Abstract: The present disclosure provides a wafer-level packaging method and a package structure. The wafer-level packaging method includes: providing a device wafer that contains a plurality of first chips, that each first chip contains a first electrode exposed at a wafer front surface of the device wafer; providing a plurality of second chips, that each second chip contains a second electrode exposed at a chip front surface of the each second chip, and a surface opposite to the chip front surface is a chip back surface; bonding the chip back surface of the each second chip to a portion of the wafer front surface of the device wafer between adjacent first chips of the plurality of first chips; forming insulating sidewalls on sidewalls of the plurality of second chips; and forming a conductive layer conformally covering the chip front surface, each insulating sidewall, and the wafer front surface.

Abstract: A wafer-level packaging method and a package structure are provided. In the packaging method, a device wafer integrated with a first chip is provided. The device wafer includes a first front surface integrated with the first chip and a first back surface opposite to the first front surface. A first oxide layer is formed on the first front surface. A second chip is provided to include a bonding surface, on which a second oxide layer is formed. A carrier substrate is provided to be temporarily bonded with the surface of the second chip that faces away from the bonding surface. The second chip is bonded with the device wafer through bonding the first and the second oxide layers using a fusion bonding process. The second chip and the carrier substrate are debonded. An encapsulation layer is formed on the first oxide layer and covers the second chip.

Abstract: The present disclosure provides a wafer-level packaging method and a package structure. The wafer-level packaging method includes: providing a device wafer that contains a plurality of first chips, that each first chip contains a first electrode exposed at a wafer front surface of the device wafer; providing a plurality of second chips, that each second chip contains a second electrode exposed at a chip front surface of the each second chip, and a surface opposite to the chip front surface is a chip back surface; bonding the chip back surface of the each second chip to a portion of the wafer front surface of the device wafer between adjacent first chips of the plurality of first chips; forming insulating sidewalls on sidewalls of the plurality of second chips; and forming a conductive layer conformally covering the chip front surface, each insulating sidewall, and the wafer front surface.

Abstract: Wafer-level system-in-package packaging method and package structure are provided. The method includes: forming a bonding structure, where the bonding structure includes a device wafer and a plurality of chips bonded to the device wafer, where the plurality of chips contains one or more first chips to-be-shielded; forming an encapsulation layer covering the plurality of chips; forming a trench in the encapsulation layer to surround each first chip of the one or more first chips; and forming a conductive material in the trench and on the encapsulation layer, where the conductive material includes a shielding housing, the shielding housing including a conductive sidewall formed in the trench and a conductive layer formed on a portion of the encapsulation layer above the each first chip and connected with the conductive sidewall.

Abstract: A wafer-level packaging method and a package structure are provided. In the method, a first wafer is provided having first chips formed there-in. A surface of each first chip is integrated with a first electrode. A first dielectric layer is formed on the first wafer to expose each first electrode. Second chips are provided with a surface of each second chip integrated with a second electrode. A second dielectric layer is formed on the plurality of second chips to expose each second electrode. The second dielectric layer is positioned relative to the first dielectric layer. The second chips are bonded to the first wafer with each second chip aligned relative to one first chip to form a cavity there-between. A chip interconnection structure is formed in the cavity to electrically connect the first electrode with the second electrode. An encapsulation layer covers the second chips.

Abstract: Wafer-level packaging method and package structure are provided. In an exemplary method, first chips are bonded to the device wafer. A first encapsulation layer is formed on the device wafer, covering the first chips. The first chip includes: a chip front surface with a formed first pad, facing the device wafer; and a chip back surface opposite to the chip front surface. A first opening is formed in the first encapsulation layer to expose at least one first chip having an exposed chip back surface for receiving a loading signal. A metal layer structure is formed covering the at least one first chip, a bottom and sidewalls of the first opening, and the first encapsulation layer, followed by an alloying treatment on the chip back surface and the metal layer structure to form a back metal layer on the chip back surface.

