Abstract: A method and apparatus for allowing the user of a power generator coupled to a time-varying load, to define an alternative reference impedance to enable on or more metrics to be provided relative to the alternative reference impedance. The metrics, for example, may provide indicia of performance of the power generator system. One illustrative embodiment provides a power delivery system that applies power to a plasma chamber to create a plasma therein; determines a reference impedance of the plasma at an operating condition; and controls the power delivery system based on the determined reference impedance.

Abstract: Improved power distribution architectures for the uniform delivery of single frequency RF power to plasma chambers are disclosed. The architectures include feeding into multiple points across a single large-area electrode, multiple electrodes driving a common plasma discharge as well as multiple coils driving a common plasma discharge. The time-averaged electromagnetic field distribution may be controlled using an array of generator and match (delivery) systems, one of which may be capable of absorbing net power and presenting controlled impedance to the plasma load. In variations, an M+N port network (with M the number of generators and N the number of feed points on the electrode) may be implemented to level the power required from each generator while maintaining a desired field strength distribution.

Abstract: A system, method, and apparatus for stabilizing interactions between an electrical generator and a nonlinear load are described. One illustrative embodiment includes an impedance element that is coupled to an output of the generator and a power source coupled to the impedance element. The power source applies power to, or across, the impedance element so as to reduce energy loss that would ordinarily occur due to energy dissipation by way of the impedance element. In many variations, the power source operates within a defined bandwidth so that a stabilizing effect is achieved outside of this bandwidth.

Abstract: An improved method and apparatus for managing an application of power with a power generator to a load, the apparatus comprising a power generator configured to apply power to the load; a controller coupled to the power generator, the controller configured to control a plurality of parameters to optimize operational performance of the power system in response to indicia of operational performance of the power system; and a performance assessor, coupled to the power generator and coupled to the controller, the performance assessor configured to provide the indicia of operational performance of the power system to the controller, where the indicia of the operational performance are relative to a plurality of metrics indicative of operational efficiency of the power system.

Abstract: A method and generator for modifying interactions between a load and the generator are described. The method includes applying output power to the load using a power amplifier, controlling a level of the output power responsive to a power control setting, and adjusting a conduction angle of the power amplifier to reduce a level of sensitivity of the power amplifier to variations of an impedance of the load. The generator includes a compensation subsystem coupled to the power amplifier that controls a conduction angle of the power amplifier to enable a sensitivity of the power amplifier to be adjusted.

Abstract: A method and apparatus for modifying interactions between an electrical generator and a nonlinear load is described. One illustrative embodiment receives a main control signal at a control input of an engine of the electrical generator, the main control signal controlling at least one of output power, output current, and output voltage delivered by the electrical generator to the nonlinear load, the engine being one of a power amplifier and a converter; measures the impedance of the nonlinear load; and feeds to the electrical generator a compensation signal corresponding to the measured impedance, the compensation signal rendering a transfer function of the output power of the electrical generator with respect to the main control signal substantially insensitive to variations in the impedance of the nonlinear load to stabilize the output power of the electrical generator.

Abstract: A system, method, and apparatus for stabilizing interactions between an electrical generator and a nonlinear load are described. One illustrative embodiment includes an impedance element that is coupled to an output of the generator and a power source coupled to the impedance element. The power source applies power to, or across, the impedance element so as to reduce energy loss that would ordinarily occur due to energy dissipation by way of the impedance element. In many variations, the power source operates within a defined bandwidth so that a stabilizing effect is achieved outside of this bandwidth.

Abstract: A method and apparatus for tuning the operational frequency of an electrical generator coupled to a time-varying load is described. One illustrative embodiment rapidly calculates an error (reflection coefficient magnitude) at the current operational frequency of the electrical generator; adjusts the frequency of the electrical generator by an initial step size so; rapidly calculates a second error; and if the magnitude of the second error is smaller than the magnitude of the first error, then the step size is increased and the frequency is adjusted by the increased step size.

Abstract: Improved power distribution architectures for the uniform delivery of single frequency RF power to plasma chambers are disclosed. The architectures include feeding into multiple points across a single large-area electrode, multiple electrodes driving a common plasma discharge as well as multiple coils driving a common plasma discharge. The time-averaged electromagnetic field distribution may be controlled using an array of generator and match (delivery) systems, one of which may be capable of absorbing net power and presenting controlled impedance to the plasma load. In variations, an M+N port network (with M the number of generators and N the number of feed points on the electrode) may be implemented to level the power required from each generator while maintaining a desired field strength distribution.

