Abstract: An electro-mechanical switch structure includes at least one fixed electrode and a free electrode which is movable in the structure with a voltage potential applied between each fixed electrode and the free, movable electrode. The voltage potentials applied between each fixed electrode and the movable electrode are modulated to actuate the electro-mechanical switch structure.

Abstract: A switching system is disclosed for an optical signal. The switching system includes a first optical waveguide coupled to a first electrode, a second electrode, and a second optical waveguide. The second optical waveguide is coupled to a movable electrode. The movable electrode is supported by a support structure and is positioned with respect to the first and second electrodes so that the position of the movable electrode may be selectively placed in either a first closed state or a second open state defined by the first and second electrodes under application of a voltage with respect to one of the first and second electrodes.

Abstract: An apparatus for replicating holographically recorded data, comprising a holographic master media having holographically recorded data thereon; a holographic copy media; a light source for generating a master reference beam and a copy reference beam, coherent with the first object beam, the first master reference beam incident on the holographic master media, the holographic master media diffracting the master reference beam to provide a first object beam; the copy reference beam incident on the holographic copy media; and a first optical relay system, disposed between the holographic master media and the holographic copy media, for relaying the first object beam from the holographic master media to the holographic copy media, the holographic copy media recording an interference pattern between the first object beam and the copy reference beam, thereby replicating at least a portion of holographically recorded data.

Abstract: A method is disclosed for creating a permanent pattern on a substrate. The method includes the steps of providing an array of photon sources, each of which provides a photon beam, providing an array of focusing elements, each of which focuses an associated photon beam from the array of photon sources onto a substrate, and creating a permanent pattern on a substrate using the array of focusing elements to respectively focus associated photon beams on the substrate.

Abstract: A holographic imaging system is disclosed that includes a spectral electromagnetic field unit for providing a plurality of focal areas of a plurality of wavelengths of electromagnetic fields along a first direction, a lens system for directing the electromagnetic fields having the plurality of wavelengths from an object that may be positioned at least substantially near the plurality of focal areas toward a holographic recording, and a detector surface for receiving electromagnetic fields from the holographic recording.

Abstract: The electro-mechanical micro-switch device includes first and second fixed electrodes. A movable electrode is positioned with respect to the first and second fixed electrodes so that the position of the movable electrode can be selectively placed in one of two opposing states defined by the fixed electrodes. The stored elastic potential energy of the movable electrode and its flexible supporting structure is used for switching between the two states. An electrostatic hold voltage is used to hold the movable electrode in the two switch states.

Abstract: An optical manipulation system is disclosed that includes an array of focusing elements, which focuses the energy beamlets from an array of beamlet sources into an array of focal spots in order to individually manipulate a plurality of samples on an adjacent substrate.

Abstract: An apparatus for replicating holographically recorded data, comprising a holographic master media having holographically recorded data thereon; a holographic copy media; a light source for generating a master reference beam and a copy reference beam, coherent with the first object beam, the first master reference beam incident on the holographic master media, the holographic master media diffracting the master reference beam to provide a first object beam; the copy reference beam incident on the holographic copy media; and a first optical relay system, disposed between the holographic master media and the holographic copy media, for relaying the first object beam from the holographic master media to the holographic copy media, the holographic copy media recording an interference pattern between the first object beam and the copy reference beam, thereby replicating at least a portion of holographically recorded data.

Abstract: A passive nanomagnet alignment method is described to self-align a membrane to another surface. The membrane and the surface each have a plurality of nanomagnets patterned on it, wherein the nanomagnets are magnetized based on an applied external magnetic field. The membrane is brought into close proximity and coarse alignment to the surface by a positioning mechanism (e.g., an actuation force), such that the nanomagnets on the membrane attract to and self-align with the nanomagnets on said surface based on the nanomagnet magnetizations.

