Patents by Inventor Ger-Pin Lin

Ger-Pin Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10861855
    Abstract: A semiconductor device and method of manufacturing the same is provided in the present invention. The method includes the step of forming first mask patterns on a substrate, wherein the first mask patterns extend in a second direction and are spaced apart in a first direction to expose a portion of first insulating layer, removing the exposed first insulating layer to form multiple recesses in the first insulating layer, performing a surface treatment to the recess surface, filling up the recesses with a second insulating layer and exposing a portion of the first insulating layer, removing the exposed first insulating layer to form a mesh-type isolation structure, and forming storage node contact plugs in the openings of mesh-type isolation structure.
    Type: Grant
    Filed: April 7, 2020
    Date of Patent: December 8, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Li-Wei Feng, Shih-Fang Tzou, Chien-Cheng Tsai, Chih-Chi Cheng, Chia-Wei Wu, Ger-Pin Lin
  • Patent number: 10847517
    Abstract: A semiconductor device includes a semiconductor substrate having a gate trench including of an upper trench and a lower trench. The upper trench is wider than the lower trench. A gate is embedded in the gate trench. The gate includes an upper portion and a lower portion. A first gate dielectric layer is between the upper portion and a sidewall of the upper trench. The first gate dielectric layer has a first thickness. A second gate dielectric layer is between the lower portion and a sidewall of the lower trench and between the lower portion and a bottom surface of the lower trench. The second gate dielectric layer has a second thickness that is smaller than the first thickness.
    Type: Grant
    Filed: June 18, 2019
    Date of Patent: November 24, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Tsuo-Wen Lu, Ger-Pin Lin, Tien-Chen Chan, Shu-Yen Chan
  • Publication number: 20200235101
    Abstract: A semiconductor device and method of manufacturing the same is provided in the present invention. The method includes the step of forming first mask patterns on a substrate, wherein the first mask patterns extend in a second direction and are spaced apart in a first direction to expose a portion of first insulating layer, removing the exposed first insulating layer to form multiple recesses in the first insulating layer, performing a surface treatment to the recess surface, filling up the recesses with a second insulating layer and exposing a portion of the first insulating layer, removing the exposed first insulating layer to form a mesh-type isolation structure, and forming storage node contact plugs in the openings of mesh-type isolation structure.
    Type: Application
    Filed: April 7, 2020
    Publication date: July 23, 2020
    Inventors: Li-Wei Feng, Shih-Fang Tzou, Chien-Cheng Tsai, Chih-Chi Cheng, Chia-Wei Wu, Ger-Pin Lin
  • Patent number: 10658365
    Abstract: A semiconductor device and method of manufacturing the same is provided in the present invention. The method includes the step of forming first mask patterns on a substrate, wherein the first mask patterns extend in a second direction and are spaced apart in a first direction to expose a portion of first insulating layer, removing the exposed first insulating layer to form multiple recesses in the first insulating layer, performing a surface treatment to the recess surface, filling up the recesses with a second insulating layer and exposing a portion of the first insulating layer, removing the exposed first insulating layer to form a mesh-type isolation structure, and forming storage node contact plugs in the openings of mesh-type isolation structure.
    Type: Grant
    Filed: August 2, 2018
    Date of Patent: May 19, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Li-Wei Feng, Shih-Fang Tzou, Chien-Cheng Tsai, Chih-Chi Cheng, Chia-Wei Wu, Ger-Pin Lin
  • Patent number: 10608086
    Abstract: The present invention provides a semiconductor structure, the semiconductor structure includes a substrate, at least one active area is defined on the substrate, a buried word line is disposed in the substrate, a source/drain region disposed beside the buried word line, a diffusion barrier region, disposed at the top of the source/drain region, the diffusion barrier region comprises a plurality of doping atoms selected from the group consisting of carbon atoms, nitrogen atoms, germanium atoms, oxygen atoms, helium atoms and xenon atoms, a dielectric layer disposed on the substrate, and a contact structure disposed in the dielectric layer, and electrically connected to the source/drain region.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: March 31, 2020
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Ger-Pin Lin, Tien-Chen Chan, Shu-Yen Chan
  • Patent number: 10497704
    Abstract: A method of fabricating a buried word line structure includes providing a substrate with a word line trench therein. Two source/drain doped regions are disposed in the substrate at two sides of the word line trench. Later, a silicon oxide layer is formed to cover the word line trench. A titanium nitride layer is formed to cover the silicon oxide layer. Next, a tilt ion implantation process is performed to implant silicon atoms into the titanium nitride layer to transform part of the titanium nitride layer into a titanium silicon nitride layer. A conductive layer is formed in the word line trench. Subsequently, part of the conductive layer, part of the titanium silicon nitride layer and part of the silicon oxide layer are removed to form a recess. Finally, a cap layer fills in the recess.
