Abstract: A system for the storage and on-demand dispensing of a fluid that is sorbable on a physical sorbent and that subsequent to sorption is desorbable from the sorbent by pressure-mediated desorption and/or thermally-mediated desorption.

Abstract: A process system with an integrated gas storage and delivery unit comprising an adsorption-desorption apparatus, for storage and dispensing of a gas wherein the gas is dispensed by pressure differential desorption of the sorbate gas from the sorbent material. A motive fluid driver, e.g., a pump, blower, compressor, eductor, or the like, is arranged for flowing the dispensed gas to a gas-utilizing unit, such as an ion-implant unit, wastewater treatment unit, gas-liquid contacting chamber, chemical vapor deposition reactor, gas laser assembly, etc.

Abstract: An adsorption-desorption apparatus, for storage and dispensing of a sorbable gas, wherein a physical sorbent medium bearing the adsorbed gas to be selectively dispensed is delivered by pressure differential desorption and/or thermal desorption of the sorbate gas from the sorbent material. The sorbent material preferably comprises a material which is characterized by a Sorbent Working Capacity, measured for arsine at 40 Torr and at 650 Torr, of at least 50 grams arsine per liter of bed of the sorbent material.

Abstract: An adsorption-desorption apparatus, for storage and dispensing of a sorbable gas, wherein a carbon physical sorbent medium bearing the adsorbed gas to be selectively dispensed is delivered by pressure differential desorption and/or thermal desorption of the sorbate gas from the sorbent material. The carbon sorbent material preferably comprises a material which is characterized by a Sorbent Working Capacity, measured for arsine at 40 Torr and at 650 Torr, of at least 100 grams arsine per liter of bed of the sorbent material, e.g., a carbon sorbent material having the adsorption isotherm characteristic of curve A in FIG. 1 herein.

Abstract: A process for recovery of halocarbons from a gas mixture containing the halocarbon and acid gas components comprises the steps of contacting the gas mixture with a dry scrubber to remove the acid gas components from the gas mixture and yield a first effluent gas mixture containing the halocarbon. The first effluent gas mixture is contacted with an adsorbent which is selective for the halocarbon component of the first effluent gas mixture to adsorb the halocarbon component and yield a second effluent gas. The adsorbed halocarbon is recovered by desorbing same from the adsorbent. The process of contacting with adsorbent can be carried out in at least two adsorbent beds joined at inlet and outlet ends thereof to gas feed and gas discharge manifolds, respectively.

Abstract: An in-line detector system and method for real-time detection of impurity concentration in a flowing gas stream. In a specific aspect, the system may comprise an in-line monitoring system for determining the calibrated concentration of an impurity species in a flowing gas stream, in a low concentration range below a predetermined concentration value, and in a high concentration range above said predetermined concentration value. The system may utilize hygrometric sensors in the case of water as a critical impurity, or surface acoustical wave (SAW) devices coated with suitable impurity-affinity coatings. The method includes sensing the impurity species concentration in gas derived from the gas flow stream in a sequential and repetitive sensing operation. In a first sensing mode the gas is purified of impurity species prior to sensing thereof and in a second sensing mode the gas is unpurified.

Abstract: Scavenger compositions useful for purifying process gas streams, such as process gas streams, such as hydrogen, nitrogen, noble gases, diborane, and hydride gases from Groups IVA-VIA of the Periodic Table, such as arsine, phosphine, silane, germane, hydrogen selenide, and hydrogen telluride, and mixtures thereof, to remove water, oxygen, and other oxidant and Lewis acid impurities therefrom, such scavenger comprising a porous, high surface area inert support having thereon an active scavenging species, formed by the deposition on the support of a Group IA metal and pyrolysis thereof at a selected elevated temperature on said support.

Abstract: An adsorption-desorption apparatus, for storage and dispensing of a gas selected from the group consisting of hydride gases, halide gases, and organometallic Group V gaseous compounds, wherein the gas to be dispensed is adsorbed on a physical sorbent medium and selectively dispensed by pressure differential desorption of the sorbate gas from the sorbent material. The sorbent medium preferably is devoid of concentrations of water, metals, and oxidic transition metal species which decompose the sorbate gas in the storage and dispensing vessel, e.g., containing less than 500 parts-per-million by weight of water and oxidic transition metal species, based on the weight of the physical sorbent medium. A cryopumping gas storage and delivery system is also disclosed for neat, high pressure, high purity delivery of the dispensed product gas.