Abstract: The present disclosure provides a wafer level packaging method and a package structure. The wafer level packaging method includes: forming a bonding structure including a device wafer and a plurality of first chips bonded to the device wafer; conformally covering the plurality of first chips and the device wafer exposed by the plurality of first chips with an insulating layer; conformally covering the insulating layer with a shielding layer; and forming an encapsulation layer on the shielding layer. The wafer level package structure includes: a device wafer; a plurality of first chips bonded to the device wafer; an insulating layer conformally covering the plurality of first chips and the device wafer exposed by the plurality of first chips; a shielding layer conformally covering the insulating layer; and an encapsulation layer formed on the shielding layer. The wafer level package structure provides a reduced volume and a reduced thickness.

Abstract: Wafer level package structures and packaging methods are provided. An exemplary method includes providing a device wafer having a first front surface and a first back surface opposing the first front surface, wherein at least one first chip is integrated in the first front surface; forming a first oxide layer on the first front surface of the device wafer; providing at least one second chip having a to-be-bonded surface; forming a second oxide layer on the to-be-bonded surface of each second chip; providing a carrier wafer; temporally bonding a surface of the second chip opposing the second oxide layer to the carrier wafer; forming an encapsulation layer on the carrier wafer between adjacent second chips of the at least one second; and bonding the device wafer and the second chip by bonding the first oxide layer with the second oxide layer by a low-temperature fusion bonding process.

Abstract: Photodetectors and fabrication methods thereof and imaging sensors are provided. An exemplary photodetector includes a first substrate formed with pixel circuits and common electrode connection members and first wiring boards electrically connected to the corresponding pixel circuits; and a second substrate formed with pixel units and isolation wall members isolating pixel units. Each isolation wall member includes a conductive member and a sidewall; second wiring boards are formed on a front surface of the second substrate; the second wiring boards are electrically connected to first terminals of the pixel units; a transparent electrode layer is formed on a back surface of the second substrate; and a second terminal of each pixel unit is electrically connected to the transparent electrode layer. The second wiring boards are bonded and electrically connected to the first wiring boards and the transparent electrode layer is electrically connected to the common electrode connection members.

Abstract: A wafer-level system-in-package (WLSiP) packaging method and a WLSiP package structure are provided. The method includes providing a device wafer including a first front surface and a first back surface and providing a plurality of second chips. The method also includes forming an adhesive layer on the first front surface and patterning the adhesive layer to form a plurality of first through-holes. In addition, the method includes bonding the plurality of second chips with a remaining adhesive layer to cover the plurality of first through-holes. Moreover, the method includes forming a plurality of second through-holes, which are connected with the plurality of first through-holes to form a plurality of first conductive through-holes, each first conductive through-hole includes a second through-hole and a first through-hole. Further, the method includes forming a first conductive plug in a first conductive through-hole to electrically connect to one of the plurality of second chips.

Abstract: A mask and a fabrication method for the mask are provided. An exemplary mask includes a substrate, including a first surface, a second surface opposite to the first surface, and a plurality of openings passing through the substrate. A mask pattern layer is disposed on the first surface of the substrate and includes a pattern region and a shield region adjacent to the pattern region. The pattern region contains at least one through-hole passing through the mask pattern layer, and the pattern region is exposed by and corresponds to one opening of the plurality of openings. A protection layer is disposed on the shield region of the mask pattern layer facing away from the substrate. A first sacrificial layer is disposed between the mask pattern layer and the protection layer.

Abstract: The present disclosure provides a mask plate and fabrication method thereof. The mask plate includes a substrate, having a first surface and a second surface, and containing a plurality of openings. The mask plate also includes a mask pattern layer, formed on the first surface of the substrate and including a plurality of pattern regions and a shield region surrounding the plurality of pattern regions. Each pattern region includes at least one through hole, and each opening formed in the substrate exposes a pattern region and the at least one through hole in the pattern region. The mask plate further includes a top substrate layer, formed on the mask pattern layer. The top substrate layer contains a plurality of grooves passing through the top substrate layer, and each groove exposes a pattern region in the mask pattern layer and exposes the at least one through hole in the pattern region.