Patents by Inventor Fred D. Fishburn

Fred D. Fishburn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10685785
    Abstract: Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
    Type: Grant
    Filed: October 28, 2019
    Date of Patent: June 16, 2020
    Assignee: Micron Technology, Inc.
    Inventor: Fred D. Fishburn
  • Patent number: 10607995
    Abstract: A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually include a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region. At least a portion of the channel region is horizontally-oriented for horizontal current flow in the portion between the first and second source/drain regions. The memory cells individually include a capacitor comprising first and second electrodes having a capacitor insulator there-between. The first electrode is electrically coupled to the first source/drain region. The second capacitor electrodes of multiple of the capacitors in the array are electrically coupled with one another. A sense-line structure extends elevationally through the vertically-alternating tiers.
    Type: Grant
    Filed: May 8, 2018
    Date of Patent: March 31, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Martin C. Roberts, Sanh D. Tang, Fred D. Fishburn
  • Publication number: 20200066456
    Abstract: Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
    Type: Application
    Filed: October 28, 2019
    Publication date: February 27, 2020
    Applicant: Micron Technology, Inc.
    Inventor: Fred D. Fishburn
  • Patent number: 10483043
    Abstract: Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
    Type: Grant
    Filed: June 12, 2019
    Date of Patent: November 19, 2019
    Assignee: Micron Technology, Inc.
    Inventor: Fred D. Fishburn
  • Publication number: 20190295775
    Abstract: Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
    Type: Application
    Filed: June 12, 2019
    Publication date: September 26, 2019
    Applicant: Micron Technology, Inc.
    Inventor: Fred D. Fishburn
  • Patent number: 10418182
    Abstract: Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
    Type: Grant
    Filed: February 4, 2019
    Date of Patent: September 17, 2019
    Assignee: Micron Technology, Inc.
    Inventor: Fred D. Fishburn
  • Publication number: 20190180944
    Abstract: Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
    Type: Application
    Filed: February 4, 2019
    Publication date: June 13, 2019
    Applicant: Micron Technology, Inc.
    Inventor: Fred D. Fishburn
  • Patent number: 10236127
    Abstract: Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
    Type: Grant
    Filed: May 31, 2018
    Date of Patent: March 19, 2019
    Assignee: Micron Technology, Inc.
    Inventor: Fred D. Fishburn
  • Publication number: 20180323199
    Abstract: A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually include a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region. At least a portion of the channel region is horizontally-oriented for horizontal current flow in the portion between the first and second source/drain regions. The memory cells individually include a capacitor comprising first and second electrodes having a capacitor insulator there-between. The first electrode is electrically coupled to the first source/drain region. The second capacitor electrodes of multiple of the capacitors in the array are electrically coupled with one another. A sense-line structure extends elevationally through the vertically-alternating tiers.
    Type: Application
    Filed: May 8, 2018
    Publication date: November 8, 2018
    Applicant: Micron Technology, Inc.
    Inventors: Martin C. Roberts, Sanh D. Tang, Fred D. Fishburn
  • Publication number: 20180286595
    Abstract: Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
    Type: Application
    Filed: May 31, 2018
    Publication date: October 4, 2018
    Applicant: Micron Technology, Inc.
    Inventor: Fred D. Fishburn
  • Patent number: 10014115
    Abstract: Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
    Type: Grant
    Filed: August 14, 2017
    Date of Patent: July 3, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Fred D. Fishburn
  • Publication number: 20170345578
    Abstract: Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
    Type: Application
    Filed: August 14, 2017
    Publication date: November 30, 2017
    Inventor: Fred D. Fishburn
  • Patent number: 9767962
    Abstract: Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
    Type: Grant
    Filed: January 22, 2016
    Date of Patent: September 19, 2017
    Assignee: Micron Technology, Inc.
    Inventor: Fred D. Fishburn
  • Publication number: 20170213650
    Abstract: Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
    Type: Application
    Filed: January 22, 2016
    Publication date: July 27, 2017
    Inventor: Fred D. Fishburn
  • Patent number: 8273619
    Abstract: The invention includes methods of forming channel region implants for two transistor devices simultaneously, in which a mask is utilized to block a larger percentage of a channel region location of one of the devices relative to the other. The invention also pertains to methods of forming capacitor structures in which a first capacitor electrode is spaced from a semiconductor substrate by a dielectric material, a second capacitor electrode comprises a conductively-doped diffusion region within the semiconductor material, and a capacitor channel region location is beneath the dielectric material and adjacent the conductively-doped diffusion region. An implant mask is formed to cover only a first portion of the capacitor channel region location and to leave a second portion of the capacitor channel region location uncovered. While the implant mask is in place, dopant is implanted into the uncovered second portion of the capacitor channel region location.