    Type: Grant
    Filed: December 20, 2018
    Date of Patent: December 3, 2019
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Ger-Pin Lin, Kuan-Chun Lin, Chi-Mao Hsu, Shu-Yen Chan, Shih-Fang Tzou, Tsuo-Wen Lu, Tien-Chen Chan, Feng-Yi Chang, Shih-Kuei Yen, Fu-Che Lee
  • Publication number: 20190312036
    Abstract: A semiconductor device includes a semiconductor substrate having a gate trench including of an upper trench and a lower trench. The upper trench is wider than the lower trench. A gate is embedded in the gate trench. The gate includes an upper portion and a lower portion. A first gate dielectric layer is between the upper portion and a sidewall of the upper trench. The first gate dielectric layer has a first thickness. A second gate dielectric layer is between the lower portion and a sidewall of the lower trench and between the lower portion and a bottom surface of the lower trench. The second gate dielectric layer has a second thickness that is smaller than the first thickness.
    Type: Application
    Filed: June 18, 2019
    Publication date: October 10, 2019
    Inventors: Tsuo-Wen Lu, Ger-Pin Lin, Tien-Chen Chan, Shu-Yen Chan
  • Patent number: 10373958
    Abstract: A semiconductor device includes a semiconductor substrate having a gate trench including an upper trench and a lower trench. The upper trench is wider than the lower trench. A gate is embedded in the gate trench. The gate includes an upper portion and a lower portion. A first gate dielectric layer is between the upper portion and a sidewall of the upper trench. The first gate dielectric layer has a first thickness. A second gate dielectric layer is between the lower portion and a sidewall of the lower trench and between the lower portion and a bottom surface of the lower trench. The second gate dielectric layer has a second thickness that is smaller than the first thickness.
    Type: Grant
    Filed: January 22, 2018
    Date of Patent: August 6, 2019
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Tsuo-Wen Lu, Ger-Pin Lin, Tien-Chen Chan, Shu-Yen Chan
  • Patent number: 10332889
    Abstract: A method of manufacturing a semiconductor device is provided, which includes the steps of providing a capacitor structure, forming a conductive layer on the capacitor structure, performing a hydrogen doping process to the conductive layer, forming a metal layer on the conductive layer after the hydrogen doping process, and patterning the metal layer and the conductive layer to forma top electrode plate.
    Type: Grant
    Filed: April 12, 2018
    Date of Patent: June 25, 2019
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Ger-Pin Lin, Tien-Chen Chan, Shu-Yen Chan, Chi-Mao Hsu, Shih-Fang Tzou, Ting-Pang Chung, Chia-Wei Wu
  • Publication number: 20190164977
    Abstract: A method of fabricating a buried word line structure includes providing a substrate with a word line trench therein. Two source/drain doped regions are disposed in the substrate at two sides of the word line trench. Later, a silicon oxide layer is formed to cover the word line trench. A titanium nitride layer is formed to cover the silicon oxide layer. Next, a tilt ion implantation process is performed to implant silicon atoms into the titanium nitride layer to transform part of the titanium nitride layer into a titanium silicon nitride layer. A conductive layer is formed in the word line trench. Subsequently, part of the conductive layer, part of the titanium silicon nitride layer and part of the silicon oxide layer are removed to form a recess. Finally, a cap layer fills in the recess.
