Patents by Inventor Eng Huat Toh

Eng Huat Toh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11967664
    Abstract: The present disclosure generally relates to semiconductor devices for use in optoelectronic/photonic applications and integrated circuit (IC) chips. More particularly, the present disclosure relates to photodiodes such as avalanche photodiodes (APDs) and single photon avalanche diodes (SPADs).
    Type: Grant
    Filed: April 20, 2022
    Date of Patent: April 23, 2024
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Ping Zheng, Eng Huat Toh, Cancan Wu, Kiok Boone Elgin Quek
  • Publication number: 20240114682
    Abstract: The present disclosure relates to a structure which includes a semiconductor substrate, a recessed shallow trench isolation structure within the semiconductor substrate, and a gate structure provided at least partially over the recessed shallow isolation structure.
    Type: Application
    Filed: October 3, 2022
    Publication date: April 4, 2024
    Inventors: Xinshu CAI, Shyue Seng TAN, Eng Huat TOH
  • Publication number: 20240088173
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a single-photon avalanche diode with isolated junctions and methods of manufacture. The structure includes a first p-n junction in a semiconductor material; and a second p-n junction in a second semiconductor material isolated from the first p-n junction by a buried insulator layer.
    Type: Application
    Filed: September 13, 2022
    Publication date: March 14, 2024
    Inventors: Xinshu CAI, Shyue Seng TAN, Eng Huat TOH, Kiok Boone Elgin QUEK
  • Patent number: 11901425
    Abstract: A non-volatile memory device is provided. The non-volatile memory device includes a substrate having an active region, a source region, a drain region, and a floating gate. The source region and the drain region may be arranged in the active region, the drain region may be arranged adjacent to the source region. The source region and the drain region may define a channel region therebetween. The floating gate may be arranged over the active region, and may include a first section over the channel region, a plurality of second sections over the drain region, and a connecting section arranged between the first section and the plurality of second sections.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: February 13, 2024
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Shyue Seng Tan, Xinshu Cai, Eng Huat Toh
  • Publication number: 20240047347
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to e-fuse structures and methods of manufacture. The structure includes: a silicided fuse structure which includes a narrow portion and wider, end portions; dummy structures on opposing sides of the silicided fuse structure; and sidewall spacer material separating the dummy structures from the silicided fuse structure.
    Type: Application
    Filed: August 2, 2022
    Publication date: February 8, 2024
    Inventors: XINSHU CAI, SHYUE SENG TAN, ENG HUAT TOH
  • Patent number: 11856875
    Abstract: A memory device may be provided. The memory device may include a first electrode including a first side surface and a second side surface opposite to the first side surface; a passivation layer arranged laterally alongside the first side surface of the first electrode; a switching layer arranged laterally alongside the passivation layer; and a second electrode arranged along the switching layer.
    Type: Grant
    Filed: December 28, 2020
    Date of Patent: December 26, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Jianxun Sun, Juan Boon Tan, Eng Huat Toh
  • Patent number: 11844292
    Abstract: The disclosed subject matter relates generally to structures, memory devices and a method of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices with an electrode having tapered sides. The present disclosure provides a memory device including a first electrode having a tapered shape and including a tapered side, a top surface, and a bottom surface, in which the bottom surface has a larger surface area than the top surface, a resistive layer on and conforming to at least the tapered side of the first electrode, and a second electrode laterally adjacent to the tapered side of the first electrode, the second electrode including a top surface and a side surface abutting the resistive layer, in which the side surface forms an acute angle with the top surface.
    Type: Grant
    Filed: June 24, 2021
    Date of Patent: December 12, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
  • Publication number: 20230395619
    Abstract: Structures for a single-photon avalanche diode and methods of forming a structure for a single-photon avalanche diode. The structure includes a semiconductor substrate having a top surface, a semiconductor layer on the top surface of the semiconductor substrate, a light-absorbing layer on a portion of the semiconductor layer, and a doped region in the portion of the semiconductor layer. The doped region is positioned in the portion of the semiconductor layer adjacent to the light-absorbing layer.