    Type: Grant
    Filed: August 2, 2010
    Date of Patent: September 25, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Hongmei Wang, Kurt D. Beigel, Fred D. Fishburn, Rongsheng Yang
  • Patent number: 8232206
    Abstract: Electroless plating can be utilized to form electrical interconnects associated with semiconductor substrates. For instance, a semiconductor substrate can be formed to have a dummy structure thereover with a surface suitable for electroless plating, and to also have a digit line thereover having about the same height as the dummy structure. A layer can be formed over the dummy structure and digit line, and openings can be formed through the layer to the upper surfaces of the dummy structure and digit line. Subsequently, a conductive material can be electroless plated within the openings to form electrical contacts within the openings. The opening extending to the dummy structure can pass through a capacitor electrode, and accordingly the conductive material formed within such opening can be utilized to form electrical contact to the capacitor electrode.
    Type: Grant
    Filed: March 31, 2010
    Date of Patent: July 31, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Nishant Sinha, Dinesh Chopra, Fred D. Fishburn
  • Patent number: 8163613
    Abstract: A method of forming a plurality of capacitors includes forming a plurality of individual capacitor electrodes using two masking steps. An earlier of the two masking steps is used to form an array of first openings over a plurality of storage node contacts. A later of the two masking steps is used to form an array of second openings received partially over and partially offset from the array of first openings. Overlapping portions of the first and second openings are received over the storage node contacts. After both of the two masking steps, conductive material of the individual capacitor electrodes is deposited into the overlapping portions of each of the first and second openings. The individual capacitor electrodes are incorporated into a plurality of capacitors. Other aspects and implementations are contemplated.
    Type: Grant
    Filed: June 25, 2010
    Date of Patent: April 24, 2012
    Assignee: Micron Technology, Inc.
    Inventor: Fred D. Fishburn
  • Patent number: 7935602
    Abstract: The invention includes methods of forming isolation regions. An opening can be formed to extend into a semiconductor material, and an upper periphery of the opening can be protected with a liner while a lower periphery is unlined. The unlined portion can then be etched to form a widened region of the opening. Subsequently, the opening can be filled with insulative material to form an isolation region. Transistor devices can then be formed on opposing sides of the isolation region, and electrically isolated from one another with the isolation region. The invention also includes semiconductor constructions containing an electrically insulative isolation structure extending into a semiconductor material, with the structure having a bulbous bottom region and a stem region extending upwardly from the bottom region to a surface of the semiconductor material.
    Type: Grant
    Filed: June 28, 2005
    Date of Patent: May 3, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Hongmei Wang, Fred D. Fishburn, Janos Fucsko, T. Earl Allen, Richard H. Lane, Robert J. Hanson, Kevin R. Shea
  • Publication number: 20100297822
    Abstract: The invention includes methods of forming channel region implants for two transistor devices simultaneously, in which a mask is utilized to block a larger percentage of a channel region location of one of the devices relative to the other. The invention also pertains to methods of forming capacitor structures in which a first capacitor electrode is spaced from a semiconductor substrate by a dielectric material, a second capacitor electrode comprises a conductively-doped diffusion region within the semiconductor material, and a capacitor channel region location is beneath the dielectric material and adjacent the conductively-doped diffusion region. An implant mask is formed to cover only a first portion of the capacitor channel region location and to leave a second portion of the capacitor channel region location uncovered. While the implant mask is in place, dopant is implanted into the uncovered second portion of the capacitor channel region location.
    Type: Application
    Filed: August 2, 2010
    Publication date: November 25, 2010
    Inventors: Hongmei Wang, Kurt D. Beigel, Fred D. Fishburn, Rongsheng Yang
  • Patent number: RE49715
    Abstract: A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually include a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region. At least a portion of the channel region is horizontally-oriented for horizontal current flow in the portion between the first and second source/drain regions. The memory cells individually include a capacitor comprising first and second electrodes having a capacitor insulator there-between. The first electrode is electrically coupled to the first source/drain region. The second capacitor electrodes of multiple of the capacitors in the array are electrically coupled with one another. A sense-line structure extends elevationally through the vertically-alternating tiers.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: October 24, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Martin C. Roberts, Sanh D. Tang, Fred D. Fishburn