Patents by Inventor Fred E. Stanke
Fred E. Stanke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9165742Abstract: Embodiments of the present disclosure are directed to an electron beam imaging/inspection apparatus having an electron source device to direct flood electrons on a sample immediately before image acquisition or inspection. The apparatus comprises a first device configured to charge a sample in a first mode, wherein the first device includes an electron source configured to provide a flood beam of charged particles to a first area of the sample. The apparatus also comprises a second device configured to generate a primary beam of electrons and characterize an interaction between the primary beam and a second area of the sample within the first area in a second mode. The apparatus is configured to switch from the first mode to the second mode less than 1 second.Type: GrantFiled: February 20, 2015Date of Patent: October 20, 2015Assignee: KLA-Tencor CorporationInventors: Richard Simmons, Douglas Masnaghetti, Mark McCord, Fred E Stanke, Scott Young, Christopher Sears
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Patent number: 7471392Abstract: An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.Type: GrantFiled: September 21, 2007Date of Patent: December 30, 2008Assignee: Tokyo Electron LimitedInventors: Adam E. Norton, Abdurrahman Sezginer, Fred E. Stanke
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Patent number: 7289219Abstract: An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.Type: GrantFiled: April 13, 2005Date of Patent: October 30, 2007Assignee: Tokyo Electron LimitedInventors: Adam E. Norton, Abdurrahman Sezginer, Fred E. Stanke
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Patent number: 7248362Abstract: A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.Type: GrantFiled: November 15, 2006Date of Patent: July 24, 2007Assignee: Tokyo Electron LimitedInventors: Adam E. Norton, Kenneth C. Johnson, Fred E. Stanke
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Patent number: 7177019Abstract: This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.Type: GrantFiled: February 1, 2005Date of Patent: February 13, 2007Assignee: Tokyo Electron LimitedInventors: Fred E. Stanke, Douglas E. Ruth, James M. Cahill, Michael Weber, Clinton B. Carlisle, Hung Pham, Edric Tong, Elliot Burke
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Patent number: 7158229Abstract: A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.Type: GrantFiled: April 6, 2006Date of Patent: January 2, 2007Assignee: Tokyo Electron LimitedInventors: Adam E. Norton, Kenneth C. Johnson, Fred E. Stanke
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Patent number: 7099081Abstract: A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.Type: GrantFiled: February 21, 2002Date of Patent: August 29, 2006Assignee: Tokyo Electron LimitedInventors: Adam E. Norton, Kenneth C. Johnson, Fred E. Stanke
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Patent number: 7069182Abstract: A database interpolation method is used to rapidly calculate a predicted optical response characteristic of a diffractive microstructure as part of a real-time optical measurement process. The interpolated optical response is a continuous and (in a preferred embodiment) smooth function of measurement parameters, and it matches the theoretically-calculated optical response at the database-stored interpolation points.Type: GrantFiled: August 26, 2005Date of Patent: June 27, 2006Assignee: Tokyo Electron LimitedInventors: Kenneth C. Johnson, Fred E. Stanke
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Patent number: 7049633Abstract: A method of measuring at least one parameter associated with a portion of a sample having formed thereon one or more structures with at least two zones each having an associated zone reflectance property. The method includes the steps of illuminating the zones with broadband light, and measuring at least one reflectance property of light reflected from the at least two zones. The measurement includes a substantial portion of non-specularly scattered light, thereby increasing the quality of the measurement. The method further includes the step of fitting a parameterized model to the measured reflectance property. The parameterized model mixes the zone reflectance properties of the zones to account for partially coherent light interactions between the two zones.Type: GrantFiled: August 17, 2004Date of Patent: May 23, 2006Assignee: Tokyo Electron LimitedInventors: Kenneth C. Johnson, Fred E. Stanke
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Patent number: 7042580Abstract: This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.Type: GrantFiled: March 22, 2000Date of Patent: May 9, 2006Assignee: Tokyo Electron LimitedInventors: Fred E. Stanke, Clinton B. Carlisle, Hung Pham, Edric Tong, Douglas E. Ruth, James M. Cahill, Michael Weber, Elliot Burke
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Patent number: 7042569Abstract: Alignment accuracy between two or more patterned layers is measured using a metrology target comprising substantially overlapping diffraction gratings formed in a test area of the layers being tested. An optical instrument illuminates all or part of the target area and measures the optical response. The instrument can measure transmission, reflectance, and/or ellipsometric parameters as a function of wavelength, polar angle of incidence, azimuthal angle of incidence, and/or polarization of the illumination and detected light. Overlay error or offset between those layers containing the test gratings is determined by a processor programmed to calculate an optical response for a set of parameters that include overlay error, using a model that accounts for diffraction by the gratings and interaction of the gratings with each others' diffracted field. The model parameters might also take account of manufactured asymmetries.Type: GrantFiled: August 12, 2004Date of Patent: May 9, 2006Assignee: Tokyo Electron LimitedInventors: Abdurrahman Sezginer, Kenneth C. Johnson, Fred E. Stanke
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Patent number: 6950780Abstract: A database interpolation method is used to rapidly calculate a predicted optical response characteristic of a diffractive microstructure as part of a real-time optical measurement process. The interpolated optical response is a continuous and (in a preferred embodiment) smooth function of measurement parameters, and it matches the theoretically-calculated optical response at the database-stored interpolation points.Type: GrantFiled: February 12, 2004Date of Patent: September 27, 2005Assignee: Tokyo Electron LimitedInventors: Kenneth C. Johnson, Fred E. Stanke
