: October 26, 2017
    Publication date: March 1, 2018
    Inventors: Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Fee Li Lie, Derrick Liu, Soon-Cheon Seo, Stuart A. Sieg
  • Patent number: 9881937
    Abstract: A semiconductor structure includes a first strained fin portion and a second strained fin portion, a pair of inactive inner gate structures upon respective strained fin portions, and spacers upon outer sidewalls surfaces of the inactive inner gate structures, upon the inner sidewall surfaces of the inactive inner gate structures, and upon the first strained fin portion and the second strained fin portion end surfaces. The first strained fin portion and the second strained fin portion end surfaces are coplanar with respective inner sidewall surfaces of the inactive inner gate structures. The spacer formed upon the end surfaces limits relaxation of the first strained fin portion and the second strained fin portion and limits shorting between the first strained fin portion and the second strained fin portion.
    Type: Grant
    Filed: January 3, 2017
    Date of Patent: January 30, 2018
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Juntao Li, Fee Li Lie, Derrick Liu, Chun Wing Yeung
  • Patent number: 9876074
    Abstract: A semiconductor structure is provided that includes a semiconductor fin portion having an end wall and extending upward from a substrate. A gate structure straddles a portion of the semiconductor fin portion. A first set of gate spacers is located on opposing sidewall surfaces of the gate structure; and a second set of gate spacers is located on sidewalls of the first set of gate spacers. One gate spacer of the second set of gate spacers has a lower portion that directly contacts the end wall of the semiconductor fin portion.
    Type: Grant
    Filed: May 22, 2015
    Date of Patent: January 23, 2018
    Assignee: International Business Machines Corporation
    Inventors: Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Fee Li Lie, Derrick Liu, Soon-Cheon Seo, Stuart A. Sieg
  • Publication number: 20170133272
    Abstract: A method of making a semiconductor device comprises forming a first channel region comprising a first channel region material and a second channel region comprising a second channel region material; disposing a gate dielectric on the first channel region and second channel region; depositing a work function modifying material on the gate dielectric; disposing a mask over the work function modifying material deposited on the gate dielectric disposed on the first channel region; removing the work function modifying material from the unmasked gate dielectric disposed on the second channel region; removing the mask from the work function modifying material deposited on the gate dielectric disposed on the first channel region; forming a first gate electrode on the work function modifying material deposited on the first channel region and forming a second gate electrode on the gate dielectric disposed on the second channel region.
    Type: Application
    Filed: December 14, 2015
    Publication date: May 11, 2017
    Inventors: RUQIANG BAO, GAURI KARVE, DERRICK LIU, ROBERT R. ROBISON, GEN TSUTSUI, REINALDO A. VEGA, KOJI WATANABE