Abstract: A gas delivery system for supplying a vapor phase constituent at low concentration in a carrier gas, wherein the carrier gas is flowed through a contacting zone in which is disposed a permeable film through which the vapor phase constituent permeates into the contacing zone, to yield a product gas mixture comprising the vapor phase constituent and the carrier gas. In a particularly preferred embodiment, concentration of the vapor phase constituent in the product gas mixture is sensed, e.g., by a surface acoustical wave (SAW) concentration sensor device, and the concentration sensing is employed to controllably adjust the flow rate of the carrier gas flowed through the contacting zone, to maintain a selected delivery rate and concentration of the vapor phase constituent in the product gas mixture.

Abstract: A process for drying a gaseous hydrogen halide of the formula HX, wherein X is bromine, Chlorine, FLuorine, or iodine, to remove water impurity therefrom, in which a scavenger precursor composition is provided, including a support having associated therewith partially or fully alkylated metal alkyl compounds or pendant groups. The precursor composition is reacted with gaseous hydrogen halide to convert the metal alkyl compounds and/or pendant functional groups to the corresponding metal halide compounds and/or pendant functional groups, which in turn react with the water impurity to produce an essentially completely water-free (below 0.1 ppm) gaseous hydrogen halide effluent. The process of the invention has utility for producing high purity, anhydrous gaseous hydrogen halides for semiconductor manufacturing operations.

Abstract: The water content of an HCl gas stream is reduced to less than 1 ppm by contacting the gas stream with a chloride of silicon or a chloride of a metal having a valence of at least four that is immobilized on a solid support.

Abstract: A scavenger, having utility for purifying a mixture comprising:(i) a primary component selected from one or more members of the group consisting of hydrogen selenide and hydrogen telluride, and(ii) impurities selected from one or more members of the group consisting of moisture and oxidants, comprising:(a) a support; and(b) associated with said support, one or more members of the group consisting of:(I) precusor compounds of the formula R.sub.3-x AlH.sub.x, wherein x is 0 or 1, and R is a hydrocarbon radical containing from 1 to 12 carbon atoms; and(II) aluminum chalconides of the formula Al.sub.2 M.sub.3, wherein M is selenium or tellurium.Illustrative supports useful in such scavenger include aluminosilicates, alumina, silica, carbon, and macroreticulate polymers. A process and apparatus are disclosed for purifying hyhrogen selenide and/or hydrogen telluride, to remove moisture and/or oxidant impurities therefrom, in which a bed of the scavenger is employed.

Abstract: A process for drying a gaseous hydrogen halide of the formula HX, wherein X is selected from the group consisting of bromine, chlorine, fluorine, and iodine, to remove water impurity therefrom, comprising:contacting the water impurity-containing gaseous hydrogen halide with a scavenger including a support having associated therewith one or more members of the group consisting of:(a) an active scavenging moiety selected from one or more members of the group consisting of:(i) metal halide compounds dispersed in the support, of the formula MX.sub.y ; and(ii) metal halide pendant functional groups of the formula -MX.sub.

Abstract: A scavenger, having utility for purifying a mixture comprising:(i) a primary component selected from one or more members of the group consisting of hydrogen selenide and hydrogen telluride, and(ii) impurities selected from one or more members of the group consisting of moisture and oxidants, comprising:(a) a support; and(b) associated with said support, one or more members of the group consisting of:(I) precursor compounds of the formula R.sub.3-x AlH.sub.x, wherein x is 0 or 1, and R is a hydrocarbon radical containing from 1 to 12 carbon atoms; and(II) aluminum chalconides of the formula Al.sub.2 M.sub.3, wherein M is selenium or tellurium.Illustrative supports useful in such scavenger include aluminosilicates, alumina, silica, carbon, and macroreticulate polymers. A process and apparatus are disclosed for purifying hydrogen selenide and/or hydrogen telluride, to remove moisture and/or oxidant impurities therefrom, in which a bed of the scavenger is employed.

Abstract: A process for purifying a gaseous mixture comprising arsine, phosphine, ammonia, and/or inert gases, to remove Lewis acid and/or oxidant impurities therefrom, comprising contacting the mixture with a scavenger including a support having associated therewith an anion which is effective to remove such impurities, such anion being selected from one or more members of the group consisting of: (i) carbanions whose corresponding protonated compounds have a pK.sub.a value of from about 22 to about 36; and (ii) anions formed by reaction of such carbanions with the primary component of the mixture.

Abstract: A process for purifying a gaseous mixture comprising arsine, phosphine, ammonia, and/or inert gases, to remove Lewis acid and/or oxidant impurities therefrom, comprising contacting the mixture with a scavenger including a support having associated therewith an anion which is effective to remove such impurities, such anion being selected from one or more members of the group consisting of: (i) carbanions whose corresponding protonated compounds have a pK.sub.a value of from about 22 to about 36; and (ii) anions formed by reaction of such carbanions with the primary component of the mixture.

