Abstract: A substrate handling structure is provided that is particularly useful with an imaging optical system that images a single reticle to a pair of imaging locations. The principles of the present invention provide substrate handling structures with new and useful metrology structures, and new and useful ways of moving substrates in relation to the imaging locations, that are designed to provide benefits in providing information as to the substrate position as a substrate is being imaged, while reducing the size of the support structure. These features are believed to be important as imaging of substrates in the 450 mm diameter range is developing.

Abstract: An autofocus system and method designed to account for instabilities in the system, e.g. due to instabilities of system components (e.g. vibrating mirrors, optics, etc) and/or environmental effects such as refractive index changes of air due to temperature, atmospheric pressure, or humidity gradients, is provided. An autofocus beam is split into a reference beam component (the split off reference channel) and a measurement beam component, by a beam splitting optic located a predetermined distance from (and in predetermined orientation relative to) the substrate, to create a first space between the beam splitting optic and the substrate. A reflector is provided that is spaced from the beam splitting optic by the predetermined distance, to create a second space between the reflector and the beam splitting optic.

Abstract: Several methods of calibrating a wavelength-modulation spectroscopy apparatus configured to measure a concentration of an analyte in a sample gas are disclosed. Each of the methods allows for calibration and recalibration using a relatively safe gas regardless of whether the sample gas for which the concentration of the analyte can be determined is a hazardous gas. In one embodiment of the invention, calibration that is sample-gas specific is accomplished by determining a first slope coefficient and calibration function for the sample gas, after which a scaling factor can be determined based on the first slope coefficient and a second slope coefficient for the same or a different sample gas and used in a subsequent calibration (or recalibration) to scale the calibration function. In other embodiments of the invention, calibration that is not sample-gas specific is accomplished to allow for the determination of the analyte concentration in variable gas compositions and constant gas compositions.

Abstract: In one embodiment of the spectroscopy method, the method comprises the steps of modulating the wavelength of a monochromatic radiation at a modulation amplitude and a modulation frequency; determining a first variable representative of an absorbance of an analyte in a sample; and demodulating by phase-sensitive detection the first variable at a harmonic of the modulation frequency to produce a harmonic spectrum of the analyte. In one embodiment of the spectroscopy apparatus, the apparatus comprises a laser diode integrated with a first photodetector configured to detect an intensity of a backward emission from the laser diode and act as a reference detector; a second photodetector configured to detect an intensity of laser radiation exiting a sample; and electronic circuitry coupled to the laser diode and the photodetectors, configured to acquire and process spectra of the sample.

Abstract: An exposure apparatus (10) for transferring a mask pattern (12A) from a mask (12) to first and second substrates (14A) (14B) includes an illumination system (18) that generates and simultaneously directs a first beam (32A) at the mask pattern (12A) and a second beam (32B) at the mask pattern (12A). Further, the first beam (32A) is spaced apart from the second beam (32B) at the mask pattern (12A). As provided herein, the first beam (32A) directed at the mask (12) creates a first pattern beam (34A) that is transferred to a first substrate location (33A), and the second beam (32B) directed at the mask (12) creates a second pattern beam (34B) that is transferred to a second substrate location (33B). Moreover, the first substrate location (33A) is spaced apart from the second substrate location (33B). With this design, the first pattern beam (34A) can be transferred to the first substrate (14A) and the second pattern beam (34B) can be simultaneously transferred to the second substrate (14B).

Abstract: A new and useful optical imaging process is provided for imaging of a plurality of substrates, in a manner that makes efficient use of an optical imaging system with the capability to image a single reticle to a pair of imaging locations, and addresses the types of substrate stage movement patterns to accomplish such imaging in an efficient and effective manner. At least three substrates are imaged by moving their substrate stages in patterns whereby (i) two of the substrates are completely imaged at respective imaging locations, (ii) a substrate on at least one of the three stages is partially imaged at one imaging location and then partially imaged at the other imaging location, and (iii) the movement of the stages of the three substrates is configured to avoid movement of the stages of the three substrates in paths that would cause interference between movement of any one substrate stage with movement of any of the other substrate stages.