Abstract: Scavenger compositions useful for purifying process gas streams, such as process gas streams, such as hydrogen, nitrogen, noble gases, diborane, and hydride gases from Groups IVA-VIA of the Periodic Table, such as arsine, phosphine, silane, germane, hydrogen selenide, and hydrogen telluride, and mixtures thereof, to remove water, oxygen, and other oxidant and Lewis acid impurities therefrom, such scavenger comprising a porous, high surface area inert support having thereon an active scavenging species, formed by the deposition on the support of a Group IA metal and pyrolysis thereof at a selected elevated temperature on said support.

Abstract: An in-line detector system for real-time detection of impurity concentration in a flowing gas stream. In a specific aspect, the system may comprise a purifier unit for selective purification of gas from the gas stream, and an impurity addition unit for imparting a predetermined concentration of impurity to the gas stream, whereby the resulting concentration sensings of the purified gas, and the impurity-enhanced gas are usefully employed to calibrate an impurity concentration sensor, for continuous accurate sensing of impurity concentration in the flowing gas stream. The system may utilize hygrometric sensors in the case of water as a critical impurity, or surface acoustical wave (SAW) devices coated with suitable impurity-affinity coatings. The system has particular utility in monitoring low impurity concentration levels (e.g., from about 0.1 ppm to about 100 ppm) in gas streams employed in vapor-phase processes such as chemical vapor deposition in the manufacture of semiconductor devices.

Abstract: An endpoint detector for gas purifiers which contains a detection element comprising a small amount of a highly reactive metal coated on an insulator and exposed to the gas stream being purified. This metal does not react with the gas being purified, but does undergo reaction with the impurity species. As this metal reacts with impurities in the gas stream, its conductivity decreases. The change in conductivity signals that the wave front of impurity-containing gas has reached the sensor, and thus the purifier has reached the end of its useful life. The use of a thin coating of reactive metal as the detection element gives the sensitivity that is required to sense sub-part-per-million levels of impurities. This resistance change sensor may be combined with a thermal measurement to detect the presence of exothermic conditions indicative of a large pulse of impurity gas.

Abstract: A system for generating a gaseous polyhydridic Group IV-VI compound, comprising a vessel containing a solid precursor metal compound for the polyhydridic Group IV-VI compound, and a source of a fluid-phase protonic activator compound reactive with the precursor compound to yield as reaction product (a) the polyhydridic compound and (b) a solid reaction product compound containing the metal moiety, e.g., a non-volatile metal salt, together with means for flowing the activator compound from the source thereof to the vessel containing the solid precursor compound. The precursor compound may suitably comprise a metal moiety such as lithium, sodium, magnesium, zinc, potassium, aluminum, and intermetallic complexes and alloys thereof. In a preferred aspect, wherein arsine is generated, the precursor compound may suitably comprise a metal arsenide, and the protonic activator compound is water or an acid such as hydrogen chloride.

Abstract: A sorbent composition comprising a first sorbent bed of hygroscopic aluminosilicate sorbent and a second sorbent bed comprising an aluminosilicate sorbent impregnated with an aqueous base solution, whereby the hygroscopic aluminosilicate sorbent provides an initial contact zone to protect upstream gas and processing equipment from reaction products resulting from back-diffusion of water which will occur in the absence of the first sorbent.

Abstract: An in-line detector system for real-time detection of impurity concentration in a flowing gas stream in which purified and unpurified volumes of gas from the flowing gas stream are subjected to concentration sensing, to determine a corrected impurity concentration value for the flowing gas stream. The system in a preferred embodiment employs a manifold in flow communication with a purifier unit, a main flow conduit through which the flowing gas stream is passed, and a sensor port, with a selectively positionable valve to flow gas through a purifier loop of the manifold to the sensing port, and alternately through a bypass loop of the manifold without passage through the purifier unit, for comparative impurity sensing of gas in the respective loops. The system may utilize hygrometric sensors in the case of water as a critical impurity, or surface acoustical wave (SAW) devices coated with suitable impurity-affinity coatings. The system has particular utility in monitoring low impurity concentration levels (e.g.

