Abstract: A recording apparatus including an ink tank and a recording head having a flow path forming portion that has an ejection orifice plate having plural ink ejection orifices and a liquid chamber provided for each orifice to supply ink to the orifices, and an energy generating element for ejecting ink in the chamber. A surface layer of the flow path forming portion opposes to the outside of the plate. An opening is provided opposing to the orifices in the surface layer. An ink reservoir is provided between the plate and the opening. A circulation flow path communicating with the ink reservoir is provided. The area of the opening is larger than that of the orifice. Both ends of the circulation flow path are respectively connected to inlet and outlet portions connected to the circulation flow path. The inlet and outlet portions and liquid chamber are connected to the ink tank.

Abstract: A liquid ejection head including: includes an ejection orifice for ejecting liquid, a pressure chamber communicating with the ejection orifice, a flow path for supplying the liquid to the pressure chamber, and a first heat-generating element and a second heat-generating element for generating energy to be used for ejecting the liquid. The first heat-generating element is arranged in the pressure chamber before the second heat-generating element with respect to a supply direction of the liquid from the flow path to the pressure chamber. A portion between the first heat-generating element and the second heat-generating element is located within a projection of an opening of the ejection orifice, when viewed from a direction in which the liquid is ejected from the ejection orifice.

Abstract: A recording apparatus including an ink tank and a recording head having a flow path forming portion that has an ejection orifice plate having plural ink ejection orifices and a liquid chamber provided for each orifice to supply ink to the orifices, and an energy generating element for ejecting ink in the chamber. A surface layer of the flow path forming portion opposes to the outside of the plate. An opening is provided opposing to the orifices in the surface layer. An ink reservoir is provided between the plate and the opening. A circulation flow path communicating with the ink reservoir is provided. The area of the opening is larger than that of the orifice. Both ends of the circulation flow path are respectively connected to inlet and outlet portions connected to the circulation flow path. The inlet and outlet portions and liquid chamber are connected to the ink tank.

Abstract: A liquid ejection method is effected in a liquid ejection head that includes an ejection orifice for ejecting a liquid, a flow path for supplying the liquid from a liquid supply port to the ejection orifice, and a heat generating element. The heat generating element is rectangular with a long-side to short-side ratio of 2.5 or more for generating thermal energy used to eject the liquid, and a longitudinal direction of the heat generating element is arranged along an extending direction of the flow path. An end portion of the heat generating element on a downstream side with respect to a liquid flowing direction within the flow path is located between an end portion of the ejection orifice on the downstream side and an end portion of the ejection orifice on an upstream side when viewed from a direction in which the liquid is ejected from the ejection orifice.

Abstract: An ink jet recording apparatus including an ink tank for storing an ink, a flow path member communicating with the ink tank and a recording head for ejecting the ink supplied from the ink tank through the flow path member, wherein the apparatus further includes a light detection unit which applies light to at least one of the ink in the ink tank and the ink in the flow path member and detects the intensity of back-scattered light of the applied light, and an image density correction unit which corrects the density of an image to be recorded on the basis of the intensity of the back-scattered light which has been detected by the light detection unit.

Abstract: In a liquid discharge head substrate having a connection line connected to a plurality of energy generating elements, and arranged between adjacent energy generating elements, a distance between the adjacent energy generating elements, between which the connection line is not arranged, is provided to be narrower than a distance of a portion where the connection line is provided.

Abstract: A recording apparatus including an ink tank and a recording head having a flow path forming portion that has an ejection orifice plate having plural ink ejection orifices and a liquid chamber provided for each orifice to supply ink to the orifices, and an energy generating element for ejecting ink in the chamber. A surface layer of the flow path forming portion opposes to the outside of the plate. An opening is provided opposing to the orifices in the surface layer. An ink reservoir is provided between the plate and the opening. A circulation flow path communicating with the ink reservoir is provided. The area of the opening is larger than that of the orifice. Both ends of the circulation flow path are respectively connected to inlet and outlet portions connected to the circulation flow path. The inlet and outlet portions and liquid chamber are connected to the ink tank.

