Abstract: The invention provides a stage system comprising a stage (ST) which is movable in respect of a reference structure. One of the stage and the reference structure comprises a reflective surface (REFS). An optical position sensor (IF1) is arranged at the other one of the stage and the reference structure and is configured to determine a position of the reflective surface relative to the optical position sensor. An optical shape sensor (IF2) is configured to determine a shape of the reflective surface. The stage system further comprises a position measurement controller configured to derive a stage position of the stage from the position of the reflective surface relative to the optical position sensor and from the shape of the reflective surface as determined by the optical shape sensor.

Abstract: The invention provides a stage system comprising a stage (ST) which is movable in respect of a reference structure. One of the stage and the reference structure comprises a reflective surface (REFS). An optical position sensor (IF1) is arranged at the other one of the stage and the reference structure and is configured to determine a position of the reflective surface relative to the optical position sensor. An optical shape sensor (IF2) is configured to determine a shape of the reflective surface. The stage system further comprises a position measurement controller configured to derive a stage position of the stage from the position of the reflective surface relative to the optical position sensor and from the shape of the reflective surface as determined by the optical shape sensor.

Abstract: A rectifying device includes a power transistor, a gate control circuit and a capacitor structure arranged on a single semiconductor die. The power transistor includes a source or emitter terminal connected to a first terminal of the rectifying device, a drain or collector terminal connected to a second terminal of the rectifying device, and a gate. The gate control circuit is operable to control a gate voltage at the gate of the power transistor based on at least one parameter relating to at least one of a voltage and a current between the first terminal and the second terminal.

Abstract: According to an embodiment, a controller system that is configured to drive a power switch includes a driver integrated circuit (IC), which includes an interface circuit, a synchronization circuit, and a drive circuit. The interface circuit is configured to receive a control scheme over a serial interface. The synchronization circuit is coupled to the interface circuit and is configured to receive an angular position signal and synchronize a drive signal with the angular position signal, where the drive signal is based on the control scheme. The drive circuit is coupled to the synchronization circuit and is configured to drive the power switch using the drive signal.

Abstract: According to various embodiments, a circuit arrangement is provided which includes a bridge circuit having at least two field effect transistors and a measurement circuit configured to measure a forward voltage of a body diode of any one of the at least two field effect transistors resulting from a current flowing through the field effect transistor.

Abstract: An excitation current-limited power generator includes a digital interface configured to be coupled to an engine control unit (ECU), a regulator coupled configured to be coupled to an excitation current input of an alternator, the excitation current controlling current generated by the alternator, a frequency sensor configured to measuring rotation speed of the alternator, and memory storing a communicated limit received by the digital interface and a first permanent limit, the regulator configured to limit the excitation current to the lesser of the first permanent limit and the communicated limit.

Abstract: An excitation current-limited power generator includes a digital interface configured to be coupled to an engine control unit (ECU), a regulator coupled configured to be coupled to an excitation current input of an alternator, the excitation current controlling current generated by the alternator, a frequency sensor configured to measuring rotation speed of the alternator, and memory storing a communicated limit received by the digital interface and a first permanent limit, the regulator configured to limit the excitation current to the lesser of the first permanent limit and the communicated limit.

Abstract: According to an embodiment, a controller system that is configured to drive a power switch includes a driver integrated circuit (IC), which includes an interface circuit, a synchronization circuit, and a drive circuit. The interface circuit is configured to receive a control scheme over a serial interface. The synchronization circuit is coupled to the interface circuit and is configured to receive an angular position signal and synchronize a drive signal with the angular position signal, where the drive signal is based on the control scheme. The drive circuit is coupled to the synchronization circuit and is configured to drive the power switch using the drive signal.

Abstract: An alternator is described that is configured to provide a current for powering one or more loads. The alternator includes an output port configured to output the current for powering the one or more loads, and one or more current sensors configured to measure a current level of at least a portion of the current being output via the output port to the one or more loads. The alternator further includes one or more communication ports configured to transmit information based on the current level measured by the one or more current sensors.

Abstract: An alternator is described that is configured to provide a current for powering one or more loads. The alternator includes an output port configured to output the current for powering the one or more loads, and one or more current sensors configured to measure a current level of at least a portion of the current being output via the output port to the one or more loads, The alternator further includes one or more communication ports configured to transmit information based on the current level measured by the one or more current sensors.