Abstract: A scavenger composition having utility for removal of water and silicon mu-oxide impurities from chlorosilanes, such scavenger composition comprising:(a) a support; and(b) associated with the support, one or more compound(s) selected from the group consisting of compounds of the formula:R.sub.a-x MCl.sub.xwherein:M is a metal selected from the group consisting of the monovalent metals lithium, sodium, and potassium; the divalent metals magnesium, strontium, barium, and calcium; and the trivalent metal aluminum;R is alkyl;a is a number equal to the valency of metal M; andx is a number having a value of from 0 to a, inclusive; andwherein said compound(s) of the formula R.sub.a-x MCl.sub.x have been activated for impurity-removal service by a reaction scheme selected from those of the group consisting of:(i) reaction of such compound(s) with hydrogen chloride to form a first reaction product therefrom, followed by reaction of the first reaction product with a chlorosilane of the formula:SiH.sub.4-y Cl.sub.

Abstract: A scavenger composition having utility for removal of water and silicon mu-oxide impurities from chlorosilanes, such scavenger composition comprising:(a) a support; and(b) associated with the support, one or more compound(s) selected from the group consisting of compounds of the formula:R.sub.a-x MCl.sub.xwherein:M is a metal selected from the group consisting of the monovalent metals lithium, sodium, and potassium; the divalent metals magnesium, strontium, barium, and calcium; and the trivalent metal aluminum;R is alkyl;a is a number equal to the valency of metal M; andx is a number having a value from 0 to a, inclusive; andwherein said compound(s) of the formula R.sub.a-x MCl.sub.x have been activated for impurity-removal service by a reaction scheme selected from those of the group consisting of:(i) reaction of such compound(s) with hydrogen chloride to form a first reaction product therefrom, followed by reaction of the first reaction product with a chlorosilane of the formula:SiH.sub.4"y Cl.sub.

Abstract: Scavenger compositions are disclosed, which have utility for effecting the sorptive removal of hazardous gases containing Group II-VII elements of the Periodic Table, such as are widely encountered in the manufacture of semiconducting materials and semiconductor devices. Gas sorption processes including the contacting of Group II-VII gaseous compounds with such scavenger compositions are likewise disclosed, together with critical space velocity contacting conditions pertaining thereto. Further described are gas contacting apparatus, including mesh structures which may be deployed in gas contacting vessels containing such scavenger compositions, to prevent solids from being introduced to or discharged from the contacting vessel in the gas stream undergoing treatment.

Abstract: A scavenger for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, comprising (i) an inert inorganic support, and (ii) an active scavenging species on the support, formed by deposition thereon of an organometallic precursor and pyrolysis thereof at a selected elevated temperature. The organometallic precursor is an alkyl metal compound comprising a metal of Group IA, IIA, and/or IIIA, wherein the pyrolysis temperature may range from about 150.degree. C. to about 250.degree. C., depending on the specific alkyl metal compound employed as the precursor. Also disclosed are: a corresponding method of making the scavenger; a process for purifying inert gases by contacting same with the scavenger; and a vessel containing a bed of the scavenger, useful as an apparatus for purifying inert gases.

Abstract: An apparatus for purifying a gaseous mixture comprising arsine, phosphine, ammonia, and/or inert gases, to remove Lewis acid and/or oxidant impurities therefrom, comprising a vessel containing a bed of a scavenger, the scavenger including a support having associated therewith an anion which is effective to remove such impurities, such anion being selected from one or more members of the group consisting of: (i) carbanions whose corresponding protonated compounds have a pK.sub.a value of from about 22 to about 36; and (ii) anions formed by reaction of such carbanions with the primary component of the mixture.

Abstract: A scavenger for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, comprising (i) an inert inorganic support, and (ii) an active scavenging species on the support, formed by deposition thereon of an organometallic precursor and pyrolysis thereof at a selected elevated temperature. The organometallic precursor is an alkyl metal compound comprising a metal of Group IA, IIA, and/or IIIA, wherein the pyrolysis temperature may range from about 150.degree. C. to about 250.degree. C., depending on the specific alkyl metal compound employed as the precursor. Also disclosed are: a corresponding method of making the scavenger; a process for purifying inert gases by contacting same with the scavenger; and a vessel containing a bed of the scavenger, useful as an apparatus for purifying inert gases.