Patents by Inventor Haim Feldman
Haim Feldman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230418081Abstract: A light source system is disclosed, the system comprises: a multimode laser unit; a first lenslet array positioned in a path of said laser beam and configured to form an array of focused spots in a selected plane downstream of said first lenslet array; a spatial filter mask carrying an array of pinholes positioned in said selected plane; a second lenslet array having spatial arrangement of lenslets similar to the first lenslet array and positioned such that said spatial filter mask is in a back focal plane of said second lenslet array, thereby collimating laser light from the array of focused spots into a corresponding array of beamlets; and a third lenslet array positioned downstream of said second lenslet array, configured for focusing said array of beamlets to form an output spot array at an exit pupil of said light source system.Type: ApplicationFiled: June 27, 2022Publication date: December 28, 2023Inventor: Haim FELDMAN
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Patent number: 11815470Abstract: Disclosed herein is a method for detecting defects on a sample. The method includes obtaining scan data of a region of a sample in a multiplicity of perspectives, and performing an integrated analysis of the obtained scan data. The integrated analysis includes computing, based on the obtained scan data, and/or estimating cross-perspective covariances, and determining presence of defects in the region, taking into account the cross-perspective covariances.Type: GrantFiled: September 2, 2020Date of Patent: November 14, 2023Assignee: Applied Materials Israel, Ltd.Inventors: Haim Feldman, Eyal Neistein, Harel Ilan, Shahar Arad, Ido Almog, Ori Golani
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Patent number: 11385188Abstract: A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.Type: GrantFiled: August 19, 2019Date of Patent: July 12, 2022Assignee: APPLIED MATERIAL ISRAEL, LTD.Inventors: Amir Shoham, Yoav Berlatzky, Haim Feldman
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Patent number: 11270432Abstract: A method for inspecting a three dimensional structure of a microscopic scale of a sample, the method may include obtaining an image of the three dimensional structure; obtaining a reference image of a reference three dimensional structure, the reference three dimensional structure and the three dimensional structure are ideally identical to each other; wherein each one of the image and the reference image was generated using optics that includes a phase mask, wherein the phase mask virtually expands a depth of field of the optics by encoding depth information over a depth range that exceeds the depth of field; generating a difference image that represents a difference between the image and the reference image; determining, based on the difference image, whether there is at least one defect in the three dimensional structure; wherein when determining that there is the at least one defect then providing a depth of the at least one defect.Type: GrantFiled: August 24, 2020Date of Patent: March 8, 2022Assignees: Applied Materials Israel Ltd., TECHNION RESEARCH & DEVELOPMENT FOUNDATION LIMITEDInventors: Haim Feldman, Yoav Shechtman
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Publication number: 20220058784Abstract: A method for inspecting a three dimensional structure of a microscopic scale of a sample, the method may include obtaining an image of the three dimensional structure; obtaining a reference image of a reference three dimensional structure, the reference three dimensional structure and the three dimensional structure are ideally identical to each other; wherein each one of the image and the reference image was generated using optics that includes a phase mask, wherein the phase mask virtually expands a depth of field of the optics by encoding depth information over a depth range that exceeds the depth of field; generating a difference image that represents a difference between the image and the reference image; determining, based on the difference image, whether there is at least one defect in the three dimensional structure; wherein when determining that there is the at least one defect then providing a depth of the at least one defectType: ApplicationFiled: August 24, 2020Publication date: February 24, 2022Inventors: Haim Feldman, Yoav Shechtman
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Patent number: 10902582Abstract: A method, system and computer readable medium for providing information about a region of a sample. The method includes (i) obtaining, by an imager, multiple images of the region; wherein the multiple images differ from each other by at least one parameter (ii) receiving or generating multiple reference images; (iii) generating multiple difference images that represent differences between the multiple images and the multiple reference images; (iv) calculating a set of region pixel attributes, (v) calculating a set of noise attributes, based on multiple sets of region pixels attributes of the multiple region pixels; and (vi) determining for each region pixel, whether the region pixel represents a defect based on a relationship between the set of noise attributes and the set of region pixel attributes of the pixel.Type: GrantFiled: January 17, 2019Date of Patent: January 26, 2021Assignee: Applied Materials Israel, Ltd.Inventors: Haim Feldman, Eyal Neistein, Harel Ilan, Shahar Arad, Ido Almog
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Publication number: 20200400589Abstract: Disclosed herein is a method for detecting defects on a sample. The method includes obtaining scan data of a region of a sample in a multiplicity of perspectives, and performing an integrated analysis of the obtained scan data. The integrated analysis includes computing, based on the obtained scan data, and/or estimating cross-perspective covariances, and determining presence of defects in the region, taking into account the cross-perspective covariances.Type: ApplicationFiled: September 2, 2020Publication date: December 24, 2020Inventors: Haim FELDMAN, Eyal NEISTEIN, Harel ILAN, Shahar ARAD, Ido ALMOG