    Type: Application
    Filed: August 22, 2023
    Publication date: December 7, 2023
    Inventors: Ping Zheng, Eng Huat Toh, Kiok Boone Elgin Quek, Kien Seen Daniel Chong, Jing Hua Michelle Tng
  • Patent number: 11839166
    Abstract: A resistive random access memory (RRAM) device may be provided, including: a base layer, a vertical electrode stack arranged over the base layer, where the vertical electrode stack may include alternating mask elements and first electrodes, and each first electrode may include an extended portion extending beyond at least one side surface of at least one mask element adjoining the first electrode, a switching layer arranged along the extended portion of each first electrode and along the at least one side surface of the at least one mask element adjoining the first electrode, and a second electrode including a surface in contact with the switching layer. The RRAM device may have a 3D structure.
    Type: Grant
    Filed: April 6, 2020
    Date of Patent: December 5, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Eng Huat Toh
  • Patent number: 11823889
    Abstract: A sensor may be provided, including a substrate having a first semiconductor layer, a second semiconductor layer, and a buried insulator layer arranged between the first semiconductor layer and the second semiconductor layer. The sensor may further include a photodiode arranged in the first semiconductor layer; and a quenching resistive element electrically connected in series with the photodiode. The quenching resistive element is arranged in the second semiconductor layer, and the quenching resistive element is arranged over the photodiode but separated from the photodiode by the buried insulator layer.
    Type: Grant
    Filed: May 11, 2022
    Date of Patent: November 21, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Lanxiang Wang, Shyue Seng Tan, Eng Huat Toh
  • Patent number: 11821924
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to an on-chip current sensor. The on-chip current sensor includes: a vertical Hall sensor; and a current carrying conductor in a first wiring layer above the vertical Hall sensor.
    Type: Grant
    Filed: March 2, 2022
    Date of Patent: November 21, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Eng Huat Toh, Yongshun Sun
  • Publication number: 20230361236
    Abstract: A structure includes a photodetector including alternating p-type semiconductor layers and n-type semiconductor layers in contact with each other in a stack. Each semiconductor layer includes an extension extending beyond an end of an adjacent semiconductor layer of the alternating p-type semiconductor layers and n-type semiconductor layers. The extensions provide an area for operative coupling to a contact. The extensions can be arranged in a cascading, staircase arrangement, or may extend from n-type semiconductor layers on one side of the stack and from p-type semiconductor layers on another side of the stack. The photodetector can be on a substrate in a first region, and a complementary metal-oxide semiconductor (CMOS) device may be on the substrate on a second region separated from the first region by a trench isolation. The photodetector is capable of detecting and converting near-infrared (NIR) light, e.g., having wavelengths of greater than 0.75 micrometers.
    Type: Application
    Filed: May 5, 2022
    Publication date: November 9, 2023
    Inventors: Xinshu Cai, Yongshun Sun, Kiok Boone Elgin Quek, Khee Yong Lim, Shyue Seng Tan, Eng Huat Toh, Thanh Hoa Phung, Cancan Wu
  • Patent number: 11810982
    Abstract: A nonvolatile memory device is provided. The nonvolatile memory device comprises an n-doped source, an n-doped drain, and a doped region in a first p-well in a substrate. A floating gate may be arranged over the first p-well, whereby the doped region may be arranged at least partially under the floating gate.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: November 7, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yongshun Sun, Shyue Seng Tan, Eng Huat Toh, Xinshu Cai
  • Publication number: 20230343886
    Abstract: The present disclosure generally relates to semiconductor devices for use in optoelectronic/photonic applications and integrated circuit (IC) chips. More particularly, the present disclosure relates to photodiodes such as avalanche photodiodes (APDs) and single photon avalanche diodes (SPADs).
    Type: Application
    Filed: April 20, 2022
    Publication date: October 26, 2023
    Inventors: PING ZHENG, ENG HUAT TOH, CANCAN WU, KIOK BOONE ELGIN QUEK
  • Patent number: 11793004
    Abstract: The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices. The present disclosure provides a memory device including a first electrode, a dielectric cap above the first electrode, a second electrode laterally adjacent to the first electrode, in which an upper surface of the second electrode is substantially coplanar with an upper surface of the dielectric cap, and a resistive layer between the first electrode and the second electrode. An edge of the first electrode is electrically coupled to an edge of the second electrode by at least the resistive layer.