Abstract: An imaging system includes an image receiving unit for receiving an input image, and a spatial light modulator. The spatial light modulator is interposed between the image receiving unit and an input image. The spatial light modulator is for selectively modulating the input image such that at least one portion of the input image may be blurred as it passes through the spatial light modulator toward the image receiving unit.

Abstract: A method is disclosed for forming an array of focusing elements for use in a lithography system. In accordance with an embodiment, the method includes the steps of providing a master element that includes at least one diffractive pattern at a first location with respect to a target surface, illuminating the master element to produce a first diffractive pattern on the target surface at the first location, moving the master element with respect to the target surface to a second location with respect to the target surface, and illuminating the master element to produce a second diffractive pattern on the target surface at the second location.

Abstract: A holographic imaging spectrometer, apparatus, and/or method enables the projection of a two-dimensional (2D) slice (having spectral information) of a four-dimensional (4D) probing object. A 4D probing source object is illuminated to emit an optical field. A holographic element having one or more recorded holograms receives and diffracts the optical field into a diffracted plane beam having spectral information. Collector optics (e.g., an imaging lens) focuses the diffracted plane beam having spectral information to a 2D slice (having spectral information) of the 4D probing source object. The focused 2D slice having spectral information is projected onto a 2D detector array surface. In addition, the holographic element may have multiple multiplexed holograms that are arranged to diffract light from the corresponding slice of the 4D probing source object to a non-overlapping section of the detector.

Abstract: A system and method are disclosed for providing error correction in an imaging system. The system includes an error determination unit for determining an amount of error associated with a spot at (x,y) in a binary pattern to be imaged, a determination unit for determining the location of a nearest exposed spot at (xi, yi) for each spot at (x,y), and a dose modification unit for modifying an exposure dose at the nearest exposed spot at (xi, yi) for each spot at (x,y).

Abstract: A holographic imaging system is disclosed that includes a spectral electromagnetic field unit for providing a plurality of focal areas of a plurality of wavelengths of electromagnetic fields along a first direction, a lens system for directing the electromagnetic fields having the plurality of wavelengths from an object that may be positioned at least substantially near the plurality of focal areas toward a holographic recording, and a detector surface for receiving electromagnetic fields from the holographic recording.

Abstract: A microphotonic device is provided. The microphotonic device includes a membrane structure that can experience strain. A waveguide element is formed on the membrane structure so that when the membrane structure is strained, the waveguide element elements are tuned to a selective amount.

Abstract: A lithography system includes a source of radiation energy and a zone plate array to focus the radiation energy to create an array of images in order to produce a permanent pattern on a substrate. A phase-shift mask is optically located between the source of radiation energy and the zone plate array. The modulated wavefront produced by the phase-shift mask alters the field diffracted by the zone plate array, and the center lobe of the point-spread function narrows as a result.

Abstract: A photonic bandgap microcavity is provided. The microcavity includes a membrane structure that can experience strain. A photonic bandgap waveguide element is formed on the membrane structure having a defect so that when the membrane structure is strained, the photonic bandgap waveguide element is tuned to a selective amount.

Abstract: A MEMS device includes a first material structure. A second material structure includes TiN. The second material structure is moveable relative to the first material structure.

Abstract: A volume diffractive composite is disclosed for providing illumination at a first output angle. The volume diffractive composite comprises a first plurality of grating elements that are mutually spaced from another in a first position with a first spacing period along a first plane, and an actuation unit for changing at least one of the position or the spacing period of the first plurality of grating elements to a second position or spacing period to provide illumination at a second output angle.

Abstract: A switching system is disclosed for an optical signal. The switching system includes a first optical waveguide coupled to a first electrode, a second electrode, and a second optical waveguide. The second optical waveguide is coupled to a movable electrode. The movable electrode is supported by a support structure and is positioned with respect to the first and second electrodes so that the position of the movable electrode may be selectively placed in either a first closed state or a second open state defined by the first and second electrodes under application of a voltage with respect to one of the first and second electrodes.