Patents by Inventor Fang Wei

Fang Wei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220326345
    Abstract: This application provides example detection signal transmitting methods, detection apparatuses, and storage medium. One example method includes determining an orientation of a field of view of a detection apparatus. One of a plurality of anti-interference parameters can then be selected as a target anti-interference parameter based on the orientation of the field of view of the detection apparatus and according to a predefined rule, where the plurality of anti-interference parameters are determined according to the predefined rule. A detection signal can then be transmitted based on the target anti-interference parameter.
    Type: Application
    Filed: June 24, 2022
    Publication date: October 13, 2022
    Inventors: Zhixi WANG, Fang WEI, Leilei XU, Boya QIN
  • Publication number: 20220319861
    Abstract: A technique for semiconductor manufacturing is provided. The technique includes the operations as follows. A semiconductor structure having a first material is received. A plurality of first main etches are performed to the semiconductor structure for a plurality of first durations under the first etching chemistry. A plurality of pumping operations are performed for a plurality of pumping durations, each of the pumping operations being prior to each of the first main etches. Each of the first durations is in a range of from about 1 second to about 2.5 seconds.
    Type: Application
    Filed: June 24, 2022
    Publication date: October 6, 2022
    Inventors: HAN-YU LIN, LI-TE LIN, TZE-CHUNG LIN, FANG-WEI LEE, YI-LUN CHEN, JUNG-HAO CHANG, YI-CHEN LO, FO-JU LIN, KENICHI SANO, PINYEN LIN
  • Patent number: 11462471
    Abstract: In some embodiments, the present disclosure relates to an integrated circuit device. A transistor structure includes a gate electrode separated from a substrate by a gate dielectric and a pair of source/drain regions disposed within the substrate on opposite sides of the gate electrode. A lower conductive plug is disposed through a lower inter-layer dielectric (ILD) layer and contacting a first source/drain region. A capping layer is disposed directly on the lower conductive plug. An upper inter-layer dielectric (ILD) layer is disposed over the capping layer and the lower ILD layer. An upper conductive plug is disposed through the upper ILD layer and directly on the capping layer.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: October 4, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Wei Chang, Sung-Li Wang, Yi-Ying Liu, Chia-Hung Chu, Fang-Wei Lee
  • Publication number: 20220302849
    Abstract: A control circuit is configured to control a flyback circuit comprising a primary-side switch, a secondary-side rectifier and a transformer. The control circuit comprises a feedback control circuit configured to generate a secondary-side control signal based on a current ripple signal of the transformer, and at least one of a direct-current component of an output voltage signal and a direct-current component of an output current signal of a secondary side of the flyback circuit, wherein the secondary-side control signal is configured to control a turn-off of the secondary-side rectifier, an isolated transmission circuit coupled to the feedback control circuit and configured to generate a first primary-side control signal based on the secondary-side control signal, and a primary control circuit coupled to the isolated transmission circuit and configured to control a turn-on of the primary-side switch in response to receiving the first primary-side control signal.
    Type: Application
    Filed: March 18, 2021
    Publication date: September 22, 2022
    Inventors: Hai Tao, Chih-Hsien Hsieh, Kai-Fang Wei, Zhibo Tao
  • Publication number: 20220202817
    Abstract: The present disclosure provides an amorphous solid dispersion containing a Cap-dependent endonuclease inhibitor or a pharmaceutically acceptable salt thereof for oral administration, wherein the Cap-dependent endonuclease inhibitor or a pharmaceutically acceptable salt thereof is dispersed in a matrix formed from the pharmaceutically acceptable polymer. Further disclosed are methods for preparing a above amorphous solid dispersion and a use thereof for treating virus infection and a pharmaceutical composition containing same.
    Type: Application
    Filed: December 29, 2021
    Publication date: June 30, 2022
    Inventors: Chi-Feng Yen, Fang-Wei Tien
  • Patent number: 11373878
    Abstract: A technique for semiconductor manufacturing is provided. The technique includes the operations as follows. A semiconductor structure having a first material and a second material is revived. The first material has a first incubation time to a first etching chemistry. The second material has a second incubation time to the first etching chemistry. The first incubation time is shorter than the second incubation time. A first main etch to the semiconductor structure for a first duration by the first etching chemistry is performed. The first duration is greater than the first incubation time and shorter than the second incubation time.
