Patents by Inventor Haim Feldman
Haim Feldman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 9012875Abstract: A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.Type: GrantFiled: April 7, 2011Date of Patent: April 21, 2015Assignee: Applied Materials Israel, Ltd.Inventors: Amir Shoham, Haim Feldman, Doron Shoham
-
Publication number: 20140299790Abstract: A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.Type: ApplicationFiled: April 7, 2011Publication date: October 9, 2014Applicant: APPLIED MATERIALS ISRAEL, LTD.Inventors: Amir Shoham, Haim Feldman, Doron Shoham
-
Patent number: 8659754Abstract: An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.Type: GrantFiled: June 20, 2013Date of Patent: February 25, 2014Assignee: Applied Materials Israel, Ltd.Inventors: Haim Feldman, Boris Morgenstein, Roman Naidis, Adam Baer
-
Publication number: 20130342893Abstract: An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.Type: ApplicationFiled: June 20, 2013Publication date: December 26, 2013Inventors: Haim Feldman, Boris Morgenstein, Roman Naidis, Adam Baer
-
Patent number: 8488117Abstract: An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.Type: GrantFiled: September 1, 2011Date of Patent: July 16, 2013Assignee: Applied Materials Israel, Ltd.Inventors: Haim Feldman, Boris Morgenstein, Roman Naidis, Adam Baer
-
Patent number: 8228601Abstract: Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.Type: GrantFiled: May 12, 2009Date of Patent: July 24, 2012Assignee: Applied Materials Israel, Ltd.Inventors: Doron Meshulach, Kobi Kan, Haim Feldman, Ido Dolev, Ori Sarfaty
-
Publication number: 20120086937Abstract: An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.Type: ApplicationFiled: September 1, 2011Publication date: April 12, 2012Inventors: Haim Feldman, Boris Morgenstein, Roman Naidis, Adam Baer
-
Patent number: 8134699Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.Type: GrantFiled: March 22, 2011Date of Patent: March 13, 2012Assignees: Applied Materials, Inc., Applied Materials Israel, Ltd.Inventors: Ron Naftali, Avishay Guetta, Haim Feldman, Doron Shoham
-
Publication number: 20110170090Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.Type: ApplicationFiled: March 22, 2011Publication date: July 14, 2011Inventors: Ron Naftali, Avishay Guetta, Haim Feldman, Doron Shoham
-
Patent number: 7973919Abstract: A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.Type: GrantFiled: April 1, 2010Date of Patent: July 5, 2011Assignee: Applied Materials Israel, Ltd.Inventors: Dan Grossman, Moshe Langer, Roman Kris, Silviu Reinhorn, Ron Naftali, Haim Feldman
-
Patent number: 7924419Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.Type: GrantFiled: November 25, 2009Date of Patent: April 12, 2011Assignees: Applied Materials Israel, Ltd., Applied Materials, Inc.Inventors: Ron Naftali, Avishay Guetta, Haim Feldman, Doron Shoham
-
Publication number: 20100188658Abstract: A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information.Type: ApplicationFiled: April 1, 2010Publication date: July 29, 2010Inventors: Dan Grossman, Moshe Langer, Roman Kris, Silviu Reinhorn, Ron Naftali, Haim Feldman
-
Patent number: 7714999Abstract: A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.Type: GrantFiled: December 6, 2007Date of Patent: May 11, 2010Assignee: Applied Materials Israel, Ltd.Inventors: Dan Grossman, Moshe Langer, Roman Kris, Silviu Reinhorn, Ron Naftali, Haim Feldman
-
Publication number: 20100097680Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.Type: ApplicationFiled: November 25, 2009Publication date: April 22, 2010Inventors: Ron Naftali, Avishay Guetta, Haim Feldman, Doron Shoham
-
Patent number: 7684048Abstract: Apparatus for imaging a surface, including scanning optics, which are configured to scan and focus one or more traveling beams onto the surface so as to form one or more traveling spots thereon. The apparatus also includes collection optics, which are arranged to collect radiation scattered from the one or more traveling spots and to focus the radiation to form one or more image spots traveling along a line. The apparatus also has a detecting assembly, which consists of a detector which is configured to generate a signal in response to the one or more traveling image spots, and a detector entry port interposed between the collection optics and the detector, which is coincident with the line. The apparatus also includes phase and/or polarization altering elements for the traveling beams.Type: GrantFiled: November 14, 2006Date of Patent: March 23, 2010Assignee: Applied Materials Israel, Ltd.Inventors: Doron Meshulach, Haim Feldman
-
Patent number: 7634754Abstract: A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.Type: GrantFiled: December 31, 2007Date of Patent: December 15, 2009Assignee: Applied Materials, Israel, Ltd.Inventor: Haim Feldman
-
Patent number: 7630069Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.Type: GrantFiled: January 23, 2006Date of Patent: December 8, 2009Assignee: Applied Materials, Inc.Inventors: Ron Naftali, Avishay Guetta, Haim Feldman, Doron Shoham
-
Publication number: 20090284835Abstract: Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.Type: ApplicationFiled: May 12, 2009Publication date: November 19, 2009Inventors: Doron Meshulach, Kobi Kan, Haim Feldman, Ido Dolev, Ori Sarfaty
-
Patent number: 7620932Abstract: A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.Type: GrantFiled: December 28, 2007Date of Patent: November 17, 2009Assignee: Applied Materials, Israel, Ltd.Inventor: Haim Feldman
-
Patent number: 7576348Abstract: A method for imaging a surface includes generating a traveling lens in an acousto-optic material and incorporating a traveling mask into a portion of the traveling lens so as to produce a composite traveling lens. The method further includes irradiating the composite traveling lens so as to produce a composite focused beam having a spatial variation across the composite focused beam. The composite focused beam is directed onto a region of the surface so as to generate radiation characteristic of the region from the region. The radiation is imaged onto a detector so as to generate a signal characteristic of the region, responsively to the spatial variation.Type: GrantFiled: September 11, 2007Date of Patent: August 18, 2009Assignee: Applied Materials, Israel, Ltd.Inventors: Haim Feldman, Doron Meshulach, Eyal Angel