Abstract: An inductor fabricated with a dry film resist and a cavity and a method of fabricating the inductor. The cavity can be formed in a substrate to minimize a parasitic capacitance generated by structures of upper electrodes, an insulating layer, and a lower electrode and minimize energy loss caused by an eddy current generated through the substrate. Also, a process of forming and planarizing the cavity can be simplified so as to form the cavity to a sufficient depth. As a result, an inductor having a high quality factor and a high self resonant frequency can be fabricated. Also, a scheme for simply forming and planarizing a cavity is contemplated.

Abstract: Disclosed is a magnetic field sensor of high sensitivity, and which is power-saving and can be manufactured with low cost in a very small size. The magnetic field sensor includes a soft magnetic core formed to construct a closed-magnetic circuit on a semiconductor substrate, a magnetic field sensing coil formed by a metal film in a shape that winds the soft magnetic core, and a drive line for exciting the soft magnetic core by directly applying an electric current thereto. The drive line is formed in a rectangular angle to the magnetic field sensing coil, and connected to the both ends of the soft magnetic core in a length direction.

Abstract: A method for manufacturing a magnetic field detecting element having a soft magnetic core formed on a substrate, first and second coils, each having coil lines, arranged above and below the core, the method including forming a seed film on the substrate, removing a portion of the seed film using a predetermined pattern so that coil lines constituting the first coil subsequently formed on the seed film are separated, forming a first plating mold having grooves corresponding to the predetermined pattern on an upper portion of the seed film, forming coil lines constituting the first coil by filling the grooves of the first plating mold with metal, forming the soft magnetic core and the second coil on an upper portion of the substrate and on the seed film where the first coil is formed, and cutting off edges of the substrate so that the separated coil lines are insulated.

Abstract: A subminiature, high-performance monolithic duplexer is disclosed. The monolithic duplexer includes a substrate, a transmitting-end filter formed in a first area on an upper surface of the substrate, a receiving-end filter formed in a second area on the upper surface of the substrate, a packaging substrate, bonded on an area on the upper surface of the substrate, for packaging the transmitting-end filter and the receiving-end filter in a sealed state, and a phase shifter, formed on one surface of the packaging substrate and connected to the transmitting-end filter and the receiving-end filter, respectively, for intercepting a signal inflow between the transmitting-end filter and the receiving-end filter.

Abstract: A method for manufacturing a magnetic field detecting element having a soft magnetic core formed on a substrate, first and second coils, each having coil lines, arranged above and below the core, the method including forming a seed film on the substrate, removing a portion of the seed film using a predetermined pattern so that coil lines constituting the first coil subsequently formed on the seed film are separated, forming a first plating mold having grooves corresponding to the predetermined pattern on an upper portion of the seed film, forming coil lines constituting the first coil by filling the grooves of the first plating mold with metal, forming the soft magnetic core and the second coil on an upper portion of the substrate and on the seed film where the first coil is formed, and cutting off edges of the substrate so that the separated coil lines are insulated.

Abstract: A filter using an air gap type film bulk acoustic resonator is provided. The present filter includes a substrate on which a first port, a second port, and a ground port are formed to be connected to an external terminal; at least one first film bulk acoustic resonator serially connecting the first port to the second port on the substrate; at least one second film bulk acoustic resonator parallel connected to an interconnection node formed between the first port and the second port; and at least one inductor serially connecting the second film bulk acoustic resonator to the ground port. The inductor included in the filter is fabricated with the first and second film bulk acoustic resonators as one body. Accordingly, a small-sized filter may be fabricated through a simplified process.

Abstract: Disclosed is a magnetic field sensor of high sensitivity, and which is power-saving and can be manufactured with low cost in a very small size. The magnetic field sensor includes a soft magnetic core formed to construct a closed-magnetic circuit on a semiconductor substrate, a magnetic field sensing coil formed by a metal film in a shape that winds the soft magnetic core, and a drive line for exciting the soft magnetic core by directly applying an electric current thereto. The drive line is formed in a rectangular angle to the magnetic field sensing coil, and connected to the both ends of the soft magnetic core in a length direction.

Abstract: In a fluxgate sensor integrated in a semiconductor substrate and a method for manufacturing the same, the fluxgate sensor includes a soft magnetic core formed on the semiconductor substrate, an excitation coil winding the soft magnetic core and being insulated by first and second insulating layers deposited above and below the soft magnetic core, respectively, and a pick-up coil, winding the soft magnetic core and being insulated by third and fourth insulating layers deposited above and below the excitation coil, respectively.

