Abstract: A contrasting surface surrounding the pin minor when measuring aberrations of a lithographic projection system. By using a surrounding surface having a different reflectivity characteristic relative to the pin minor, the reflected wave front contains predominately single-pass aberration content because the amount of double-pass content is significantly reduced. As a result, the aberration measurement performed by a measurement system is more accurate.

Abstract: A new and useful optical system is provided, which is particularly useful as an optical relay for an aerial imaging system (AIS). The optical system preferably comprises a two element catadioptric lens where a beam transmitted by makes two reflections before leaving the first solid glass (catadioptric) element, then reflects off the second (mirror) element, makes a fourth reflection off the outside surface of the first element and then passes through a hole in the center of the second element. When the optical system is used as an AIS relay, it substantially captures the NA of the projection lens with which it is associated, and simplifies the structure of the AIS relay. In addition, the AIS relay is configured to minimize the affects of stray light.

Abstract: New and useful optical components are provided, for use in measuring projection lens characteristics of an optical imaging system that images a substrate. The optical components comprise an array of full NA imagers located at the substrate plane, and a relay system for imaging the imagers to a detector that is remote from the substrate.

Abstract: A way of predicting distribution of light in an illumination pupil, comprising: (a) identifying one or more component(s) of an illumination system having an illumination pupil, where the component(s) affect the distribution of light in the illumination pupil; (b) generating a point spread function that depends on the identified component(s) and has a functional relationship with the configurable settings of the illumination system; and (c) predicting the distribution of light in the illumination pupil using the point spread function.

Abstract: A target (16) for a metrology system (10) that monitors the position of an object (12) includes a target housing (18) and a detector assembly (20). The target housing (18) is substantially spherically shaped and includes a first detector region (218F). The target housing (18) includes a housing interior (228). A light beam (22A) impinging on the target housing (18) results in light energy within the housing interior (228). The detector assembly (20) includes a first detector (220A) secured to the first detector region (218F). The first detector (220?) generates a first signal when the light beam (22A) impinges on the target housing (18) that relates to the light energy within the housing interior (228).

Abstract: An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.

Abstract: Several methods of calibrating a wavelength-modulation spectroscopy apparatus configured to measure a concentration of an analyte in a sample gas are disclosed. Each of the methods allows for calibration and recalibration using a relatively safe gas regardless of whether the sample gas for which the concentration of the analyte can be determined is a hazardous gas. In one embodiment of the invention, calibration that is sample-gas specific is accomplished by determining a first slope coefficient and calibration function for the sample gas, after which a scaling factor can be determined based on the first slope coefficient and a second slope coefficient for the same or a different sample gas and used in a subsequent calibration (or recalibration) to scale the calibration function. In other embodiments of the invention, calibration that is not sample-gas specific is accomplished to allow for the determination of the analyte concentration in variable gas compositions and constant gas compositions.

Abstract: A new and useful optical element for an optical imaging system is provided, characterized in that the optical element comprises a reflecting surface that is rotationally symmetric and oriented at a grazing angle to a relatively small slit that is illuminated over a relatively large range of angles, such that the optical element collects radiation from the relatively small slit that is illuminated over a large range of angles, and the reflecting surface reflects the collected radiation. The optical element is configured to convert a large range of angles leaving a very small slit, to a much smaller range of angles over a larger area.

Abstract: A collapsible transport, storage and display table includes a plurality of rectangular plastic shelves supported at their midsections by respective plastic support posts. Each shelf includes an interior framework and a peripheral lip formed unitarily with the framework. A gap is formed in the lip at the midsection of each side edge for receiving a respective support post such that the support post securely, yet releasably interengages a respective shelf. The peripheral lip forms a receptacle in the shelf for accommodating four support posts in a collapsed condition.

Abstract: An encoder system and method are provided, that is designed to improve 2D encoder systems and methods in areas such as accuracy, compactness, stability, resolution, and/or light efficiency. Moreover, the system and method of this invention provides a new concept in a retroreflector that while particularly useful in applicants' system and method, is believed to have more general utility in optical imaging systems and methods.

Abstract: New and useful concepts for an autofocus system and method are provided. A basic concept uses fringe projection in an autofocus system and method. A further aspect provides spatial filtering concepts for the fringe projection concept. In yet another aspect, the fringe projection autofocus system and method is provided with temporal phase shifting using no moving parts. In a still further aspect, the fringe projection autofocus system and method is provided with unambiguous height measurement concepts.

Abstract: A new and useful concept is provided by which control information for an imaging optical system such as a lithographic imaging optical system can be generated. A system and method are disclosed that are designed to detect changes in the lateral position of an image plane or object plane in an imaging optical system, particularly a lithographic imaging optical system.

Abstract: Several methods of calibrating a wavelength-modulation spectroscopy apparatus configured to measure a concentration of an analyte in a sample gas are disclosed. Each of the methods allows for calibration and recalibration using a relatively safe gas regardless of whether the sample gas for which the concentration of the analyte can be determined is a hazardous gas. In one embodiment of the invention, calibration that is sample-gas specific is accomplished by determining a first slope coefficient and calibration function for the sample gas, after which a scaling factor can be determined based on the first slope coefficient and a second slope coefficient for the same or a different sample gas and used in a subsequent calibration (or recalibration) to scale the calibration function. In other embodiments of the invention, calibration that is not sample-gas specific is accomplished to allow for the determination of the analyte concentration in variable gas compositions and constant gas compositions.