Abstract: A recording apparatus including an ink tank and a recording head having a flow path forming portion that has an ejection orifice plate having plural ink ejection orifices and a liquid chamber provided for each orifice to supply ink to the orifices, and an energy generating element for ejecting ink in the chamber. A surface layer of the flow path forming portion opposes to the outside of the plate. An opening is provided opposing to the orifices in the surface layer. An ink reservoir is provided between the plate and the opening. A circulation flow path communicating with the ink reservoir is provided. The area of the opening is larger than that of the orifice. Both ends of the circulation flow path are respectively connected to inlet and outlet portions connected to the circulation flow path. The inlet and outlet portions and liquid chamber are connected to the ink tank.

Abstract: To remove the deposit including a high dielectric constant film deposited on an inside of a processing chamber, by using a cleaning gas activated only by heat. The method includes the steps of: loading a substrate or a plurality of substrates into the processing chamber; performing processing to deposit the high dielectric constant film on the substrate by supplying processing gas into the processing chamber; unloading the processed substrate from the inside of the processing chamber; and cleaning the inside of the processing chamber by supplying a halide gas and an oxygen based gas into the processing chamber, and removing the deposit including the high dielectric constant film deposited on the inside of the processing chamber, and in the step of cleaning the inside of the processing chamber, the concentration of the oxygen based gas in the halide gas and the oxygen based gas is set to be less than 7%.

Abstract: A liquid ejection head includes: a first and a second common liquid chamber formed in a substrate; a first nozzle array in which short and long nozzles are connected to the first common liquid chamber and alternately arranged on one side of the chamber; a second nozzle array in which short and long nozzles are connected to the first common liquid chamber and alternately arranged on the other side; a third nozzle array in which short and long nozzles are connected to the second common liquid chamber and alternately arranged on one side of the chamber; and a fourth nozzle array in which short and long nozzles are connected to the second common liquid chamber and alternately arranged on the other side; wherein the long and short nozzles formed on the one side and the long and short nozzles formed on the other side are disposed within a pitch P.

Abstract: Provided is a liquid ejection head, including: an ejection orifice for ejecting liquid; a pressure chamber communicating with the ejection orifice; a flow path for supplying the liquid to the pressure chamber; and a first heat-generating element and a second heat-generating element for generating energy to be used for ejecting the liquid, which are arranged in the pressure chamber in the mentioned order in a supply direction of the liquid from the flow path to the pressure chamber, in which a portion between the first heat-generating element and the second heat-generating element is located in an opening of the ejection orifice, when viewed from a direction in which the liquid is ejected from the ejection orifice.

Abstract: There is provided a substrate processing apparatus, comprising: a processing chamber in which a plurality of substrates are housed, the substrate having thereon a lamination film composed of any one of copper-indium, copper-gallium, or copper-indium-gallium; a reaction tube formed so as to constitute the processing chamber; a gas supply tube configured to introduce elemental selenium-containing gas or elemental sulfur-containing gas to the processing chamber; an exhaust tube configured to exhaust an atmosphere in the processing chamber; and a heating section provided so as to surround the reaction tube, wherein a porous coating film having a void rate of 5% to 15% mainly composed of a mixture of chromium oxide (CrxOy:x, y are arbitrary integer of 1 or more) silica is formed on a surface exposed to at least the elemental selenium-containing gas or the elemental sulfur-containing gas, out of the surface of the reaction tube on the processing chamber side.

Abstract: There is provided a substrate procession apparatus, comprising: a processing chamber configured to house a plurality of substrates with a laminated film formed thereon which is composed of any one of copper-indium, copper-gallium, or copper-indium-gallium; a reaction tube formed so as to constitute the processing chamber; a gas supply tube configured to introduce elemental selenium-containing gas or elemental sulfur-containing gas to the processing chamber; an exhaust tube configured to exhaust an atmosphere in the processing chamber; heating section provided so as to surround the reaction tube; and a fan configured to forcibly circulate the atmosphere in the processing chamber in a short-side direction of the plurality of glass substrates, on surfaces of the plurality of glass substrates.