Abstract: A pivoting dump rack for an existing pickup truck. The pivoting dump rack is mounted on pivot mounts with a single axis above the tailgate end of an existing pickup truck bed. On each rail of the pickup truck bed a hydraulic lift is mounted on a support frame. The hydraulic lifts raise the rack while the support frame distributes the load on the hydraulic lifts as they are in use. The rack is long enough to extend from the tailgate to above the cab of the pickup truck while providing extensions mounted on each end of the rack to further lengthen the pivoting rack and to increase the length of loads that can be carried by the pivoting rack. An attachable dump bed may also be fitted on the pivoting rack to allow it to carry loose items such as dirt and construction debris.

Abstract: An exposure apparatus (10) for transferring a mask pattern (358) from a mask (12) to a substrate (14) includes a mask retainer (44), a substrate stage assembly (24), and an illumination system (18). The mask retainer (44) retains the mask (12). The substrate stage assembly (24) retains and positions the substrate (14). The illumination system (18) generates an illumination beam (31) that moves along a beam scan axis (35) relative to the mask (12) to scan at least a portion of the mask pattern (358). The beam scan axis (35) is substantially parallel to the mask pattern (358). The illumination system (18) can include an illumination source (32) that generates the illumination beam (31) and an illumination optical assembly (34) that guides the illumination beam (31). The illumination optical assembly (34) moves the illumination beam (31) relative to the mask (12) so that the illumination beam (31) scans substantially the entire mask pattern (358).

Abstract: An autofocus system (222C) for measuring the position of a work piece (200) along an axis includes a slit light source assembly (236), a slit detector assembly (238), and a control system (224). The slit light source assembly (236) directs a first slit of light (342A) at a first slit area (344A) of the work piece (200). The slit detector assembly (238) detects light reflected off of the first slit area (344A) and generates a first slit signal relating to the amount of light reflected off of the first slit area (344A) at the slit detector assembly (238). The control system (224) uses the first slit signal from the slit detector assembly (238), and first reflectance information of the first slit area (344A) to determine the position of the work piece (200) along the axis. With this design, the autofocus system (222C) can compensate for the changes in reflectivity of the work piece (200).

Abstract: A lamp collecting apparatus for collecting used illuminants like bulbs or tubes said apparatus comprises a housing (1) with a lamp inserting opening (16) and an air outlet opening (46); a breaker device (5) provided in the housing (1) below the lamp inserting opening (16); a container (10?) for collecting lamp scrap, said container (10?) being disposed in said housing (1) below said breaker device (5); a low pressure generating system (4) having a suction portion with an air inlet (42) and an exhaust portion with an air outlet (43) wherein said air inlet (42) is effectively connected to the air outlet opening (46) of the housing (1).

Abstract: An edge shot (“ES”) exposure apparatus (14) for transferring edge features (ef) to a substrate edge region (222) of a substrate (18) includes a feature transferer (55), and an ES wafer stage assembly (62). The feature transferer (55) transfers one or more edge features (ef) to the substrate edge region (222), while the ES wafer stage assembly (62) rotates the substrate (18) about a substrate axis (23). This allows the feature transferer (55) to transfer the edge features (ef) to a plurality of alternative locations in the substrate edge region (222). The ES exposure apparatus (14) can be used in conjunction with a primary exposure apparatus (12) that transfers usable features (uf) to a substrate usable region (220) of the substrate (18). With this design, the primary exposure apparatus (12) can be transferring usable features (uf) to a first substrate (18A) while the ES exposure apparatus (14) is transferring edge features (ef) to a second substrate (18B).

Abstract: A vibration damper assembly to dampen the vibration generated in a motor vehicle and transmitted through, for example, a steering assembly. The vibration damper assembly includes a rotor disposed within a housing. The rotor is operatively connected to a velocity generating member such as a pinion that is integrated with the steering assembly. A conductive sleeve is disposed between the housing and the rotor. A coil engages the sleeve and is capable of generating a magnetic field that is transmitted through the sleeve. A plate separates the rotor from the sleeve thereby defining a viscous fluid chamber and a Magneto-Rheological (MR) fluid chamber between the rotor and the sleeve. The viscous fluid chamber includes a Newtonian fluid and the MR fluid chamber includes a MR fluid having sheer properties reactive to the magnetic field.

