Patents by Inventor Haim Feldman

Haim Feldman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10481101
    Abstract: An illumination module that includes a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism; wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis; and a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam; and a rotating mechanism that is configured to change an asymmetrical magnification of the pair of anamorphic prisms by rotating at least one of the first anamorphic prism and the second anamorphic prism.
    Type: Grant
    Filed: January 23, 2017
    Date of Patent: November 19, 2019
    Assignee: Applied Materials Israel Ltd.
    Inventors: Haim Feldman, Boris Golberg, Ido Dolev
  • Patent number: 10386311
    Abstract: A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam so as to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation so as to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.
    Type: Grant
    Filed: November 5, 2017
    Date of Patent: August 20, 2019
    Assignee: APPLIED MATERIALS ISRAEL, LTD.
    Inventors: Amir Shoham, Yoav Berlatzky, Haim Feldman
  • Patent number: 10060736
    Abstract: A method for determining a distance between a near field sensor and a substrate, the method may include creating a diffraction pattern by illuminating, with a beam of coherent radiation having a wavelength that does not exceed twenty nanometers, a slit that is formed between the substrate and an opaque element; detecting, by a detector, multiple portions of the diffraction pattern and generating detection signals indicative of the multiple portions of the diffraction pattern; processing the detection signals to determine a height of the slit; and determining the distance between the near field sensor and the substrate based upon (a) the height of the slit, and (b) a relationship between the height of the slit and a location of the near field sensor.
    Type: Grant
    Filed: April 21, 2016
    Date of Patent: August 28, 2018
    Assignee: Appled Materials Israel Ltd.
    Inventors: Amir Moshe Sagiv, Yoram Uziel, Haim Feldman, Ron Naftali
  • Publication number: 20180209915
    Abstract: An illumination module that includes a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism; wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis; and a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam; and a rotating mechanism that is configured to change an asymmetrical magnification of the pair of anamorphic prisms by rotating at least one of the first anamorphic prism and the second anamorphic prism.
    Type: Application
    Filed: January 23, 2017
    Publication date: July 26, 2018
    Inventors: Haim Feldman, Boris Golberg, Ido Dolev
  • Patent number: 9835563
    Abstract: There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.
    Type: Grant
    Filed: November 19, 2015
    Date of Patent: December 5, 2017
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Yoram Uziel, Ron Naftali, Ofer Adan, Haim Feldman, Ofer Shneyour, Ron Bar-Or, Doron Korngut
  • Patent number: 9810643
    Abstract: A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam so as to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation so as to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.
    Type: Grant
    Filed: September 25, 2013
    Date of Patent: November 7, 2017
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Amir Shoham, Yoav Berlatzky, Haim Feldman
  • Publication number: 20170016834
    Abstract: A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.
    Type: Application
    Filed: July 15, 2015
    Publication date: January 19, 2017
    Inventors: Haim Feldman, Ido Dolev, Ido Almog
  • Patent number: 9535014
    Abstract: A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.
    Type: Grant
    Filed: July 15, 2015
    Date of Patent: January 3, 2017
    Assignee: Applied Materials Israel Ltd.
    Inventors: Haim Feldman, Ido Dolev, Ido Almog
  • Patent number: 9395266
    Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.
    Type: Grant
    Filed: December 4, 2014
    Date of Patent: July 19, 2016
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Boris Golberg, Amir Moshe Sagiv, Haim Feldman, Uriel Malul, Adam Baer
  • Publication number: 20160077016
    Abstract: There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.
    Type: Application
    Filed: November 19, 2015
    Publication date: March 17, 2016
    Inventors: Yoram Uziel, Ron Naftali, Ofer Adan, Haim Feldman, Ofer Shneyour, Ron Bar-Or
  • Publication number: 20150300913
    Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.
    Type: Application
    Filed: December 4, 2014
    Publication date: October 22, 2015
    Inventors: Boris Golberg, Amir Moshe Sagiv, Haim Feldman, Uriel Malul, Adam Baer
  • Patent number: 9012875
    Abstract: A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.
    Type: Grant
    Filed: April 7, 2011
    Date of Patent: April 21, 2015
    Assignee: Applied Materials Israel, Ltd.
    Inventors: Amir Shoham, Haim Feldman, Doron Shoham
  • Publication number: 20140299790
    Abstract: A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.
    Type: Application
    Filed: April 7, 2011
    Publication date: October 9, 2014
    Applicant: APPLIED MATERIALS ISRAEL, LTD.
    Inventors: Amir Shoham, Haim Feldman, Doron Shoham
  • Patent number: 8659754
    Abstract: An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.
    Type: Grant
    Filed: June 20, 2013
    Date of Patent: February 25, 2014
    Assignee: Applied Materials Israel, Ltd.
    Inventors: Haim Feldman, Boris Morgenstein, Roman Naidis, Adam Baer
  • Publication number: 20130342893
    Abstract: An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.
    Type: Application
    Filed: June 20, 2013
    Publication date: December 26, 2013
    Inventors: Haim Feldman, Boris Morgenstein, Roman Naidis, Adam Baer
  • Patent number: 8488117
    Abstract: An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.
    Type: Grant
    Filed: September 1, 2011
    Date of Patent: July 16, 2013
    Assignee: Applied Materials Israel, Ltd.
    Inventors: Haim Feldman, Boris Morgenstein, Roman Naidis, Adam Baer
  • Patent number: 8228601
    Abstract: Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.
    Type: Grant
    Filed: May 12, 2009
    Date of Patent: July 24, 2012
    Assignee: Applied Materials Israel, Ltd.
    Inventors: Doron Meshulach, Kobi Kan, Haim Feldman, Ido Dolev, Ori Sarfaty
  • Publication number: 20120086937
    Abstract: An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.
    Type: Application
    Filed: September 1, 2011
    Publication date: April 12, 2012
    Inventors: Haim Feldman, Boris Morgenstein, Roman Naidis, Adam Baer
  • Patent number: 8134699
    Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
    Type: Grant
    Filed: March 22, 2011
    Date of Patent: March 13, 2012
    Assignees: Applied Materials, Inc., Applied Materials Israel, Ltd.
    Inventors: Ron Naftali, Avishay Guetta, Haim Feldman, Doron Shoham
  • Publication number: 20110170090
    Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
    Type: Application
    Filed: March 22, 2011
    Publication date: July 14, 2011
    Inventors: Ron Naftali, Avishay Guetta, Haim Feldman, Doron Shoham