    Type: Grant
    Filed: January 20, 2021
    Date of Patent: June 28, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Han-Yu Lin, Li-Te Lin, Tze-Chung Lin, Fang-Wei Lee, Yi-Lun Chen, Jung-Hao Chang, Yi-Chen Lo, Fo-Ju Lin, Kenichi Sano, Pinyen Lin
  • Publication number: 20220173224
    Abstract: A method includes forming a fin structure including a plurality of first semiconductor layers and a plurality of second semiconductor layers alternately stacked over a substrate. A dummy gate structure is formed across the fin structure. The exposed second portions of the fin structure are removed. A selective etching process is performed, using a gas mixture including a hydrogen-containing gas and a fluorine-containing gas, to laterally recess the first semiconductor layers. Inner spacers are formed on opposite end surfaces of the laterally recessed first semiconductor layers. Source/drain epitaxial structures are formed on opposite end surfaces of the second semiconductor layers. The dummy gate structure is removed to expose the first portion of the fin structure. The laterally recessed first semiconductor layers are removed. A gate structure is formed to surround each of the second semiconductor layers.
    Type: Application
    Filed: January 19, 2021
    Publication date: June 2, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC Nanjing Company Limited
    Inventors: Han-Yu LIN, Fang-Wei LEE, Kai-Tak LAM, Raghunath PUTIKAM, Tzer-Min SHEN, Li-Te LIN, Pinyen LIN, Cheng-Tzu YANG, Tzu-Li LEE, Tze-Chung LIN
  • Publication number: 20220139773
    Abstract: An IC structure includes a transistor, a source/drain contact, a metal oxide layer, a non-metal oxide layer, a barrier structure, and a via. The transistor includes a gate structure and source/drain regions on opposite sides of the gate structure. The source/drain contact is over one of the source/drain regions. The metal oxide layer is over the source/drain contact. The non-metal oxide layer is over the metal oxide layer. The barrier structure is over the source/drain contact. The barrier structure forms a first interface with the metal oxide layer and a second interface with the non-metal oxide layer, and the second interface is laterally offset from the first interface. The via extends through the non-metal oxide layer to the barrier structure.
    Type: Application
    Filed: January 13, 2022
    Publication date: May 5, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sung-Li WANG, Shuen-Shin LIANG, Yu-Yun PENG, Fang-Wei LEE, Chia-Hung CHU, Mrunal Abhijith KHADERBAD, Keng-Chu LIN
  • Publication number: 20220130693
    Abstract: The present disclosure provides a semiconductor fabrication apparatus. The semiconductor apparatus includes a processing chamber for etching; a substrate stage integrated in the processing chamber and being configured to secure a semiconductor wafer; a reflective mirror configured inside the processing chamber to reflect thermal energy from the heating mechanism toward the semiconductor wafer; and a heating mechanism embedded in the process chamber and is operable to perform a baking process to remove a by-product generated during the etching. The heating mechanism is integrated between the reflective mirror and a gas distribution plate of the processing chamber.
    Type: Application
    Filed: January 10, 2022
    Publication date: April 28, 2022
    Inventors: Han-Yu Lin, Yi-Ruei Jhan, Fang-Wei Lee, Li-Te Lin, Pinyen Lin, Tze-Chung Lin
  • Patent number: 11303195
    Abstract: A controller is for use in a power converter having a flyback transformer having a primary winding switched by a primary side transistor and a secondary winding switched by a secondary side transistor. The controller includes a line voltage detection circuit that activates a high line detect signal in response to detecting that an input line voltage is greater than a first threshold, a discontinuous conduction mode detection circuit activates a discontinuous conduction mode signal in response to detecting that the controller is operating in discontinuous conduction mode, and a switching controller coupled to the line voltage detection circuit and to the discontinuous conduction mode detection circuit that controls the primary side transistor and the secondary side transistor using partial zero voltage switching in response to an activation of the high line detect signal and the discontinuous conduction mode signal, and without using partial zero voltage switching otherwise.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: April 12, 2022
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: BongGeun Chung, Souhib Harb, Kai-Fang Wei
  • Patent number: 11270896
    Abstract: Provided are methods and apparatus for ultraviolet (UV) assisted capillary condensation to form dielectric materials. In some embodiments, a UV driven reaction facilitates photo-polymerization of a liquid phase flowable material. Applications include high quality gap fill in high aspect ratio structures and pore sealing of a porous solid dielectric film. According to various embodiments, single station and multi-station chambers configured for capillary condensation and UV exposure are provided.