Abstract: A high flash point cycloolefin composition, including at least 50% by weight dicyclopentadiene, the composition having a flash point of greater than 100.degree. F. and a viscosity of from about 3 cps to about 3000 cps at about 70.degree. F. and about 1 atmosphere pressure. The cycloolefin composition is used in a method of preparation of cycloolefin for polymerization by metathesis catalysis to form a substantially crosslinked thermoset polymer by: distilling the cycloolefin to form distilled cycloolefin, and contacting the distilled cycloolefin and an adsorbent.

Abstract: A valve block leak-tightly joinable to a receptacle to form a container suitable for liquid storage/vapor dispensing, and gas purification applications. The valve block is provided with first and second valve ports with which valves may be employed to flow feed gas through the valve block and receptacle. To effect purging the valve block ports and gas flow passages, the valve block is provided with a purge valve port which may be opened while the first and second valve ports are closed, to remove dead space hold-up gas from the respective ports and flow passages of the block prior to initiation of vapor dispensing or gas purification operation. The disclosed container is particularly advantageous for dispensing or purifying source reagent compounds for elements of Group III and Group V, in semiconductor manufacturing applications.

Abstract: A valve block leak-tightly joinable to a receptacle to form a container suitable for liquid storage/vapor dispensing, and gas purification applications. The valve block is provided with first and second valve ports with which valves may be employed to flow feed gas through the valve block and receptacle. To effect purging the valve block ports and gas flow passages, the valve block is provided with a purge valve port wich may be opened while the first and second valve ports are closed, to remove dead space hold-up gas from the respective ports and flow passages of the block prior to initiation of vapor dispensing or gas purification operation.The disclosed container is particularly advantageous for dispensing or purifying source reagent compounds for elements of Group III and Group V, in semiconductor manufacturing applications.

Abstract: Disclosed are macroreticulate polymer scavengers functionalized with arsenic or phosphorus compounds. These scavengers are used for removing oxidants, protic acids and compounds that can be metallated, from arsine and phosphine.

Abstract: Disclosed are macroreticulate polymer scavengers functionalized with arsenic or phosphorus compounds. These scavengers are used for removing oxidants, protic acids and compounds that can be metallated, from arsine and phosphine.

Abstract: A novel polymer product comprised of polymerized units of dicyclopentadiene and method of making the same as disclosed.

Abstract: Disclosed are macroreticulate polymer scavengers functionalized with arsenic or phosphorus compounds. These scavengers are used for removing oxidants, protic acids and compounds that can be metallated, from arsine and phosphine.

Abstract: Lewis acid and oxidant impurities are removed from inert fluids by contacting with a high capacity macroreticulate polymer comprising a macroreticulate polymer backbone having a plurality of pendant functional groups or mixtures of functional groups having the general formula: ##STR1## where Ar is an aromatic hydrocarbon radical containing from one to three rings; R.sub.1 and R.sub.2 are the same or different and are selected from the group consisting of hydrogen, alkyl hydrocarbon radicals, methylene-bridged benzophenone radicals, salts of methylene-bridged benzophenone, methylene-bridged fluorenone radicals and salts of methylene-bridged fluorenone; and M is selected from the group consisting of lithium, potassium, sodium, alkyl magnesium, and alkyl zinc.

Abstract: Lewis acid and oxidant impurities are removed from inert fluids by contacting with a high capacity macroreticulate polymer comprising a macroreticulate polymer backbone having a plurality of pendant functional groups or mixtures of functional groups having the general formula: ##STR1## where Ar is an aromatic hydrocarbon radical containing from one to three rings; R.sub.1 and R.sub.2 are the same or different and are selected from the group consisting of hydrogen, alkyl hydrocarbon radicals, methylene-bridged benzophenone radicals, salts of methylene-bridged benzophenone, methylene-bridged fluorenone radicals and salts of methylene-bridged fluorenone; and M is selected from the group consisting of lithium, potassium, sodium, alkyl magnesium, and alkyl zinc.

Abstract: A high flash point cycloolefin composition, including at least 50% by weight dicyclopentadiene, the composition having a flash point of greater than 100.degree. F. and a viscosity of from about 3 cps to about 3000 cps at about 70.degree. F. and about 1 atmosphere pressure. The cycloolefin composition is used in a method of preparation of cycloolefin for polymerization by metathesis catalysis to form a substantially crosslinked thermoset polymer by: distilling the cycloolefin to form distilled cycloolefin, and contacting the distilled cycloolefin and an adsorbant.

Abstract: A high impact strength, high modulus thermoset homopolymer is formed by the metathesis-catalyzed polymerization of dicyclopentadiene. In a preferred embodiment of the synthesis, two parts of a metathesis-catalyst system, a catalyst/monomer solution and an activator/monomer solution, are combined in the mixing head of a reaction injection molding machine and then injected into a mold. The reaction mixture sets up into a tough, rigid, thermoset polymer with high modulus and excellent impact strength.