Patents by Inventor Derrick Liu
Derrick Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10170593Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.Type: GrantFiled: December 20, 2017Date of Patent: January 1, 2019Assignee: International Business Machines CorporationInventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
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Publication number: 20180358504Abstract: A method of forming a metal silicide nanowire network that includes multiple metal silicide nanowires fused together in an orderly arrangement on a substrate. The metal silicide nanowire network can be formed by printing a first set of multiple parallel silicon nanowires on the substrate and printing a second set of multiple parallel silicon nanowires over the first set of multiple parallel silicon nanowires such that said first set is perpendicular to said second set. A metal layer can be formed on the silicon nanowires. A silicidation anneal process is performed such that metal silicide nanowires are formed and fused together in an orderly arrangement, forming a grid network. After the silicidation anneal is performed, any unreacted silicon or metal can be selectively removed.Type: ApplicationFiled: August 3, 2018Publication date: December 13, 2018Applicant: International Business Machines CorporationInventors: Jeffrey P. Gambino, Derrick Liu, Daniel S. Vanslette
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Patent number: 10147839Abstract: A method of forming a metal silicide nanowire network that includes multiple metal silicide nanowires fused together in a disorderly arrangement on a substrate. The metal silicide nanowire network can be formed by applying a solution that contains silicon nanowires onto the substrate, forming a metal layer on the silicon nanowires, and performing a silicidation anneal such that the metal silicide nanowires are fused together in a disorderly arrangement, forming a mesh. After the silicidation anneal is performed, any unreacted silicon or metal can be selectively removed.Type: GrantFiled: August 18, 2015Date of Patent: December 4, 2018Assignee: International Business Machines CorporationInventors: Jeffrey P. Gambino, Derrick Liu, Daniel S. Vanslette
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Patent number: 10147725Abstract: A method of making a semiconductor device comprises forming a first channel region comprising a first channel region material and a second channel region comprising a second channel region material; disposing a gate dielectric on the first channel region and second channel region; depositing a work function modifying material on the gate dielectric; disposing a mask over the work function modifying material deposited on the gate dielectric disposed on the first channel region; removing the work function modifying material from the unmasked gate dielectric disposed on the second channel region; removing the mask from the work function modifying material deposited on the gate dielectric disposed on the first channel region; forming a first gate electrode on the work function modifying material deposited on the first channel region and forming a second gate electrode on the gate dielectric disposed on the second channel region.Type: GrantFiled: December 14, 2015Date of Patent: December 4, 2018Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Ruqiang Bao, Gauri Karve, Derrick Liu, Robert R. Robison, Gen Tsutsui, Reinaldo A. Vega, Koji Watanabe
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Publication number: 20180342642Abstract: A method of forming a metal silicide nanowire network that includes multiple metal silicide nanowires fused together in a disorderly arrangement on a substrate. The metal silicide nanowire network can be formed by applying a solution that contains silicon nanowires onto the substrate, forming a metal layer on the silicon nanowires, and performing a silicidation anneal such that the metal silicide nanowires are fused together in a disorderly arrangement, forming a mesh. After the silicidation anneal is performed, any unreacted silicon or metal can be selectively removed.Type: ApplicationFiled: August 3, 2018Publication date: November 29, 2018Applicant: International Business Machines CorporationInventors: Jeffrey P. Gambino, Derrick Liu, Daniel S. Vanslette
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Patent number: 10121853Abstract: A semiconductor structure is provided that includes a semiconductor fin portion having an end wall and extending upward from a substrate. A gate structure straddles a portion of the semiconductor fin portion. A first set of gate spacers is located on opposing sidewall surfaces of the gate structure; and a second set of gate spacers is located on sidewalls of the first set of gate spacers. One gate spacer of the second set of gate spacers has a lower portion that directly contacts the end wall of the semiconductor fin portion.Type: GrantFiled: October 26, 2017Date of Patent: November 6, 2018Assignee: International Business Machines CorporationInventors: Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Fee Li Lie, Derrick Liu, Soon-Cheon Seo, Stuart A. Sieg
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Patent number: 10121852Abstract: A semiconductor structure is provided that includes a semiconductor fin portion having an end wall and extending upward from a substrate. A gate structure straddles a portion of the semiconductor fin portion. A first set of gate spacers is located on opposing sidewall surfaces of the gate structure; and a second set of gate spacers is located on sidewalls of the first set of gate spacers. One gate spacer of the second set of gate spacers has a lower portion that directly contacts the end wall of the semiconductor fin portion.Type: GrantFiled: October 26, 2017Date of Patent: November 6, 2018Assignee: International Business Machines CorporationInventors: Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Fee Li Lie, Derrick Liu, Soon-Cheon Seo, Stuart A. Sieg
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Publication number: 20180122813Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.Type: ApplicationFiled: December 20, 2017Publication date: May 3, 2018Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
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Publication number: 20180083016Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.Type: ApplicationFiled: October 19, 2017Publication date: March 22, 2018Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
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Publication number: 20180083017Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.Type: ApplicationFiled: November 27, 2017Publication date: March 22, 2018Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