    Type: Grant
    Filed: July 11, 2019
    Date of Patent: March 8, 2022
    Assignee: Lam Research Corporation
    Inventors: Jonathan D. Mohn, Nicholas Muga Ndiege, Patrick A. van Cleemput, David Fang Wei Chen, Wenbo Liang, Shawn M. Hamilton
  • Publication number: 20220045194
    Abstract: A semiconductor device structure is provided. The semiconductor device includes a first nanowire structure over a second nanowire structure, a gate stack wrapping around the first nanowire structure and the second nanowire structure, a source/drain feature adjoining the first nanowire structure and the second nanowire structure, a gate spacer layer over the first nanowire structure and between the gate stack and the source/drain feature, and an inner spacer layer between the first nanowire structure and the second nanowire structure and between the gate stack and the source/drain feature. The gate spacer layer has a first carbon concentration, the inner spacer has a second carbon concentration, and the second carbon concentration is lower than the first carbon concentration.
    Type: Application
    Filed: October 18, 2021
    Publication date: February 10, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Han-Yu LIN, Chansyun David YANG, Fang-Wei LEE, Tze-Chung LIN, Li-Te LIN, Pinyen LIN
  • Publication number: 20220020595
    Abstract: A technique for semiconductor manufacturing is provided. The technique includes the operations as follows. A semiconductor structure having a first material and a second material is revived. The first material has a first incubation time to a first etching chemistry. The second material has a second incubation time to the first etching chemistry. The first incubation time is shorter than the second incubation time. A first main etch to the semiconductor structure for a first duration by the first etching chemistry is performed. The first duration is greater than the first incubation time and shorter than the second incubation time.
    Type: Application
    Filed: January 20, 2021
    Publication date: January 20, 2022
    Inventors: HAN-YU LIN, LI-TE LIN, TZE-CHUNG LIN, FANG-WEI LEE, YI-LUN CHEN, JUNG-HAO CHANG, YI-CHEN LO, FO-JU LIN, KENICHI SANO, PINYEN LIN
  • Patent number: 11227794
    Abstract: A multi-layer interconnect structure with a self-aligning barrier structure and a method for fabricating the same is disclosed. For example, the method includes forming a via through an interlayer dielectric (ILD) layer, an etch stop layer (ESL), and a contact structure, pre-cleaning the via with a metal halide, forming a barrier structure on the contact structure in-situ during the pre-cleaning of the via with the metal halide, and depositing a second metal in the via on top of the barrier structure.
    Type: Grant
    Filed: December 19, 2019
    Date of Patent: January 18, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sung-Li Wang, Shuen-Shin Liang, Yu-Yun Peng, Fang-Wei Lee, Chia-Hung Chu, Mrunal Abhijith Khaderbad, Keng-Chu Lin
  • Patent number: 11222794
    Abstract: The present disclosure provides a semiconductor fabrication apparatus. The semiconductor apparatus includes a processing chamber for etching; a substrate stage integrated in the processing chamber and being configured to secure a semiconductor wafer; a reflective mirror configured inside the processing chamber to reflect thermal energy from the heating mechanism toward the semiconductor wafer; and a heating mechanism embedded in the process chamber and is operable to perform a baking process to remove a by-product generated during the etching. The heating mechanism is integrated between the reflective mirror and a gas distribution plate of the processing chamber.