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Patent number: 6919958Abstract: This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.Type: GrantFiled: March 26, 2003Date of Patent: July 19, 2005Assignee: Therma-Wave, Inc.Inventors: Fred E. Stanke, Clinton B. Carlisle, Hung Van Pham, Edric Tong, Douglas E. Ruth, James M. Cahill, Jr., Michael Weber-Grabau, Elliot Burke, Adam E. Norton
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Patent number: 6909507Abstract: An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.Type: GrantFiled: May 28, 2004Date of Patent: June 21, 2005Assignee: Therma-Wave, Inc.Inventors: Adam E. Norton, Abdurrahman Sezginer, Fred E. Stanke
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Patent number: 6870617Abstract: The invention is a method and apparatus for determining characteristics of a sample. The system and method provide for detecting a monitor beam reflected off a mirror, where the monitor beam corresponds to the intensity of light incident upon the sample. The system and method also provide for detecting a measurement beam, where the measurement beam has been reflected off the sample being characterized. Both the monitor beam and the measurement beam are transmitted through the same transmission path, and detected by the same detector. Thus, potential sources of variations between the monitor beam and the measurement beam which are not due to the characteristics of the sample are minimized. Reflectivity information for the sample can be determined by comparing data corresponding to the measurement beam relative to data corresponding the monitor beam.Type: GrantFiled: March 9, 2004Date of Patent: March 22, 2005Assignee: Therma-Wave, Inc.Inventors: Adam Norton, Abdurrahman Sezginer, Fred E. Stanke, Rodney Smedt
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Patent number: 6850333Abstract: A metrology instrument for measuring grating-like microstructures on a sample for parameters of interest is characterized by an illumination spot that is elongated. The elongated illumination spot is produced by providing the designing the illumination optics to have a limiting aperture that is also elongated. The limiting aperture and corresponding illumination spot will have respective long directions that are perpendicular to each other. The sample is supported in a measurement relation to the instrument wherein the illumination spot is oriented generally transverse to linear elements of a microstructure. The microstructure can be also be a two-dimensional bigrating, with the illumination spot on a row or column of the bigrating.Type: GrantFiled: August 23, 2001Date of Patent: February 1, 2005Assignee: Therma-Wave, Inc.Inventors: Kenneth C. Johnson, Fred E. Stanke
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Patent number: 6829054Abstract: This invention is an instrument adaptable for integration into a process tool the combines a number of instruments for surface characterization. As an integrated process monitor, the invention is capable of monitoring surface dishing, surface erosion and thickness of residue layers on work-pieces with little time delay. The invention is adaptable to making measurements while a wafer or work-piece is either wet or dry. A preferred embodiment includes an integrated optical profiler adapted to surface profiling in the presence of optical interference arising from retro-reflections from underlying optical non-uniformities Alternate embodiments include an integrated stylus profiler with vibration isolation.Type: GrantFiled: September 3, 2003Date of Patent: December 7, 2004Assignee: Sensys Instruments CorporationInventors: Fred E. Stanke, Talat F. Hasan, Michael Weber
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Patent number: 6819426Abstract: Alignment accuracy between two or more patterned layers is measured using a metrology target comprising substantially overlapping diffraction gratings formed in a test area of the layers being tested. An optical instrument illuminates all or part of the target area and measures the optical response. The instrument can measure transmission, reflectance, and/or ellipsometric parameters as a function of wavelength, polar angle of incidence, azimuthal angle of incidence, and/or polarization of the illumination and detected light. Overlay error or offset between those layers containing the test gratings is determined by a processor programmed to calculate an optical response for a set of parameters that include overlay error, using a model that accounts for diffraction by the gratings and interaction of the gratings with each others' diffracted field. The model parameters might also take account of manufactured asymmetries.Type: GrantFiled: February 12, 2002Date of Patent: November 16, 2004Assignee: Therma-Wave, Inc.Inventors: Abdurrahman Sezginer, Kenneth C. Johnson, Fred E. Stanke
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Publication number: 20040218179Abstract: An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.Type: ApplicationFiled: May 28, 2004Publication date: November 4, 2004Inventors: Adam E. Norton, Abdurrahman Sezginer, Fred E. Stanke
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Patent number: 6806105Abstract: A method of measuring at least one parameter associated with a portion of a sample having formed thereon one or more structures with at least two zones each having an associated zone reflectance property. The method includes the steps of illuminating the zones with broadband light, and measuring at least one reflectance property of light reflected from the at least two zones. The measurement includes a substantial portion of non-specularly scattered light, thereby increasing the quality of the measurement. The method further includes the step of fitting a parameterized model to the measured reflectance property. The parameterized model mixes the zone reflectance properties of the zones to account for partially coherent light interactions between the two zones.Type: GrantFiled: July 16, 2003Date of Patent: October 19, 2004Assignee: Therma-Wave, Inc.Inventors: Kenneth C. Johnson, Fred E. Stanke