Abstract: A micro-machining method of manufacturing a micro fluxgate sensor manufactured having an amorphous magnetic core includes forming lower coils of an excitation coil and a magnetic field detecting coil on a wafer, depositing a first insulating layer on the lower coils and forming an amorphous magnetic core, depositing a second insulating layer on the amorphous magnetic core and forming upper coils connected to the lower coils to complete the excitation coil and the magnetic field detecting coil, and covering the excitation coil and the magnetic field detecting coil with a protective film, and etching the protective film to expose a portion of the excitation coil and magnetic field detecting coil, thereby forming a pad.

Abstract: Disclosed is a method for manufacturing a magnetic field detecting element, capable of simplifying the manufacturing process and providing a thin-type magnetic field detecting element. The disclosed method for manufacturing a magnetic field detecting element according to the present invention, is characterized in forming a seed film on the semiconductor substrate, then partially removing the seed film using a predetermined pattern in advance, for insulation of a plurality of coil lines that would be formed on the seed film, forming a soft magnetic core, and cutting off edges of the semiconductor substrate so that a plurality of the coil lines may be insulated.

Abstract: A method for manufacturing a metal structure using a trench includes etching a semiconductor substrate to form a trench, depositing a seed layer over the semiconductor substrate including in the trench, stacking an insulating layer over the seed layer, removing a portion of the insulating layer to expose a portion of the seed layer at a bottom of the trench, filling the trench with a metal material, and removing the seed layer and the insulating layer on the semiconductor substrate. As a result, a subsequent process in forming a multi-layered structure may be easily carried out, thereby simplifying a manufacturing process.

Abstract: A micromirror actuator is provided. The micromirror actuator includes a substrate, posts formed to a predetermined height on the substrate and spaced a predetermined distance apart, a torsion bar fixed to the posts, a mirror coupled to the torsion bar, and a groove including an inclined contact surface and formed in the substrate. Here, the inclined contact surface contacts the lower bottom surface of the mirror when the mirror is rotated. The micromirror actuator can be applied to a structure in which a plurality of micromirror actuators are arrayed side-by-side and is capable of precisely and stably maintaining the rotation angle of a mirror, particularly, stably maintaining the inclination angle of the mirror irrespective of an increase in the strength of a magnetic field.

Abstract: A micromirror actuator includes a substrate; two posts having predetermined heights and installed a predetermined distance apart on the substrate; a torsion bar ends of which are fixed to respective posts; a stopper extending from a portion of the torsion bar and contacting or coming apart from the surface of the substrate; a mirror connected to the middle portion of the torsion bar; parallel elements connected to the torsion bar being isolated from the mirror and causing the torsion bar to be distorted; and a magnet providing a rotation force to the parallel elements through being affected by an external magnetic field. Accordingly, the rotation characteristics of the mirror of the micromirror actuator of the present invention become insensitive to a change of the strength of the external magnetic field applied after the stopper contacts the surface, thereby uniformly maintaining the rotation angle of the mirror at a desired level.

Abstract: A micromirror actuator includes a substrate; two posts having predetermined heights and installed a predetermined distance apart on the substrate; a torsion bar ends of which are fixed to respective posts; a stopper extending from a portion of the torsion bar and contacting or coming apart from the surface of the substrate; a mirror connected to the middle portion of the torsion bar; parallel elements connected to the torsion bar being isolated from the mirror and causing the torsion bar to be distorted; and a magnet providing a rotation force to the parallel elements through being affected by an external magnetic field. Accordingly, the rotation characteristics of the mirror of the micromirror actuator of the present invention become insensitive to a change of the strength of the external magnetic field applied after the stopper contacts the surface, thereby uniformly maintaining the rotation angle of the mirror at a desired level.

Abstract: A micromirror actuator is provided. The micromirror actuator includes a substrate, posts formed to a predetermined height on the substrate and spaced a predetermined distance apart, a torsion bar fixed to the posts, a mirror coupled to the torsion bar, and a groove including an inclined contact surface and formed in the substrate. Here, the inclined contact surface contacts the lower bottom surface of the mirror when the mirror is rotated. The micromirror actuator can be applied to a structure in which a plurality of micromirror actuators are arrayed side-by-side and is capable of precisely and stably maintaining the rotation angle of a mirror, particularly, stably maintaining the inclination angle of the mirror irrespective of an increase in the strength of a magnetic field.