    Type: Grant
    Filed: July 24, 2018
    Date of Patent: January 11, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Han-Yu Lin, Yi-Ruei Jhan, Fang-Wei Lee, Li-Te Lin, Pinyen Lin, Tze-Chung Lin
  • Publication number: 20210391447
    Abstract: A method of fabricating a semiconductor device includes forming a channel member suspended above a substrate, depositing a dielectric material layer wrapping around the channel member, performing an oxidation treatment to a surface portion of the dielectric material layer, selectively etching the surface portion of the dielectric material layer to expose sidewalls of the channel member, performing a nitridation treatment to remaining portions of the dielectric material layer and the exposed sidewalls of the channel member, thereby forming a nitride passivation layer partially wrapping around the channel member. The method also includes repeating the steps of performing the oxidation treatment and selectively etching until top and bottom surfaces of the channel member are exposed, removing the nitride passivation layer from the channel member, and forming a gate structure wrapping around the channel member.
    Type: Application
    Filed: August 26, 2021
    Publication date: December 16, 2021
    Inventors: Han-Yu Lin, Chansyun David Yang, Tze-Chung Lin, Fang-Wei Lee, Fo-Ju Lin, Li-Te Lin, Pinyen Lin
  • Patent number: 11201243
    Abstract: The current disclosure describes techniques for forming a gate-all-around device where semiconductor layers are released by etching out the buffer layers that are vertically stacked between semiconductor layers in an alternating manner. The buffer layers stacked at different vertical levels include different material compositions, which bring about different etch rates with respect to an etchant that is used to remove at least partially the buffer layers to release the semiconductor layers.
    Type: Grant
    Filed: September 3, 2019
    Date of Patent: December 14, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chansyun David Yang, Han-Yu Lin, Chun-Yu Chen, Chih-Ching Wang, Fang-Wei Lee, Tze-Chung Lin, Li-Te Lin, Gwan-Sin Chang, Pinyen Lin
  • Publication number: 20210327764
    Abstract: A semiconductor device includes a semiconductor substrate, a semiconductor fin protruding from the semiconductor substrate, and an isolation layer disposed above the semiconductor substrate. The isolation layer includes a first portion disposed on a first sidewall of the semiconductor fin and a second portion disposed on a second sidewall of the semiconductor fin. Top surfaces of the first and second portions of the isolation layer are leveled. The first portion of the isolation layer includes an air pocket. The semiconductor device also includes a dielectric fin with a bottom portion embedded in the second portion of the isolation layer.
    Type: Application
    Filed: June 29, 2021
    Publication date: October 21, 2021
    Inventors: Han-Yu Lin, Yi-Ruei Jhan, Fang-Wei Lee, Tze-Chung Lin, Chao-Hsien Huang, Li-Te Lin, Pinyen Lin, Akira Mineji
  • Patent number: 11152491
    Abstract: A method for forming a semiconductor device structure is provided. The method for forming a semiconductor device structure includes forming a fin structure over a substrate. The fin structure includes first semiconductor layers and second semiconductor layers alternately stacked. The method for forming the semiconductor device structure also includes removing the first semiconductor layers of the fin structure in a channel region thereby exposing the second semiconductor layers of the fin structure. The method for forming the semiconductor device structure also includes forming a dielectric material surrounding the second semiconductor layers, and treating a first portion of the dielectric material. The method for forming the semiconductor device structure also includes etching the first portion of the dielectric material to form gaps, and filling the gaps with a gate stack.
    Type: Grant
    Filed: March 12, 2019
    Date of Patent: October 19, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Han-Yu Lin, Chansyun David Yang, Fang-Wei Lee, Tze-Chung Lin, Li-Te Lin, Pinyen Lin
  • Publication number: 20210275385
    Abstract: An adjustable massage seat includes a seat having a first connection layer laid thereon, and at least one massage knob having at least one connection member disposed thereon. The connection member can be a double-hook-sided touch fasteners to attach with the massage knob by a hook side thereof, so that the massage knob can be connected on arbitrary position of the first connection layer by the other hook side of the connection member. A vibration device or a heating device can be disposed on the massage knob to provide more massage effect. According to the present invention, the position of the massage knob disposed on the seat can be adjusted freely, to effectively relieve user's symptom upon user's requirement in massage position.
    Type: Application
    Filed: June 18, 2020
    Publication date: September 9, 2021
    Inventor: FANG-WEI CHIOU