Abstract: To correctly transfer a pattern to a substrate, or transfer any other pattern having small features, a transfer of vibrations from an external support structure, e.g. a floor, is minimized by using a vibration isolation support device, e.g. an airmount. To improve the vibration isolation characteristics of the airmount, the (positive) stiffness of the airmount is lowered by providing a pressure reducer that is configured to reduce a gas pressure change in a gas chamber of the airmount, which pressure change is a result of a volume change of the gas chamber. Due to vibrations the volume of said gas chamber changes. Due to the stiffness reduction device, the corresponding pressure change, and thus a force exerted on the supported object, is reduced, thereby reducing the stiffness of the airmount.

Abstract: A supporting device for supporting in a lithographic projection apparatus a supported part relative to a supporting part, is presented. The supporting device includes a first part that engages the supporting part of the lithographic projection apparatus; a second part that engages the supported part of the lithographic projection apparatus; a supporting spring system disposed between the first part and the second part; and a position control system configured to control a position of the supported part.

Abstract: To correctly transfer a pattern to a substrate, or transfer any other pattern having small features, a transfer of vibrations from an external support structure, e.g. a floor, is minimized by using a vibration isolation support device, e.g. an airmount. To improve the vibration isolation characteristics of the airmount, the (positive) stiffness of the airmount is lowered by providing a pressure reducer that is configured to reduce a gas pressure change in a gas chamber of the airmount, which pressure change is a result of a volume change of the gas chamber. Due to vibrations the volume of said gas chamber changes. Due to the stiffness reduction device, the corresponding pressure change, and thus a force exerted on the supported object, is reduced, thereby reducing the stiffness of the airmount.

Abstract: A vehicle headlamp has a first incandescent filament, which is preferably used to generate a main beam, and a second incandescent filament, which is preferably used to generate daytime running light, the incandescent filaments being fixed within a lamp vessel—which is provided with a lamp base—using three supply lead wires, which are arranged in a common plane, with the result that they are arranged one above the other when the vehicle headlamp is suitably oriented, the bottom supply lead wire and the top supply lead wire being used to fix the first incandescent filament and the top supply lead wire and the middle supply lead wire being used to arrange the second incandescent filament such that it is offset in a parallel manner with respect to the axis of the first incandescent filament and is above the axis of the first incandescent filament.

Abstract: The invention relates to an electric incandescent lamp, in particular a vehicle headlight lamp, having an incandescent filament, arranged inside a transparent lamp vessel, and supply leads for the incandescent filament, at least one of the supply leads being provided with at least one reinforcing strut in order to improve the vibration strength of the lamp.

Abstract: A supporting device for supporting in a lithographic projection apparatus a supported part relative to a supporting part, is presented. The supporting device includes a first part that engages the supporting part of the lithographic projection apparatus; a second part that engages the supported part of the lithographic projection apparatus; a supporting spring system disposed between the first part and the second part; and a position control system configured to control a position of the supported part.

Abstract: Vibrational movement between the top of a lens and a main plate on which the lens is mounted is reduced by attaching between the lens and the main plate a lens support which detects relative movement between the lens and the main plates using piezoelectric sensors and compensates for that movement to reduce vibration using piezoelectric actuators which are in series with the piezoelectric sensors. The control signal which is generated to actuate the actuated piezoelectrics is generated by a controller.

Abstract: A reaction mass and an actuator are used to reduce unwanted vibrations of an optical element in the projection system of a lithographic projection apparatus. The reaction mass may be mechanically connected only to the optical element or may be compliantly mounted to the projection system frame.

Abstract: A reaction mass and an actuator are used to reduce unwanted vibrations of an optical element in the projection system of a lithographic projection apparatus. The reaction mass may be mechanically connected only to the optical element or may be compliantly mounted to the projection system frame.

Abstract: A supporting assembly for use in a lithographic projection apparatus includes a moveable member which is journalled in a housing such that substantially no vibration forces are transmitted between the moveable member and the housing. The assembly comprises a gas filled pressure chamber in which the gas in the pressure chamber acts on the moveable member so as to at least partially counteract the force due to the weight of the moveable member and any other object which it carries. The pressure chamber is supplied with gas and the whole assembly is constructed and arranged such that substantially no gas flows through the pressure chamber when the moveable member is substantially stationary. The supporting assembly may be applied to a lithographic projection apparatus, object table, or metrology frame.

Abstract: Vibrational movement between the top of a lens and a main plate on which the lens is mounted is reduced by attaching between the lens and the main plate a lens support which detects relative movement between the lens and the main plates using piezoelectric sensors and compensates for that movement to reduce vibration using piezoelectric actuators which are in series with the piezoelectric sensors. The control signal which is generated to actuate the actuated piezoelectrics is generated by a controller.

Abstract: The circuit configuration has a semiconductor switch and a driver circuit that drives the switch. A switching signal is applied at an input terminal of the driver circuit and an output terminal that is connected to a control input of the semiconductor switch outputs a drive signal. The drive signal depends on the switching signal and its gradient during a change from a first drive level to a second drive level is temperature-dependent.

Abstract: A supporting assembly for use in a lithographic projection apparatus includes a moveable member which is journalled in a housing such that substantially no vibration forces are transmitted between the moveable member and the housing. The assembly comprises a gas filled pressure chamber in which the gas in the pressure chamber acts on the moveable member so as to at least partially counteract the force due to the weight of the moveable member and any other object which it carries. The pressure chamber is supplied with gas and the whole assembly is constructed and arranged such that substantially no gas flows through the pressure chamber when the moveable member is substantially stationary. The supporting assembly may be applied to a lithographic projection apparatus, object table, or metrology frame.

Abstract: In order to supply a load, e.g. an electric motor, with current bidirectionally, an H bridge configuration containing four switching transistors is used. In order to attain outstanding electrical conductivity and also thermal conductivity, a half-bridge configuration containing two transistors of opposite conductivity types is constructed. Each of the transistors is realized on a chip, the rear sides of which chips are seated on a common conductive support preferably produced from metal. Each housing is equipped with a support of this type. The rear side of each of the two chips is formed from a drain or source electrode of the transistors. A load can be connected to the support. Two half-bridge configurations can advantageously be combined to form an H bridge configuration.

Abstract: Support device (53) provided with a first part (69) and a second part (71) which is supported relative to the first part by means of a gas spring (73) having a pressure chamber (75). A gas supply (117), which compensates for gas leakage from the pressure chamber (75) during operation, is connected to an intermediate space (119) which is in communication with the pressure chamber (75) via a pneumatic restriction (121). The gas pressure present in the intermediate space (119) is held as constant as possible during operation by means of a control loop (123), to prevent transmission of pressure fluctuations which are present in the gas supply (117) to the pressure chamber (75) as much as possible. Such pressure fluctuations are undesirable in the pressure chamber because they cause mechanical vibrations in the second part of the support device and the device to be supported.