    Type: Application
    Filed: December 20, 2018
    Publication date: May 30, 2019
    Inventors: Ger-Pin Lin, Kuan-Chun Lin, Chi-Mao Hsu, Shu-Yen Chan, Shih-Fang Tzou, Tsuo-Wen Lu, Tien-Chen Chan, Feng-Yi Chang, Shih-Kuei Yen, Fu-Che Lee
  • Publication number: 20190081047
    Abstract: A semiconductor device and method of manufacturing the same is provided in the present invention. The method includes the step of forming first mask patterns on a substrate, wherein the first mask patterns extend in a second direction and are spaced apart in a first direction to expose a portion of first insulating layer, removing the exposed first insulating layer to form multiple recesses in the first insulating layer, performing a surface treatment to the recess surface, filling up the recesses with a second insulating layer and exposing a portion of the first insulating layer, removing the exposed first insulating layer to form a mesh-type isolation structure, and forming storage node contact plugs in the openings of mesh-type isolation structure.
    Type: Application
    Filed: August 2, 2018
    Publication date: March 14, 2019
    Inventors: Li-Wei Feng, Shih-Fang Tzou, Chien-Cheng Tsai, Chih-Chi Cheng, Chia-Wei Wu, Ger-Pin Lin
  • Publication number: 20190074280
    Abstract: A method of manufacturing a semiconductor device is provided, which includes the steps of providing a capacitor structure, forming a conductive layer on the capacitor structure, performing a hydrogen doping process to the conductive layer, forming a metal layer on the conductive layer after the hydrogen doping process, and patterning the metal layer and the conductive layer to forma top electrode plate.
    Type: Application
    Filed: April 12, 2018
    Publication date: March 7, 2019
    Inventors: Ger-Pin Lin, Tien-Chen Chan, Shu-Yen Chan, Chi-Mao Hsu, Shih-Fang Tzou, Ting-Pang Chung, Chia-Wei Wu
  • Publication number: 20190067293
    Abstract: A method of fabricating a buried word line structure includes providing a substrate with a word line trench therein. Two source/drain doped regions are disposed in the substrate at two sides of the word line trench. Later, a silicon oxide layer is formed to cover the word line trench. A titanium nitride layer is formed to cover the silicon oxide layer. Next, a tilt ion implantation process is performed to implant silicon atoms into the titanium nitride layer to transform part of the titanium nitride layer into a titanium silicon nitride layer. A conductive layer is formed in the word line trench. Subsequently, part of the conductive layer, part of the titanium silicon nitride layer and part of the silicon oxide layer are removed to form a recess. Finally, a cap layer fills in the recess.
    Type: Application
    Filed: September 21, 2017
    Publication date: February 28, 2019
    Inventors: Ger-Pin Lin, Kuan-Chun Lin, Chi-Mao Hsu, Shu-Yen Chan, Shih-Fang Tzou, Tsuo-Wen Lu, Tien-Chen Chan, Feng-Yi Chang, Shih-Kuei Yen, Fu-Che Lee
  • Patent number: 10217750
    Abstract: A method of fabricating a buried word line structure includes providing a substrate with a word line trench therein. Two source/drain doped regions are disposed in the substrate at two sides of the word line trench. Later, a silicon oxide layer is formed to cover the word line trench. A titanium nitride layer is formed to cover the silicon oxide layer. Next, a tilt ion implantation process is performed to implant silicon atoms into the titanium nitride layer to transform part of the titanium nitride layer into a titanium silicon nitride layer. A conductive layer is formed in the word line trench. Subsequently, part of the conductive layer, part of the titanium silicon nitride layer and part of the silicon oxide layer are removed to form a recess. Finally, a cap layer fills in the recess.
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: February 26, 2019
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Ger-Pin Lin, Kuan-Chun Lin, Chi-Mao Hsu, Shu-Yen Chan, Shih-Fang Tzou, Tsuo-Wen Lu, Tien-Chen Chan, Feng-Yi Chang, Shih-Kuei Yen, Fu-Che Lee
  • Publication number: 20190035792
    Abstract: A semiconductor device includes a semiconductor substrate having a gate trench including an upper trench and a lower trench. The upper trench is wider than the lower trench. A gate is embedded in the gate trench. The gate includes an upper portion and a lower portion. A first gate dielectric layer is between the upper portion and a sidewall of the upper trench. The first gate dielectric layer has a first thickness. A second gate dielectric layer is between the lower portion and a sidewall of the lower trench and between the lower portion and a bottom surface of the lower trench. The second gate dielectric layer has a second thickness that is smaller than the first thickness.