Abstract: Several methods of calibrating a wavelength-modulation spectroscopy apparatus configured to measure a concentration of an analyte in a sample gas are disclosed. Each of the methods allows for calibration and recalibration using a relatively safe gas regardless of whether the sample gas for which the concentration of the analyte can be determined is a hazardous gas. In one embodiment of the invention, calibration that is sample-gas specific is, accomplished by determining a first slope coefficient and calibration function for the sample gas, after which a scaling factor can be determined based on the first slope coefficient and a second slope coefficient for the same or a different sample gas and used in a subsequent calibration (or recalibration) to scale the calibration function. In other embodiments of the invention, calibration that is not sample-gas specific is accomplished to allow for the determination of the analyte concentration in variable gas compositions and constant gas compositions.

Abstract: Several methods of calibrating a wavelength-modulation spectroscopy apparatus configured to measure a concentration of an analyte in a sample gas are disclosed. Each of the methods allows for calibration and recalibration using a relatively safe gas regardless of whether the sample gas for which the concentration of the analyte can be determined is a hazardous gas. In one embodiment of the invention, calibration that is sample-gas specific is accomplished by determining a first slope coefficient and calibration function for the sample gas, after which a scaling factor can be determined based on the first slope coefficient and a second slope coefficient for the same or a different sample gas and used in a subsequent calibration (or recalibration) to scale the calibration function. In other embodiments of the invention, calibration that is not sample-gas specific is accomplished to allow for the determination of the analyte concentration in variable gas compositions and constant gas compositions.

Abstract: An autofocus system (222C) for measuring the position of a work piece (200) along an axis includes a slit light source assembly (236), a slit detector assembly (238), and a control system (224). The slit light source assembly (236) directs a first slit of light (342A) at a first slit area (344A) of the work piece (200). The slit detector assembly (238) detects light reflected off of the first slit area (344A) and generates a first slit signal relating to the amount of light reflected off of the first slit area (344A) at the slit detector assembly (238). The control system (224) uses the first slit signal from the slit detector assembly (238), and first reflectance information of the first slit area (344A) to determine the position of the work piece (200) along the axis. With this design, the autofocus system (222C) can compensate for the changes in reflectivity of the work piece (200).

Abstract: Apparatus for making tenons and forming shoulders on wood ends with a stand having two opposing sides and a attachable stand top, a two piece router bracket that accepts different diameter router motors, a threaded rod bracket with at least 3 apertures for receiving a threaded rod, a threaded rod with a square tapered end, a tube connector that receives and secures smaller round diameter tubing and bolts to the top of the router bracket, a round steel slide pole, a wooden work piece holder with a round tube with a square tube attached at a 90 degree angle a a square tube with a fixed stud at one end. A preferred embodiment includes the curved thread engaging clip moves slidably on a steel rod. A preferred embodiment includes locking collars used as adjustable stops positioning the curved engaging clip in a engaging and disengaging location on the threaded rod.

Abstract: In one embodiment of the spectroscopy method, the method comprises the steps of modulating the wavelength of a monochromatic radiation at a modulation amplitude and a modulation frequency; determining a first variable representative of an absorbance of an analyte in a sample; and demodulating by phase-sensitive detection the first variable at a harmonic of the modulation frequency to produce a harmonic spectrum of the analyte. In one embodiment of the spectroscopy apparatus, the apparatus comprises a laser diode integrated with a first photodetector configured to detect an intensity of a backward emission from the laser diode and act as a reference detector; a second photodetector configured to detect an intensity of laser radiation exiting a sample; and electronic circuitry coupled to the laser diode and the photodetectors, configured to acquire and process spectra of the sample.

Abstract: Several methods of calibrating a wavelength-modulation spectroscopy apparatus configured to measure a concentration of an analyte in a sample gas are disclosed. Each of the methods allows for calibration and recalibration using a relatively safe gas regardless of whether the sample gas for which the concentration of the analyte can be determined is a hazardous gas. In one embodiment of the invention, calibration that is sample-gas specific is accomplished by determining a first slope coefficient and calibration function for the sample gas, after which a scaling factor can be determined based on the first slope coefficient and a second slope coefficient for the same or a different sample gas and used in a subsequent calibration (or recalibration) to scale the calibration function. In other embodiments of the invention, calibration that is not sample-gas specific is accomplished to allow for the determination of the analyte concentration in variable gas compositions and constant gas compositions.

Abstract: A new and useful method is provided for Goos-Hanchen compensation in an optical autofocus (AF) system that uses light reflected from a substrate to determine changes in the z position of a substrate. According to the method of the invention reflected light from the substrate is provided at a plurality of wavelengths and polarizations, detected and used to make corrections that compensate for the errors due to the Goos-Hanchen effect.