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Publication number: 20180083015Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.Type: ApplicationFiled: June 7, 2017Publication date: March 22, 2018Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
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Publication number: 20180083013Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.Type: ApplicationFiled: September 22, 2016Publication date: March 22, 2018Inventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
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Patent number: 9922983Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.Type: GrantFiled: September 22, 2016Date of Patent: March 20, 2018Assignee: International Business Machines CorporationInventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
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Patent number: 9922984Abstract: A method of forming an arrangement of long and short fins on a substrate, including forming a plurality of finFET devices having long fins on the substrate, where the long fins have a fin length in the range of about 180 nm to about 350 nm, and forming a plurality of finFET devices having short fins on the substrate, where the short fins have a fin length in the range of about 60 nm to about 140 nm, wherein at least one of the plurality of finFET devices having a long fin is adjacent to at least one of the plurality of finFET devices having a short fin.Type: GrantFiled: June 7, 2017Date of Patent: March 20, 2018Assignee: International Business Machines CorporationInventors: Ruqiang Bao, Dechao Guo, Derrick Liu, Huimei Zhou
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Publication number: 20180069027Abstract: A semiconductor structure includes a stained fin, a gate upon the strain fin, and a spacer upon a sidewall of the gate and upon an end surface of the strained fin. The end surface of the strained fin is coplanar with a sidewall of the gate. The spacer limits relaxation of the strained fin.Type: ApplicationFiled: October 27, 2017Publication date: March 8, 2018Inventors: Kangguo Cheng, Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Juntao Li, Fee Li Lie, Derrick Liu, Chun Wing Yeung
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Publication number: 20180061941Abstract: A semiconductor structure is provided that includes a semiconductor fin portion having an end wall and extending upward from a substrate. A gate structure straddles a portion of the semiconductor fin portion. A first set of gate spacers is located on opposing sidewall surfaces of the gate structure; and a second set of gate spacers is located on sidewalls of the first set of gate spacers. One gate spacer of the second set of gate spacers has a lower portion that directly contacts the end wall of the semiconductor fin portion.Type: ApplicationFiled: October 26, 2017Publication date: March 1, 2018Inventors: Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Fee Li Lie, Derrick Liu, Soon-Cheon Seo, Stuart A. Sieg
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Publication number: 20180061942Abstract: A semiconductor structure is provided that includes a semiconductor fin portion having an end wall and extending upward from a substrate. A gate structure straddles a portion of the semiconductor fin portion. A first set of gate spacers is located on opposing sidewall surfaces of the gate structure; and a second set of gate spacers is located on sidewalls of the first set of gate spacers. One gate spacer of the second set of gate spacers has a lower portion that directly contacts the end wall of the semiconductor fin portion.Type: ApplicationFiled: October 26, 2017Publication date: March 1, 2018Inventors: Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Fee Li Lie, Derrick Liu, Soon-Cheon Seo, Stuart A. Sieg
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Patent number: 9881937Abstract: A semiconductor structure includes a first strained fin portion and a second strained fin portion, a pair of inactive inner gate structures upon respective strained fin portions, and spacers upon outer sidewalls surfaces of the inactive inner gate structures, upon the inner sidewall surfaces of the inactive inner gate structures, and upon the first strained fin portion and the second strained fin portion end surfaces. The first strained fin portion and the second strained fin portion end surfaces are coplanar with respective inner sidewall surfaces of the inactive inner gate structures. The spacer formed upon the end surfaces limits relaxation of the first strained fin portion and the second strained fin portion and limits shorting between the first strained fin portion and the second strained fin portion.Type: GrantFiled: January 3, 2017Date of Patent: January 30, 2018Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Juntao Li, Fee Li Lie, Derrick Liu, Chun Wing Yeung
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Patent number: 9876074Abstract: A semiconductor structure is provided that includes a semiconductor fin portion having an end wall and extending upward from a substrate. A gate structure straddles a portion of the semiconductor fin portion. A first set of gate spacers is located on opposing sidewall surfaces of the gate structure; and a second set of gate spacers is located on sidewalls of the first set of gate spacers. One gate spacer of the second set of gate spacers has a lower portion that directly contacts the end wall of the semiconductor fin portion.Type: GrantFiled: May 22, 2015Date of Patent: January 23, 2018Assignee: International Business Machines CorporationInventors: Bruce B. Doris, Hong He, Sivananda K. Kanakasabapathy, Gauri Karve, Fee Li Lie, Derrick Liu, Soon-Cheon Seo, Stuart A. Sieg
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Publication number: 20170133272Abstract: A method of making a semiconductor device comprises forming a first channel region comprising a first channel region material and a second channel region comprising a second channel region material; disposing a gate dielectric on the first channel region and second channel region; depositing a work function modifying material on the gate dielectric; disposing a mask over the work function modifying material deposited on the gate dielectric disposed on the first channel region; removing the work function modifying material from the unmasked gate dielectric disposed on the second channel region; removing the mask from the work function modifying material deposited on the gate dielectric disposed on the first channel region; forming a first gate electrode on the work function modifying material deposited on the first channel region and forming a second gate electrode on the gate dielectric disposed on the second channel region.Type: ApplicationFiled: December 14, 2015Publication date: May 11, 2017Inventors: RUQIANG BAO, GAURI KARVE, DERRICK LIU, ROBERT R. ROBISON, GEN TSUTSUI, REINALDO A. VEGA, KOJI WATANABE