Abstract: A positioning system for positioning an object in a lithographic apparatus, including: a first and second object tables moveable in an operating area; a first position measurement system to provide an incremental position measurement of the second object table relative to a reference when in the operating area, wherein the first position measurement system is configured to provide an absolute position measurement of the first object table relative to the reference; a second position measurement system to provide an absolute position measurement of the first object table relative to the second object table, and wherein the first position measurement system is further configured to provide an absolute position measurement of the second object table relative to the reference based on the absolute position measurement of the first object table relative to the reference and on the absolute position measurement of the first object table relative to the second object table.

Abstract: A rectifying device includes a power transistor, a gate control circuit and a capacitor structure arranged on a single semiconductor die. The power transistor includes a source or emitter terminal connected to a first terminal of the rectifying device, a drain or collector terminal connected to a second terminal of the rectifying device, and a gate. The gate control circuit is operable to control a gate voltage at the gate of the power transistor based on at least one parameter relating to at least one of a voltage and a current between the first terminal and the second terminal.

Abstract: A positioning system for positioning an object in a lithographic apparatus, including: a first and second object tables moveable in an operating area; a first position measurement system to provide an incremental position measurement of the second object table relative to a reference when in the operating area, wherein the first position measurement system is configured to provide an absolute position measurement of the first object table relative to the reference; a second position measurement system to provide an absolute position measurement of the first object table relative to the second object table, and wherein the first position measurement system is further configured to provide an absolute position measurement of the second object table relative to the reference based on the absolute position measurement of the first object table relative to the reference and on the absolute position measurement of the first object table relative to the second object table.

Abstract: According to various embodiments, a circuit arrangement is provided which includes a bridge circuit having at least two field effect transistors and a measurement circuit configured to measure a forward voltage of a body diode of any one of the at least two field effect transistors resulting from a current flowing through the field effect transistor.

Abstract: A lithographic device includes a cooling device for removing heat from a motor. The cooling device has a cooling element provided in thermal contact with at least part of the motor. The cooling device further has a cooling duct assembly with a supply duct to supply a cooling fluid to the cooling element, and a discharge duct to discharge the cooling fluid from the cooling element. A pump causes the cooling fluid to flow through at least part of the cooling duct assembly. A flow control device controls a flow rate of the cooling fluid through at least part of the cooling duct assembly, to maintain a predetermined average temperature of the cooling fluid in the cooling element.

Abstract: According to various embodiments, a circuit arrangement is provided which includes a bridge circuit having at least two field effect transistors and a measurement circuit configured to measure a forward voltage of a body diode of any one of the at least two field effect transistors resulting from a predefined current flowing through the field effect transistor.

Abstract: A circuit includes a first half bridge including a first controllable semiconductor switch and a first diode. The first controllable semiconductor switch is coupled between a first constant supply potential and a center tap of the first half bridge. The first diode is coupled between the center tap and a constant reference potential. A second half bridge includes a second diode and a second controllable semiconductor switch. The second diode is coupled between a second constant potential higher than the first potential and a center tap of the second half bridge. The second controllable semiconductor switch is coupled between the center tap and the constant reference potential. Driver circuitry controls the conducting state of the first and the second semiconductor switch thus controlling the current flow through a field connectable between the center taps.

Abstract: A circuit includes a first half bridge including a first controllable semiconductor switch and a first diode. The first controllable semiconductor switch is coupled between a first constant supply potential and a center tap of the first half bridge. The first diode is coupled between the center tap and a constant reference potential. A second half bridge includes a second diode and a second controllable semiconductor switch. The second diode is coupled between a second constant potential higher than the first potential and a center tap of the second half bridge. The second controllable semiconductor switch is coupled between the center tap and the constant reference potential. Driver circuitry controls the conducting state of the first and the second semiconductor switch thus controlling the current flow through a field connectable between the center taps.

Abstract: A circuit includes a first half bridge including a first controllable semiconductor switch and a first diode. The first controllable semiconductor switch is coupled between a first constant supply potential and a center tap of the first half bridge. The first diode is coupled between the center tap and a constant reference potential. A second half bridge includes a second diode and a second controllable semiconductor switch. The second diode is coupled between a second constant potential higher than the first potential and a center tap of the second half bridge. The second controllable semiconductor switch is coupled between the center tap and the constant reference potential. Driver circuitry controls the conducting state of the first and the second semiconductor switch thus controlling the current flow through a field connectable between the center taps.

Abstract: According to various embodiments, a circuit arrangement is provided which includes a bridge circuit having at least two field effect transistors and a measurement circuit configured to measure a forward voltage of a body diode of any one of the at least two field effect transistors resulting from a predefined current flowing through the field effect transistor.