Abstract: The present disclosure relates to an organic electroluminescent device comprising a first electrode, a second electrode, and at least one organic layer interposed between the first electrode and the second electrode, wherein the organic layer comprises a light-emitting layer and a hole transport zone. By comprising a deuterated compound in at least one of the light-emitting layer and the hole transport zone, it is possible to provide an organic electroluminescent device having improved driving voltage, luminous efficiency, power efficiency, and/or lifetime properties.

Abstract: The present disclosure relates to an organic electroluminescent device comprising an organic electroluminescent compound of high refractive index. According to the present disclosure, an organic electroluminescent device having decreased thickness while implementing a desired color coordinate, or implementing deeper color coordinate in the same device thickness can be provided. As such, the production efficiency of the device can be increased by decreasing the material amount used in the organic electroluminescent device or a broader light-emitting zone can be obtained due to deeper color characteristic in the same device thickness.

Abstract: The present disclosure relates to an organic electroluminescent compound, an organic electroluminescent material comprising the same, and an organic electroluminescent device. By comprising an organic electroluminescent compound according to the present disclosure and an organic electroluminescent material comprising the same, an organic electroluminescent device having low driving voltage and/or high luminous efficiency and/or long lifespan can be provided.

Abstract: The present disclosure relates to an organic electroluminescent device comprising a light-emitting layer and a hole transport zone. By the combination of the light-emitting layer comprising the compound according to the present disclosure and the hole transport zone comprising the compound having a specific HOMO energy level, the organic electroluminescent device having excellent luminous efficiency can be provided.

Abstract: The present disclosure relates to an organic electroluminescent compound, and an organic electroluminescent device comprising the same. By comprising the organic electroluminescent compound of the present disclosure, it is possible to provide an organic electroluminescent device having improved driving voltage, lifetime properties, and/or power efficiency.

Abstract: The present disclosure relates to a plurality of organic electroluminescent materials comprising at least one first compound and at least one second compound, and an organic electroluminescent device comprising the same.

Abstract: The present disclosure relates to an organic electroluminescent compound and an organic electroluminescent device comprising the same. The organic electroluminescent device having improved driving voltage and/or luminous efficiency can be provided by using the organic electroluminescent compound according to the present disclosure.

Abstract: An equipment for inspecting a secondary battery is provided. The equipment includes a loading device on which a secondary battery is loaded in an upright position, and a side portion inspecting device which inspects a side portion of the secondary battery loaded on the loading device, wherein the side portion inspecting device comprises an elevation unit which lifts the secondary battery loaded on the loading device so as to be withdrawn out of the loading device and allows the secondary battery to return to its original position after a first period of time elapses and a side portion inspecting unit which captures an image of the side portion of the secondary battery, which is withdrawn out of the loading device by the elevation unit, thereby inspecting the side portion of the secondary battery.

Abstract: The present disclosure relates to an organic electroluminescent device comprising an organic electroluminescent compound of high refractive index. According to the present disclosure, an organic electroluminescent device having decreased thickness while implementing a desired color coordinate, or implementing deeper color coordinate in the same device thickness can be provided. As such, the production efficiency of the device can be increased by decreasing the material amount used in the organic electroluminescent device or a broader light-emitting zone can be obtained due to deeper color characteristic in the same device thickness.

Abstract: The present disclosure relates to a plurality of light-emitting materials comprising at least one of first compounds and at least one of second compounds, wherein the first compound is represented by formula 1, and the second compound is represented by formula 2, and an organic electroluminescent device having high color purity and/or long lifespan properties can be provided by comprising the plurality of light-emitting materials.

Abstract: Embodiments of the disclosure relate to an improved electrostatic chuck for use in a processing chamber to fabricate semiconductor devices. In one embodiment, a processing chamber includes a chamber body having a processing volume defined therein and an electrostatic chuck disposed within the processing volume. The electrostatic chuck includes a support surface with a plurality of mesas located thereon, one or more electrodes disposed within the electrostatic chuck, and a seasoning layer deposited on the support surface over the plurality of mesas. The support surface is made from an aluminum containing material. The one or more electrodes are configured to form electrostatic charges to electrostatically secure a substrate to the support surface. The seasoning layer is configured to provide cushioning support to the substrate when the substrate is electrostatically secured to the support surface.

