Patents by Inventor Duy-Phach Vu

Duy-Phach Vu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heat treatment machine for semiconductors
    Patent number: 4581520
    Abstract: A heat treatment machine for heat-treating semiconductor wafers, each wafer having two faces. A first lamp is arranged to heat a first spot of first diameter on one face of the wafer and a second lamp is arranged to heat a second spot of second diameter on the other face of the wafer, both by reflection of emitted light off a focusing reflector. The lamps are moved in tandem such that the first spot travels along an Archimedes spiral relative to the center of the stationary wafer. The centers of the spots coincide, and the second diameter is greater than the first diameter.
    Type: Grant
    Filed: September 2, 1983
    Date of Patent: April 8, 1986
    Inventors: Duy-Phach Vu, Michel Haond