Abstract: There is provide a substrate processing apparatus, comprising: a processing chamber configured to house a plurality of substrates with a laminated film formed thereon which is composed of any one of copper-indium, copper-gallium, or copper-indium-gallium; a gas supply tube configured to introduce elemental selenium-containing gas or elemental sulfur-containing gas into the processing chamber; an exhaust tube configured to exhaust an atmosphere in the processing chamber; and a heating section provided so as to surround the reaction tube, wherein a base of the reaction tube is made of a metal material.

Abstract: A liquid ejection head including an ejection orifice for ejecting a liquid; a flow path for supplying the liquid from a liquid supply port holding the liquid to the ejection orifice; and a heat generating element of a rectangular form with a long-side to short-side ratio of 2.5 or more for generating thermal energy used to eject the liquid, a longitudinal direction of the heat generating element being arranged along an extending direction of the flow path. An end portion of the heat generating element on a downstream side of a liquid flowing direction within the flow path is located between an end portion of the ejection orifice on the downstream side and an end portion of the ejection orifice on an upstream side when viewed from a direction to which the liquid is ejected from the ejection orifice.

Abstract: In a liquid discharge head substrate having a connection line connected to a plurality of energy generating elements, and arranged between adjacent energy generating elements, a distance between the adjacent energy generating elements, between which the connection line is not arranged, is provided to be narrower than a distance of a portion where the connection line is provided.

Abstract: A liquid ejection head includes ejection orifices allowing liquid to be ejected therethrough, passages communicating with the ejection orifices and the pressure chambers each accommodating an energy generating element generating energy for ejecting the liquid therein, a supply port supplying the liquid to the passages, and a filter including substantially cylindrical members between the supply port and passages and having openings. Each of the ejection orifices has a substantially circular cross section having larger and smaller diameters substantially perpendicularly to its liquid ejecting direction. Each of the openings has a substantially rectangular cross section having longer and shorter sides substantially perpendicularly to its liquid supplying direction. The relationships D1>L1, D1<D2, and D2>L2?D1 are satisfied where D1 is the smaller diameter, D2 is the larger diameter, L1 is the shorter side, and L2 is the longer side.

Abstract: A recording apparatus including an ink tank and a recording head having a flow path forming portion that has an ejection orifice plate having plural ink ejection orifices and a liquid chamber provided for each orifice to supply ink to the orifices, and an energy generating element for ejecting ink in the chamber. A surface layer of the flow path forming portion opposes to the outside of the plate. An opening is provided opposing to the orifices in the surface layer. An ink reservoir is provided between the plate and the opening. A circulation flow path communicating with the ink reservoir is provided. The area of the opening is larger than that of the orifice. Both ends of the circulation flow path are respectively connected to inlet and outlet portions connected to the circulation flow path. The inlet and outlet portions and liquid chamber are connected to the ink tank.

Abstract: A liquid ejection head includes: a first and a second common liquid chamber formed in a substrate; a first nozzle array in which short and long nozzles are connected to the first common liquid chamber and alternately arranged on one side of the chamber; a second nozzle array in which short and long nozzles are connected to the first common liquid chamber and alternately arranged on the other side; a third nozzle array in which short and long nozzles are connected to the second common liquid chamber and alternately arranged on one side of the chamber; and a fourth nozzle array in which short and long nozzles are connected to the second common liquid chamber and alternately arranged on the other side; wherein the long and short nozzles formed on the one side and the long and short nozzles formed on the other side are disposed within a pitch P.

Abstract: A liquid ejection head includes ejection orifices allowing liquid to be ejected therethrough, passages communicating with the ejection orifices and the pressure chambers each accommodating an energy generating element generating energy for ejecting the liquid therein, a supply port supplying the liquid to the passages, and a filter including substantially cylindrical members between the supply port and passages and having openings. Each of the ejection orifices has a substantially circular cross section having larger and smaller diameters substantially perpendicularly to its liquid ejecting direction. Each of the openings has a substantially rectangular cross section having longer and shorter sides substantially perpendicularly to its liquid supplying direction. The relationships D1>L1, D1<D2, and D2>L2?D1 are satisfied where D1 is the smaller diameter, D2 is the larger diameter, L1 is the shorter side, and L2 is the longer side.