Abstract: Embodiments of the present invention generally relate to an apparatus for reducing arcing during thick film deposition in a plasma process chamber. In one embodiment, an edge ring including an inner edge diameter that is about 0.28 inches to about 0.38 inches larger than an outer diameter of a substrate is utilized when depositing a thick (greater than two microns) layer on the substrate. The layer may be a dielectric layer, such as a carbon hard mask layer, for example an amorphous carbon layer. With the 0.14 inches to 0.19 inches gap between the outer edge of substrate and the inner edge of the edge ring during the deposition of the thick layer, substrate support surface arcing is reduced while the layer thickness uniformity is maintained.

Abstract: The present disclosure relates to an organic electroluminescent compound and an organic electroluminescent device comprising the same. The organic electroluminescent device having improved driving voltage and/or current efficiency characteristics can be provided by comprising the organic electroluminescent compound according to the present disclosure.

Abstract: The present disclosure relates to an organic electroluminescent compound and an organic electroluminescent device comprising the same. By comprising the organic electroluminescent compound, an organic electroluminescent device having a low driving voltage and/or a high luminous efficiency and/or a long lifespan can be provided.

Abstract: Methods and techniques for deposition of amorphous carbon films on a substrate are provided. In one example, the method includes depositing an amorphous carbon film on an underlayer positioned on a susceptor in a first processing region. The method further includes implanting a dopant or the inert species into the amorphous carbon film in a second processing region. The implant species, energy, dose & temperature in some combination may be used to enhance the hardmask hardness. The method further includes patterning the doped amorphous carbon film. The method further includes etching the underlayer.

Abstract: A system and method for forming a film includes generating a plasma in a processing volume of a processing chamber to form the film on a substrate. The processing chamber may include a gas distributor configured to generate the plasma in the processing volume. Further, a barrier gas is provided into the processing volume to form a gas curtain around a plasma located in the processing volume. The barrier gas is supplied by a gas supply source through an inlet port disposed along a first side of the processing chamber. Further, an exhaust port is disposed along the first side of the processing chamber and the plasma and the barrier gas is purged via the exhaust port.

Abstract: Implementations of the disclosure generally relate to a method of cleaning a semiconductor processing chamber. In one implementation, a method of cleaning a deposition chamber includes flowing a nitrogen containing gas into a processing region within the deposition chamber, striking a plasma in the processing region utilizing a radio frequency power, introducing a cleaning gas into a remote plasma source that is fluidly connected to the deposition chamber, generating reactive species of the cleaning gas in the remote plasma source, introducing the cleaning gas into the deposition chamber, and removing deposits on interior surfaces of the deposition chamber at different etch rates.

Abstract: Implementations described herein generally relate to the fabrication of integrated circuits. More particularly, the implementations described herein provide techniques for deposition of amorphous carbon films on a substrate. In one implementation, a method of forming an amorphous carbon film is provided. The method comprises depositing an amorphous carbon film on an underlayer positioned on a susceptor in a first processing region. The method further comprises implanting a dopant or inert species into the amorphous carbon film in a second processing region. The dopant or inert species is selected from carbon, boron, nitrogen, silicon, phosphorous, argon, helium, neon, krypton, xenon or combinations thereof. The method further comprises patterning the doped amorphous carbon film. The method further comprises etching the underlayer.

Abstract: Embodiments described herein relate to coating materials with high resistivity for use in processing chambers. To counteract the high charges near the top surface of the thermal conductive support, the top surface of the thermal conductive support can be coated with a high resistivity layer. The high resistivity of the layer reduces the amount of charge at the top surface of the thermally conductive element, greatly reducing or preventing arcing incidents along with reducing electrostatic chucking degradation. The high resistivity layer can also be applied to other chamber components. Embodiments described herein also relate to methods for fabricating a chamber component for use in a processing environment. The component can be fabricated by forming a body of a chamber component, optionally ex-situ seasoning the body, installing the chamber component into a processing chamber, in-situ seasoning the chamber component, and performing a deposition process in the processing chamber.

Abstract: The present disclosure relates to an organic electroluminescent device comprising a light-emitting layer and a hole transport zone. By comprising the combination of the light-emitting layer and the hole transport zone having a certain HOMO energy value according to the present disclosure, an organic electroluminescent device of excellent luminous efficiency while maintaining excellent lifespan or driving voltage characteristic of the device can be provided.