Abstract: A suspension damper includes a reservoir housing with a piston slidably mounted therein and including a piston rod extending from the reservoir housing and attached to the vehicle by a mount assembly. An air chamber is defined by a sleeve cirucmscribing the piston rod and connected to the reservoir housing by a flexible portion. The mount assembly includes a pumping chamber which expands and contracts in response to normal road undulations to inflate the air chamber. A valve controlled by the flexible portion of the sleeve controls communication from the air chamber to ambient atmosphere to thereby control inflation of the air chamber and thereby controlling ride height.

Abstract: A vibration damper assembly to dampen the vibration generated in a motor vehicle and transmitted through, for example, a steering assembly. The vibration damper assembly includes a rotor disposed within a housing. The rotor is operatively connected to a velocity generating member such as a pinion that is integrated with the steering assembly. A conductive sleeve is disposed between the housing and the rotor. A coil engages the sleeve and is capable of generating a magnetic field that is transmitted through the sleeve. A plate separates the rotor from the sleeve thereby defining a viscous fluid chamber and a Magneto-Rheological (MR) fluid chamber between the rotor and the sleeve. The viscous fluid chamber includes a Newtonian fluid and the MR fluid chamber includes a MR fluid having sheer properties reactive to the magnetic field.

Abstract: A suspension damper includes a reservoir housing with a piston slidably mounted therein and including a piston rod extending from the reservoir housing and attached to the vehicle by a mount assembly. An air chamber is defined by a sleeve cirucmscribing the piston rod and connected to the reservoir housing by a flexible portion. The mount assembly includes a pumping chamber which expands and contracts in response to normal road undulations to inflate the air chamber. A valve controlled by the flexible portion of the sleeve controls communication from the air chamber to ambient atmosphere to thereby control inflation of the air chamber and thereby controlling ride height.

Abstract: A vibration damper assembly to dampen the vibration generated in a motor vehicle and transmitted through, for example, a steering assembly. The vibration damper assembly includes a rotor disposed within a housing. The rotor is operatively connected to a velocity generating member such as a pinion that is integrated with the steering assembly. A conductive sleeve is disposed between the housing and the rotor. A coil engages the sleeve and is capable of generating a magnetic field that is transmitted through the sleeve. A plate separates the rotor from the sleeve thereby defining a viscous fluid chamber and a Magneto-Rheological (MR) fluid chamber between the rotor and the sleeve. The viscous fluid chamber includes a Newtonian fluid and the MR fluid chamber includes a MR fluid having sheer properties reactive to the magnetic field.

Abstract: A vibration damper assembly to dampen the vibration generated in a motor vehicle and transmitted through, for example, a steering assembly. The vibration damper assembly includes a rotor disposed within a housing. The rotor is operatively connected to a velocity generating member such as a pinion that is integrated with the steering assembly. A conductive sleeve is disposed between the housing and the rotor. A coil engages the sleeve and is capable of generating a magnetic field that is transmitted through the sleeve. A plate separates the rotor from the sleeve thereby defining a viscous fluid chamber and a Magneto-Rheological (MR) fluid chamber between the rotor and the sleeve. The viscous fluid chamber includes a Newtonian fluid and the MR fluid chamber includes a MR fluid having sheer properties reactive to the magnetic field.

Abstract: A variable radius bending apparatus is disclosed for bending a glass plate. The variable radius bending apparatus includes a bending rail having a longitudinal rail member and a drive drum and a tension drum rotatably attached thereto. A drive band is positioned around the drive drum and tension drum and in frictional engagement therewith. A plurality of rollers are in driven contact with the drive band and are tiltable to a desired bend radius for forming the desired bend radius in the glass plate. Finally, a band guide is fixedly attached to the bending rail and in juxtaposition with the drive band for preventing the drive band from moving transversely with respect to the drive drum and tension drum, whereby the band is prevented from contacting a surface adjacent to the band.