Abstract: The inventive concept provides a wafer type sensor unit which acquires data on a wind direction and a wind velocity of an air flow during processing, the wafer type sensor unit supported by a supporting unit of a substrate processing apparatus. The unit comprising a wafer-shaped circuit board and a hot-wired wind velocity sensor placed apart from an upper surface of the circuit board.

Abstract: Disclosed are an apparatus and a method for quickly and accurately inspecting a droplet on a substrate. An apparatus for inspecting a droplet on a substrate according to an exemplary embodiment of the present disclosure includes: an ultrasonic sensor configured to apply an ultrasonic wave to a droplet on the substrate and detect an ultrasonic wave reflected from the substrate; and a processor configured to acquire a height of the droplet at each position on the substrate on the basis of a signal of the ultrasonic wave reflected from the droplet on the substrate, calculate a volume of the droplet on the basis of the heights of the droplet at the positions, and store or output data in relation to the volume of the droplet. The embodiment of the present disclosure may calculate the volume of the droplet using the ultrasonic wave, thereby quickly and accurately inspecting the droplet on the substrate.

Abstract: A method of controlling a low-power operation of a wireless sensor device includes performing a sensor-active step where the wireless sensor device is active during the time taken for a working mode in which the wireless sensor device performs multiple tasks, and performing a sensor-inactive step where a mode of the wireless sensor device is switched to a sleep mode after the working mode is ended. The performing of the sensor-active step includes receiving, after transmitting sensing data of a sensing target to a host device that monitors and controls the wireless sensor device, operation control information stored in the host device from the host device.

Abstract: The present invention relates to a hybrid supported metallocene catalyst including at least first metallocene compound, at least one second metallocene compound, at least one cocatalyst compound, and a carrier, a preparation method therefor, and a polyolefin resin polymerized in the presence of the catalyst, wherein the second metallocene compound is a compound of a bridged structure having a ligand of an asymmetric structure, and the polyolefin resin has a density of 0.910 g/cm3 to 0.960 g/cm3, a molecular weight density in a unimodal distribution of 3 to 5, a melt index of 0.05 to 100 at 2.16 kg, and a melt flow rate of 20 to 40.

Abstract: An operation method of a communication node in a vehicle network may include detecting a wake-up event; generating a wake-up signal including an identifier indicating a wake-up reason corresponding to the wake-up event based on a wake-up table, the wake-up table configured for storing the wake-up reason corresponding to the wake-up event, a target communication node configured to be woken up by the wake-up reason, and an operation power configured to be supplied to the target communication node; and transmitting the wake-up signal.

Abstract: An operation method of a first end node constituting an Ethernet-based vehicle network includes receiving a first beacon from a second end node, the beacon including first configuration information of a first main-cycle including a plurality of sub-cycles each of which includes N time slots; transmitting a signal in a time slot corresponding to an identifier of the first end node among the N time slots within a sub-cycle #k of the plurality of sub-cycles; and transmitting a signal in a time slot corresponding to the identifier of the first end node among the N time slots in a sub-cycle #(k+1) consecutive with the sub-cycle #k of the plurality of sub-cycles.

Abstract: A data processing apparatus and a vehicle having the same are provided. A data processing apparatus of a vehicle includes: a first memory having a plurality of storage areas to which each address of a plurality of addresses is allocated; and a processor configured to confirm information of data received from a first device, confirm an address corresponding to the received data based on the confirmed information of data, and store the received data in a storage area of the plurality of storage areas corresponding to the confirmed address.

Abstract: The present invention provides a biological use including a bioplatform and a method for detecting a high-sensitivity biomolecule by providing improved quantum yield (QY) and brightness when detecting biomolecules by preparing nanoparticles, which are doped in multiple quantum dots and have a structure of inorganic core particles, a quantum dot buried layer and a silica/quantum dot composite shell, while maintaining a high occupancy and stable bonding.

Abstract: An operation method of a first communication node constituting a vehicle network includes transitioning an operation state of the first communication node to a wake-up state when a preconfigured event is detected; determining whether a physical layer collision avoidance (PLCA) function is deactivated; in response to determining that the PLCA function is deactivated, generating a message including an indicator indicating that the PLCA function is deactivated; and transmitting the message.

Abstract: An error recovery method performed in an end node of an Ethernet-based vehicle network includes: detecting, by a physical (PHY) layer processor of a PHY layer of the end node, a physical error of a message, when the message is received at the PHY layer of the end node; detecting, by a controller processor of a controller included in the end node, a logical error of the message; and classifying, by the controller processor, types of the physical error and the logical error.