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Publication number: 20200232934Abstract: Disclosed herein is a method for detecting defects on a sample. The method includes obtaining scan data of a region of a sample in a multiplicity of perspectives, and performing an integrated analysis of the obtained scan data. The integrated analysis includes computing, based on the obtained scan data, and/or estimating cross-perspective covariances, and determining presence of defects in the region, taking into account the cross-perspective covariances.Type: ApplicationFiled: January 17, 2020Publication date: July 23, 2020Inventors: Haim FELDMAN, Eyal NEISTEIN, Harel ILAN, Shahar ARAD, Ido ALMOG
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Publication number: 20200234418Abstract: A method, system and computer readable medium for providing information about a region of a sample. The method includes (i) obtaining, by an imager, multiple images of the region; wherein the multiple images differ from each other by at least one parameter (ii) receiving or generating multiple reference images; (iii) generating multiple difference images that represent differences between the multiple images and the multiple reference images; (iv) calculating a set of region pixel attributes, (v) calculating a set of noise attributes, based on multiple sets of region pixels attributes of the multiple region pixels; and (vi) determining for each region pixel, whether the region pixel represents a defect based on a relationship between the set of noise attributes and the set of region pixel attributes of the pixel.Type: ApplicationFiled: January 17, 2019Publication date: July 23, 2020Inventors: Haim FELDMAN, Eyal NEISTEIN, Harel ILAN, Shahar ARAD, Ido ALMOG
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Patent number: 10481101Abstract: An illumination module that includes a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism; wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis; and a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam; and a rotating mechanism that is configured to change an asymmetrical magnification of the pair of anamorphic prisms by rotating at least one of the first anamorphic prism and the second anamorphic prism.Type: GrantFiled: January 23, 2017Date of Patent: November 19, 2019Assignee: Applied Materials Israel Ltd.Inventors: Haim Feldman, Boris Golberg, Ido Dolev
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Patent number: 10386311Abstract: A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam so as to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation so as to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.Type: GrantFiled: November 5, 2017Date of Patent: August 20, 2019Assignee: APPLIED MATERIALS ISRAEL, LTD.Inventors: Amir Shoham, Yoav Berlatzky, Haim Feldman
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Patent number: 10060736Abstract: A method for determining a distance between a near field sensor and a substrate, the method may include creating a diffraction pattern by illuminating, with a beam of coherent radiation having a wavelength that does not exceed twenty nanometers, a slit that is formed between the substrate and an opaque element; detecting, by a detector, multiple portions of the diffraction pattern and generating detection signals indicative of the multiple portions of the diffraction pattern; processing the detection signals to determine a height of the slit; and determining the distance between the near field sensor and the substrate based upon (a) the height of the slit, and (b) a relationship between the height of the slit and a location of the near field sensor.Type: GrantFiled: April 21, 2016Date of Patent: August 28, 2018Assignee: Appled Materials Israel Ltd.Inventors: Amir Moshe Sagiv, Yoram Uziel, Haim Feldman, Ron Naftali
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Publication number: 20180209915Abstract: An illumination module that includes a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism; wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis; and a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam; and a rotating mechanism that is configured to change an asymmetrical magnification of the pair of anamorphic prisms by rotating at least one of the first anamorphic prism and the second anamorphic prism.Type: ApplicationFiled: January 23, 2017Publication date: July 26, 2018Inventors: Haim Feldman, Boris Golberg, Ido Dolev
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Patent number: 9835563Abstract: There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.Type: GrantFiled: November 19, 2015Date of Patent: December 5, 2017Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Yoram Uziel, Ron Naftali, Ofer Adan, Haim Feldman, Ofer Shneyour, Ron Bar-Or, Doron Korngut
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Patent number: 9810643Abstract: A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam so as to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation so as to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.Type: GrantFiled: September 25, 2013Date of Patent: November 7, 2017Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Amir Shoham, Yoav Berlatzky, Haim Feldman
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Publication number: 20170016834Abstract: A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.Type: ApplicationFiled: July 15, 2015Publication date: January 19, 2017Inventors: Haim Feldman, Ido Dolev, Ido Almog
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Patent number: 9535014Abstract: A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.Type: GrantFiled: July 15, 2015Date of Patent: January 3, 2017Assignee: Applied Materials Israel Ltd.Inventors: Haim Feldman, Ido Dolev, Ido Almog
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Patent number: 9395266Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.Type: GrantFiled: December 4, 2014Date of Patent: July 19, 2016Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Boris Golberg, Amir Moshe Sagiv, Haim Feldman, Uriel Malul, Adam Baer
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Publication number: 20160077016Abstract: There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.Type: ApplicationFiled: November 19, 2015Publication date: March 17, 2016Inventors: Yoram Uziel, Ron Naftali, Ofer Adan, Haim Feldman, Ofer Shneyour, Ron Bar-Or
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Publication number: 20150300913Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.Type: ApplicationFiled: December 4, 2014Publication date: October 22, 2015Inventors: Boris Golberg, Amir Moshe Sagiv, Haim Feldman, Uriel Malul, Adam Baer