    Type: Grant
    Filed: August 16, 2020
    Date of Patent: October 17, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
  • Patent number: 11791083
    Abstract: The present disclosure relates to integrated circuits, and more particularly, a tunnel magneto-resistive (TMR) sensor with perpendicular magnetic tunneling junction (p-MTJ) structures and methods of manufacture and operation. The structure includes: a first magnetic tunneling junction (MTJ) structure on a first level; a second MTJ structure on a same wiring level as the first MTJ structure; and at least one metal line between the first MTJ structure and the second MTJ structure.
    Type: Grant
    Filed: May 26, 2021
    Date of Patent: October 17, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Eng-Huat Toh, Hemant M. Dixit, Vinayak Bharat Naik, Kazutaka Yamane
  • Patent number: 11784196
    Abstract: Structures for a single-photon avalanche diode and methods of forming a structure for a single-photon avalanche diode. The structure includes a semiconductor substrate having a top surface, a semiconductor layer on the top surface of the semiconductor substrate, a light-absorbing layer on a portion of the semiconductor layer, and a doped region in the portion of the semiconductor layer. The doped region is positioned in the portion of the semiconductor layer adjacent to the light-absorbing layer.
    Type: Grant
    Filed: May 4, 2021
    Date of Patent: October 10, 2023
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Ping Zheng, Eng Huat Toh, Kiok Boone Elgin Quek, Kien Seen Daniel Chong, Jing Hua Michelle Tng
  • Publication number: 20230320104
    Abstract: The disclosed subject matter relates generally to memory devices and a method of forming the same. More particularly, the present disclosure relates to three terminal resistive random-access (ReRAM) memory structures having two bottom electrodes and one top electrode. The present disclosure provides a structure including a first bottom electrode having an upper surface, a second bottom electrode having an upper surface, a switching layer on the upper surface of the first electrode and the upper surface of the second electrode, an oxygen enhancement layer on the switching layer, and a top electrode on the oxygen enhancement layer, the top electrode is positioned above the first bottom electrode and the second bottom electrode.
    Type: Application
    Filed: March 31, 2022
    Publication date: October 5, 2023
    Inventors: JIA RUI THONG, JIANXUN SUN, ENG HUAT TOH, JUAN BOON TAN
  • Publication number: 20230320240
    Abstract: According to an aspect of the present disclosure, a memory device is provided. The memory device includes a dielectric layer having a top surface, a first electrode having a bottom surface, a switching layer, and a second electrode. The bottom surface of the first electrode is arranged below the top surface of the dielectric layer. The first electrode includes a first corner having a first acute angle and a second corner having a second acute angle arranged over the top surface of the dielectric layer. The switching layer is arranged over the first electrode. The second electrode is arranged over the switching layer, and at least the first corner of the first electrode extends into the second electrode.
    Type: Application
    Filed: March 23, 2022
    Publication date: October 5, 2023
    Inventors: XINSHU CAI, SHYUE SENG TAN, ENG HUAT TOH
  • Patent number: 11774402
    Abstract: According to various embodiments, there is provided a sensor device that includes: a substrate and two semiconductor structures. Each semiconductor structure includes a source region and a drain region at least partially disposed within the substrate, a channel region between the source region and the drain region, and a gate region. A first semiconductor structure of the two semiconductor structures further includes a sensing element electrically connected to the first gate structure. The sensing element is configured to receive a solution. The drain regions of the two semiconductor structures are electrically coupled. The source regions of the two semiconductor structures are also electrically coupled. A mobility of charge carriers of the channel region of a second semiconductor structure of the two semiconductor structures is lower than a mobility of charge carriers of the channel region of the first semiconductor structure.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: October 3, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Lanxiang Wang, Bin Liu, Eng Huat Toh, Shyue Seng Tan, Kiok Boone Elgin Quek