Abstract: An operation method of a first communication node among a plurality of communication nodes included in an Ethernet-based vehicle network may include steps of measuring a first link delay for performing time synchronization with a second communication node included in the plurality of communication nodes; calculating a difference between the first link delay and an average value of a plurality of link delays measured before the measurement of the first link delay; comparing the calculated difference with a first threshold value for controlling a link delay measurement cycle for the second communication node; and controlling the link delay measurement cycle for the second communication node based on the comparison result.

Abstract: An operation method of an end node including a physical (PHY) layer unit and a controller unit in a vehicle network includes: detecting, by the controller unit, a local event; in response to detecting the local event, transitioning an operation state of the controller unit from an OFF state to an ON state; transmitting, by the controller unit, to the PHY layer unit an indicator requesting to transmit a wake-up signal in accordance with the local event; and transmitting, by the PHY layer unit, the wake-up signal including an identifier of at least one end node required to be woken up by the local event.

Abstract: An operation method of a first end node in a vehicle network supporting a PLCA function is provided. The method includes performing a monitoring operation in a first time interval configured for communication of the first end node and detecting a transmission request signal transmitted from a second end node by the monitoring operation. In response to detecting the transmission request signal, a transmission operation of the first end node in the first time interval is stopped. The first time interval is used for communication of a second end node instead of the first end node.

Abstract: A communication node in a vehicle network may comprise a medium access control (MAC) layer; a physical (PHY) layer; a first port connected to the PHY layer; a second port connected to the PHY layer; and a switch controlling a connection between the first port and the second port. The switch may turn on or off the connection between the first port and the second port under control of the MAC layer.

Abstract: An antenna apparatus includes a dielectric layer; a patch antenna pattern disposed on an upper surface of the dielectric layer and including an upper surface having a polygonal shape, a plurality of feed vias respectively disposed to penetrate the dielectric layer by at least a portion of a thickness of the dielectric layer, respectively disposed to be biased toward a first side and a second side, different from each other, from a center of the polygonal shape of the patch antenna pattern, and respectively disposed to be spaced apart from the patch antenna pattern, and a plurality of feed patterns respectively electrically connected to an upper end of a corresponding feed via, among the plurality of feed vias, respectively disposed to be spaced apart from the patch antenna pattern, and configured to provide a feed path to the patch antenna pattern, wherein the polygonal shape of the patch antenna pattern has a structure in which the first side and a third side between the first and second sides form an obtuse

Abstract: An antenna apparatus includes a ground plane, a patch antenna pattern disposed on an upper surface of the ground plane, a feed via penetrating the ground plane and spaced apart from the patch antenna pattern, and a coiled feed pattern electrically connected to an upper end of the feed via, spaced apart from the patch antenna pattern, and configured to provide a feed path to the patch antenna pattern, wherein at least a portion of the coiled feed pattern is coiled, wherein the patch antenna pattern includes an aperture portion corresponding to the coiled feed pattern.

Abstract: An antenna apparatus includes a dielectric layer; a patch antenna pattern disposed on an upper surface of the dielectric layer and including an upper surface having a polygonal shape, a plurality of feed vias respectively disposed to penetrate the dielectric layer by at least a portion of a thickness of the dielectric layer, respectively disposed to be biased toward a first side and a second side, different from each other, from a center of the polygonal shape of the patch antenna pattern, and respectively disposed to be spaced apart from the patch antenna pattern, and a plurality of feed patterns respectively electrically connected to an upper end of a corresponding feed via, among the plurality of feed vias, respectively disposed to be spaced apart from the patch antenna pattern, and configured to provide a feed path to the patch antenna pattern, wherein the polygonal shape of the patch antenna pattern has a structure in which the first side and a third side between the first and second sides form an obtuse

Abstract: An antenna apparatus includes a first feed line and a second feed line spaced apart from each other, a ground plane surrounding a portion of each of the first and second feed lines, a first end-fire antenna pattern and a second end-fire antenna pattern having different sizes spaced apart from each other, spaced apart from the ground plane, and respectively electrically connected to the first and second feed lines, and a first feed via and a second feed via respectively electrically connecting the first and second feed lines to the first and second end-fire antenna patterns. The first feed via extends away from the first feed line in one direction, and the second feed via extends away from the second feed line in another direction different from the one direction.

Abstract: An operation method of a first communication node comprises: receiving a first frame from a second communication node; obtaining a destination address of the first frame; and transmitting a second frame including an indicator for indicating an occurrence of an error in the first frame to a communication node corresponding to a source address of the first frame, when a port corresponding to the destination address does not exist in a routing table.

Abstract: According to an exemplary embodiment of the present invention, a substrate treatment apparatus includes a chamber member including a treatment space in which a substrate is to be treated, a substrate support unit installed in the treatment space and supporting a substrate, a chemical ejection unit connected to the chamber member and ejecting a chemical fluid to the substrate support unit, and a steam supply unit connected to the chamber member and supplying steam to the chamber member.