Abstract: A method and system for flexible, comprehensive, on-line, real-time dynamic lot dispatching in a semiconductor test foundry based on a two-phased, event-driven dispatching system structure. An adjustable priority formula and tuned algorithms integrated with PROMIS' constraint function give a nearly optimum dispatching list on any tester at any time with reduced mistake operations. Exception rules take care of special events to improve daily dispatching manual effort. This invention can automatically dispatch engineering lots according to engineering lots' capacity of Testing, solve conflict between wafer and package lots, efficiently reduce tester setup times, replace daily manual-dispatching sheet and keep a high CLIP rate while fully following MPS.

Abstract: In prior arts, additional pulse-width modulators and more costs are needed for increasing the current output. The invention provides a synchronized parallel running power converter. The power converter includes multiple power converters controlled by single-phase or double-phase pulse-width modulators. Each power converter includes a first pulse input port, a second pulse input port and a current output port. Each first pulse input ports are coupled, and each second pulse input ports are coupled also, so that each power converter is controlled by the same pulse signal and provide a same output current to be added as several times of current output.

Abstract: A method of scheduling packet output according to a quality of service action specification, the method maintains a calendar queue of bandwidth timeslots, organizes the timeslots into groups, invokes a look-up logic circuitry to inspect a group of timeslots substantially simultaneously, determines a first unoccupied timeslot to schedule a current packet, and also determines a first occupied timeslot that contains a next packet to transmit.

Abstract: To allocate products for machines on a manufacturing line, provide a standard test time. Minimize total test time with respect to production scheduling. Form a supply demand matrix table for products and machines for product allocation. Find the grid location with minimum testing time. Provide maximum time allocation from a machine at the corresponding position on the matrix table. Determine the grid location with the next minimum testing time. Loop back to provide a maximum allocation of remaining time from the corresponding machine and repeat looping back until no demand is left. Find need for an optimum testing process by testing whether only one machine can test the product and no quantity is allocated to a machine. If YES branch to calculate utilization per machine. If NO, decide whether NCOL+NLIN−1=NVB. If YES perform optimum testing. If NO, branch to calculate machine utilization per machine.

Abstract: The invention provides a new soluble thermosetting polyethersulfone resin, which can dissolve in ether solvent such as THF and 1,4-Dioxane. The soluble thermosetting polyethersulfone resin can be introduced the unsaturated olefin functional group, after high temperature (>180° C.) curing the unsaturated olefin functional group gets high heat resistant polyethersulfone resin. The soluble thermosetting polyethersulfone resin is made by two steps reaction, the dihalodiphenylsulfone reacts with dihydroxy aromatic compound and dihydroxybenzoic acid to form carboxy group terminated polyethersulfone resin, then the carboxy group terminated polyethersulfone resin react with unsaturated olefin alcohol or glycidyl acrylate or their derivatives to make soluble thermosetting polyethersulfone resin.

Abstract: An interlock controller device is used in an ion implantation machine to prevent an overdose ions from being implanted into a semiconductor wafer due to fluctuations in the power supply to the ion beam used to scan the wafer. The device stores a pre-selected count corresponding to the number of times the wafer should be scanned at a particular ion beam current in order to achieve a desired implantation dose, and decrements the count each time the wafer is scanned. When the count is decremented to zero, the device turns off the current to the ion beam, thereby terminating ion implantation, even though scanning of the wafer is continued.

Abstract: The present invention provides a wafer holder shield in a physical vapor deposition chamber for use in a metal deposition process without the arcing problem. The shield is constructed in a configuration of a toroid wherein the toroid has a rectangular cross-section and a flat bottom surface. The toroid further has a cavity at the center adapted for receiving a wafer when the shield is placed on a wafer holder. The flat bottom surface of the wafer holder shield has an inner end adjacent to an inner periphery of the toroid that is supported by the wafer holder. The flat bottom surface further has an outer end adjacent to an outer periphery of the toroid suspended over and spaced apart from a chamber shield for the deposition chamber at a distance sufficient to prevent bridge formation between the wafer holder shield and the chamber shield by metal particles generated in the deposition chamber.

Abstract: A plurality of removable shields are disclosed for use with ion source in ion implanters. Specifically, the shields fit over the extraction electrode assembly, the sides of the interior walls and the cold-plate inside an ion source chamber. The shields are easily mountable and dismountable by the maintenance personnel. It is shown that shields can very effectively protect the insides of ion source from contamination by toxic materials emanating from the ionization source. A method is also disclosed for cleaning the shields outside the ion source by means of bead blasting followed by washing by deionized water and rinse with isopropyl alcohol. It is shown that the turn-around-time for preventive maintenance of an ion source in an ion implanter can be shortened by a factor of four.

Abstract: The present invention discloses a leakage detection apparatus for testing the vacuum tightness of a semiconductor processing equipment which is equipped with a universal adapter head for testing various components of the equipment and a method for conducting such tests. Valuable down time can be saved on the semiconductor fabrication equipment by pre-screening all components on the basis of vacuum tightness testing done by a leak detection chamber supplied with such universal adapter head before they are assembled into the fabrication equipment after a maintenance or cleaning procedure is conducted on the components.

Abstract: A plurality of removable shields are disclosed for use with ion source in ion implanters. Specifically, the shields fit over the extraction electrode assembly, the sides of the interior walls and the cold-plate inside an ion source chamber. The shields are easily mountable and dismountable by the maintenance personnel. It is shown that shields can very effectively protect the insides of ion source from contamination by toxic materials emanating from the ionization source. A method is also disclosed for cleaning the shields outside the ion source by means of bead blasting followed by washing by deionized water and rinse with isopropyl alcohol. It is shown that the turn-around-time for preventive maintenance of an ion source in an ion implanter can be shortened by a factor of four.