Abstract: A method and apparatus for allowing the user of a power generator coupled to a time-varying load, to define an alternative reference impedance to enable on or more metrics to be provided relative to the alternative reference impedance. The metrics, for example, may provide indicia of performance of the power generator system. One illustrative embodiment provides a power delivery system that applies power to a plasma chamber to create a plasma therein; determines a reference impedance of the plasma at an operating condition; and controls the power delivery system based on the determined reference impedance.

Abstract: An improved method and apparatus for managing an application of power with a power generator to a load, the apparatus comprising a power generator configured to apply power to the load; a controller coupled to the power generator, the controller configured to control a plurality of parameters to optimize operational performance of the power system in response to indicia of operational performance of the power system; and a performance assessor, coupled to the power generator and coupled to the controller, the performance assessor configured to provide the indicia of operational performance of the power system to the controller, where the indicia of the operational performance are relative to a plurality of metrics indicative of operational efficiency of the power system.

Abstract: A method and apparatus for modifying interactions between an electrical generator and a nonlinear load is described. One illustrative embodiment receives a main control signal at a control input of an engine of the electrical generator, the main control signal controlling at least one of output power, output current, and output voltage delivered by the electrical generator to the nonlinear load, the engine being one of a power amplifier and a converter; measures the impedance of the nonlinear load; and feeds to the electrical generator a compensation signal corresponding to the measured impedance, the compensation signal rendering a transfer function of the output power of the electrical generator with respect to the main control signal substantially insensitive to variations in the impedance of the nonlinear load to stabilize the output power of the electrical generator.

Abstract: A method and apparatus for modifying interactions between an electrical generator and a nonlinear load is described. One illustrative embodiment receives a main control signal at a control input of an engine of the electrical generator, the main control signal controlling at least one of output power, output current, and output voltage delivered by the electrical generator to the nonlinear load, the engine being one of a power amplifier and a converter; measures the impedance of the nonlinear load; and feeds to the electrical generator a compensation signal corresponding to the measured impedance, the compensation signal rendering a transfer function of the output power of the electrical generator with respect to the main control signal substantially insensitive to variations in the impedance of the nonlinear load to stabilize the output power of the electrical generator.

Abstract: A method and apparatus for modifying interactions between an electrical generator and a nonlinear load is described. One illustrative embodiment receives a main control signal at a control input of an engine of the electrical generator, the main control signal controlling at least one of output power, output current, and output voltage delivered by the electrical generator to the nonlinear load, the engine being one of a power amplifier and a converter; measures the impedance of the nonlinear load; and feeds to the electrical generator a compensation signal corresponding to the measured impedance, the compensation signal rendering a transfer function of the output power of the electrical generator with respect to the main control signal substantially insensitive to variations in the impedance of the nonlinear load to stabilize the output power of the electrical generator.

Abstract: A radio frequency power delivery system comprises an RF power generator, arc detection circuitry, and control logic responsive to the arc detection circuitry. A dynamic boundary is computed about the measured value of a parameter representative of or related to the power transferred from the power generator to a load. A subsequently measured value of the parameter that exceeds the computed dynamic boundary of the parameter indicates detection of an arc. Upon detection of an arc, power delivery from the generator is interrupted or adjusted, or other action is taken, until the arc is extinguished. By employing dynamic computation of arc detection boundaries, the invention allows for arc handling in RF power deliver systems regardless of whether the system has reached a stable power delivery condition.

Abstract: There is provided by this invention a novel and unique configuration for combining multiple die such as metal oxide field effect transistors (MOSFETS) in high power high frequency applications to prevent internal oscillation. A first embodiment of this invention comprises a split gate design wherein the gate distribution network for multiple semiconductor devices is split to provide individual gate feeds to each device. A second embodiment provides a plurality of semiconductors devices arranged in a configuration such that the reference terminals are connected together at a common point at the approximate center of the configuration that allows external connections to the semiconductor devices' input and output terminals positioned on the outer periphery of the configuration design.

Abstract: There is provided by this invention a novel and unique configuration for combining multiple die such as metal oxide field effect transistors (MOSFETS) in high power high frequency applications to prevent internal oscillation. A first embodiment of this invention comprises a split gate design wherein the gate distribution network for multiple semiconductor devices is split to provide individual gate feeds to each device. A second embodiment provides a plurality of semiconductors devices arranged in a configuration such that the reference terminals are connected together at a common point at the approximate center of the configuration that allows external connections to the semiconductor devices' input and output terminals positioned on the outer periphery of the configuration design.