    Type: Application
    Filed: January 22, 2018
    Publication date: January 31, 2019
    Inventors: Tsuo-Wen Lu, Ger-Pin Lin, Tien-Chen Chan, Shu-Yen Chan
  • Publication number: 20190013204
    Abstract: A method of fabricating a buried word line includes forming a trench in a substrate. Next, a deposition process is performed to form a silicon layer on a sidewall and a bottom at the inner side of the trench. After the deposition process, a gate dielectric layer is formed in the trench. Finally, a conductive layer is formed to fill in the trench.
    Type: Application
    Filed: July 26, 2017
    Publication date: January 10, 2019
    Inventors: Tien-Chen Chan, Ger-Pin Lin, Tsuo-Wen Lu, Chin-Wei Wu, Yu-Chun Wang, Shu-Yen Chan
  • Patent number: 10056288
    Abstract: A semiconductor device includes a semiconductor substrate having a gate trench penetrating through an active area and a trench isolation region surrounding the active area. The gate trench exposes a sidewall of the active area and a sidewall of the trench isolation region. The sidewall of the trench isolation region includes a void. A first gate dielectric layer conformally covers the sidewall of the active area and the sidewall of the trench isolation region. The void in the sidewall of the trench isolation region is filled with the first gate dielectric layer. A second gate dielectric layer is grown on the sidewall of the active area. A gate is embedded in the gate trench.
    Type: Grant
    Filed: August 8, 2017
    Date of Patent: August 21, 2018
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Tsuo-Wen Lu, Chin-Wei Wu, Tien-Chen Chan, Ger-Pin Lin, Shu-Yen Chan
  • Patent number: 10056388
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a memory region defined thereon; forming a trench in the substrate; performing a first ion implantation process to form a first doped region having a first conductive type in the substrate adjacent to the trench; forming a gate electrode in the trench; and performing a second ion implantation process to form a second doped region having a second conductive type in the substrate above the gate electrode.
    Type: Grant
    Filed: March 22, 2017
    Date of Patent: August 21, 2018
    Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Ger-Pin Lin, Yung-Ming Wang, Tien-Chen Chan, Shu-Yen Chan
  • Publication number: 20180226470
    Abstract: A method of fabricating a bottom electrode includes providing a dielectric layer. An atomic layer deposition is performed to form a bottom electrode material on the dielectric layer. Then, an oxidation process is performed to oxidize part of the bottom electrode material. The oxidized bottom electrode material transforms into an oxide layer. The bottom electrode material which is not oxidized becomes a bottom electrode. A top surface of the bottom electrode includes numerous hill-like profiles. Finally, the oxide layer is removed.
    Type: Application
    Filed: January 18, 2018
    Publication date: August 9, 2018
    Inventors: Ger-Pin Lin, Tien-Chen Chan, Shu-Yen Chan, Chi-Mao Hsu, Shih-Fang Tzou
  • Publication number: 20180211961
    Abstract: A semiconductor memory device and a manufacturing method thereof are provided in the present invention. Storage node contacts are formed on a semiconductor substrate including active regions. Each storage node contact contacts at least one of the active regions. Each storage node contact has a recessed top surface. A first distance exists between a topmost point and a lowest point of the recessed top surface in a vertical direction. A second distance exists between the topmost point and a bottom surface of the storage node contact in the vertical direction. A ratio of the first distance to the second distance ranges from 30% to 70%. The contact resistance between the storage node contact and other conductive structures formed on the storage node contact may be reduced by the storage node contact having the recessed top surface, and the electrical operation condition of the semiconductor memory device may be improved accordingly.
    Type: Application
    Filed: January 22, 2018
    Publication date: July 26, 2018
    Inventors: Ger-Pin Lin, Yung-Ming Wang, Ting-Pang Chung, Tien-Chen Chan, Shu-Yen Chan